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1. 发明授权

US07103439B1 Method and apparatus for initializing tool controllers based on tool event data 有权
标题翻译：基于工具事件数据初始化刀具控制器的方法和装置
公开(公告)号：US07103439B1
公开(公告)日：2006-09-05
申请号：US09824301
申请日：2001-04-02
申请人： Christopher A. Bode , Alexander J. Pasadyn , Anthony J. Toprac , Joyce S. Oey Hewett , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
发明人： Christopher A. Bode , Alexander J. Pasadyn , Anthony J. Toprac , Joyce S. Oey Hewett , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
IPC分类号： G06F19/00
CPC分类号： G05B19/41865 , Y02P90/20 , Y02P90/86
摘要： A method for initializing process controllers based on tool event data includes providing a tool having a process controller adapted to employ a control model to control an operating recipe of the tool; receiving a tool event notification; and initializing the control model in response to receiving the tool event notification. A manufacturing system includes a tool and a process controller. The tool is adapted to process wafers in accordance with an operating recipe. The process controller is adapted to employ a control model to control the operating recipe in accordance with a control algorithm. The process controller is further adapted to receive a tool event notification and initialize the control model in response to receiving the tool event notification.
摘要翻译：用于基于工具事件数据初始化过程控制器的方法包括提供具有适于使用控制模型来控制工具的操作配方的过程控制器的工具; 接收工具事件通知; 并且响应于接收到工具事件通知来初始化控制模型。制造系统包括工具和过程控制器。该工具适于根据操作配方处理晶片。过程控制器适于采用控制模型来根据控制算法来控制操作配方。过程控制器还适于接收工具事件通知并响应于接收到工具事件通知而初始化控制模型。

2. 发明授权

US06901340B1 Method and apparatus for distinguishing between sources of process variation 有权
标题翻译：用于区分过程变化源的方法和装置
公开(公告)号：US06901340B1
公开(公告)日：2005-05-31
申请号：US09824348
申请日：2001-04-02
申请人： Alexander J. Pasadyn , Joyce S. Oey Hewett , Christopher A. Bode , Anthony J. Toprac , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
发明人： Alexander J. Pasadyn , Joyce S. Oey Hewett , Christopher A. Bode , Anthony J. Toprac , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
IPC分类号： G05B23/02 , H01L21/00 , G01N37/00 , G06F19/00
CPC分类号： G05B23/0275 , G05B2219/1112 , G05B2219/34477 , G05B2223/02 , H01L21/67276 , Y02P90/86
摘要： A method for distinguishing between sources of process variation includes processing a plurality of manufactured items in a process flow; storing a set of production environment data associated with each of the manufactured items; identifying manufactured items associated with a process drift; generating a plurality of characteristic threads based on the production environment data; comparing the characteristic threads for at least those manufactured items associated with the process drift; and determining at least one potential cause for the process drift based on the comparison of the characteristic threads. A manufacturing system for distinguishing between sources of process variation is also provided. The manufacturing system includes a plurality of tools for processing manufactured items in a process flow, a database server, and a drift monitor.
摘要翻译：用于区分过程变化源的方法包括在处理流程中处理多个制造项目; 存储与每个所制造的项目相关联的一组生产环境数据; 识别与过程漂移相关联的制品; 基于生产环境数据生成多个特征线程; 比较至少那些与过程漂移有关的制造物品的特征线; 以及基于所述特征线程的比较来确定所述过程漂移的至少一个潜在原因。还提供了用于区分过程变化源的制造系统。制造系统包括用于处理流程中的制造物品的多个工具，数据库服务器和漂移监视器。

