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    • 1. 发明授权
    • Apparatus and method for production process diagnosis using dynamic time
warping
    • 使用动态时间扭曲的生产过程诊断的装置和方法
    • US4861419A
    • 1989-08-29
    • US233878
    • 1988-08-15
    • Bruce E. FlinchbaughSteven B. DolinsAditya SrivastavaJon Reese
    • Bruce E. FlinchbaughSteven B. DolinsAditya SrivastavaJon Reese
    • H01J37/32
    • H01J37/32935
    • Operations of a plasma etch reactor (10) are monitored to detect aberrations in etching operations. A reference end point trace is defined (62) for the etch process. Regions are defined in the reference end point trace (70) with aid of a dynamic time warping matching function (84) and characteristics and tolerances for each region are defined (72-80). The etcher is run and an actual end point trace is obtained (82) from the running of the etcher. A warping function is constructed (88) between the actual trace and the reference trace. In building the warping function, candidate path segments (100) are constructed according to a minimum cumulative cost function (96). Once the regions of the reference trace and the actual trace has been matched according to an optimum dynamic time warping function path (106), characteristics of the matched regions are compared (66) to determine whether aberrations have occurred during the etch process. In an alternative embodiment, the actual trace (164) is matched to each of a library of reference traces (162,182) by dynamic time warping (166). By determining the best match, a determination can be made whether the actual trace is abnormal (174) or normal (176), and the type of abnormality.
    • 监测等离子体蚀刻反应器(101)的操作以检测蚀刻操作中的像差。 为刻蚀工艺定义参考端点迹线(62)。 通过动态时间扭曲匹配函数(84)的帮助,在参考端点迹线(70)中定义区域,并且定义每个区域的特征和公差(72-80)。 蚀刻器运行,从蚀刻器的运行中获得实际的终点痕迹(82)。 在实际轨迹和参考轨迹之间构建(88)翘曲函数。 在构建翘曲函数中,根据最小累积成本函数构建候选路径段(100)(96)。 一旦根据最佳动态时间扭曲函数路径(106)参考轨迹和实际迹线的区域被匹配,比较匹配区域的特性(66)以确定在蚀刻过程期间是否发生像差。 在替代实施例中,通过动态时间扭曲(166)将实际迹线(164)与参考迹线库(162,182)中的每一个匹配。 通过确定最佳匹配,可以确定实际迹线是否异常(174)或正常(176)以及异常的类型。
    • 2. 发明授权
    • Process and apparatus for detecting aberrations in production process
operations
    • 用于检测生产过程操作中的像差的过程和设备
    • US4846928A
    • 1989-07-11
    • US224205
    • 1988-07-22
    • Steven B. DolinsAditya SrivastavaBruce E. FlinchbaughSarma S. GunturiThomas W. LassiterRobert L. Love
    • Steven B. DolinsAditya SrivastavaBruce E. FlinchbaughSarma S. GunturiThomas W. LassiterRobert L. Love
    • H01J37/32
    • H01J37/32935
    • An improved apparatus and process for detecting aberrations in production process operations is provided. In one embodiment, operations of a plasma etch reactor (10) are monitored to detect aberrations in etching operations. A reference end-point trace (EPT) is defined (62) for the etch process. Regions are defined in the reference end-point trace (70) and characteristics and tolerances for each region are defined (72-80). The etcher is run and an actual EPT is obtained (82) from the running of the etcher. The actual EPT is analyzed to identify proposed regions of the actual EPT (86), and then the proposed regions of the actual EPT are matched with regions of the reference EPT (96). The system employs a series of heuristic functions in matching proposed regions of the actual EPT with regions of the reference EPT. Characteristics of the matched regions of the actual end-point trace are compared (66) with characteristics of the corresponding regions of the reference end-point trace to determine whether aberrations have occurred during the etch process. The invention provides for an improved matching and improved comparison of actual end-point traces with reference end-point traces.
