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1. 发明公开

EP3174191A1 ULTRASONIC MOTOR WITH ANNULAR PIEZOELECTRIC VIBRATOR FOR OPTICAL APPARATUS 有权
标题翻译：带环形压电振子的超声波电机在光学仪器中的应用
公开(公告)号：EP3174191A1
公开(公告)日：2017-05-31
申请号：EP16002384.2
申请日：2016-11-11
申请人： Canon Kabushiki Kaisha
发明人： Uebayashi, Akira , Furuta, Tatsuo , Ueda, Miki , Tanaka, Hidenori , Koyama, Shinya , Miura, Kaoru , Kimura, Atsushi , Fujita, Satoshi
IPC分类号： H02N2/16 , H01L41/187 , G02B7/10
CPC分类号： H02N2/04 , G02B7/08 , G02B7/102 , H01L41/1871 , H02N2/062 , H02N2/163
摘要： Provided is an ultrasonic motor including an annular vibrator and an annular moving member that is brought into pressure-contact with the vibrator. The vibrator includes an annular vibrating plate and an annular piezoelectric element. The piezoelectric element includes an annular lead-free piezoelectric ceramic piece, a common electrode arranged on one surface of the piezoelectric ceramic piece, and a plurality of electrodes arranged on the other surface of the piezoelectric ceramic piece. The plurality of electrodes include two drive phase electrodes, one or more non-drive phase electrodes, and one or more detection phase electrodes. A second surface of the vibrating plate includes a plurality of groove regions extending radially, and the depths of the groove regions change in a circumferential direction along a curve obtained by superimposing one or more sine waves on one another. The ultrasonic motor exhibits a sufficient drive speed while suppressing generation of an unnecessary vibration wave.
摘要翻译：本发明提供一种超声波马达，该超声波马达具备环状的振子以及与该振子压接的环状的移动部件。振动器包括环形振动板和环形压电元件。压电元件包括环形无铅压电陶瓷片，布置在压电陶瓷片的一个表面上的公共电极以及布置在压电陶瓷片的另一个表面上的多个电极。多个电极包括两个驱动相电极，一个或多个非驱动相电极以及一个或多个检测相电极。振动板的第二表面包括多个径向延伸的凹槽区域，并且凹槽区域的深度沿着通过将一个或多个正弦波彼此叠加而获得的曲线在圆周方向上改变。超声波马达在抑制不必要的振动波的产生的同时表现出足够的驱动速度。

2. 发明公开

EP1582932A3 Alignment apparatus, exposure apparatus, and device manufacturing method 审中-公开
标题翻译：定位装置，曝光装置和方法，用于制造装置
公开(公告)号：EP1582932A3
公开(公告)日：2010-01-20
申请号：EP05251985.7
申请日：2005-03-30
申请人： CANON KABUSHIKI KAISHA
发明人： Kimura, Atsushi , Korenaga, Nobushige , Kubo, Hiroyoshi
IPC分类号： G03F7/20
CPC分类号： G03F7/70733
摘要： In an alignment apparatus having two movable elements (11a,11b) which move on a stator (2) having a planer portion, the two movable elements are prevented from moving to deviate from target position while enabling the two movable elements to swap. The alignment apparatus includes a stator which has a planer portion including first and second areas, first and second movable elements which move on the planer portion, and a regulating mechanism which regulates positions of the first and second movable elements. The first and second movable elements are driven to target positions by the Lorentz force that acts with respect to the stator. The regulating mechanism includes a first regulator (111a) which regulates the position of the movable element (11a) which is located in the first area such that the movable element will not deviate from the target position, and a second regulator (112b) which regulates the position of the movable element (11b) which is located in the second area such that the movable element will not deviate from the target position.