3. 发明授权

US06970757B1 Method and apparatus for updating control state variables of a process control model based on rework data 有权
标题翻译：基于返工数据更新过程控制模型的控制状态变量的方法和装置
公开(公告)号：US06970757B1
公开(公告)日：2005-11-29
申请号：US09838467
申请日：2001-04-19
申请人： Joyce S. Oey Hewett , Anthony J. Toprac , Christopher A. Bode , Alexander J. Pasadyn , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
发明人： Joyce S. Oey Hewett , Anthony J. Toprac , Christopher A. Bode , Alexander J. Pasadyn , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
IPC分类号： G05B19/418 , G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32179 , G05B2219/32228 , G05B2219/45031 , Y02P90/22 , Y02P90/86
摘要： A method for controlling a manufacturing process includes processing a plurality of workpieces in a tool; monitoring a rework rate associated with the workpieces processed in the tool; and initiating an automatic corrective action in response to the rework rate being greater than a predetermined threshold. A manufacturing system includes a tool adapted to process a plurality of workpieces and a rework controller adapted to monitor a rework rate associated with the workpieces processed in the tool and initiate an automatic corrective action in response to the rework rate being greater than a predetermined threshold.
摘要翻译：一种用于控制制造过程的方法包括在工具中处理多个工件; 监测与工具中处理的工件相关联的返工率; 以及响应于所述返工率大于预定阈值而启动自动校正动作。制造系统包括适于处理多个工件的工具和适于监测与工具中处理的工件相关联的返工率的返工控制器，并响应于返工率大于预定阈值而启动自动校正动作。

4. 发明授权

US06937914B1 Method and apparatus for controlling process target values based on manufacturing metrics 失效
标题翻译：基于制造指标控制过程目标值的方法和装置
公开(公告)号：US06937914B1
公开(公告)日：2005-08-30
申请号：US09789872
申请日：2001-02-21
申请人： Christopher A. Bode , Thomas J. Sonderman , Alexander J. Pasadyn , Anthony J. Toprac , Joyce S. Oey Hewett , Anastasia Oshelski Peterson , Michael L. Miller
发明人： Christopher A. Bode , Thomas J. Sonderman , Alexander J. Pasadyn , Anthony J. Toprac , Joyce S. Oey Hewett , Anastasia Oshelski Peterson , Michael L. Miller
IPC分类号： G05B19/418 , G06F19/00
CPC分类号： G05B19/41865 , G05B2219/32063 , G05B2219/45031 , Y02P90/20 , Y02P90/86
摘要： A method for controlling a tool adapted to process workpieces in accordance with an operating recipe based on a process target value is provided. The method includes collecting manufacturing characteristic data associated with the workpieces; correlating the manufacturing characteristic data with a first manufacturing metric to generate a first manufacturing metric distribution for the workpieces; and adjusting the process target value based on the first manufacturing metric distribution. A manufacturing system includes a processing tool and a target monitor. The processing tool is adapted to process workpieces in accordance with an operating recipe based on a process target value. The target monitor is adapted to collect manufacturing characteristic data associated with the workpieces, correlate the manufacturing characteristic data with a first manufacturing metric to generate a first manufacturing metric distribution for the workpieces, and adjust the process target value based on the first manufacturing metric distribution.
摘要翻译：提供了一种用于控制适于根据基于过程目标值的操作配方来处理工件的工具的方法。该方法包括收集与工件相关联的制造特性数据; 将所述制造特征数据与第一制造度量相关联，以产生所述工件的第一制造度量分布; 以及基于所述第一制造度量分布来调整所述过程目标值。制造系统包括处理工具和目标监视器。处理工具适于根据基于过程目标值的操作配方来处理工件。目标监视器适于收集与工件相关联的制造特性数据，将制造特性数据与第一制造度量相关联，以产生工件的第一制造度量分布，并且基于第一制造度量分布来调整过程目标值。

