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    • 1. 发明授权
    • Protected switch having a power semiconductor device
    • 具有功率半导体器件的保护开关
    • US5801573A
    • 1998-09-01
    • US884104
    • 1997-06-27
    • Brendan P. KellyRoyce Lowis
    • Brendan P. KellyRoyce Lowis
    • H01L21/8238H01L27/08H01L27/092H01L29/417H01L29/78H03K17/08H03K17/082H03K17/687
    • H01L29/7815H01L29/7803H01L29/7804H01L29/7808H03K17/0822H01L29/41766
    • A protected switch has a power semiconductor device (P) having first and second main electrodes (D and S) for coupling a load (L) between first (2) and second (3) voltage supply lines, a control electrode (G) coupled to a control voltage supply line (4) and a sense electrode (S1) for providing in operation of the power semiconductor device a sense current that flows between the first (d) and sense electrodes (S1) and is indicative of the current that flows between the first (D) and second (S) main electrodes. A control arrangement (S) has a sense resistance (R4) coupled to the sense electrode (S1) and across which a sense voltage is developed by the sense current (I.sub.3). A control semiconductor device (M3) has its main electrodes coupled between the control electrode (G) and the second (S) main electrode of the power semiconductor device (P). A semiconductor device (M2) has one (d) of its main electrodes coupled to the control electrode (g) of the control semiconductor device (M3) and the other (s) to the sense resistance (R4). A reference arrangement (50) provides a biasing voltage V.sub.b for the control electrode (g) of the semiconductor device (M2) to cause the semiconductor device (M2) to conduct sufficiently to cause the control semiconductor device (M3) to be non-conducting until the sense voltage reaches a reference voltage determined by the biasing voltage when the semiconductor device (M2) becomes less conducting, causing the control semiconductor device (M3) to start to conduct, so reducing the voltage at the control electrode (G) of the power semiconductor device (P) and thus reducing the current through the power semiconductor device (P).
    • 受保护的开关具有功率半导体器件(P),该功率半导体器件(P)具有用于耦合第一(2)和第二(3)电压源线之间的负载(L)的第一和第二主电极(D和S) 控制电压供应线(4)和感测电极(S1),用于在功率半导体器件的操作中提供在第一(d)和感测电极(S1)之间流动的感测电流,并且指示流动的电流 在第一(D)和第二(S)主电极之间。 控制装置(S)具有耦合到感测电极(S1)的感测电阻(R4),并且感测电流(I3)产生感测电压。 控制半导体器件(M3)的主电极耦合在功率半导体器件(P)的控制电极(G)和第二(S)主电极之间。 半导体器件(M2)的主电极中的一个(d)耦合到控制半导体器件(M3)的控制电极(g),另一个耦合到检测电阻(R4)。 参考装置(50)为半导体装置(M2)的控制电极(g)提供偏置电压Vb,以使半导体装置(M2)充分进行导致控制半导体装置(M3)不导通 直到当半导体器件(M2)变得较小导通时,感测电压达到由偏置电压确定的参考电压,使得控制半导体器件(M3)开始导通,从而降低控制电极(G)处的电压 功率半导体器件(P),从而减小通过功率半导体器件(P)的电流。
    • 3. 发明授权
    • Method of manufacturing an insulated-gate field-effect transistor
    • 制造绝缘栅场效应晶体管的方法
    • US4408384A
    • 1983-10-11
    • US407673
    • 1982-08-12
    • Royce LowisPeter M. Tunbridge
    • Royce LowisPeter M. Tunbridge
    • H01L29/06H01L29/10H01L29/417H01L29/78H01L21/265H01L21/28
    • H01L29/0692H01L29/1087H01L29/4175H01L29/78
    • An insulated-gate field-effect transistor is disclosed which is particularly suitable for forming high-frequency transistors for a common source circuit configuration. The field-effect transistor is obtained in a simple and reliable manner using the following steps: (a) forming on an insulating layer a gate layer having separate, parallel apertures; (b) doping said epitaxial layer via said apertures so as to form parallel islands from which at least a portion of the source fingers is to be provided; (c) providing an etch-resistant mask having smaller parallel apertures each of which overlies an area of an island; (d) etching away said areas and underlying parts of the epitaxial layer so as to form parallel V-shaped grooves which expose the substrate, extend longitudinally along the islands and are adjoined along opposite sides by remaining parts of said islands, and (e) providing within the apertures of the gate layer and over the walls of the grooves parallel metal fingers which extend longitudinally along said islands to short-circuit the remaining parts of said islands to the epitaxial layer and to the substrate. These remaining parts form source fingers of the transistor. At least part of the drain fingers may also be formed in step (b).
