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    • 3. 发明专利
    • Semiconductor device manufacturing method
    • 半导体器件制造方法
    • JP2014116419A
    • 2014-06-26
    • JP2012268653
    • 2012-12-07
    • Denso Corp株式会社デンソー
    • TOMISAKA MANABUTAYA ATSUSHIUCHIDA TOMOYASANO YUKIHIRO
    • H01L21/3065B23K26/00B23K26/364H01L21/306H01L21/308
    • PROBLEM TO BE SOLVED: To provide a semiconductor device manufacturing method capable of improving productivity by achieving reduction in processing time.SOLUTION: A semiconductor device manufacturing method comprises: emitting laser beams L by a laser beam irradiation device 30 from one surface 10a side of a semiconductor substrate 10 by setting a light focusing point P at inside the semiconductor substrate 10 to form a modified region K; subsequently removing a region from the one surface 10a side to the modified region K and the modified region K by etching to form a trench 20 such that a width of an opening 20a of the trench 20 formed on the one surface 10a side becomes narrower than a width of an internal region formed by removing the modified region K.
    • 要解决的问题:提供能够通过减少处理时间来提高生产率的半导体器件制造方法。解决方案:一种半导体器件制造方法,包括:通过激光束照射装置30从一个表面10a侧发射激光束L 半导体衬底10通过将聚光点P设置在半导体衬底10内部以形成改质区域K; 随后通过蚀刻将一个表面10a侧的区域从改质区域K和修饰区域K移除,以形成沟槽20,使得形成在一个表面10a侧的沟槽20的开口20a的宽度变得比 通过去除修饰区域K形成的内部区域的宽度。
    • 6. 发明专利
    • 熱交換器の製造方法および熱交換器
    • 热交换器制造方法和换热器
    • JP2014202390A
    • 2014-10-27
    • JP2013077625
    • 2013-04-03
    • 株式会社デンソーDenso Corp
    • KAFUKU KAZUAKIAZEYANAGI ISAOYAMANAKA YASUTOSHITERA AKINOSUKESANO YUKIHIRO
    • F28F19/02B23K1/00C23C16/40C23C16/455F28D7/00F28F1/40
    • B23P15/26C23C16/405C23C16/45555F28D7/1684F28D9/0062F28F3/027F28F2275/04
    • 【課題】腐食による貫通孔が生じることを確実に抑制できる熱交換器の製造方法および熱交換器を提供する。【解決手段】チューブ21およびフィン22を組み付ける組付工程と、組付工程の後に行われるとともに、チューブ21およびフィン22の表面に化学気相成長法によって被膜30を形成する被膜形成工程とを含んでいる。これによれば、被膜30により、チューブ21およびフィン22に腐食による貫通孔が生じることを抑制できる。このとき、被膜形成工程を組付工程の後に行うので、構成部品の搬送時や構成部品同士の組付時に被膜30に傷が付くことを防止できる。さらに、ドライコーティング法の一種である化学気相成長法によって被膜30を形成することで、被膜形成工程時に熱交換器内部の微細部において目詰まりを起こすことを防止できる。したがって、チューブ21およびフィン22に腐食による貫通孔が生じることを確実に抑制することが可能となる。【選択図】図5
    • 要解决的问题:提供一种能够确保抑制由于腐蚀而产生通孔的热交换器制造方法和热交换器。热交换器制造方法包括:组装管21和翅片22的组装步骤; 以及在组装步骤之后执行的涂膜形成步骤,通过化学气相生长法在管21和翅片22的表面上形成涂膜30。 根据该方法,能够抑制由于腐蚀导致管21和翅片22的通孔的产生。 此时,由于在组装步骤之后执行涂膜形成步骤,所以可以防止涂膜30在输送构成部件或将组成部件组装在一起时被损坏。 此外,由于通过作为干式涂布方法的化学气相生长法形成涂膜30,因此可以防止热交换器中的非常细的部分在涂膜形成步骤期间被堵塞。 因此,能够确保由于腐蚀而抑制管21和翅片22中的通孔的产生。
    • 7. 发明专利
    • Manufacturing method of semiconductor device
    • 半导体器件的制造方法
    • JP2007027565A
    • 2007-02-01
    • JP2005210210
    • 2005-07-20
    • Denso Corp株式会社デンソー
    • TOMISAKA MANABUSANO YUKIHIROMIZUNO YOSHIAKIKONDO ICHIJIMAKINO TOMOATSU
    • H01L21/304B23D1/02
    • PROBLEM TO BE SOLVED: To provide a manufacturing method of a semiconductor device capable of suppressing fluctuation in element characteristics which is caused by static electricity occurring at grinding for insulating separation between electrodes.