    • 提供了一种用于检测生产过程操作中的像差的改进的装置和过程。 在一个实施例中,监测等离子体蚀刻反应器(10)的操作以检测蚀刻操作中的像差。 为蚀刻过程定义了参考端点轨迹(EPT)(62)。 区域在参考终点轨迹(70)中定义,每个区域的特征和公差被定义(72-80)。 蚀刻器运行,从蚀刻器的运行获得实际的EPT(82)。 分析实际的EPT以识别实际EPT(86)的建议区域,然后将实际EPT的建议区域与参考EPT(96)的区域匹配。 该系统采用一系列启发式功能,将实际EPT的建议区域与参考EPT的区域进行匹配。 将实际端点迹线的匹配区域的特征与参考端点迹线的相应区域的特性进行比较(66),以确定在蚀刻过程期间是否发生了像差。 本发明提供了改进的匹配和改进的实际端点迹线与参考端点迹线的比较。
    • 3. 发明授权
    • Method and apparatus for mapping a location from a video image to a map
    • 将位置从视频图像映射到地图的方法和装置
    • US06816184B1
    • 2004-11-09
    • US09292499
    • 1999-04-15
    • Frank Z. BrillBruce E. Flinchbaugh
    • Frank Z. BrillBruce E. Flinchbaugh
    • H04N718
    • G06K9/00771G08B13/19602G08B13/19608G08B13/19691H04N7/183
    • A monitoring system (10) includes a video camera (12) which generates images of a monitored area. A computer (16) receives the images from the video camera, and contains a digitized map (85) of the monitored area. One of the detected images (84) is saved as a reference image. An operator defines a first region (86) corresponding to a selected portion of the monitored area, as viewed in the reference image, and defines a second region (87) which corresponds to the selected portion of the area as viewed on the map. Subsequent images from the camera are compared to the reference image, in order to identify an object of interest, and a first point associated with the object is identified. If the first point is within the first region, a warp transformation of the first point from the first region to the second region is carried out, in order to identify within the second region a second point which corresponds to the first point, and which identifies the location on the map of the object of interest.
    • 监视系统(10)包括产生被监视区域的图像的摄像机(12)。 计算机(16)从摄像机接收图像,并且包含监视区域的数字化地图(85)。 检测到的图像之一(84)被保存为参考图像。 操作者定义与参考图像中所观察到的所监视区域的选定部分相对应的第一区域(86),并且定义对应于在地图上观察的区域的所选部分的第二区域(87)。 将相机的后续图像与参考图像进行比较,以便识别感兴趣的对象,并且识别与对象相关联的第一点。 如果第一点在第一区域内,则执行第一点从第一区域到第二区域的翘曲变换,以便在第二区域内识别对应于第一点的第二点,并且识别 感兴趣对象的地图上的位置。
    • 5. 发明授权
    • Method and apparatus for compressing image information
    • 用于压缩图像信息的方法和装置
    • US06937651B1
    • 2005-08-30
    • US09338202
    • 1999-06-22
    • Frank Z. BrillBruce E. Flinchbaugh
    • Frank Z. BrillBruce E. Flinchbaugh
    • G08B13/194H04N7/18H04B1/66
    • G08B13/19602G08B13/19608G08B13/19667G08B13/19691H04N7/181
    • A system (10) includes an image detector (12) which is a video camera, and which detects and outputs a succession of video images of a selected subject. A technique for processing these images involves preparing compressed image information. The compressed image information includes a first detected image (FIG. 2A) that serves as a reference image, includes information (FIG. 2G) identifying regions of subsequent detected images that differ from the first image, and excludes at least a portion of each of the subsequent images. The information identifying regions of subsequent detected images is free of contrast information for a substantial portion of each of those regions. The compressed image information for a given image is decompressed by displaying the reference image and by modifying the displayed reference image based on the information identifying differences from the reference image.
