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1. 发明专利

JP2010163685A Deposition film forming apparatus, deposition film forming method and method for manufacturing electrophotographic photoreceptor 有权
标题翻译：沉积膜形成装置，沉积膜形成方法和制造电摄影光电子的方法
公开(公告)号：JP2010163685A
公开(公告)日：2010-07-29
申请号：JP2009276837
申请日：2009-12-04
申请人： Canon Inc , キヤノン株式会社
发明人： HOSOI KAZUTO , AKIYAMA KAZUYOSHI , ABE YUKIHIRO , YAMADA MOTOYA
IPC分类号： C23C16/44
CPC分类号： G03G5/04 , C23C16/4405 , C23C16/4412 , C23C16/45591
摘要： PROBLEM TO BE SOLVED: To provide a deposition film forming apparatus that suppresses influence on characteristics of a deposition film due to back diffusion of a cleaning gas toward a reaction container side. SOLUTION: The deposition film forming apparatus includes a reaction container 1101, an exhaust device 1103 and an exhaust gas flow path 1102 for causing a material gas to flow from the reaction container to the exhaust device, wherein the exhaust gas flow path includes a portion whose cross section expands with a step in a direction that the material gas flows, and the deposition film forming apparatus further includes a cleaning gas flow device 1124 for causing the cleaning gas to directly flow into a region closer to the exhaust device side than the step of the exhaust gas flow path. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决的问题：提供一种沉积膜形成装置，其抑制由于清洁气体朝向反应容器侧的反向扩散而对沉积膜的特性的影响。解决方案：沉积膜形成装置包括用于使原料气体从反应容器流到排气装置的反应容器1101，排气装置1103和排气流路1102，其中排气流路包括其横截面沿着材料气体流动的方向上的台阶膨胀的部分，并且沉积膜形成装置还包括清洁气体流动装置1124，用于使清洁气体直接流入靠近排气装置侧的区域，排气流路的台阶。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2009080266A Electrophotographic photoreceptor 审中-公开
标题翻译：电子照相机
公开(公告)号：JP2009080266A
公开(公告)日：2009-04-16
申请号：JP2007248940
申请日：2007-09-26
申请人： Canon Inc , キヤノン株式会社
发明人： AKIYAMA KAZUYOSHI , TOKURA NORIKO
IPC分类号： G03G5/08 , G03G5/147
摘要： PROBLEM TO BE SOLVED: To provide an electrophotographic photoreceptor which can suppress irregularity of density in an image, irregularity of photosensitivity in an electrophotographic photoreceptor causing irregularity of color and irregularity of residual potential, which has the excellent and uniform photosensitivity over the whole surface, which has extremely high stability for water and the stability for environmental change and, even when performing image formation at high speed on recording media of a variety of thicknesses and materials while increasing repetition times, which can suppress damage of the surface and is excellent in water resistance, weather resistance and durability.
SOLUTION: The electrophotographic photoreceptor has at least a photoconductive layer and a surface layer disposed on a cylindrical conductive base, wherein the surface layer contains magnesium atom, fluorine atom and oxygen atom as principal constitutional atoms and the principal constitutional atoms satisfy a composition formula MgFxOy (1) (in the formula, x denotes a number of ≥1.30 and ≤2.10; and y denotes a number of ≥0.050 and ≤0.500).
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决问题：为了提供能够抑制图像中的密度不均匀性的电子照相感光体，导致电子照相感光体的光敏性不均匀，导致颜色不均匀和残留电位不均匀，整体上具有优异且均匀的光敏性表面，其对水的稳定性和环境变化的稳定性以及即使在增加重复次数的同时在各种厚度和材料的记录介质上进行高速图像形成，也可以抑制表面的损伤，并且是优异的耐水性，耐候性和耐久性。解决方案：电子照相感光体至少具有光导电层和设置在圆柱形导电基底上的表面层，其中表面层含有镁原子，氟原子和氧原子作为主要构成原子，并且主要结构原子满足组成式（1）（式中，x表示≥1.30，≤2.10的数，y表示≥0.050，≤0.500的数）。版权所有（C）2009，JPO＆INPIT

