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1. 发明申请

US20100107402A1 Methods Of Making Magnetic Write Heads With Use Of A Resist Channel Shrinking Solution Having Corrosion Inhibitors 失效
标题翻译：使用具有腐蚀抑制剂的抗蚀剂通道收缩溶液制造磁性写头的方法
公开(公告)号：US20100107402A1
公开(公告)日：2010-05-06
申请号：US12685455
申请日：2010-01-11
申请人： Christian Rene Bonhote , Jila Tabib , Dennis Richard Mckean , Daniel Wayne Bedell , Jyh-Shuey Lo , Hieu Lam , Kim Y. Lee
发明人： Christian Rene Bonhote , Jila Tabib , Dennis Richard Mckean , Daniel Wayne Bedell , Jyh-Shuey Lo , Hieu Lam , Kim Y. Lee
IPC分类号： G11B5/127 , B05D3/02
CPC分类号： G11B5/3116 , G11B5/3163 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49048 , Y10T29/49052
摘要： One preferred method for use in making a device structure with use of the resist channel shrinking solution includes the steps of forming a first pedestal portion within a channel of a patterned resist; applying a resist channel shrinking solution comprising a resist channel shrinking film and corrosion inhibitors within the channel of the patterned resist; baking the resist channel shrinking solution over the patterned resist to thereby reduce a width of the channel of the patterned resist; removing the resist channel shrinking solution; and forming a second pedestal portion within the reduced-width channel of the patterned resist. Advantageously, the oxide layer and the corrosion inhibitors of the resist channel shrinking solution reduce corrosion in the pedestal during the act of baking the resist channel shrinking solution.
摘要翻译：用于制造使用抗蚀剂通道收缩溶液的器件结构的一种优选方法包括在图案化抗蚀剂的通道内形成第一基座部分的步骤; 在图案化的抗蚀剂的通道内施加包含抗蚀剂通道收缩膜和腐蚀抑制剂的抗蚀剂通道收缩溶液; 在图案化的抗蚀剂上烘烤抗蚀剂通道收缩溶液，从而减小图案化抗蚀剂的通道的宽度; 去除抗蚀剂通道收缩溶液; 以及在所述图案化抗蚀剂的所述减小宽度的通道内形成第二基座部分。有利地，抗蚀剂通道收缩溶液的氧化物层和腐蚀抑制剂在烘烤抗蚀剂通道收缩溶液的作用下降低了基座中的腐蚀。

2. 发明授权

US07612964B2 Magnetic write head having a self aligned, steep shoulder pole structure and method of manufacture thereof 失效
标题翻译：具有自对准陡肩极结构的磁写头及其制造方法
公开(公告)号：US07612964B2
公开(公告)日：2009-11-03
申请号：US11228783
申请日：2005-09-15
申请人： Daniel Wayne Bedell , Hieu Lam , Kim Y. Lee , Jyh-Shuey Lo
发明人： Daniel Wayne Bedell , Hieu Lam , Kim Y. Lee , Jyh-Shuey Lo
IPC分类号： G11B5/187
CPC分类号： G11B5/3116 , G11B5/3163
摘要： A magnetic write head and method of manufacture thereof that has a first pole structure having a notched structure configured with a steep shoulder portion and a narrow vertical notch portion extending from the top of the steep shoulder portion. The write head also includes a second pole structure (P2) that has a very narrow width (track width) and that is self aligned with the narrow vertical notch structure of the first pole structure. The write head provides excellent magnetic properties including a very narrow track width and minimal side writing, while avoiding magnetic saturation of the poles.
摘要翻译：一种磁写头及其制造方法，其具有第一极结构，其具有构造为具有陡峭肩部的切口结构和从陡峭肩部的顶部延伸的窄垂直切口部。写头还包括具有非常窄的宽度（轨道宽度）并且与第一极结构的窄垂直切口结构自对准的第二极结构（P2）。写头提供优异的磁性，包括非常窄的轨道宽度和最小的侧面写入，同时避免极点的磁饱和。

