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    • 4. 发明申请
    • SEMICONDUCTOR FABRICATING PROCESS
    • US20100055912A1
    • 2010-03-04
    • US12202548
    • 2008-09-02
    • Chiu-Te Lee
    • Chiu-Te Lee
    • H01L21/311
    • H01L27/11526H01L27/11534
    • A semiconductor fabricating process is provided. First, a substrate is provided. The substrate has thereon a stacked structure and a mask layer disposed on the stacked structure. Thereafter, an oxide layer is formed on a surface of the mask layer and a surface of at least a portion of the stacked structure. Afterwards, a first spacer is formed on a sidewall of the stacked structure. Then, a second spacer is formed on a sidewall of the first spacer. Further, a first etching process is performed to remove the oxide layer on the surface of the mask layer. Thereafter, a second etching process is performed to simultaneously remove the mask layer and the second spacer.
    • 提供半导体制造工艺。 首先,提供基板。 基板上具有堆叠结构和设置在堆叠结构上的掩模层。 此后,在掩模层的表面和堆叠结构的至少一部分的表面上形成氧化物层。 之后,在堆叠结构的侧壁上形成第一间隔物。 然后,在第一间隔物的侧壁上形成第二间隔物。 此外,进行第一蚀刻工艺以去除掩模层表面上的氧化物层。 此后,进行第二蚀刻处理以同时去除掩模层和第二间隔物。
    • 5. 发明申请
    • COMPLEMENTARY METAL OXIDE SEMICONDUCTOR IMAGE SENSOR AND FABRICATING METHOD THEREOF
    • 补充金属氧化物半导体图像传感器及其制造方法
    • US20070052053A1
    • 2007-03-08
    • US11162118
    • 2005-08-29
    • Chiu-Te Lee
    • Chiu-Te Lee
    • H01L31/06
    • H01L27/14683H01L27/14623H01L27/14625H01L27/14629
    • A CMOS image sensor including a light-receiving element, at least one transistor, a first dielectric layer, a reflective layer, a second dielectric layer, a protective layer, a material layer, a transparent material layer, an optical filter, and a converging element is described. The light-receiving element and the transistor are disposed respectively inside the light sensing region and the transistor region. The first dielectric layer is disposed on the substrate, covering the transistor and the light-receiving element. The reflective layer is disposed on the first dielectric layer inside the light sensing region. The second dielectric layer is disposed on the first dielectric layer outside of the reflective layer. The material layer is disposed on the first dielectric layer inside of the reflective layer. The optical filter is disposed on the transparent material layer and the converging element is disposed on the optical filter inside the light sensing region.
    • 一种CMOS图像传感器,包括光接收元件,至少一个晶体管,第一介电层,反射层,第二介电层,保护层,材料层,透明材料层,滤光器和会聚 描述元素。 光接收元件和晶体管分别设置在光感测区域和晶体管区域内。 第一电介质层设置在衬底上,覆盖晶体管和光接收元件。 反射层设置在光感测区域内的第一介质层上。 第二电介质层设置在反射层外侧的第一电介质层上。 材料层设置在反射层内部的第一介电层上。 滤光器设置在透明材料层上,并且会聚元件设置在光感测区域内的滤光器上。
    • 7. 发明授权
    • Method of forming a fuse
    • 形成保险丝的方法
    • US06864124B2
    • 2005-03-08
    • US10064052
    • 2002-06-05
    • Chiu-Te LeeTe-Yuan Wu
    • Chiu-Te LeeTe-Yuan Wu
    • H01L21/60H01L23/525H01L21/82
    • H01L23/5258H01L2924/0002H01L2924/00
    • A surface of a semiconductor substrate defined with at least one fuse area and at least one bonding pad area. A conductive layer with a thickness of 12 kÅ and a protective layer are sequentially formed on the surface of the semiconductor substrate. Then portions of the protective layer and portions of the conductive layer in the fuse area are etched to make the thickness for the remaining conductive layer in the fuse area be approximately 5 kÅ. Finally a dielectric layer is formed on the surface of the semiconductor substrate, and portions of the first dielectric layer and portions of the protective layer in the bonding pad area are etched until reaching the top surface of the conductive layer.
    • 半导体衬底的表面,其被限定有至少一个熔丝区域和至少一个焊盘区域。 在半导体衬底的表面上依次形成厚度为12kA的导电层和保护层。 然后,将保护层的部分和熔丝区域中的导电层的部分进行蚀刻,以使保险丝区域中的剩余导电层的厚度为约5k。 最后,在半导体衬底的表面上形成电介质层,并且蚀刻第一电介质层的部分和焊盘区域中的保护层的部分,直到到达导电层的顶表面。
    • 9. 发明授权
    • Semiconductor structure and method for manufacturing the same
    • 半导体结构及其制造方法
    • US08766358B2
    • 2014-07-01
    • US13454149
    • 2012-04-24
    • Chiu-Te LeeKe-Feng LinShu-Wen LinKun-Huang YuChih-Chung WangTe-Yuan Wu
    • Chiu-Te LeeKe-Feng LinShu-Wen LinKun-Huang YuChih-Chung WangTe-Yuan Wu
    • H01L29/76
    • H01L29/0653H01L29/0878H01L29/407H01L29/7816
    • A semiconductor structure comprises a substrate having a first conductive type; a deep well having a second conductive type formed in the substrate and extending down from a surface of the substrate; a first well having the first conductive type and a second well having the second conductive type both formed in the deep well and extending down from the surface of the substrate, and the second well spaced apart from the first well; a gate electrode formed on the substrate and disposed between the first and second wells; an isolation extending down from the surface of the substrate and disposed between the gate electrode and the second well; a conductive plug including a first portion and a second portion electrically connected to each other, and the first portion electrically connected to the gate electrode, and the second portion penetrating into the isolation.
    • 半导体结构包括具有第一导电类型的衬底; 具有形成在所述基板中并从所述基板的表面向下延伸的第二导电类型的深阱; 具有第一导电类型的第一阱和具有第二导电类型的第二阱都形成在深阱中并且从衬底的表面向下延伸,并且第二阱与第一阱间隔开; 栅电极,形成在所述基板上并且设置在所述第一阱和所述第二阱之间; 从衬底的表面向下延伸并且设置在栅电极和第二阱之间的隔离件; 导电插头,其包括彼此电连接的第一部分和第二部分,并且所述第一部分电连接到所述栅电极,并且所述第二部分穿透所述隔离。