5. 发明授权

US06615098B1 Method and apparatus for controlling a tool using a baseline control script 有权
标题翻译：使用基线控制脚本控制工具的方法和装置
公开(公告)号：US06615098B1
公开(公告)日：2003-09-02
申请号：US09789871
申请日：2001-02-21
申请人： Christopher A. Bode , Alexander J. Pasadyn , Anthony J. Toprac , Joyce S. Oey Hewett , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
发明人： Christopher A. Bode , Alexander J. Pasadyn , Anthony J. Toprac , Joyce S. Oey Hewett , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
IPC分类号： G06F1760
CPC分类号： G05B19/41865 , G05B19/0426 , G05B2219/32129 , G05B2219/36225 , G05B2219/45031 , Y02P90/20
摘要： A method for controlling a manufacturing system includes processing workpieces in a plurality of tools; initiating a baseline control script for a selected tool of the plurality of tools; providing context information for the baseline control script; determining a tool type based on the context information; selecting a control routine for the selected tool based on the tool type; and executing the control routine to generate a control action for the selected tool. A manufacturing system includes a plurality of tools adapted to process workpieces, a control execution manager, and a control executor. The control execution manager is adapted to initiate a baseline control script for a selected tool of the plurality of tools and provide context information for the baseline control script. The control executor is adapted to execute the baseline control script, determine a tool type based on the context information, select a control routine for the selected tool based on the tool type, and execute the control routine to generate a control action for the selected tool.
摘要翻译：一种用于控制制造系统的方法包括：处理多个工具中的工件; 为所述多个工具的所选择的工具启动基线控制脚本; 提供基线控制脚本的上下文信息; 基于上下文信息确定工具类型; 根据刀具类型选择所选刀具的控制程序; 以及执行所述控制程序以产生所选择的工具的控制动作。制造系统包括适于处理工件的多个工具，控制执行管理器和控制执行器。所述控制执行管理器适于启动用于所述多个工具的所选工具的基线控制脚本并提供所述基线控制脚本的上下文信息。控制执行器适于执行基线控制脚本，基于上下文信息确定工具类型，基于工具类型选择所选刀具的控制程序，并执行控制程序以生成所选刀具的控制动作。

6. 发明授权

US06576385B2 Method of varying stepper exposure dose to compensate for across-wafer variations in photoresist thickness 失效
标题翻译：改变步进曝光剂量以补偿光致抗蚀剂厚度的跨晶片变化的方法
公开(公告)号：US06576385B2
公开(公告)日：2003-06-10
申请号：US09776206
申请日：2001-02-02
申请人： Christopher A. Bode , Joyce S. Oey Hewett , Alexander J. Pasadyn
发明人： Christopher A. Bode , Joyce S. Oey Hewett , Alexander J. Pasadyn
IPC分类号： G03F900
CPC分类号： G03F7/70558
摘要： A method of compensating for across-wafer variations in photoresist thickness is provided. The method comprises providing a wafer having a process layer formed there-above, forming a layer of photoresist above the process layer, measuring a thickness of the layer of photoresist at a plurality of locations to result in a plurality of thickness measurements, providing the thickness measurements to a controller that determines, based upon the thickness measurements, an exposure dose of an exposure process to be performed on the layer of photoresist, and performing the exposure process on the layer of photoresist using the determined exposure dose. This exposure dose may be varied on a flash-by-flash basis as the stepper tool “steps” across the surface of wafers. That is, the exposure dose for a group of flashes, or for each flash, may be varied in response to the thickness measurements.
摘要翻译：提供了补偿光致抗蚀剂厚度的跨晶片变化的方法。该方法包括提供具有在其上形成的处理层的晶片，在处理层上方形成光致抗蚀剂层，测量多个位置处的光致抗蚀剂层的厚度，以产生多个厚度测量值，从而提供厚度控制器的测量，其基于厚度测量确定将在光致抗蚀剂层上进行的曝光处理的曝光剂量，以及使用确定的曝光剂量对光致抗蚀剂层进行曝光处理。当步进工具跨越晶片表面“步进”时，该曝光剂量可以在逐闪的基础上变化。也就是说，一组闪光或每个闪光灯的曝光剂量可以响应于厚度测量而变化。

