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1. 发明公开

EP1965411A3 Stage system and stage driving method for use in exposure apparatus 有权
标题翻译：阶段系统和载置台驱动方法，用于曝光装置
公开(公告)号：EP1965411A3
公开(公告)日：2012-08-08
申请号：EP08009497.2
申请日：1999-07-28
申请人： CANON KABUSHIKI KAISHA
发明人： Korenaga, Nobushige , Ebinuma, Ryuichi
IPC分类号： H01L21/00 , G03F7/20
CPC分类号： H01L21/67242 , G03F7/70725 , H01L21/68
摘要： A stage system includes a stage being movable in a predetermined direction, a first unit for applying a force to the stage in the predetermined direction, a moving mechanism for moving one of the first unit and a structure including the first unit, a first measuring system for measuring at least one of the position and movement amount of the stage, and a second measuring system for measuring at least one of the position and movement amount of one of the first unit and the structure, wherein the stage is controlled on the basis of a measured value of the first measuring system, and wherein the moving system is controlled on the basis of a measured value of the second measuring system.

2. 发明公开

EP1486829A3 Stage system, exposure apparatus, and device manufacturing method 审中-公开
标题翻译：承载板系统，曝光装置及方法，用于制造器件
公开(公告)号：EP1486829A3
公开(公告)日：2006-08-30
申请号：EP04253447.9
申请日：2004-06-10
申请人： CANON KABUSHIKI KAISHA
发明人： Akutsu, Kotaro , Korenaga, Nobushige , Inoue, Mitsuru
IPC分类号： G03F7/20 , H01J37/20 , H01J37/317 , H01L21/68
CPC分类号： G03F7/70808 , G03F7/70716 , G03F7/70758 , G03F7/70816 , H01J37/20 , H01J2237/20292 , H01J2237/3175 , H02K1/278 , H02K16/00 , H02K41/031 , H02K2201/18
摘要： Disclosed is a stage system that can meet enlargement of a stroke and thus, particularly, that can be suitably incorporated into an electron beam exposure apparatus. The stage system includes a first fixed guide (1a, 1c) having a plane along X and Y directions, a first movable guide (3) to be guided by the first fixed guided (the first movable guide having a Y guide 3f extending in Y direction), a second fixed guide (1b, 1d) having a plane along X and Y directions, a second movable guide (2) to be guided by the second fixed guide (the second movable guide having an X guide 2f extending in X direction), and a central movable member (4) to be guided in the X and Y directions by the Y guide (3f) and X guide (2f).

3. 发明公开

EP1422571A2 Stage apparatus and method of controlling the same 有权
标题翻译：用于控制相同的横表的装置和方法
公开(公告)号：EP1422571A2
公开(公告)日：2004-05-26
申请号：EP03257326.3
申请日：2003-11-19
申请人： CANON KABUSHIKI KAISHA
发明人： Korenaga, Nobushige
IPC分类号： G03F7/20 , H02K41/02
CPC分类号： H02K41/031 , G03F7/70716 , G03F7/70758 , H02K7/09 , H02K2201/18
摘要： A Y slider (302) extending in an X-axis direction can move in a Y-axis direction by a Y linear motor. An X slider (303) loaded with a fine movement stage can be guided by a Y slider to move in an X-axis direction by an X linear motor. At least a pair of Y electromagnets (101) are provided to the X slider to oppose guide surfaces of the Y slider. A Y attracting plate (102) is provided to each guide surface of the Y slider. The pair of Y electromagnets generate attracting forces in opposite directions along the Y-axis direction between the X and Y sliders. Thus, the X and Y sliders can be kept in noncontact with each other. When the Y slider is to move in the Y-axis direction, an appropriate accelerating force can be applied to the X slider.

4. 发明公开

EP0905869A2 Linear motor mechanism for exposure apparatus, and device manufacturing method using the same 有权
标题翻译：线性电动机的曝光装置及该装置中使用的装置的制造方法
公开(公告)号：EP0905869A2
公开(公告)日：1999-03-31
申请号：EP98307703.3
申请日：1998-09-23
申请人： CANON KABUSHIKI KAISHA
发明人： Korenaga, Nobushige
IPC分类号： H02K41/03
CPC分类号： G03F7/70691 , H02K41/031
摘要： A linear motor mechanism includes a stator element and a movable element being movable relative to the stator element in a predetermined direction through an electromagnetic drive force, wherein the stator element includes a yoke and coils disposed along a predetermined direction while the movable element includes a magnet with plural magnetic poles but with no yoke. There are plural stator elements disposed opposed to each other with a magnet of the movable element disposed therebetween.
摘要翻译：一种线性电动机，机构包括一个定子元件和可动元件是通过向电磁驱动力，worin定子元件包括沿着预定方向设置的磁轭和线圈可相对于在规定的方向上的定子元件，而可移动元件包括磁体与多个磁极但没有轭。有反对海誓山盟与之间设置有可移动元件的磁块处理完毕的多个定子元件。

