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    • 1. 发明授权
    • Driver circuit
    • 驱动电路
    • US07187227B2
    • 2007-03-06
    • US10636381
    • 2003-08-06
    • Yohtaro UmedaAtsushi Kanda
    • Yohtaro UmedaAtsushi Kanda
    • H03K17/284
    • H03K17/04123H03K17/102
    • A driver circuit includes first and second three-terminal active elements, and first and second delay units. The first and second three-terminal active elements are series-connected. Each of the first and second three-terminal active elements has an amplification function and first, second, and third electrodes. The second and third electrodes of each three-terminal active element are series-connected between the first and second potentials. The first and second delay units receive the same input signal. The outputs of the first and second delay units are respectively connected to the first electrodes of the first and second three-terminal active elements. The delay amount of the second delay unit is larger than that of the first delay unit. The delay amount of the first delay unit is a finite value including zero.
    • 驱动器电路包括第一和第二三端有源元件以及第一和第二延迟单元。 第一和第二三端有源元件串联连接。 第一和第二三端有源元件中的每一个具有放大功能和第一,第二和第三电极。 每个三端有源元件的第二和第三电极串联连接在第一和第二电位之间。 第一和第二延迟单元接收相同的输入信号。 第一和第二延迟单元的输出分别连接到第一和第二三端有源元件的第一电极。 第二延迟单元的延迟量大于第一延迟单元的延迟量。 第一延迟单元的延迟量是包括零的有限值。
    • 3. 发明授权
    • Method of manufacturing semiconductor device with high and low breakdown transistors
    • 制造具有高和低击穿晶体管的半导体器件的方法
    • US06638804B2
    • 2003-10-28
    • US10271536
    • 2002-10-17
    • Atsushi KandaYasushi Haga
    • Atsushi KandaYasushi Haga
    • H01L218238
    • H01L29/665H01L21/823807H01L21/823814H01L21/82385H01L21/823857H01L21/823864H01L21/823892
    • Among first and second oxide films 110 and 112 formed on a substrate 100, the oxide film in a low-breakdown-voltage transistor area LV is all etched off, while the whole surface of the oxide film in a high-breakdown-voltage transistor area HV is left intact. A sixth oxide film 119 to define a side wall is subsequently formed on the whole surface of the substrate 100, and a resist R17 is formed over the whole high-breakdown-voltage transistor area HV. Over-etching of the low-breakdown-voltage transistor area LV is carried out to make the surface of the substrate 100 exposed and to define the side wall only in the low-breakdown-voltage transistor area LV. The oxide film 119 is made to remain in the high-breakdown-voltage transistor area HV. Non-required portions of the oxide films 119 and 112 are then etched off with a resist R15B. This causes a drain-source forming region, which is expected to form a drain area and a source area, to be open in an element forming region in a high-breakdown-voltage nMOS area HVn. The resist R15B is not removed but is used continuously, and an n-type impurity ion is implanted into the open drain-source forming region. This arrangement enables both a high-breakdown-voltage MOS transistor and a low-breakdown-voltage MOS transistor to be formed efficiently on an identical substrate without damaging the characteristics of the respective MOS transistors.
    • 在形成在基板100上的第一和第二氧化膜110和112中,低击穿电压晶体管区域LV中的氧化膜全部被蚀刻掉,而在高击穿电压晶体管区域中的氧化膜的整个表面 HV完好无损。 随后在基板100的整个表面上形成用于限定侧壁的第六氧化物膜119,并且在整个高击穿电压晶体管区域HV上形成抗蚀剂R17。 执行低击穿电压晶体管区域LV的过蚀刻,以使衬底100的表面暴露并仅在低击穿电压晶体管区域LV中限定侧壁。 使氧化物膜119保持在高击穿电压晶体管区域HV中。 然后用抗蚀剂R15B蚀刻掉氧化膜119和112的非必需部分。 这导致预期形成漏极区域和源极区域的漏极 - 源极形成区域在高击穿电压nMOS区域HVn中的元件形成区域中断开。 抗蚀剂R15B不被去除,而是连续使用,并且n型杂质离子注入到开漏源形成区域中。 这种布置使得能够在相同的衬底上有效地形成高击穿电压MOS晶体管和低击穿电压MOS晶体管,而不损害各个MOS晶体管的特性。
    • 5. 发明授权
    • METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE, IN WHICH A HIGH-BREAKDOWN-VOLTAGE MOS TRANSISTOR AND A LOW-BREAKDOWN-VOLTAGE MOS TRANSISTOR ARE FORMED ON AN IDENTICAL SEMICONDUCTOR SUBSTRATE AND SEMICONDUCTOR DEVICE MANUFACTURED THEREBY
    • 制造半导体器件的方法,其中形成高标准电压MOS晶体管和低突变电压MOS晶体管形成在标识半导体衬底和制造的半导体器件上
    • US06916714B2
    • 2005-07-12
    • US10210053
    • 2002-08-02
    • Atsushi KandaYasushi Haga
    • Atsushi KandaYasushi Haga
    • H01L21/266H01L21/8238H01L27/02H01L27/092H01L21/8234
    • H01L21/823814H01L21/823842H01L21/823857H01L27/0266
    • A procedure of manufacturing a semiconductor device according to the present invention first creates a gate electrode on a center portion of a gate oxide film formed on a substrate, forms a silicon oxide film over the whole surface of the substrate including the gate electrode, and etches the whole face of the silicon oxide film, so as to form a side wall of the silicon oxide film on a side face of the gate electrode. The procedure then implants an impurity ion according to a channel of a target MOS transistor, so as to specify a drain area and a source area. In the process of specifying the drain area and the source area, a resist is formed in advance on at least a peripheral portion of the gate oxide film in a high-breakdown-voltage MOS transistor, so as to prevent implantation of the impurity ion in an under-layer region below the peripheral portion of the gate oxide film. This arrangement enables both a high-breakdown-voltage MOS transistor and a low-breakdown-voltage MOS transistor to be efficiently formed on an identical substrate without damaging the characteristics of the respective transistors.
    • 根据本发明的制造半导体器件的步骤首先在形成在衬底上的栅极氧化膜的中心部分上形成栅电极,在包括栅电极的衬底的整个表面上形成氧化硅膜,并且蚀刻 氧化硅膜的整个表面,以便在栅电极的侧面上形成氧化硅膜的侧壁。 然后,该过程根据目标MOS晶体管的沟道注入杂质离子,以指定漏极区域和源极区域。 在规定漏极区域和源极区域的过程中,预先在高耐压MOS晶体管的栅极氧化膜的至少周边部分形成抗蚀剂,以防止将杂质离子注入 栅极氧化膜的周边部分下方的下层区域。 这种布置使得高耐压MOS晶体管和低击穿电压MOS晶体管能够在相同的衬底上有效地形成,而不损害各个晶体管的特性。
    • 6. 发明授权
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • US06720222B2
    • 2004-04-13
    • US10271589
    • 2002-10-17
    • Atsushi KandaYasushi Haga
    • Atsushi KandaYasushi Haga
    • H01L21336
    • H01L27/0922H01L21/823814H01L21/823857
    • Among first and second oxide films 110 and 112 formed on a substrate 100, the oxide film in a low-breakdown-voltage transistor area LV is all etched off, while the whole surface of the oxide film in a high-breakdown-voltage transistor area HV is left intact. A sixth oxide film 119 for defining side walls is subsequently formed on the whole surface of the substrate 100 in a greater thickness of approximately 2000 angstrom than a standard thickness. Over-etching of the sixth oxide film 119 defines side walls 119SW. Non-required portions of the oxide film 112 are then etched off with a resist R15A. This causes a drain-source forming region, which is expected to form a drain area and a source area, to be open in an element forming region in a high-breakdown-voltage nMOS area HVn. The resist R15A is not removed but is used continuously, and an n-type impurity ion is implanted into the open drain-source forming region. This arrangement enables both a high-breakdown-voltage MOS transistor and a low-breakdown-voltage MOS transistor to be formed efficiently on an identical substrate without damaging the characteristics of the respective MOS transistors.
    • 在形成在基板100上的第一和第二氧化膜110和112中,低击穿电压晶体管区域LV中的氧化膜全部被蚀刻掉,而在高击穿电压晶体管区域中的氧化膜的整个表面 HV完好无损。 随后在基板100的整个表面上形成大约为标准厚度大约2000埃的较大厚度的用于限定侧壁的第六氧化膜119。 第六氧化膜119的过蚀刻限定侧壁119SW。 然后用抗蚀剂R15A蚀刻掉氧化膜112的非必需部分。 这导致预期形成漏极区域和源极区域的漏极 - 源极形成区域在高击穿电压nMOS区域HVn中的元件形成区域中断开。 抗蚀剂R15A不被去除,而是连续使用,并且n型杂质离子注入到开漏源形成区域中。 这种布置使得能够在相同的衬底上有效地形成高击穿电压MOS晶体管和低击穿电压MOS晶体管,而不损害各个MOS晶体管的特性。