3. 发明专利

JP2009080265A Electrophotographic photoreceptor 审中-公开
标题翻译：电子照相机
公开(公告)号：JP2009080265A
公开(公告)日：2009-04-16
申请号：JP2007248939
申请日：2007-09-26
申请人： Canon Inc , キヤノン株式会社
发明人： TOKURA NORIKO , AKIYAMA KAZUYOSHI
IPC分类号： G03G5/08 , G03G5/147
摘要： PROBLEM TO BE SOLVED: To provide an electrophotographic photoreceptor which is hard, therefore, produces only a slight amount of wear of the surface layer even when being used repeatedly, can suppress generation of scratch, fluctuation of latent image potential, deterioration of charging ability, occurrence of image flow and production of a blot due to water, can suppress peeling from a boundary face because of excellent adhesiveness with the under layer and is excellent in endurance.
SOLUTION: The electrophotographic photoreceptor has at least a photoconductive layer and a surface layer disposed on a conductive base, wherein the surface layer is formed with a deposit film which comprises: a photoconductive layer side area containing magnesium atom, fluorine atom and oxygen atom as principal constitutent atoms; and a surface side area containing magnesium atom and oxygen atom as principal constitutent atoms, the principal constitutent atoms in the photoconductive layer side area satisfy a composition formula MgFxOy (1) (in the formula, x denotes a number of ≥0.10 and ≤2.10 and y denotes a number of ≥0.05 and ≤1.20), and the principal constitutent atoms in the surface side area satisfy a composition formula MgOz (2) (in the formula, z denotes a number of ≥0.80 and ≤1.30).
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供硬的电子照相感光体，因此即使重复使用也仅产生表面层的轻微磨损，可以抑制刮痕的产生，潜像的潜在的变动，劣化充电能力，图像流动的发生和由于水引起的印迹的产生可以抑制由于与底层的粘合性优异而导致的边界面的剥离，并且耐久性优异。解决方案：电子照相感光体至少具有光电导层和设置在导电基底上的表面层，其中表面层形成有沉积膜，该沉积膜包括：含有镁原子，氟原子和氧的光电导层侧面原子作为主要成分原子; 和含有镁原子和氧原子作为主要成分原子的表面侧区域，光电导层侧区域中的主要成分原子满足组成式MgF x O y（1）（在该式中，x表示≥0.10和≤2.10的数量， y表示≥0.05和≤1.20的数量），表面侧区域中的主要成分原子满足组成式MgOz（2）（在该式中，z表示≥0.80和≤1.30）。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2007119798A Deposited film forming device and deposited film forming method 审中-公开
标题翻译：沉积膜形成装置和沉积膜形成方法
公开(公告)号：JP2007119798A
公开(公告)日：2007-05-17
申请号：JP2005309392
申请日：2005-10-25
申请人： Canon Inc , キヤノン株式会社
发明人： AKIYAMA KAZUYOSHI , TOKURA NORIKO
IPC分类号： C23C16/44 , G03G5/08 , G03G5/10
摘要： PROBLEM TO BE SOLVED: To efficiently collect a reaction product while preventing the influence of the reaction product on a process, and to efficiently remove the reaction product in a powder trap.
SOLUTION: The device comprises at least a gaseous starting material introducing means and an electric power feeding means of feeding electric power into the vacuum vessel, which are positioned in a vacuum vessel capable of involving a substrate and is provided with a dry pump for exhausting the vacuum vessel and a powder trap for collecting a reaction product. The powder trap is installed in such a manner that a state of being connected to piping (upstream piping) installed at the upstream of the dry pump and a state of being connected to piping (downstream piping) installed at the downstream of the dry pump can be changed by a valve operation.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：待解决的问题：为了有效地收集反应产物，同时防止反应产物对工艺的影响，并有效地除去粉末捕集器中的反应产物。解决方案：该装置至少包括气态原料引入装置和将电力供给到真空容器中的电力供给装置，该真空容器位于真空容器中，该真空容器能够包括基材，并且设置有干式泵用于排出真空容器和用于收集反应产物的粉末捕集器。粉末捕集器以这样的方式安装，即连接到安装在干泵上游的管道（上游管道）的状态和连接到安装在干泵下游的管道（下游管道）的状态可以通过阀门操作改变。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2006108504A Reactive sputtering method and apparatus thereof 审中-公开
标题翻译：反应溅射方法及装置
公开(公告)号：JP2006108504A
公开(公告)日：2006-04-20
申请号：JP2004295202
申请日：2004-10-07
申请人： Canon Inc , キヤノン株式会社
发明人： TANIGUCHI TAKAHISA , AKIYAMA KAZUYOSHI
IPC分类号： H01L21/314 , C23C14/34 , G03G5/08 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide a reactive sputtering method and apparatus, with which a high-quality deposited film can be obtained extending over a deposition film forming plane. SOLUTION: In the reactive sputtering method, with which a target and a substrate are disposed inside a treatment container, and a reactant of sputtering particles and reaction gases fed into the treatment container is deposited on the substrate, in a space where the sputtering particles fly from the target onto the substrate, a partition is disposed, without being in contact with a deposition film formation plane of the substrate so as to substantially divide the deposition film forming plane of the substrate into a plurality of regions. The reaction gases of a flow rate corresponding to the deposition speed of the sputtering particles are fed, from a reactive gas feeding nozzle which is disposed toward each of the areas divided by the partition inside each of spaces surrounded with the partition, to the deposition film forming plane of the substrate installed in each of the regions divided by the partition. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种反应性溅射方法和装置，通过该反应溅射方法和装置可以获得在沉积膜形成平面上延伸的高质量沉积膜。解决方案：在反应溅射法中，将靶和基底设置在处理容器内，并且将投入到处理容器中的溅射颗粒和反应气体的反应物沉积在基板上，在溅射粒子从目标物飞散到基板上，配置隔板，而不与基板的沉积膜形成面接触，从而将基板的沉积膜形成面基本上分成多个区域。从溅射粒子的沉积速度的反应气体的反应气体，从设置在由隔板包围的每个空间内的隔板分隔的各个区域的反应性气体供给喷嘴供给到沉积膜所述基板的形成平面安装在由所述隔板划分的每个区域中。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2006106341A Electrophotographic photoreceptor 审中-公开
标题翻译：电子照相机
公开(公告)号：JP2006106341A
公开(公告)日：2006-04-20
申请号：JP2004292675
申请日：2004-10-05
申请人： Canon Inc , キヤノン株式会社
发明人： AKIYAMA KAZUYOSHI , TANIGUCHI TAKAHISA
IPC分类号： G03G5/08
摘要： PROBLEM TO BE SOLVED: To prevent potential changes or scratches and to improve durability of an electrophotographic photoreceptor having a surface layer made of magnesium fluoride.
SOLUTION: The atomic ratio of fluorine to magnesium (F/Mg) in magnesium fluoride constituting the surface layer is specified to 1.50 to 1.95.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了防止由氟化镁制成的表面层的电子照相感光体发生潜在的变化或划痕并提高耐久性。解决方案：构成表面层的氟化镁中氟与镁（F / Mg）的原子比规定为1.50〜1.95。版权所有（C）2006，JPO＆NCIPI