3. 发明授权

US07536774B2 Method and apparatus for integrating a stair notch and a gap bump at a pole tip in a write head 失效
标题翻译：用于将台阶缺口和间隙凸起集成在写头中的极尖处的方法和装置
公开(公告)号：US07536774B2
公开(公告)日：2009-05-26
申请号：US11399821
申请日：2006-04-07
申请人： Daniel Wayne Bedell , Wen-Chien David Hsiao , Ming Jiang , Hieu Lam , Kim Y. Lee , Jyh-Shuey Lo , Aron Pentek
发明人： Daniel Wayne Bedell , Wen-Chien David Hsiao , Ming Jiang , Hieu Lam , Kim Y. Lee , Jyh-Shuey Lo , Aron Pentek
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , Y10T29/49043
摘要： A method and apparatus for integrating a stair notch and a gap bump at a pole tip in a write head is disclosed. A protective plated layer is formed over the bump to prevent the bump form being damaged during formation of the notch at the pole tip. The flux from the second pole outside of the track will be effectively channeled to the first pole piece under the alumina bump.
摘要翻译：公开了一种用于将写入头中的极尖处的台阶缺口和间隙凸起集成的方法和装置。在凸起之上形成保护镀层，以防止在极尖处形成凹口期间凸起形状被损坏。来自轨道外部的第二极的磁通将有效地引导到氧化铝凸块下方的第一极靴。

4. 发明申请

US20060096081A1 Methods of making magnetic write heads with use of a resist channel shrinking solution having corrosion inhibitors 审中-公开
标题翻译：使用具有腐蚀抑制剂的抗蚀剂通道收缩溶液制造磁性写入头的方法
公开(公告)号：US20060096081A1
公开(公告)日：2006-05-11
申请号：US11312064
申请日：2005-12-19
申请人： Christian Bonhote , Jila Tabib , Dennis McKean , Daniel Bedell , Jyh-Shuey Lo , Hieu Lam , Kim Lee
发明人： Christian Bonhote , Jila Tabib , Dennis McKean , Daniel Bedell , Jyh-Shuey Lo , Hieu Lam , Kim Lee
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3116 , G11B5/3163 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49048 , Y10T29/49052
摘要： One preferred method for use in making a magnetic write head with use of the resist channel shrinking solution includes the steps of forming a first pole piece layer of a first pole piece; forming a gap layer over the first pole piece layer; forming a patterned resist over the first pole piece layer and the gap layer; electroplating a first pedestal portion of a second pole piece over the gap layer within a channel of the patterned resist; forming an oxide layer over the first pedestal portion; applying the resist channel shrinking solution comprising the resist channel shrinking film and the corrosion inhibitors over the patterned resist; baking the resist channel shrinking solution over the patterned resist to thereby reduce a width of the channel; removing the resist channel shrinking solution; electroplating a second pedestal portion of the second pole piece within the reduced-width channel of the patterned resist; removing the patterned resist; and milling the structure. Advantageously, the oxide layer and the corrosion inhibitors of the resist channel shrinking solution reduce corrosion in the pole piece during the act of baking the resist channel shrinking solution.
摘要翻译：使用抗蚀剂通道收缩溶液制造磁性写入头的一种优选方法包括以下步骤：形成第一极片的第一极片层; 在所述第一极片层上形成间隙层; 在所述第一极片层和所述间隙层上形成图案化的抗蚀剂; 在图案化的抗蚀剂的通道内的间隙层上电镀第二极片的第一基座部分; 在所述第一基座部分上形成氧化物层; 在图案化的抗蚀剂上施加包含抗蚀剂通道收缩膜和腐蚀抑制剂的抗蚀剂通道收缩溶液; 在图案化的抗蚀剂上烘烤抗蚀剂通道收缩溶液，从而减小通道的宽度; 去除抗蚀剂通道收缩溶液; 在所述图案化抗蚀剂的所述减小宽度的通道内电镀所述第二极靴的第二基座部分; 去除图案化的抗蚀剂; 并研磨结构。有利地，抗蚀剂通道收缩溶液的氧化物层和腐蚀抑制剂在烘烤抗蚀剂通道收缩溶液的作用期间减少极片中的腐蚀。