    • 公开了一种绝缘栅场效应晶体管,其特别适用于形成用于公共源电路配置的高频晶体管。 场效应晶体管以简单可靠的方式使用以下步骤获得:(a)在绝缘层上形成具有分开的平行孔的栅极层; (b)经由所述孔掺杂所述外延层,以便形成平行的岛,待从其中提供至少一部分源极指; (c)提供具有更小的平行孔的耐蚀刻掩模,每个孔覆盖在岛的一个区域上; (d)蚀刻所述外延层的所述区域和底层部分以形成平行的V形凹槽,其暴露所述基底,沿着所述岛纵向延伸并且通过所述岛的剩余部分沿着相对侧邻接,以及(e) 在栅极层的孔内以及沟槽壁上平行延伸的金属指,其沿着所述岛纵向延伸,以将所述岛的剩余部分短路到外延层和衬底。 这些剩余部分形成晶体管的源极。 排水指的至少一部分也可以在步骤(b)中形成。
    • 8. 发明授权
    • Semiconductor switch including a power transistor integrated with a
temperature sensor therefor
    • 半导体开关包括与其温度传感器集成的功率晶体管
    • US5434443A
    • 1995-07-18
    • US240949
    • 1994-05-10
    • Brendon P. KellyRoyce LowisPaul T. Moody
    • Brendon P. KellyRoyce LowisPaul T. Moody
    • G01K7/01H01L21/822H01L27/02H01L27/04H01L29/78H01L27/088
    • H01L29/7803G01K7/01H01L27/0248H01L29/0696H01L29/41766
    • A semiconductor switch includes a power FET and a temperature sensor for providing a control signal to switch off the power FET when it reaches a predetermined thermal condition, such as a particular temperature. The power FET consists of a semiconductor body having a first region (13) of a first conductivity type adjacent one major surface (10a) thereof, and a plurality of cells (11). Each such cell has a second region (32) of the second (opposite) conductivity type provided within the first region (13), a third region (33) of the first conductivity type formed within the second region (32), and an insulated gate overlying a conduction channel in the second region (32) between the first and third regions (33 and 13). The temperature sensor (2) is formed within the semiconductor body (10) and consists of a number of further cells (11') of the same structure as the cells (11) of the power FET. The insulated gate of each further cell (11') is electrically connected to the third region (33') so as to form a parasitic bipolar transistor having a leakage current which varies with temperature, thereby enabling the temperature sensor to provide a control signal to switch off the power FET when the predetermined thermal condition is reached.
    • 半导体开关包括功率FET和温度传感器,用于当其达到诸如特定温度的预定热条件时提供控制信号以关断功率FET。 功率FET由具有邻近其主表面(10a)的第一导电类型的第一区域(13)和多个单元(11)的半导体本体组成。 每个这样的单元具有设置在第一区域(13)内的第二(相对)导电类型的第二区域(32),形成在第二区域(32)内的第一导电类型的第三区域(33) 栅极覆盖第一和第三区域(33和13)之间的第二区域(32)中的导电通道。 温度传感器(2)形成在半导体本体(10)内并且由与功率FET的单元(11)相同结构的多个另外的单元(11')组成。 每个另外的单元(11')的绝缘栅电连接到第三区(33'),以形成具有随温度变化的漏电流的寄生双极晶体管,从而使温度传感器能够提供控制信号 当达到预定的热条件时关闭功率FET。