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    • 6. 发明申请
    • Versatile system for accelerated stress characterization of semiconductor device structures
    • 用于半导体器件结构加速应力表征的多功能系统
    • US20050280477A1
    • 2005-12-22
    • US10871932
    • 2004-06-18
    • Vijay ReddyPrasun Raha
    • Vijay ReddyPrasun Raha
    • G01R31/27G01R31/28H03K3/03
    • G01R31/2884G01R31/275G01R31/2856
    • The present invention provides a system (200) for performing accelerated stress characterization of a given transistor (204). Inverter circuits, formed from the given transistor, are disposed in series with one another (202). A plurality of signal taps is operatively associated with each gap between adjacent inverter circuits. Selective circuitry is operatively coupled to the plurality of signal taps, and adapted to output (206) data from a first and a second of the plurality of signal taps. A controlled voltage component (212) is operatively coupled the plurality of inverter circuits, and adapted to supply a desired supply voltage. A controlled signal component (210) is operatively coupled the plurality of inverter circuits, and adapted to supply a signal of a desired frequency thereto. An evaluation component (208) receives signal data from the first and second signal taps for evaluation or processing.
    • 本发明提供一种用于执行给定晶体管(204)的加速应力表征的系统(200)。 由给定晶体管形成的逆变器电路彼此串联设置(202)。 多个信号抽头可操作地与相邻逆变器电路之间的每个间隙相关联。 选择性电路可操作地耦合到多个信号抽头,并且适于从多个信号抽头中的第一和第二信号抽头输出(206)数据。 受控电压分量(212)可操作地耦合多个逆变器电路,并且适于提供期望的电源电压。 受控信号分量(210)可操作地耦合多个逆变器电路,并且适于向其提供期望频率的信号。 评估组件(208)从第一和第二信号抽头接收用于评估或处理的信号数据。