7. 发明授权

US06699727B1 Method for prioritizing production lots based on grade estimates and output requirements 有权
标题翻译：根据年龄估计和产出要求确定生产批次的方法
公开(公告)号：US06699727B1
公开(公告)日：2004-03-02
申请号：US09821675
申请日：2001-03-29
申请人： Anthony J. Toprac , Joyce S. Oey Hewett , Christopher A. Bode , Alexander J. Pasadyn , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
发明人： Anthony J. Toprac , Joyce S. Oey Hewett , Christopher A. Bode , Alexander J. Pasadyn , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
IPC分类号： G01R3126
CPC分类号： H01L22/20 , G05B19/418 , G05B2219/32194 , G05B2219/32263 , Y02P90/02 , Y02P90/18 , Y02P90/20 , Y02P90/22
摘要： A method for prioritizing production flow includes processing a plurality of manufactured items in a process flow; measuring characteristics of a plurality of manufactured items in the process flow; estimating performance grades for the plurality of manufactured items based on the measured characteristics; grouping the manufactured items with like estimated performance grades; assigning priorities to groups of manufactured items with like estimated performance grades; and directing the plurality of manufactured items through the process flow based on the assigned priorities. A manufacturing system includes a plurality of processing tools adapted to process a plurality of manufactured items in a process flow, a metrology tool, and a process control server. The metrology tool is adapted to measure characteristics of a plurality of manufactured items in the process flow. The process control server is adapted to estimate performance grades for the plurality of manufactured items based on the measured characteristics, group the manufactured items with like estimated performance grades, assign priorities to groups of manufactured items with like estimated performance grades, and direct the plurality of manufactured items through the process flow based on the assigned priorities.
摘要翻译：一种用于确定生产流程优先级的方法包括在处理流程中处理多个制造的物品; 测量处理流程中的多个制成品的特性; 基于所测量的特性来估计所述多个制造物品的性能等级; 对具有相似估计性能等级的制成品进行分组; 将优先事项分配给具有类似估计绩效等级的制成品组; 以及基于所分配的优先级，通过所述处理流程来引导所述多个制造的物品。制造系统包括多个处理工具，其适用于处理流程中的多个制造物品，计量工具和过程控制服务器。计量工具适于测量处理流程中的多个制造物品的特性。过程控制服务器适于基于测量的特性来估计多个制造物品的性能等级，将具有相似估计性能等级的制造物品分组，将具有相似估计性能等级的制造商品组的优先级分配给多个基于分配的优先级，通过流程流程制造出的物品。

8. 发明授权

US06675058B1 Method and apparatus for controlling the flow of wafers through a process flow 有权
标题翻译：通过工艺流程控制晶片流动的方法和装置
公开(公告)号：US06675058B1
公开(公告)日：2004-01-06
申请号：US09821630
申请日：2001-03-29
申请人： Alexander J. Pasadyn , Anthony J. Toprac , Christopher A. Bode , Joyce S. Oey Hewett , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
发明人： Alexander J. Pasadyn , Anthony J. Toprac , Christopher A. Bode , Joyce S. Oey Hewett , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
IPC分类号： G06F1900
CPC分类号： G05B19/41865 , G05B2219/32272 , H01L21/67276 , Y02P90/18 , Y02P90/20 , Y02P90/86
摘要： A method for controlling the flow of wafers through a process flow includes monitoring operating states of a plurality of processing tools adapted to process wafers; measuring a characteristic of a particular incoming wafer; identifying a particular processing tool having an operating state complimentary to the measured characteristic; and routing the particular incoming wafer to the particular processing tool for processing. A manufacturing system includes a plurality of processing tools adapted to process wafers and a process control server. The process control server is adapted to access metrology data related to a characteristic of a particular incoming wafer, identify a particular processing tool having an operating state complimentary to the characteristic, and route the particular incoming wafer to the particular processing tool for processing.
摘要翻译：用于通过工艺流程控制晶片流动的方法包括监测适于处理晶片的多个处理工具的操作状态; 测量特定输入晶片的特性; 识别具有与测量特性相互补充的操作状态的特定加工工具; 并将特定进入的晶片路由到特定的处理工具进行处理。制造系统包括适于处理晶片的多个处理工具和过程控制服务器。过程控制服务器适于访问与特定输入晶片的特性相关的度量数据，识别具有与该特征相互补充的操作状态的特定处理工具，并将特定输入晶片路由到特定处理工具进行处理。