3. 发明授权

EP0416884B1 Vibration wave driven motor 失效
标题翻译：一种振动波驱动马达
公开(公告)号：EP0416884B1
公开(公告)日：1996-03-27
申请号：EP90309688.1
申请日：1990-09-05
申请人： CANON KABUSHIKI KAISHA
发明人： Kimura, Atsushi , Seki, Hiroyuki
IPC分类号： H01L41/09
CPC分类号： H02N2/08

4. 发明公开

EP0416884A2 Vibration wave driven motor 失效
标题翻译：振动电机。
公开(公告)号：EP0416884A2
公开(公告)日：1991-03-13
申请号：EP90309688.1
申请日：1990-09-05
申请人： CANON KABUSHIKI KAISHA
发明人： Kimura, Atsushi , Seki, Hiroyuki
IPC分类号： H01L41/09
CPC分类号： H02N2/08
摘要： A vibration wave driven motor produces a travelling wave in an elastic body and thereby moves the elastic body relative to a member pressed against the elastic body. The travelling wave is a combination of a plurality of standing waves generated by application of out-of-phase alternate electric fields to a plurality of driving element groups for an electro-mechanical energy conversion element bonded to the elastic body. The electro-mechanical energy conversion element has an electrode which is patterned such that cuts thereof coincide with the nodes of the standing wave generated in the elastic body.
摘要翻译：振动波驱动电动机在弹性体中产生行波，从而使弹性体相对于压靠弹性体的部件移动。行波是通过将异相交替电场施加到与弹性体接合的机电能转换元件的多个驱动元件组而产生的多个驻波的组合。机电能量转换元件具有图案化的电极，使得其切口与弹性体中产生的驻波的节点重合。

5. 发明公开

EP2375463A1 Vibration type actuator, vibrator, and vibrator manufacturing method 有权
标题翻译：振动器，振动器和振动器
公开(公告)号：EP2375463A1
公开(公告)日：2011-10-12
申请号：EP11161106.7
申请日：2011-04-05
申请人： Canon Kabushiki Kaisha
发明人： Kimura, Atsushi
IPC分类号： H01L41/09
CPC分类号： H02N2/001 , H02N2/0015 , H02N2/0065 , H02N2/026 , H02N2/163 , H02N2/22
摘要： A vibration type actuator providing a satisfactory actuator performance even when an increase in speed is proposed. The actuator includes a vibrator (10) equipped with an electrical-mechanical energy conversion element (15), an elastic member (12) to which the electrical-mechanical energy conversion element is fixed, and a protrusion (19) provided on the elastic member (12). The vibrator can generate an elliptic movement in the protrusion (19). A driven body is configured to come into contact with the protrusion (19) and to make a relative movement with respect to the vibrator (10). The protrusion (19) includes a contact portion (16) having a contact surface (17) contacting the driven body, a continuous side wall portion (14) protruding with respect to one end surface of the elastic member (12) and forming a hollow structure, and a connection portion (11) connecting the contact portion (16) and the side wall portion (14) and exhibiting flexibility in a direction normal to the contact surface (17).
摘要翻译：即使在提高速度的情况下也能提供令人满意的致动器性能的振动型致动器。致动器包括配备有机电能量转换元件（15）的振动器（10），固定有机电能转换元件的弹性元件（12）和设置在弹性元件上的突起（19）（12）。振动器可以在突起（19）中产生椭圆运动。被驱动体构造成与突起（19）接触并且相对于振动器（10）进行相对运动。突起（19）包括具有与被驱动体接触的接触表面（17）的接触部分（16），相对于弹性部件（12）的一个端面突出的连续侧壁部分（14）以及连接所述接触部分（16）和所述侧壁部分（14）并且在垂直于所述接触表面（17）的方向上呈现柔性的连接部分（11）。

6. 发明公开

EP1261041A3 Vibration wave driving device and method of processing vibrating member or moving member for use in vibration wave driving device 有权
标题翻译：一种振动波驱动和处理方法，对于振动件或振动波驱动的可动构件
公开(公告)号：EP1261041A3
公开(公告)日：2005-09-14
申请号：EP02011376.7
申请日：2002-05-23
申请人： CANON KABUSHIKI KAISHA
发明人： Kimura, Atsushi , Maruyama, Yutaka
IPC分类号： H01L41/09 , H01L41/22
CPC分类号： H02N2/22 , H02N2/0065 , H02N2/106 , H02N2/163
摘要： In order to manufacture a vibration wave driving device in a short time and with high accuracy, the device of the invention comprises: a vibrating member which has an elastic member and an electro-mechanical energy conversion element and which causes vibration when a drive signal is applied to the electro-mechanical energy conversion element; and a moving member coming into contact with the vibrating member and driven by the vibration, characterized in that contact portions of the vibrating member and the moving member are formed such that at least one contact portion protrudes toward the other contact portion and that the vibrating member or the moving member having the protruding contact portion has in a same plane as an end surface of the protruding contact portion a surface of a part other than the protruding contact portion.

