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    • 8. 发明授权
    • Electron microscope, methods to determine the contact point and the contact of the probe
    • 电子显微镜,确定探针的接触点和接触的方法
    • US07435954B2
    • 2008-10-14
    • US11459359
    • 2006-07-23
    • Cheng-Hsun NienChuen-Horng TsaiKun-Ying ShinWen-Bin Jian
    • Cheng-Hsun NienChuen-Horng TsaiKun-Ying ShinWen-Bin Jian
    • H01J37/26H01J37/20
    • G01R31/307H01J2237/2594
    • An electron microscope suitable for observing at least one sample is provided. The sample has at least one testing area, and a material of the sample on the testing area is semiconductive or conductive. The electron microscope includes a stage, an electron gun, and at least one probe. The stage is suitable for carrying the sample and the sample is not electrically grounded. The electron gun is suitable for generating an electron beam and accumulating charges on the sample. When the probe contacts with the testing area, the image contrast of the testing area will change. The current through the probe will also change upon contact. Methods have been provided based on these principles to determine “when” and “where” the probe starts to contact the sample surface inside an electron microscope.
    • 提供适用于观察至少一个样品的电子显微镜。 样品具有至少一个测试区域,测试区域上的样品材料是半导体或导电的。 电子显微镜包括载物台,电子枪和至少一个探针。 该阶段适用于携带样品,样品不接地。 电子枪适用于产生电子束并在样品上积累电荷。 当探头与测试区域接触时,测试区域的图像对比度将发生变化。 通过探头的电流也将随接触而改变。 已经基于这些原理提供了用于确定探针在电子显微镜内开始与样品表面接触的“何时”和“在哪里”的方法。