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    • 3. 发明申请
    • Stackable semiconductor device and manufacturing method thereof
    • 可堆叠半导体器件及其制造方法
    • US20080251937A1
    • 2008-10-16
    • US12082724
    • 2008-04-11
    • Chin-Huang ChangChien-Ping HuangChih-Ming HuangCheng-Hsu Hsiao
    • Chin-Huang ChangChien-Ping HuangChih-Ming HuangCheng-Hsu Hsiao
    • H01L23/52H01L21/00
    • H01L21/76898H01L25/0657H01L2224/48091H01L2225/06513H01L2225/06551H01L2225/06562H01L2924/00014
    • A stackable semiconductor device and a manufacturing method thereof are disclosed. The method includes providing a wafer comprised of a plurality of chips, wherein a plurality of solder pads are formed on the active surface of each chip, and a plurality of grooves are formed between the solder pads of any two adjacent ones of the chips; forming a dielectric layer on regions between the solder pads of any two adjacent ones of the chips ; forming a metal layer on the dielectric layer electrically connected to the solder pads and forming a connective layer on the metal layer, wherein the width of the connective layer is smaller than that of the metal layer; cutting along the grooves to break off the electrical connection between adjacent chips; thinning the non-active surface of the wafer to the extent that the metal layer is exposed from the wafer; and separating the chips to form a plurality of stackable semiconductor devices. Accordingly, a multi-chip stack structure can be obtained by stacking and electrically connecting a plurality of semiconductor devices through the electrical connection between the connective layer of a semiconductor device and the metal layer of another semiconductor device, thereby effectively integrating more chips without having to increase the stacking area, and further the problems of poor electrical connection, complicated manufacturing processes and high costs known in the prior art can be avoided.
    • 公开了一种可堆叠半导体器件及其制造方法。 该方法包括提供由多个芯片组成的晶片,其中在每个芯片的有源表面上形成多个焊盘,并且在任何两个相邻芯片的焊盘之间形成多个沟槽; 在任何两个相邻芯片的焊盘之间的区域上形成电介质层; 在与所述焊料焊盘电连接的所述电介质层上形成金属层,并在所述金属层上形成连接层,其中所述连接层的宽度小于所述金属层的宽度; 沿着凹槽切割以破坏相邻芯片之间的电连接; 使晶片的非活性表面变薄至金属层从晶片露出的程度; 并分离所述芯片以形成多个可堆叠半导体器件。 因此,通过半导体器件的连接层与另一半导体器件的金属层之间的电连接层叠并电连接多个半导体器件,可以获得多芯片堆叠结构,从而有效地集成更多的芯片,而不必 增加堆积面积,进一步避免了现有技术中已知的电连接不良,制造工艺复杂,成本高的问题。
    • 7. 发明授权
    • Fabrication method of multi-chip stack structure
    • 多芯片堆叠结构的制作方法
    • US07981729B2
    • 2011-07-19
    • US12818701
    • 2010-06-18
    • Jung-Pin HuangChin-Huang ChangChien-Ping HuangChung-Lun LiuCheng-Hsu Hsiao
    • Jung-Pin HuangChin-Huang ChangChien-Ping HuangChung-Lun LiuCheng-Hsu Hsiao
    • H01L21/60
    • H01L23/49575H01L24/45H01L24/48H01L24/49H01L24/78H01L24/85H01L25/50H01L2224/45144H01L2224/48091H01L2224/48247H01L2224/48465H01L2224/48496H01L2224/49175H01L2224/78H01L2224/85001H01L2924/00014H01L2924/01033H01L2924/01079H01L2924/01082H01L2924/014H01L2924/00
    • A multi-chip stack structure and a fabrication method thereof are proposed, including providing a leadframe having a die base and a plurality of leads and disposing a first and a second chips on the two surfaces of the die base respectively; disposing the leadframe on a heating block having a cavity in a wire bonding process with the second chip received in the cavity of the heating block; performing a first wire bonding process to electrically connect the first chip to the leads through a plurality of first bonding wires, and forming a bump on one side of the leads connected with the first bonding wires; disposing the leadframe in an upside down manner to the heating block via the bump with the first chip and the first bonding wires received in the cavity of the heating block; and performing a second wire bonding process to electrically connect the second chip to the leads through a plurality of second bonding wires. The bump is used for supporting the leads to a certain height so as to keep the bonding wires from contacting the heating block and eliminate the need of using a second heating block in the second wire bonding process of the prior art, thereby saving time and costs in a fabrication process. Also, as positions where the first and second bonding wires are bonded to the leads on opposite sides of the leadframe correspond with each other, the conventional problems of adversely affected electrical performance and electrical mismatch can be prevented.