7. 发明授权

EP0600485B1 A supporting device for a vibration driven actuator 失效
标题翻译：用于振动驱动驱动乳头装置
公开(公告)号：EP0600485B1
公开(公告)日：2000-05-10
申请号：EP93119445.0
申请日：1993-12-02
申请人： CANON KABUSHIKI KAISHA
发明人： Kimura, Atsushi , Nishimoto, Yoshifumi , Tanaka, Hideki , Seki, Hiroyuki , Harada, Toshiaki , Okamura, Yoshitaka , Yamamoto, Shinji
IPC分类号： H01L41/09 , B41J23/00
CPC分类号： H02N2/08

8. 发明公开

EP0600485A1 A supporting device for a vibration driven actuator 失效
标题翻译： Stuttzvorrichtungfürvibrationgetriebenen Antrieb。
公开(公告)号：EP0600485A1
公开(公告)日：1994-06-08
申请号：EP93119445.0
申请日：1993-12-02
申请人： CANON KABUSHIKI KAISHA
发明人： Kimura, Atsushi , Nishimoto, Yoshifumi , Tanaka, Hideki , Seki, Hiroyuki , Harada, Toshiaki , Okamura, Yoshitaka , Yamamoto, Shinji
IPC分类号： H01L41/09 , B41J23/00
CPC分类号： H02N2/08
摘要： A planar auxiliary supporting member for supporting an elastic member for generating a vibration is arranged. The elastic member contacts a rail-shaped stationary member, and moves along the stationary member. The rigidity of the supporting member is set to be low, so that the elastic member as a stator stably moves along the stationary member.
摘要翻译：布置了用于支撑用于产生振动的弹性构件的平面辅助支撑构件。弹性构件与轨道状固定构件接触，并且沿固定构件移动。支撑构件的刚性被设定为低，使得作为定子的弹性构件稳定地沿着固定构件移动。

9. 发明公开

EP0435496A1 A vibration driven motor and thermal jet type printer using the same 失效
标题翻译：振动威力丰富。
公开(公告)号：EP0435496A1
公开(公告)日：1991-07-03
申请号：EP90313324.7
申请日：1990-12-07
申请人： CANON KABUSHIKI KAISHA
发明人： Kimura, Atsushi , Seki, Hiroyuki , Maeno, Takashi
IPC分类号： H01L41/00
CPC分类号： H02N2/08
摘要： In a vibration wave driven motor having a vibration member having an electro mechanical energy conversion element (2) secured to one surface of a resilient member (1) of an elliptical shape formed by straight portions and arcuate portions, and a member (8) brought into pressure contact with the other surface of the resilient member and wherein AC voltages having a phase difference of 90° therebetween in terms of time are applied to the driving phases of the electro-mechanical energy conversion element divided into two phases (2a,2b) to thereby generate a travelling vibration wave in the resilient member, whereby the vibration member and the member brought into pressure contact therewith are moved relative to each other, the two driving phases of the electro-mechanical energy conversion element are polarization-processed in such a manner that only one travelling wave is formed in the straight portions of the resilient member.
摘要翻译：在具有振动部件的振动波驱动电机中，所述振动部件具有固定在由直线部分和弧形部分形成的椭圆形状的弹性部件（1）的一个表面上的机电能转换元件（2），并且带有与弹性构件的另一表面压力接触，并且其中在时间上具有90°相位差的AC电压被施加到分为两相（2a，2b）的机电能转换元件的驱动相位，从而在弹性构件中产生行进振动波，由此使振动构件和与其接触的构件相对于彼此移动，机电能量转换元件的两个驱动相位被这样的偏振处理在弹性构件的直线部分中只形成一个行波。

10. 发明授权

EP3174191B1 ULTRASONIC MOTOR WITH ANNULAR PIEZOELECTRIC VIBRATOR FOR OPTICAL APPARATUS 有权
公开(公告)号：EP3174191B1
公开(公告)日：2019-03-13
申请号：EP16002384.2
申请日：2016-11-11
申请人： Canon Kabushiki Kaisha
发明人： Uebayashi, Akira , Furuta, Tatsuo , Ueda, Miki , Tanaka, Hidenori , Koyama, Shinya , Miura, Kaoru , Kimura, Atsushi , Fujita, Satoshi
IPC分类号： H02N2/16 , H01L41/187 , G02B7/10

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