      SOLUTION: A metal film 4 formed on the entire surface of a wafer is formed on the surface of a protective film 3 while the metal film 4 is formed by deposition, spatter, or vapor deposition, so that an unrequired part of the metal film 4 is removed along with a part of the protective film 3. At that time, removing of the unrequired part is performed by machining using a grounded bite 10. So, the static electricity that occurs at grinding and electric charges generated when the protective film 3 or the like is cut off are absorbed through the bite 10, resulting in preventing a semiconductor element from being charged.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 解决的问题:提供能够抑制在研磨时产生的静电引起的元件特性波动的半导体器件的制造方法,用于电极之间的绝缘分离。 解决方案:在保护膜3的表面上形成在晶片的整个表面上的金属膜4,同时通过沉积,溅射或气相沉积形成金属膜4,使得不需要的部分 金属膜4与保护膜3的一部分一起被去除。此时,通过使用接地咬合机10的机械加工来去除不需要的部件。因此,在研磨时发生的静电和当保护性 切断的薄膜3等被咬入10吸收,从而防止半导体元件带电。 版权所有(C)2007,JPO&INPIT
    • 8. 发明专利
    • Hydrogen concentration detector and hydrogen concentration detecting method
    • 氢浓度检测器和氢浓度检测方法
    • JP2005227090A
    • 2005-08-25
    • JP2004035242
    • 2004-02-12
    • Denso Corp株式会社デンソー
    • SANO YUKIHIROTAKEUCHI YUKIHIROABE KICHIJI
    • G01N27/00G01N27/04G01N33/00
    • G01N33/005
    • PROBLEM TO BE SOLVED: To provide a hydrogen concentration detecting method enhanced in detection precision.
      SOLUTION: In the hydrogen concentration detecting method, a first heating resistor, which is changed in first electrophysical quantity by the concentration of hydrogen and the second heating resistor, which is adjacent to the first heating resistor in a gas flow direction and changed in second electrophysical quantity with respect to the concentration of hydrogven in the same way as the first electrophysical quantity, are used to detect the concentration of hydrogen on the bases of the first and second electrophysical quantities. This hydrogen concentration detecting method includes a change quantity calculating stage (S3) for setting one of the first and second electrophysical quantities as noticing physical quantity to calculate the change quantity of the noticing physical quantity, a correction quantity calculating stage (S5) for calculating correction quantity on the basis of the difference between the first and second electrophysical quantities and a concentration calculating stage (S7) for calculating the concentration of hydrogen on the basis of the difference between the change quantity of the noticing physical quantity and the correction quantity.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供检测精度提高的氢浓度检测方法。 解决方案:在氢浓度检测方法中,第一加热电阻器通过氢气浓度和第二加热电阻器在气体流动方向上与第一加热电阻器相邻而在第一电化学量上改变,并且改变 以与第一电化学量相同的方式相对于水压的浓度的第二电物量用于在第一和第二电物量的基础上检测氢的浓度。 这种氢浓度检测方法包括:用于将第一和第二电物质中的一个设置为注意物理量的变化量计算级(S3),以计算注意物理量的变化量;校正量计算级(S5),用于计算校正 基于第一和第二电物量之间的差数和基于注意物理量的变化量与校正量之间的差来计算氢浓度的浓度计算级(S7)的数量。 版权所有(C)2005,JPO&NCIPI
    • 10. 发明专利
    • Semiconductor device
    • 半导体器件
    • JP2008103623A
    • 2008-05-01
    • JP2006286445
    • 2006-10-20
    • Denso Corp株式会社デンソー
    • SANO YUKIHIROKONDO ICHIJISAKAMOTO ZENJITOMISAKA MANABUMAKINO TOMOATSU
    • H01L23/473
    • H01L2224/48091H01L2224/73265H01L2924/1305H01L2924/13055H01L2924/00014H01L2924/00
    • PROBLEM TO BE SOLVED: To provide a semiconductor device having a cooling structure whose cooling efficiency is high. SOLUTION: A semiconductor device 100 comprises a power mold 10 and ceramic tubes 21, 22 of the both sides. The power mold 10 has a power element 15, and a pair of lead frames 12, 13 which sandwiches the power element, and exposes the outside surface of the lead frames 12, 13, and is molded by a resin 18. The ceramic tubes 21, 22 have cooling medium passages 23, 24 where cooling medium flows, and are jointed to the outside surface of the lead frames 12, 13 through metals 25, 26 for joint. Two opposite walls of the cooling medium passages 23, 24 of the ceramic tubes 21, 22 are different in thickness, and a wall with thin thickness is jointed to the outer surface of the lead frames 12, 13. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种具有冷却效率高的冷却结构的半导体器件。 解决方案:半导体器件100包括电源模具10和两侧的陶瓷管21,22。 电动模具10具有功率元件15和一对引线框架12,13,它们夹住功率元件,并且暴露引线框架12,13的外表面,并由树脂18模制。陶瓷管21 22具有冷却介质流动的冷却介质通道23,24,并且通过用于接合的金属25,26连接到引线框架12,13的外表面。 陶瓷管21,22的冷却介质通道23,24的两个相对的壁的厚度不同,并且具有薄的厚度的壁与引线框架12,13的外表面接合。版权所有(C) )2008,JPO&INPIT