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1. 发明专利

JP2010177275A Substrate holding member, substrate treatment method, and method of cleaning the substrate holding member 审中-公开
标题翻译：基板保持部件，基板处理方法以及清洗基板保持部件的方法
公开(公告)号：JP2010177275A
公开(公告)日：2010-08-12
申请号：JP2009015648
申请日：2009-01-27
申请人： Canon Inc , キヤノン株式会社
发明人： OHIRA JUN , HOSOI KAZUTO
IPC分类号： H01L21/205 , C23C16/44 , C23C16/458 , H01L21/304 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide: a substrate holding member suppressing generation of a spherical projection, and reducing cost by improving quality and the non-defective ratio of a product; a substrate treatment method; and a method of cleaning the substrate holding member.
SOLUTION: The substrate holding member 101 is formed into a vertically-opened cylindrical shape. The substrate holding member 101 includes a substrate arrangement part 107 for holding a substrate, and a gripping member insertion part 102 for inserting a gripping member of a transport mechanism therein. The substrate holding member further includes an opening closing member 103 closing an opening 108 for gripping member insertion, formed in an upper part of the gripping member insertion part 102.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供：抑制球形突起的产生的基板保持构件，并且通过提高产品的质量和无缺陷率来降低成本; 底物处理方法; 以及清洁基板保持部件的方法。解决方案：将基板保持部件101形成为垂直开口的圆筒形状。基板保持构件101包括用于保持基板的基板布置部107和用于将输送机构的夹持构件插入其中的夹持构件插入部102。基板保持构件还包括形成在夹持构件插入部102的上部的闭合用于夹持构件插入的开口108的开口关闭构件103.版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2009249726A Carrying vessel, and method carrying for substrate holder 审中-公开
标题翻译：承载船只和承载基座支架的方法
公开(公告)号：JP2009249726A
公开(公告)日：2009-10-29
申请号：JP2008102580
申请日：2008-04-10
申请人： Canon Inc , キヤノン株式会社
发明人： HOSOI KAZUTO , UEDA SHIGENORI , OHIRA JUN , YAMADA MOTOYA
IPC分类号： C23C16/44 , G03G5/08
摘要： PROBLEM TO BE SOLVED: To prevent dusts remaining in the recessed part of a substrate holder, to which a chucking member is fixed, from depositing onto the surface of a substrate.
SOLUTION: The carrier vessel (not shown in figure) is provided with the chucking member 103 holding a substrate holder 102 and performing the carrying in/out of the substrate holder to the inside of the carrier vessel. At the upper part of the substrate holder 102, a recessed part 102a held by the chucking member 103 is composed. When the inside of the carrier vessel is evacuated in a state where the substrate holder 102 is stored, for equalizing the pressure of the space in the recessed pat 102a and the pressure of the space around a cylindrical substrate 101, a through-hole 109 for communicating both the spaces is formed at the chucking member 103.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了防止残留在固定有夹紧构件的基板支架的凹部中的灰尘沉积到基板的表面上。
解决方案：载体容器（图中未示出）设置有保持基板保持器102的夹持构件103，并且将衬底保持器的载入/移出到载体容器的内部。在基板保持架102的上部，由夹紧部件103保持的凹部102a构成。当载体容器的内部在存储基板保持器102的状态下被抽真空时，为了均衡凹部pat 102a中的空间的压力和圆筒形基板101周围的空间的压力，通孔109用于在夹紧构件103上形成两个空间的连通。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2009138208A Method for treating substrate holder, and treatment device therefor 审中-公开
标题翻译：用于处理衬底保持器的方法及其处理装置
公开(公告)号：JP2009138208A
公开(公告)日：2009-06-25
申请号：JP2007312457
申请日：2007-12-03
申请人： Canon Inc , キヤノン株式会社
发明人： YAMADA MOTOYA , UEDA SHIGENORI , HOSOI KAZUTO , OHIRA JUN , NAGASE HIROSHI , HASHIMOTO HIROSHI
IPC分类号： C23C16/44 , C23C16/24 , G03G5/08 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To provide a method for treating a substrate holder which can effectively remove substances stuck to a substrate holder repeatedly used for the formation of a light receiving member consisting essentially of amorphous silicon without wearing and deteriorating the substrate holder, and without using the ones causing an image defect such as beads, and to provide a treatment device therefor.