5. 发明授权

EP1965411B1 Stage system for use in exposure apparatus 有权
标题翻译：用于在曝光装置中使用的载板系统
公开(公告)号：EP1965411B1
公开(公告)日：2013-10-16
申请号：EP08009497.2
申请日：1999-07-28
申请人： CANON KABUSHIKI KAISHA
发明人： Korenaga, Nobushige , Ebinuma, Ryuichi
IPC分类号： H01L21/00 , G03F7/20
CPC分类号： H01L21/67242 , G03F7/70725 , H01L21/68

6. 发明公开

EP2149972A1 Alignment apparatus and exposure apparatus using the same 审中-公开
标题翻译： Ausrichtvorrichtung和ihre Verwendung在einem Belichtungsapparat
公开(公告)号：EP2149972A1
公开(公告)日：2010-02-03
申请号：EP09170191.2
申请日：2003-12-23
申请人： Canon Kabushiki Kaisha
发明人： Korenaga, Nobushige
IPC分类号： H02K41/03 , G03F7/20
CPC分类号： G03F7/70758 , H02K9/19 , H02K16/00 , H02K16/02 , H02K41/031 , H02K2201/18 , H02N15/02
摘要： An alignment apparatus which generates driving forces with six degrees of freedom between stator coils and movable element magnets to implement high-accuracy position and posture control has movable element magnets (114) which are arrayed in a plate-like plane of the movable element in accordance with an array cycle and are magnetized in predetermined directions, stator coils (116) which are arrayed at intervals corresponding to the array cycle, and a current controller which supplies to each pair of adjacent ones of stator coils control currents having phase differences to generate driving forces for driving the movable element between the movable element magnets and stator coils facing the movable element magnets.
摘要翻译：在定子线圈和可动元件磁体之间产生具有六个自由度的驱动力以实现高精度位置和姿势控制的对准装置具有可移动元件磁体（114），它们按照可移动元件的板状平面排列具有阵列周期并且在预定方向上被磁化，以对应于阵列周期的间隔排列的定子线圈（116）和供给每对相邻定子线圈的电流控制器控制具有相位差的电流以产生驱动用于在可动元件磁体和面对可移动元件磁体的定子线圈之间驱动可移动元件的力。

7. 发明公开

EP1942573A1 Alignment apparatus and exposure apparatus using the same 审中-公开
标题翻译： Ausrichtvorrichtung和ihre Verwendung在einem Belichtungsapparat
公开(公告)号：EP1942573A1
公开(公告)日：2008-07-09
申请号：EP08005961.1
申请日：2003-12-23
申请人： CANON KABUSHIKI KAISHA
发明人： Korenaga, Nobushige
IPC分类号： H02K41/03 , G03F7/20
CPC分类号： G03F7/70758 , H02K9/19 , H02K16/00 , H02K16/02 , H02K41/031 , H02K2201/18 , H02N15/02
摘要： An exposure apparatus illustrated in Figure 16A has first and second movable stages (1630A, 1630B) and first to third stator coils (1710, 1720, 1730).
The first movable stage (1630A) holds and aligns a first wafer at a predetermined position. The second movable stage (1630B) holds and aligns a second wafer at a predetermined position. The first stator coils (1710) are provided for driving one of said first and second movable stages in a first direction and are located in a measurement region (1670) for measuring an exposure result. The second stator coils (1720) are for driving the other of said first and second movable stages located in an exposure region (1680) for performing exposure in the first direction independently of said movable stage in the measurement region. The third stator coils (1730) are for independently driving said first and second movable stages in a second direction perpendicular to the first direction. A current control means (500) supplies control currents to said first to third stator coils. The control currents having phase differences to generate driving forces between movable element magnets of said first and second movable stages and said stator coils facing the movable element magnets.
Also disclosed is an alignment apparatus which generates driving forces with six degrees of freedom between stator coils and movable clement magnets to implement high-accuracy position and posture control has movable element magnets (114) which are arrayed in a plate-like plane of the movable element in accordance with an array cycle and are magnetized in predetermined directions, stator coils (116) which are arrayed at intervals corresponding to the array cycle, and a current controller which supplies to each pair of adjacent ones of stator coils control currents having phase differences to generate driving forces for driving the movable element between the movable element magnets and stator coils facing the movable element magnets.
摘要翻译：图16A所示的曝光装置具有第一和第二可移动台（1630A，1630B）和第一至第三定子线圈（1710,1720,1730）。第一可移动台（1630A）在预定位置保持并排列第一晶片。第二可移动台（1630B）在预定位置保持和对准第二晶片。第一定子线圈（1710）被设置用于沿第一方向驱动所述第一和第二可移动级中的一个，并且位于用于测量曝光结果的测量区域（1670）中。第二定子线圈（1720）用于驱动位于曝光区域（1680）中的所述第一和第二可移动台架中的另一个，用于在测量区域中独立于所述可移动平台在第一方向进行曝光。第三定子线圈（1730）用于在垂直于第一方向的第二方向上独立地驱动所述第一和第二可动平台。电流控制装置（500）向第一至第三定子线圈提供控制电流。所述控制电流具有相位差，以在所述第一和第二可移动级的可移动元件磁体与面向可移动元件磁体的所述定子线圈之间产生驱动力。还公开了一种对准装置，其产生定子线圈和可移动夹持磁体之间的六个自由度的驱动力，以实现高精度位置，并且姿势控制具有可移动元件磁体（114），其被布置在可移动的板状平面中元件，并且沿预定方向被磁化，定子线圈（116）以对应于阵列周期的间隔排列;以及电流控制器，其向每对相邻的定子线圈提供控制具有相位差的电流以产生用于驱动可动元件在可动元件磁体和面向可动元件磁体的定子线圈之间的驱动力。