7. 发明专利

JP2005264257A Sputtering method, sputtering system, and method for manufacturing electrophotographic photoreceptor 审中-公开
标题翻译：溅射方法，溅射系统和制造电子照相光电子的方法
公开(公告)号：JP2005264257A
公开(公告)日：2005-09-29
申请号：JP2004079958
申请日：2004-03-19
申请人： Canon Inc , キヤノン株式会社
发明人： TANIGUCHI TAKAHISA , AKIYAMA KAZUYOSHI
IPC分类号： G03G5/08 , C23C14/34
摘要： PROBLEM TO BE SOLVED: To provide a sputtering method capable of suppressing peeling of a deposited film formed on a cylindrical substrate and a sputtering system and a method for manufacturing an electrophotographic photoreceptor. SOLUTION: The sputtering method comprises changing a positional relation between a target installed in a process vessel and a cylindrical substrate along a generator direction of the substrate, making the time when the target exists near the end of the substrate longer than the time the target exists near the center in the generator direction of the substrate and forming the deposited film on the outer periphery of the substrate while rotating the substrate. The rotating speed of the substrate is made faster as the center of the target comes nearer to the end of the substrate on the side nearer to the center of the target in distance. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够抑制形成在圆筒形基板上的沉积膜和溅射系统的剥离的溅射方法以及电子照相感光体的制造方法。解决方案：溅射方法包括沿着衬底的发生器方向改变安装在处理容器中的靶和圆柱形衬底之间的位置关系，使得在衬底端部存在的时间比时间长目标存在于基板发生器方向的中心附近，并且在旋转基板的同时在基板的外周面上形成沉积膜。当靶的中心距离基板的更靠近目标中心的一侧的距离更靠近基板的端部时，基板的旋转速度变得更快。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2004332088A Sputtering apparatus and sputtering method 审中-公开
公开(公告)号：JP2004332088A
公开(公告)日：2004-11-25
申请号：JP2003133314
申请日：2003-05-12
申请人： Canon Inc , キヤノン株式会社
发明人： TANIGUCHI TAKAHISA , AKIYAMA KAZUYOSHI
IPC分类号： G03G5/08 , C23C14/34 , G03G5/147
摘要： PROBLEM TO BE SOLVED: To provide a sputtering apparatus for depositing a film of uniform film thickness and film quality on an outer circumference of a cylindrical base body with high utilization efficiency of a target.
SOLUTION: The sputtering apparatus for depositing a film on the outer circumference of a cylindrical base body comprises a treatment container to deposit the film inside thereof, the cylindrical base body, a cylindrical target disposed on the outer circumference of the base body in which the length in the axial direction is larger than the length in the axial direction of the base body, a gas inlet to introduce sputtering gas and reaction gas, and a moving means to move either the target or the base body in the axial direction of the base body.
COPYRIGHT: (C)2005,JPO&NCIPI