SOLUTION: The method for treating a substrate holder includes a process where substances stuck to a substrate holder used for forming a light receiving member consisting essentially of amorphous silicon are irradiated with pulse laser light and are removed.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种处理基板保持器的方法，其可以有效地去除粘附到基板保持器上的物质，其重复用于形成基本上由非晶硅组成的光接收部件，而不会磨损和劣化基板保持器，并且不使用引起诸如珠粒的图像缺陷的那些，并且提供其治疗装置。解决方案：用于处理衬底保持器的方法包括用脉冲激光照射粘附到用于形成基本上由非晶硅组成的受光部件的衬底保持器的物质并被去除的过程。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2006154805A Electrophotographic photoreceptor 有权
标题翻译：电子照相机
公开(公告)号：JP2006154805A
公开(公告)日：2006-06-15
申请号：JP2005320925
申请日：2005-11-04
申请人： Canon Inc , キヤノン株式会社
发明人： AOKI MAKOTO , FURUSHIMA SATOSHI , YAMADA MOTOYA , HOSOI KAZUTO , OHIRA JUN , OWAKI HIRONORI
IPC分类号： G03G5/08
摘要： PROBLEM TO BE SOLVED: To provide an electrophotographic photoreceptor that can maintain electrophotographic characteristics such as resolution in a preferable state while minimizing the absorption of image exposure light of 380 to 500 nm wavelength at a surface layer thereof. SOLUTION: The electrophotographic photoreceptor comprises a base material and a photoconductive layer and a surface layer sequentially superimposed on the base material, wherein the surface layer comprises an amorphous material containing silicon atoms and nitrogen atoms as a matrix together with at least oxygen atoms and carbon atoms. The amorphous material contains oxygen atoms, carbon atoms and nitrogen atoms in average concentrations expressed by formulae (1):0.0001≤O/(Si+N+O+C)≤0.2, (2):0.0001≤C/(Si+N+O+C)≤0.1, and (3):0.3≤N/(Si+N+O+C)≤0.6, wherein Si represents the number of silicon atoms, N represents the number of nitrogen atoms, O represents the number of oxygen atoms, and C represents the number of carbon atoms. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种电子照相感光体，其可以在优选状态下保持诸如分辨率的电子照相特性，同时使其表面层处的380-500nm波长的图像曝光光的吸收最小化。解决方案：电子照相感光体包括基材和光电导层以及依次叠加在基材上的表面层，其中表面层包括含有硅原子和氮原子作为基质的至少含氧原子的非晶材料和碳原子。无定形材料包含由式（1）表示的平均浓度的氧原子，碳原子和氮原子：0.0001≤O/（Si + N + O + C）≤0.2，（2）：0.0001≤C/（Si + N + O + C）≤0.1，（3）：0.3≤N/（Si + N + O + C）≤0.6，其中Si表示硅原子数，N表示氮原子数，O表示数的氧原子，C表示碳原子数。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2004133398A Method for manufacturing electrophotographic photoreceptor, electrophotographic photoreceptor and electrophotographic apparatus 审中-公开
公开(公告)号：JP2004133398A
公开(公告)日：2004-04-30
申请号：JP2003206859
申请日：2003-08-08
申请人： Canon Inc , キヤノン株式会社
发明人： MATSUOKA HIDEAKI , EBARA TOSHIYUKI , FURUSHIMA SATOSHI , HOSOI KAZUTO , HASHIZUME JUNICHIRO , OKAMURA TATSUJI , HITSUISHI MITSUHARU
IPC分类号： G03G5/08
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing an electrophotographic photoreceptor in which abnormally grown parts called spherical protrusions which may exist on the surface of an electrophotographic photoreceptor have no effect on an image, and defective images are considerably improved. SOLUTION: The method for manufacturing an electrophotographic photoreceptor includes: a step a in which a substrate is set in an evacuatable and hermetically sealable first film deposition furnace connected to an exhaust system and equipped with a raw material gas feeding device, and the raw material gas is decomposed with high-frequency power to deposit a photoconductive layer comprising a non-monocrystalline material and a silicon carbide layer comprising a non-monocrystalline material comprising C and Si as a first layer on the substrate; a step b in which the substrate on which the first layer has been deposited is taken out once from the furnace; and a step c in which the substrate on which the first layer has been deposited is set in an evacuatable and hermetically sealable second film deposition furnace connected to an exhaust system and equipped with a gaseous starting material feeding device, and the raw material gas is decomposed with high-frequency power to deposit an upper blocking layer comprising a non-monocrystalline material as a second layer on the first layer. The invention includes an electrophotographic photoreceptor by the above manufacturing method and an electrophotographic apparatus using the same. COPYRIGHT: (C)2004,JPO