    • 提出了一种多芯片堆叠结构及其制造方法,包括提供具有芯片基底和多个引线的引线框架,并分别在模具基座的两个表面上设置第一和第二芯片; 将引线框架布置在具有引线接合工艺中的空腔的加热块上,第二芯片容纳在加热块的空腔中; 执行第一引线接合工艺,以通过多个第一接合线将第一芯片电连接到引线,以及在与第一接合线连接的引线的一侧上形成凸块; 通过第一芯片和第一接合线容纳在加热块的空腔中,通过凸块将引线框倒置放置到加热块, 以及执行第二引线接合处理,以通过多个第二接合线将所述第二芯片电连接到所述引线。 凸块用于将引线支撑到一定高度,以便使接合线不会接触加热块,并且在现有技术的第二引线接合过程中不需要使用第二加热块,从而节省了时间和成本 在制造过程中。 此外,由于第一和第二接合线与引线框架的相对侧上的引线接合的位置彼此对应,可以防止电性能和电不匹配受到不利影响的常规问题。
    • 8. 发明申请
    • FABRICATION METHOD OF MULTI-CHIP STACK STRUCTURE
    • 多芯片堆叠结构的制作方法
    • US20100255635A1
    • 2010-10-07
    • US12818701
    • 2010-06-18
    • Jung-Pin HuangChin-Huang ChangChien-Ping HuangChung-Lun LiuCheng-Hsu Hsiao
    • Jung-Pin HuangChin-Huang ChangChien-Ping HuangChung-Lun LiuCheng-Hsu Hsiao
    • H01L21/60
    • H01L23/49575H01L24/45H01L24/48H01L24/49H01L24/78H01L24/85H01L25/50H01L2224/45144H01L2224/48091H01L2224/48247H01L2224/48465H01L2224/48496H01L2224/49175H01L2224/78H01L2224/85001H01L2924/00014H01L2924/01033H01L2924/01079H01L2924/01082H01L2924/014H01L2924/00
    • A multi-chip stack structure and a fabrication method thereof are proposed, including providing a leadframe having a die base and a plurality of leads and disposing a first and a second chips on the two surfaces of the die base respectively; disposing the leadframe on a heating block having a cavity in a wire bonding process with the second chip received in the cavity of the heating block; performing a first wire bonding process to electrically connect the first chip to the leads through a plurality of first bonding wires, and forming a bump on one side of the leads connected with the first bonding wires; disposing the leadframe in an upside down manner to the heating block via the bump with the first chip and the first bonding wires received in the cavity of the heating block; and performing a second wire bonding process to electrically connect the second chip to the leads through a plurality of second bonding wires. The bump is used for supporting the leads to a certain height so as to keep the bonding wires from contacting the heating block and eliminate the need of using a second heating block in the second wire bonding process of the prior art, thereby saving time and costs in a fabrication process. Also, as positions where the first and second bonding wires are bonded to the leads on opposite sides of the leadframe correspond with each other, the conventional problems of adversely affected electrical performance and electrical mismatch can be prevented.
