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1. 发明申请

US20100089444A1 Method of making front electrode of photovoltaic device having etched surface and corresponding photovoltaic device 失效
标题翻译：制造具有蚀刻表面的光电器件的前电极和相应的光伏器件的方法
公开(公告)号：US20100089444A1
公开(公告)日：2010-04-15
申请号：US12285890
申请日：2008-10-15
申请人： Scott V. Thomsen , Yiwei Lu , Alexey Krasnov
发明人： Scott V. Thomsen , Yiwei Lu , Alexey Krasnov
IPC分类号： H01L31/00 , C23C14/00
CPC分类号： H01L31/1884 , H01L31/022466 , H01L31/0236 , Y02E10/50
摘要： Certain example embodiments of this invention relate to a photovoltaic (PV) device including an electrode such as a front electrode/contact, and a method of making the same. In certain example embodiments, the front electrode has a textured (e.g., etched) surface that faces the photovoltaic semiconductor film of the PV device. The front electrode has a transparent conductive oxide (TCO) film having first and second layers (continuous or discontinuous) of the same material (e.g., zinc oxide, zinc aluminum oxide, indium-tin-oxide, or tin oxide), where the first TCO layer is sputter-deposited using a ceramic sputtering target(s) and the second TCO layer of the same material is sputter-deposited using a metallic or substantially metallic sputtering target(s). This allows the better quality TCO of the film, deposited more slowly via the ceramic target(s), to be formed using the ceramic target and the lesser quality TCO of the film to be deposited more quickly and cost effectively via the metallic target(s). After the etching, most or all of the better quality ceramic-deposited TCO remains whereas much of the lesser quality metallic-deposited TCO of the film was removed during the etching process.
摘要翻译：本发明的某些示例性实施例涉及包括诸如前电极/触点的电极的光伏（PV）装置及其制造方法。在某些示例性实施例中，前电极具有面向PV器件的光电半导体膜的有纹理（例如蚀刻）的表面。前电极具有透明导电氧化物（TCO）膜，其具有相同材料（例如氧化锌，氧化锌铝，氧化铟锡或氧化锡）的第一和第二层（连续或不连续），其中第一使用陶瓷溅射靶溅射沉积TCO层，并且使用金属或基本上金属的溅射靶溅射沉积相同材料的第二TCO层。这允许通过使用陶瓷靶材形成的通过陶瓷靶材更缓慢地沉积的膜的更好的质量TCO，并且通过金属靶材更快速且成本有效地沉积的膜的质量较差的TCO（s ）。在蚀刻之后，大部分或全部较好质量的陶瓷沉积的TCO保留，而在蚀刻过程中除去较薄质量的金属沉积的TCO。

2. 发明授权

US08022291B2 Method of making front electrode of photovoltaic device having etched surface and corresponding photovoltaic device 失效
标题翻译：制造具有蚀刻表面的光电器件的前电极和相应的光伏器件的方法
公开(公告)号：US08022291B2
公开(公告)日：2011-09-20
申请号：US12285890
申请日：2008-10-15
申请人： Scott V. Thomsen , Yiwei Lu , Alexey Krasnov
发明人： Scott V. Thomsen , Yiwei Lu , Alexey Krasnov
IPC分类号： H01L31/00 , H01L21/00 , C23C14/00
CPC分类号： H01L31/1884 , H01L31/022466 , H01L31/0236 , Y02E10/50
摘要： Certain example embodiments of this invention relate to a photovoltaic (PV) device including an electrode such as a front electrode/contact, and a method of making the same. In certain example embodiments, the front electrode has a textured (e.g., etched) surface that faces the photovoltaic semiconductor film of the PV device. The front electrode has a transparent conductive oxide (TCO) film having first and second layers (continuous or discontinuous) of the same material (e.g., zinc oxide, zinc aluminum oxide, indium-tin-oxide, or tin oxide), where the first TCO layer is sputter-deposited using a ceramic sputtering target(s) and the second TCO layer of the same material is sputter-deposited using a metallic or substantially metallic sputtering target(s). This allows the better quality TCO of the film, deposited more slowly via the ceramic target(s), to be formed using the ceramic target and the lesser quality TCO of the film to be deposited more quickly and cost effectively via the metallic target(s). After the etching, most or all of the better quality ceramic-deposited TCO remains whereas much of the lesser quality metallic-deposited TCO of the film was removed during the etching process.
摘要翻译：本发明的某些示例性实施例涉及包括诸如前电极/触点的电极的光伏（PV）装置及其制造方法。在某些示例性实施例中，前电极具有面向PV器件的光电半导体膜的有纹理（例如蚀刻）的表面。前电极具有透明导电氧化物（TCO）膜，其具有相同材料（例如氧化锌，氧化锌铝，氧化铟锡或氧化锡）的第一和第二层（连续或不连续），其中第一使用陶瓷溅射靶溅射沉积TCO层，并且使用金属或基本上金属的溅射靶溅射沉积相同材料的第二TCO层。这允许通过使用陶瓷靶材形成的通过陶瓷靶材更缓慢地沉积的膜的更好的TCO，并且通过金属靶材（s）更快速且成本有效地沉积的膜的质量较差的TCO ）。在蚀刻之后，大部分或全部较好质量的陶瓷沉积的TCO保留，而在蚀刻过程中除去较薄质量的金属沉积的TCO。