6. 发明专利

JP2000077339A Deposited film formation method 审中-公开
标题翻译：沉积膜形成方法
公开(公告)号：JP2000077339A
公开(公告)日：2000-03-14
申请号：JP24599298
申请日：1998-08-31
申请人： Canon Inc , キヤノン株式会社
发明人： AOIKE TATSUYUKI , TAZAWA DAISUKE , SHIRASAGO TOSHIYASU , OTSUKA TAKASHI , HOSOI KAZUTO , MURAYAMA HITOSHI , AKIYAMA KAZUYOSHI
IPC分类号： G03G5/00 , G03G5/08 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To form a deposited film efficiently, inexpensively, and safely by installing a substrate in a reaction container that is partially made of an insulation member, setting the pressure in the reaction container to a specific reduced pressure, introducing a discharge power, forming the deposited film, and then eliminating a byproduct adhering to the inner wall of the reaction container.
SOLUTION: A wall surface 107 of a reaction container 114 that is partially made of an insulation material and a cylindrical substrate 109 are installed on a bottom surface 108 of the reaction container 114, the reaction container 114 is connected to a deposition film formation device 101, the inside of a reaction space 106 is evacuated, the pressure of the inside of the reaction container 114 is reduced to 10 Pa or less, and a feed gas is introduced into the reaction space 106. Then, a specific high-frequency power is supplied from a high-frequency power supply 104 via a matching box 105. Then, after a deposition film is formed, the reaction container 114 is removed from the deposited film formation device 101, the cylindrical substrate 109 is taken out of the reaction container 114, further the wall surface 107, a material supply means 115, and the like are removed from the reaction container 114, and a byproduct being deposited on each surface is eliminated.
COPYRIGHT: (C)2000,JPO
摘要翻译：要解决的问题：为了通过将基板安装在部分由绝缘部件制成的反应容器中，通过将反应容器内的压力设定为特定的减压来有效地，廉价地并且安全地形成沉积膜，引入放电功率形成沉积膜，然后除去附着在反应容器内壁上的副产物。解决方案：反应容器114的一部分由绝缘材料制成的壁表面107和圆筒形基底109安装在反应容器114的底面108上，反应容器114连接到沉积膜形成装置101 反应空间106的内部被抽真空，反应容器114的内部的压力降低到10Pa以下，并且将原料气体引入反应空间106.然后，特定的高频功率为从高频电源104通过匹配箱105供给。然后，在形成沉积膜之后，从沉积膜形成装置101中取出反应容器114，将圆筒形基板109从反应容器114中取出此外，壁面107，材料供给装置115等从反应容器114中取出，并且消除了沉积在每个表面上的副产物。