5. 发明授权

US07593186B2 P1 write pole with shoulder formation 失效
标题翻译： P1写柱与肩形
公开(公告)号：US07593186B2
公开(公告)日：2009-09-22
申请号：US11046740
申请日：2005-01-31
申请人： Daniel Wayne Bedell , Hung-Chin Guthrie , Ming Jiang , Hieu Lam , Jyh-Shuey Lo , Edward Hin Pong Lee , Aron Pentek
发明人： Daniel Wayne Bedell , Hung-Chin Guthrie , Ming Jiang , Hieu Lam , Jyh-Shuey Lo , Edward Hin Pong Lee , Aron Pentek
IPC分类号： G11B5/39 , G11B5/147
CPC分类号： G11B5/1871 , G11B5/3116
摘要： A magnetic disk drive head is disclosed including a write head, which includes a P1 layer having a pedestal portion, a gap layer formed on the P1 layer, and a P2 layer formed on the gap layer. The P1 layer includes a shoulder formation having a neck portion and a beveled portion. Also disclosed is a disk drive having a write head with a P1 layer with shoulder formation, and a method for fabricating a write pole for a magnetic recording head having a P1 layer with shoulder formation.
摘要翻译：公开了一种包括写头的磁盘驱动器头，该写头包括具有基座部分的P1层，在P1层上形成的间隙层和形成在间隙层上的P2层。 P1层包括具有颈部和斜面部分的肩部结构。还公开了具有具有肩部形成的P1层的写入头的磁盘驱动器，以及用于制造具有具有肩部形成的P1层的磁性记录头的写入磁极的方法。

6. 发明申请

US20070058293A1 Magnetic write head having a self aligned, steep shoulder pole structure and method of manufacture thereof 失效
标题翻译：具有自对准陡肩极结构的磁写头及其制造方法
公开(公告)号：US20070058293A1
公开(公告)日：2007-03-15
申请号：US11228783
申请日：2005-09-15
申请人： Daniel Bedell , Hieu Lam , Kim Lee , Jyh-Shuey Lo
发明人： Daniel Bedell , Hieu Lam , Kim Lee , Jyh-Shuey Lo
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/3163
摘要： A magnetic write head and method of manufacture thereof that has a first pole structure having a notched structure configured with a steep shoulder portion and a narrow vertical notch portion extending from the top of the steep shoulder portion. The write head also includes a second pole structure (P2) that has a very narrow width (track width) and that is self aligned with the narrow vertical notch structure of the first pole structure. The write head provides excellent magnetic properties including a very narrow track width and minimal side writing, while avoiding magnetic saturation of the poles.
摘要翻译：一种磁写头及其制造方法，其具有第一极结构，其具有构造为具有陡峭肩部的切口结构和从陡峭肩部的顶部延伸的窄垂直切口部。写头还包括具有非常窄的宽度（轨道宽度）并且与第一极结构的窄垂直切口结构自对准的第二极结构（P 2）。写头提供优异的磁性，包括非常窄的轨道宽度和最小的侧面写入，同时避免极点的磁饱和。

7. 发明申请

US20060171069A1 P1 write pole with shoulder formation and method of fabrication 失效
标题翻译： P1写杆与肩部形成和制造方法
公开(公告)号：US20060171069A1
公开(公告)日：2006-08-03
申请号：US11046740
申请日：2005-01-31
申请人： Daniel Bedell , Hung-Chin Guthrie , Ming Jiang , Hieu Lam , Jyh-Shuey Lo , Edward Lee , Aron Pentek
发明人： Daniel Bedell , Hung-Chin Guthrie , Ming Jiang , Hieu Lam , Jyh-Shuey Lo , Edward Lee , Aron Pentek
IPC分类号： G11B5/147
CPC分类号： G11B5/1871 , G11B5/3116
摘要： A magnetic disk drive head is disclosed including a write head, which includes a P1 layer having a pedestal portion, a gap layer formed on the P1 layer, and a P2 layer formed on the gap layer. The P1 layer includes a shoulder formation having a neck portion and a beveled portion. Also disclosed is a disk drive having a write head with a P1 layer with shoulder formation, and a method for fabricating a write pole for a magnetic recording head having a P1 layer with shoulder formation.
摘要翻译：公开了一种包括写头的磁盘驱动器头，该写头包括具有基座部分的P 1层，在P 1层上形成的间隙层和形成在间隙层上的P 2层。 P 1层包括具有颈部和斜面部分的肩部结构。还公开了一种具有具有肩部形成的P 1层的写入头的磁盘驱动器，以及用于制造具有具有肩部形成的P 1层的磁性记录头的写入磁极的方法。

