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    • 3. 发明申请
    • Micro-optoelectromechanical system packages for a light modulator and methods of making the same
    • 用于光调制器的微光机电系统封装及其制造方法
    • US20060146426A1
    • 2006-07-06
    • US11029316
    • 2005-01-04
    • Chien-Hua ChenDavid CraigCharles Haluzak
    • Chien-Hua ChenDavid CraigCharles Haluzak
    • G02B7/02
    • H01L31/0203H01L2224/48091H04N5/7458H01L2924/00014
    • A micro-optoelectromechanical system (MOEMS) package for a light modulator includes a sealed modulator package containing a light modulator sealed under a first transparent lid; a secondary, larger package containing the sealed modulator package, the secondary package comprising a seal and a second transparent lid; and an optical material disposed between the first transparent lid and the second transparent lid, where the optical material is a solid or liquid. An alternatively micro-optoelectromechanical system (MOEMS) package for a light modulator includes a sealed modulator package containing a light modulator sealed under a first transparent lid; a secondary, larger package containing the sealed modulator package; and a desiccant or getter material disposed inside the secondary package with the modulator package.
    • 用于光调制器的微光电机电系统(MOEMS)封装包括密封的调制器封装,其包含密封在第一透明盖下的光调制器; 包含密封调制器封装件的次级较大封装,所述二次封装包括密封件和第二透明盖; 以及设置在第一透明盖和第二透明盖之间的光学材料,其中光学材料是固体或液体。 用于光调制器的替代的微光电机电系统(MOEMS)封装包括密封的调制器封装,其包含密封在第一透明盖下的光调制器; 包含密封调制器封装的二次,较大封装; 以及设置在具有调制器封装的二次封装内的干燥剂或吸气材料。