9. 发明授权

US06801817B1 Method and apparatus for integrating multiple process controllers 失效
标题翻译：用于集成多个过程控制器的方法和设备
公开(公告)号：US06801817B1
公开(公告)日：2004-10-05
申请号：US09789140
申请日：2001-02-20
申请人： Christopher A. Bode , Alexander J. Pasadyn , Anthony J. Toprac , Joyce S. Oey Hewett , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
发明人： Christopher A. Bode , Alexander J. Pasadyn , Anthony J. Toprac , Joyce S. Oey Hewett , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
IPC分类号： G06F1900
CPC分类号： G05B19/41865 , G05B19/40937 , Y02P90/16 , Y02P90/20 , Y02P90/265
摘要： A method for controlling a manufacturing system includes processing workpieces in a plurality of tools; initiating a baseline control script for a selected tool of the plurality of tools; providing context information for the baseline control script; determining a tool type based on the context information; selecting a group of control routines for the selected tool based on the tool type; determining required control routines from the group of control routines based on the context information; and executing the required control routines to generate control actions for the selected tool. A manufacturing system includes a plurality of tools adapted to process workpieces, a control execution manager, and a control executor. The control execution manager is adapted to initiate a baseline control script for a selected tool of the plurality of tools and provide context information for the baseline control script. The control executor is adapted to execute the baseline control script, determine a tool type based on the context information, select a group of control routines for the selected tool based on the tool type, determine required control routines from the group of control routines based on the context information, and execute the required control routines to generate control actions for the selected tool.
摘要翻译：一种用于控制制造系统的方法包括：处理多个工具中的工件; 为所述多个工具的所选择的工具启动基线控制脚本; 提供基线控制脚本的上下文信息; 基于上下文信息确定工具类型; 基于所述工具类型为所选择的工具选择一组控制例程; 基于所述上下文信息来确定来自所述一组控制例程的所需控制例程; 并执行所需的控制例程以产生所选择的工具的控制动作。制造系统包括适于处理工件的多个工具，控制执行管理器和控制执行器。所述控制执行管理器适于启动用于所述多个工具的所选工具的基线控制脚本并提供所述基线控制脚本的上下文信息。控制执行器适于执行基线控制脚本，基于上下文信息确定工具类型，基于工具类型为所选择的工具选择一组控制例程，从基于控制例程的组中确定所需的控制例程上下文信息，并执行所需的控制例程以生成所选择的工具的控制动作。

10. 发明授权

US06785586B1 Method and apparatus for adaptively scheduling tool maintenance 有权
标题翻译：自动调度工具维护的方法和装置
公开(公告)号：US06785586B1
公开(公告)日：2004-08-31
申请号：US09791981
申请日：2001-02-23
申请人： Anthony J. Toprac , Thomas J. Sonderman , Christopher A. Bode , Alexander J. Pasadyn , Joyce S. Oey Hewett , Anastasia Oshelski Peterson , Michael L. Miller
发明人： Anthony J. Toprac , Thomas J. Sonderman , Christopher A. Bode , Alexander J. Pasadyn , Joyce S. Oey Hewett , Anastasia Oshelski Peterson , Michael L. Miller
IPC分类号： G06F1900
CPC分类号： G05B19/4065 , G05B2219/32234 , G05B2219/37252 , G05B2219/37258 , Y02P90/86
摘要： A method for adaptively scheduling tool maintenance includes controlling an operating recipe of a tool using a plurality of control actions, monitoring the control actions to identify a degraded tool condition, and automatically initiating a tool maintenance recommendation in response to identifying the degraded tool condition. A manufacturing system includes a tool, a process controller, and a tool health monitor. The tool is adapted to process a workpiece in accordance with an operating recipe. The process controller is adapted to control the operating recipe of the tool using a plurality of control actions. The tool health monitor is adapted to monitor the control actions to identify a degraded tool condition and automatically initiate a tool maintenance recommendation in response to identifying the degraded tool condition.
摘要翻译：一种用于自适应地调度工具维护的方法包括使用多个控制动作来控制工具的操作配方，监视控制动作以识别劣化的工具条件，以及响应于识别劣化的工具条件自动启动工具维护建议。制造系统包括工具，过程控制器和工具健康监视器。该工具适于根据操作配方处理工件。过程控制器适于使用多个控制动作来控制工具的操作配方。工具健康监视器适于监视控制动作以识别劣化的工具状态，并且响应于识别劣化的工具条件而自动启动工具维护建议。

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