    • 系统(10)包括作为摄像机的图像检测器(12),并且检测并输出所选择的对象的一系列视频图像。 处理这些图像的技术包括准备压缩图像信息。 压缩图像信息包括用作参考图像的第一检测图像(图2A)包括识别与第一图像不同的后续检测图像的区域的信息(图2G),并且排除至少一部分 每个后续图像。 后续检测图像的信息识别区域对于这些区域中的每一个的大部分没有对比度信息。 通过显示参考图像来解压缩给定图像的压缩图像信息,并且通过基于识别与参考图像的差异的信息来修改所显示的参考图像。
    • 6. 发明授权
    • System and method for displaying, and interactively excavating and
examining a three dimensional volume
    • 用于显示和交互式挖掘和检查三维体积的系统和方法
    • US4685070A
    • 1987-08-04
    • US637465
    • 1984-08-03
    • Bruce E. Flinchbaugh
    • Bruce E. Flinchbaugh
    • G06T17/00G06F15/62G06F15/68
    • G06T17/00
    • A computer system displays, in two dimensions, a representation of a three-dimensional volume. The three-dimensional volume representation is a tessellation of cells, represented as three-dimensional units. The three-dimensional volume is represented by a plurality of digital numbers. A designator designates which of the digital numbers are to be represented in the two-dimensional display. Each digital number is represented by one cell. Also, each digital number represents a color. Each corresponding cell is colored in accordance with the digital number. A designator designates which of the digital numbers is to be represented by a cell in the three-dimensional representation. A cursor, controlled by a mouse, may be used to indicate which of the three-dimensional volume representation is to be excavated by indicating at the appropriate cells and then electronically ordering the excavation. The designator is changed thereby and the excavated cells are stripped away, exposing the cells immediately adjacent the excavated cells. The color of the cells indicates a parameter such as amplitude. The viewing angle of the three-dimensional volume representation is variable, allowing rotation in any direction of the three-dimensional display for examination of any surface.
    • 计算机系统在二维中显示三维体积的表示。 三维体积表示是细胞的镶嵌,表示为三维单位。 三维体积由多个数字数字表示。 指示符指定要在二维显示中表示哪个数字数字。 每个数字数字由一个单元表示。 此外,每个数字数字表示一种颜色。 每个相应的单元根据数字编号进行着色。 指示符指定在三维表示中由单元格表示哪个数字数字。 由鼠标控制的光标可用于通过在适当的单元格处指示然后以电子方式对挖掘进行排序来指示要挖掘的三维体积表示中的哪一个。 指示符由此改变,挖掘的细胞被剥离,使得紧邻挖掘的细胞的细胞暴露。 单元格的颜色表示诸如幅度的参数。 三维体积表示的视角是可变的,允许在三维显示器的任何方向上旋转以检查任何表面。
    • 8. 发明授权
    • Digital still camera with high-quality portrait mode
    • 数码相机具有高品质的肖像模式
    • US07038715B1
    • 2006-05-02
    • US09465242
    • 1999-12-15
    • Bruce E. Flinchbaugh
    • Bruce E. Flinchbaugh
    • H04N5/225H04N5/228
    • H04N1/00127H04N1/00326H04N2201/0084
    • A digital still camera (10) receives and digitizes visible radiation (17) and sound waves (32) from a scene (12). When an operator actuates a shutter release (46), the camera detects and evaluates digitized information (22, 38) from the scene in a continuing manner, until a point in time when information representative of a human facial characteristic satisfies a specified criteria set by the operator through use of switches (47, 48) and a display (51). The camera then records in a memory (59) a digital image of the scene, which corresponds to the point in time. The stored image is a high-quality image, which can avoid characteristics such as eyes that are closed or a mouth that is open.
    • 数字静态照相机(10)从场景(12)接收并数字化可见光(17)和声波(32)。 当操作者启动快门释放(46)时,相机以连续的方式检测并评估来自场景的数字化信息(22,38),直到表示人脸特征的信息满足由 操作员通过使用开关(47,48)和显示器(51)。 摄像机然后在存储器(59)中记录对应于该时间点的场景的数字图像。 存储的图像是高质量的图像,其可以避免诸如闭合的眼睛或打开的嘴的特征。