7. 发明专利

JP2014162955A Deposition film formation method, method of manufacturing electrophotographic photoreceptor, and deposition film formation device 审中-公开
标题翻译：沉积膜形成方法，制造电子照相光电子的方法和沉积膜形成装置
公开(公告)号：JP2014162955A
公开(公告)日：2014-09-08
申请号：JP2013035161
申请日：2013-02-25
申请人： Canon Inc , キヤノン株式会社
发明人： TAZAWA DAISUKE , AOKI MAKOTO , HOSOI KAZUTO , KOJIMA YASUO , OYAMA KAZUNARI
IPC分类号： C23C16/515 , G03G5/08 , G03G5/082
摘要： PROBLEM TO BE SOLVED: To improve uniformity of a film thickness of a deposition film such as an amorphous silicon semiconductor film, to decrease image defects, and to improve a deposition rate.SOLUTION: There is provided a deposition film formation method of forming a deposition film on a conductive base by a plasma CVD method including the processes of: installing the conductive base apart from an electrode in a reaction vessel in which the pressure can be reduced; introducing a raw material gas for deposition film formation; and decomposing the raw material gas and thereby forming a deposition film by applying, between the electrode and conductive base, such a voltage that a voltage having an absolute value equal to or larger than the absolute value of a discharge start voltage and a voltage having an absolute value less than the absolute value of a discharge maintaining voltage alternate at a frequency of 3-300 kHz, and then keeping the conductive base lower in potential than the electrode in a period of the voltage having the absolute value equal to or larger than the absolute value of the discharge start voltage. In a period of the voltage having the absolute value less than the absolute value of the discharge maintaining voltage, a current flowing from the top surface of the conductive base to the electrode is suppressed.
摘要翻译：要解决的问题：提高非晶硅半导体膜等沉积膜的膜厚均匀性，降低图像缺陷，提高成膜速度。提供了形成沉积膜的沉积膜形成方法通过等离子体CVD法在导电性基材上形成膜，该方法包括以下工序：将导电性基体与电极分离，在其中能够降低压力的反应容器中; 引入用于沉积膜形成的原料气体; 并且分解原料气体，从而通过在电极和导电基体之间施加绝对值等于或大于放电开始电压的绝对值的电压和具有绝对值小于放电维持电压的绝对值，以3-300kHz的频率交替，然后在绝对值等于或大于绝对值的电压的周期内，使导电基底的电位保持在电极的电位以下放电启动电压的绝对值。在绝对值小于放电维持电压的绝对值的电压的周期中，抑制从导电性基体的顶面向电极流动的电流。

8. 发明专利

JP2008216306A Method for polishing protrusion of electrophotographic photoreceptor 审中-公开
标题翻译：抛光电子摄影机的推广方法
公开(公告)号：JP2008216306A
公开(公告)日：2008-09-18
申请号：JP2007049666
申请日：2007-02-28
申请人： Canon Inc , キヤノン株式会社
发明人： OHIRA JUN , FURUSHIMA SATOSHI , HOSOI KAZUTO , YAMADA MOTOYA
IPC分类号： G03G5/00 , G03G5/08
摘要： PROBLEM TO BE SOLVED: To provide a method for polishing an electrophotographic photoreceptor, by which the surface of the electrophotographic photoreceptor is polished, without producing a polishing flaw due to polishing processing, so that image defects can be minimized.
SOLUTION: In the method for polishing protrusions to remove the protrusion tops of the surface of an electrophotographic photoreceptor including a photoconductive layer comprising at least amorphous silicon; the electrophotographic photoreceptor is held and rotated; a polishing tape is fed to polish protrusions; while the polishing tape is brought into pressure-contact with the surface of the photoreceptor by a cylindrical pressing member, where the surface of the cylindrical pressing member is made spiral, so that the surface the photoreceptor and the polishing tape are brought into contact with each other; and chips produced at an early stage of polishing do not reach a place polishing processing is carried out.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种抛光电子照相感光体的方法，通过该方法电子照相感光体的表面被抛光，而不会由于抛光处理而产生抛光缺陷，使得图像缺陷可以最小化。解决方案：在用于抛光突起以去除包括至少包含非晶硅的光电导层的电子照相感光体的表面的突出顶部的方法中，电子照相感光体被保持并旋转; 抛光带被送入抛光突起; 当研磨带通过圆柱形按压部件与感光体的表面压力接触时，其中圆柱形按压部件的表面被制成螺旋状，使得感光体和研磨带与每个接触的表面其他; 并且在抛光的早期阶段生产的切屑没有到达抛光加工的地方。版权所有（C）2008，JPO＆INPIT