8. 发明申请

US20070236833A1 Method and apparatus for integrating a stair notch and a gap bump at a pole tip in a write head 失效
标题翻译：用于将台阶缺口和间隙凸起集成在写头中的极尖处的方法和装置
公开(公告)号：US20070236833A1
公开(公告)日：2007-10-11
申请号：US11399821
申请日：2006-04-07
申请人： Daniel Bedell , Wen-Chien Hsiao , Ming Jiang , Hieu Lam , Kim Lee , Jyh-Shuey Lo , Aron Pentek
发明人： Daniel Bedell , Wen-Chien Hsiao , Ming Jiang , Hieu Lam , Kim Lee , Jyh-Shuey Lo , Aron Pentek
IPC分类号： G11B5/147
CPC分类号： G11B5/3163 , Y10T29/49043
摘要： A method and apparatus for integrating a stair notch and a gap bump at a pole tip in a write head is disclosed. A protective plated layer is formed over the bump to prevent the bump form being damaged during formation of the notch at the pole tip. The flux from the second pole outside of the track will be effectively channeled to the first pole piece under the alumina bump.
摘要翻译：公开了一种用于将写入头中的极尖处的台阶缺口和间隙凸起集成的方法和装置。在凸起之上形成保护镀层，以防止在极尖处形成凹口期间凸起形状被损坏。来自轨道外部的第二极的磁通将有效地引导到氧化铝凸块下方的第一极靴。

9. 发明授权

US07172786B2 Methods for improving positioning performance of electron beam lithography on magnetic wafers 失效
标题翻译：改善电子束光刻在磁晶片上的定位性能的方法
公开(公告)号：US07172786B2
公开(公告)日：2007-02-06
申请号：US10845956
申请日：2004-05-14
申请人： Alexander Adrian Girling Driskill-Smith , Hieu Lam , Kim Y. Lee
发明人： Alexander Adrian Girling Driskill-Smith , Hieu Lam , Kim Y. Lee
IPC分类号： B05D5/12
CPC分类号： G11B5/855 , C25D3/562 , C25D5/022 , G11B5/858
摘要： The present invention discloses a method for the production of sub-micron structures on magnetic materials using electron beam lithography. A subtractive process is disclosed wherein a portion of a magnetic material layer is removed from the substrate using conventional lithography, and the remaining portion of the magnetic material layer is patterned by e-beam lithography. A additive process is also disclosed wherein a thin magnetic seed layer is deposited on the substrate, a portion of which is removed by conventional lithography and replaced with a non-magnetic conducting layer. The remaining portion of magnetic seed layer is patterned by e-beam lithography and the final magnetic structure produced by electroplating.
摘要翻译：本发明公开了一种使用电子束光刻在磁性材料上生产亚微米结构的方法。公开了一种消减方法，其中使用常规光刻将磁性材料层的一部分从衬底上除去，并且通过电子束光刻将磁性材料层的剩余部分图案化。还公开了一种添加方法，其中将薄的磁性种子层沉积在基底上，其一部分通过常规的光刻法被去除并被非磁性导电层代替。通过电子束光刻和通过电镀产生的最终磁性结构对磁性种子层的剩余部分进行构图。

10. 发明申请

US20130001188A1 METHOD TO PROTECT MAGNETIC BITS DURING PLANARIZATION 审中-公开
标题翻译：在平面化过程中保护磁极的方法
公开(公告)号：US20130001188A1
公开(公告)日：2013-01-03
申请号：US13174321
申请日：2011-06-30
申请人： David Kuo , Michael R. Feldbaum , Paritosh Rajora , Hieu Lam
发明人： David Kuo , Michael R. Feldbaum , Paritosh Rajora , Hieu Lam
IPC分类号： G11B5/84 , B05C9/06 , B32B3/28 , B05D3/00 , C23F1/00 , C23F1/08 , B05D1/36
CPC分类号： H01L43/12 , Y10T428/24628
摘要： The embodiments disclose a method to protect magnetic bits during carbon field planarization, including depositing a stop layer upon magnetic bits and magnetic film of a patterned stack, depositing a carbon fill layer on the stop layer and using the stop layer during planarization and etch-back of the carbon field to protect the patterned stack magnetic bits during the carbon field planarization.
摘要翻译：这些实施例公开了一种在碳场平坦化期间保护磁头的方法，包括在图案化堆叠的磁头和磁性膜上沉积停止层，在停止层上沉积碳填充层并在平坦化和回蚀刻期间使用停止层的碳场以在碳场平坦化期间保护图案化的堆叠磁性位。

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