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    • 1. 发明申请
    • Fabrication tool for bonding
    • 用于粘接的加工工具
    • US20070274669A1
    • 2007-11-29
    • US11413333
    • 2006-04-28
    • Chien-Hua ChenTroy SchwinabartWilliam Atkinson
    • Chien-Hua ChenTroy SchwinabartWilliam Atkinson
    • G02B6/00
    • H01L21/67092
    • A fabrication tool presses a first device surface against a second device surface after the first and the second device surfaces have been plasma activated, to bond the first device surface with the second device surface. The fabrication tool includes a bonding piston to exert force on the first device surface to press the first device surface against the second device surface. The fabrication tool also includes a pressure plate situated between the bonding piston and the first device surface. The fabrication tool further includes a mechanism to ensure that the force exerted by the bonding piston on the first device surface via the pressure plate is initially exerted at one or more first locations on the first device surface and subsequently exerted at one or more second locations on the first device surface.
    • 在第一和第二装置表面已被等离子体激活之后,制造工具将第一装置表面压靠第二装置表面,以将第一装置表面与第二装置表面结合。 制造工具包括粘合活塞,以在第一装置表面施加力以将第一装置表面压靠第二装置表面。 制造工具还包括位于接合活塞和第一装置表面之间的压力板。 制造工具还包括机构,以确保由第一装置表面经由压板施加的结合活塞的力最初施加在第一装置表面上的一个或多个第一位置上,随后在一个或多个第二位置上施加 第一个设备表面。