9. 发明专利

JP2007084885A Method and apparatus for forming deposited film 审中-公开
标题翻译：形成沉积膜的方法和装置
公开(公告)号：JP2007084885A
公开(公告)日：2007-04-05
申请号：JP2005275881
申请日：2005-09-22
申请人： Canon Inc , キヤノン株式会社
发明人： KOJIMA YASUO , SHIRASAGO TOSHIYASU , AOKI MAKOTO , HOSOI KAZUTO
IPC分类号： C23C16/44 , G03G5/08
摘要： PROBLEM TO BE SOLVED: To provide a method and an apparatus for forming a deposited film by which an inexpensive deposited film having high quality and almost free from image defects can be formed.
SOLUTION: The method for forming the deposited film is characterized by forming the deposited film after attaching attachable/detachable upper cover 303 and lower cover 302 to a cylindrical substrate 301 for covering the area opposing to the inner surface 113a of the side wall of a reaction vessel 113 except the area where the cylindrical substrate 301 is attached, in the surface of a holder 310 for transferring the substrate.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于形成沉积膜的方法和装置，通过该方法和装置可以形成具有高质量且几乎没有图像缺陷的廉价的沉积膜。解决方案：用于形成沉积膜的方法的特征在于在将可附接/可拆卸的上盖303和下盖302附接到圆柱形基板301之后形成沉积膜，用于覆盖与侧壁的内表面113a相对的区域的除了安装有圆筒形基板301的区域之外的反应容器113在用于转移基板的保持器310的表面中。版权所有（C）2007，JPO＆INPIT

10. 发明专利

JP2007072177A Electrophotographic method and electrophotographic apparatus 审中-公开
标题翻译：电子照相方法和电子显微图像
公开(公告)号：JP2007072177A
公开(公告)日：2007-03-22
申请号：JP2005259167
申请日：2005-09-07
申请人： Canon Inc , キヤノン株式会社
发明人： UEDA SHIGENORI , HOSOI KAZUTO , OHIRA JUN , ABE YUKIHIRO
IPC分类号： G03G5/08 , G03G15/02 , G03G15/20 , G03G21/00
摘要： PROBLEM TO BE SOLVED: To provide an electrophotographic method and an electrophotographic apparatus by excellent environmental stabilitycan be obtained, image defects such as fusion of a developer or image flow can be prevented and an electric power consumption can be reduced,. SOLUTION: The electrophotographic method using an electrophotographic photoreceptor successively laminated with a photoconductive layer composed of an amorphous film using silicon as a base and a surface layer consisting of an amorphous film containing at least one of silicon and carbon on a cylindrical substrate is characterized in that the atom ratio of the surface layer is expressed by SilxxCx and the value of x is set in a range of 0.05≤x≤1.0; the toner image formed on the surface of the electrophotographic photoreceptor is transferred to a transfer material and is simultaneously fixed thereto. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供电子照相方法和通过优异的环境稳定性的电子照相设备，可以获得图像缺陷如显影剂或图像流动的融合，并且可以降低电力消耗。解决方案：使用电子照相感光体的电子照相方法依次层叠有由硅作为基底的非晶膜构成的光电导层和由在圆筒形基板上含有至少一种硅和碳的非晶膜构成的表面层，其特征在于，表面层的原子比由SilxxCx表示，x的值设定在0.05≤x≤1.0的范围内; 将形成在电子照相感光体的表面上的调色剂图像转印到转印材料上并同时固定。版权所有（C）2007，JPO＆INPIT

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