    • 提出了一种多芯片堆叠结构及其制造方法,包括提供具有芯片基底和多个引线的引线框架,并分别在模具基座的两个表面上设置第一和第二芯片; 将引线框架布置在具有引线接合工艺中的空腔的加热块上,第二芯片容纳在加热块的空腔中; 执行第一引线接合工艺,以通过多个第一接合线将第一芯片电连接到引线,以及在与第一接合线连接的引线的一侧上形成凸块; 通过第一芯片和第一接合线容纳在加热块的空腔中,通过凸块将引线框倒置放置到加热块, 以及执行第二引线接合处理,以通过多个第二接合线将所述第二芯片电连接到所述引线。 凸块用于将引线支撑到一定高度,以便使接合线不会接触加热块,并且在现有技术的第二引线接合过程中不需要使用第二加热块,从而节省了时间和成本 在制造过程中。 此外,由于第一和第二接合线与引线框架的相对侧上的引线接合的位置彼此对应,可以防止电性能和电不匹配受到不利影响的常规问题。
    • 9. 发明授权
    • Multi-chip stack structure and fabrication method thereof
    • 多芯片堆叠结构及其制造方法
    • US07768106B2
    • 2010-08-03
    • US12077003
    • 2008-03-13
    • Jung-Ping HuangChin-Huang ChangChien-Ping HuangChung-Lun LiuCheng-Hsu Hsiao
    • Jung-Ping HuangChin-Huang ChangChien-Ping HuangChung-Lun LiuCheng-Hsu Hsiao
    • H01L23/495H01L21/00
    • H01L23/49575H01L24/45H01L24/48H01L24/49H01L24/78H01L24/85H01L25/50H01L2224/45144H01L2224/48091H01L2224/48247H01L2224/48465H01L2224/48496H01L2224/49175H01L2224/78H01L2224/85001H01L2924/00014H01L2924/01033H01L2924/01079H01L2924/01082H01L2924/014H01L2924/00
    • A multi-chip stack structure and a fabrication method thereof are proposed, including providing a leadframe having a die base and a plurality of leads and disposing a first and a second chips on the two surfaces of the die base respectively; disposing the leadframe on a heating block having a cavity in a wire bonding process with the second chip received in the cavity of the heating block; performing a first wire bonding process to electrically connect the first chip to the leads through a plurality of first bonding wires, and forming a bump on one side of the leads connected with the first bonding wires; disposing the leadframe in an upside down manner to the heating block via the bump with the first chip and the first bonding wires received in the cavity of the heating block; and performing a second wire bonding process to electrically connect the second chip to the leads through a plurality of second bonding wires. The bump is used for supporting the leads to a certain height so as to keep the bonding wires from contacting the heating block and eliminate the need of using a second heating block in the second wire bonding process of the prior art, thereby saving time and costs in a fabrication process. Also, as positions where the first and second bonding wires are bonded to the leads on opposite sides of the leadframe correspond with each other, the conventional problems of adversely affected electrical performance and electrical mismatch can be prevented.
    • 提出了一种多芯片堆叠结构及其制造方法,包括提供具有芯片基底和多个引线的引线框架,并分别在模具基座的两个表面上设置第一和第二芯片; 将引线框架布置在具有引线接合工艺中的空腔的加热块上,第二芯片容纳在加热块的空腔中; 执行第一引线接合工艺,以通过多个第一接合线将第一芯片电连接到引线,以及在与第一接合线连接的引线的一侧上形成凸块; 通过第一芯片和第一接合线容纳在加热块的空腔中,通过凸块将引线框倒置放置到加热块, 以及执行第二引线接合处理,以通过多个第二接合线将所述第二芯片电连接到所述引线。 凸块用于将引线支撑到一定高度,以便使接合线不会接触加热块,并且在现有技术的第二引线接合过程中不需要使用第二加热块,从而节省了时间和成本 在制造过程中。 此外,由于第一和第二接合线与引线框架的相对侧上的引线接合的位置彼此对应,可以防止电性能和电不匹配受到不利影响的常规问题。