8. 发明公开

EP0501724A2 Supporting device 失效
标题翻译：旁观者。
公开(公告)号：EP0501724A2
公开(公告)日：1992-09-02
申请号：EP92301529.1
申请日：1992-02-24
申请人： CANON KABUSHIKI KAISHA
发明人： Korenaga, Nobushige , Iwamoto, Kazunori
IPC分类号： F16F15/00 , H01L21/00
CPC分类号： H01L21/67796 , G03F7/2039 , G03F7/70716 , G03F7/70766 , G03F7/709 , H01J2237/0216
摘要： A supporting device for supporting a member having an inside movable portion, includes a main frame (511) and a supporting reference plate (530) on which the member is to be placed. A plurality of driving mechanisms are disposed between the main frame and the supporting reference plate, each having a high-rigidity displacement providing element (540) and a low-rigidity supporting element (550) with a low damping factor, disposed in series.
The supporting device has particular application with an attitude control device for an X-ray exposure apparatus.
摘要翻译：一种用于支撑具有内部可移动部分的构件的支撑装置，包括：主框架（511）和支撑基准板（530），所述构件将放置在所述主框架上。多个驱动机构设置在主框架和支撑基准板之间，每个具有串联设置的具有低阻尼系数的高刚性位移提供元件（540）和低刚度支撑元件（550）。支持装置具有用于X射线曝光装置的姿势控制装置的特定应用。

9. 发明公开

EP0283149A2 A radiation gauge 失效
标题翻译： Strahlungsmessgerät。
公开(公告)号：EP0283149A2
公开(公告)日：1988-09-21
申请号：EP88301642.0
申请日：1988-02-25
申请人： CANON KABUSHIKI KAISHA
发明人： Kadosawa, Tsuneaki , Korenaga, Nobushige
IPC分类号： G01T1/29 , H05G1/26
CPC分类号： H05G1/26 , G01T1/00 , G01T1/29 , G03F7/70558
摘要： A radiation gauge (2) for detecting an intensity of X-ray radiation is provided for example an X-ray aligner. The sensitivity of the radiation gauge (2) is influenced by the past exposure. The sensitivity change is compensated by a calibrator (3) which responds to an integrator which produces a measure of past-exposure. Thus, the correct exposure can be provided.
The sensitivity of the gauge (2) may be influenced by past non-exposure time and/or elapsed time. Modifications of the gauge compensate for these influences also.
摘要翻译：提供了用于检测X射线辐射强度的辐射计（2），例如X射线对准器。辐射计（2）的灵敏度受过去曝光的影响。灵敏度变化由校准器（3）补偿，校准器（3）响应产生过曝的测量的积分器。因此，可以提供正确的曝光。仪表（2）的灵敏度可能受到过去非曝光时间和/或经过时间的影响。仪表的修改也可以补偿这些影响。

10. 发明授权

EP1300932B1 Linear motor, stage apparatus, and exposure apparatus 有权
标题翻译：线性马达载波系统和曝光系统具有这样的线性电动机
公开(公告)号：EP1300932B1
公开(公告)日：2013-12-18
申请号：EP02256825.7
申请日：2002-10-01
申请人： CANON KABUSHIKI KAISHA
发明人： Korenaga, Nobushige
IPC分类号： H02K41/03
CPC分类号： G03F7/70758 , H02K41/031
摘要： This invention provides a linear motor having a structure that can be fabricated easily. A stator has a stator yoke (103) and a stator coil (104) arranged outside the stator yoke. A movable element has a movable magnet (105) arranged outside the stator coil (104). Each of the stator yoke (103), stator coil (104), and movable magnet (105) has four flat portions, and a square section.

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