9. 发明专利

JP2004131777A Method for formation of deposition film 审中-公开
公开(公告)号：JP2004131777A
公开(公告)日：2004-04-30
申请号：JP2002296325
申请日：2002-10-09
申请人： Canon Inc , キヤノン株式会社
发明人： TANIGUCHI TAKAHISA , AKIYAMA KAZUYOSHI
IPC分类号： G03G5/08 , C23C16/505 , C23C16/52
摘要： PROBLEM TO BE SOLVED: To provide a method for formation of a deposition film for improving the utilization efficiency of an apparatus by detecting the phenomenon that defective deposition occurs by detecting the defective deposition in an early period, and by stopping the deposition in a step of formation of the deposition film by utilizing a plasma.
SOLUTION: The change in the electric power of the reflected waves of high-frequency power under plasma treatment and the pressure in a reaction vessel is measured in formation of the deposition film on a substrate to be treated by introducing treating gas into the reaction vessel and by making the treating gas to the plasma by the high-frequency power. When a synchronous change in the electric power of the reflected waves of the high-frequency power under the plasma treatment and the pressure in the reaction vessel arises, whether such change is due to the stop of the plasma discharge or not is judged by comparing the pressure in the reaction vessel and the pressure in the state of not impressing the high-frequency power. When the synchronous change in the electric power of the reflected waves of the high-frequency power under the plasma treatment and the pressure in the reaction vessel is judged to arise not from the stop of the plasma discharge, the plasma treatment is stopped according to the result of the measurement of the change in the electric power and the pressure.
COPYRIGHT: (C)2004,JPO

10. 发明专利

JP2010276795A Electrophotographic device 审中-公开
标题翻译：电子照相设备
公开(公告)号：JP2010276795A
公开(公告)日：2010-12-09
申请号：JP2009128064
申请日：2009-05-27
申请人： Canon Inc , キヤノン株式会社
发明人： UEDA SHIGENORI , AKIYAMA KAZUYOSHI , TAZAWA DAISUKE , OZAWA TOMOHITO
IPC分类号： G03G5/08 , G03G15/02
摘要： PROBLEM TO BE SOLVED: To provide an electrophotographic device for satisfying all of image deletion due to high humidity, abrasion resistance and energy-saving property by suppressing oxidation of the surface of an electrophotographic photoreceptor. SOLUTION: In the electrophotographic device, a corona charger includes a sheet-like shielding member for shielding an opening part facing the electrophotographic photoreceptor and a mechanism for winding the shielding member, wherein the electrophotographic photoreceptor is made by successively forming a photo-conductive layer made of hydrogenated amorphous silicon and a surface layer made of hydrogenated amorphous silicon carbide at least on the surface of a base body, and the surface layer has the sum of atomic density of silicon atom and atomic density of carbon atom, of 6.60×10 22 atom/cm 3 or more and has the ratio of number of atoms of carbon atom to the sum of number of atoms of silicon atom and number of atoms of carbon atom, of 0.61 to 0.75. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种通过抑制电子照相感光体的表面的氧化来满足由于高湿度，耐磨性和节能性而导致的全部图像缺失的电子照相装置。解决方案：在电子照相装置中，电晕充电器包括用于屏蔽面对电子照相感光体的开口部分的片状屏蔽部件和用于卷绕屏蔽部件的机构，其中电子照相感光体通过连续地形成光电感光体，由氢化非晶硅制成的导电层和至少在基体表面上由氢化非晶碳化硅制成的表面层，表面层具有硅原子密度和碳原子的原子密度之和为6.60× 具有碳原子数原子数与硅原子数原子数和碳原子数之比的原子数/原子数，为0.61〜0.75。版权所有（C）2011，JPO＆INPIT

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