3. 发明申请

US20080308145A1 Front electrode including transparent conductive coating on etched glass substrate for use in photovoltaic device and method of making same 审中-公开
标题翻译：包括用于光伏器件的蚀刻玻璃基板上的透明导电涂层的前电极及其制造方法
公开(公告)号：US20080308145A1
公开(公告)日：2008-12-18
申请号：US11808765
申请日：2007-06-12
申请人： Alexey Krasnov , Scott V. Thomsen , Yiwei Lu
发明人： Alexey Krasnov , Scott V. Thomsen , Yiwei Lu
IPC分类号： H01L31/02 , C03C15/00 , H01L31/20 , C23C14/08
CPC分类号： H01L31/022466 , H01L31/022483 , H01L31/068 , H01L31/1884 , Y02E10/547
摘要： Certain example embodiments of this invention relate to a front electrode provided on an etched/patterned front glass substrate for use in a photovoltaic device or the like. The glass is a low-iron soda-lime-silica based glass. Etching of the glass may include immersing the soda-lime-silica based glass in an acid inclusive solution such as hydrofluoric acid (e.g., HF in aqueous solution) and/or hydrofluoric acid with a buffer, in order to selectively dissolve some of the glass thereby producing at least one textured/patterned substantially transparent surface of the glass substrate. A front electrode (single or multi-layered) is then formed (e.g., via sputter-deposition) on the textured surface of the front glass substrate, and may be used in a photovoltaic device or the like.
摘要翻译：本发明的一些示例性实施例涉及设置在用于光伏器件等的蚀刻/图案化的前玻璃基板上的前电极。玻璃是一种低铁钠钙石英玻璃。玻璃的蚀刻可以包括将钠钙二氧化硅基玻璃浸入包含酸的溶液如氢氟酸（例如在水溶液中的HF）和/或氢氟酸与缓冲液，以便选择性地溶解一些玻璃从而产生至少一个纹理/图案化的玻璃基板的基本上透明的表面。然后在前玻璃基板的纹理化表面上形成前电极（单层或多层）（例如，通过溅射沉积），并且可以用于光伏器件等中。

4. 发明授权

US09499436B2 Light scattering coating for greenhouse applications, and/or coated article including the same 有权
标题翻译：用于温室应用的光散射涂层和/或包括其的涂层制品
公开(公告)号：US09499436B2
公开(公告)日：2016-11-22
申请号：US13064600
申请日：2011-04-01
申请人： Alexey Krasnov , Willem Den Boer , Scott V. Thomsen , Jean-Marc Lemmer
发明人： Alexey Krasnov , Willem Den Boer , Scott V. Thomsen , Jean-Marc Lemmer
IPC分类号： C03C17/34 , C03C15/00 , G02B1/10 , G02B5/02 , A01G9/14 , F24J2/40 , F24J2/50
CPC分类号： G02B1/10 , A01G9/14 , A01G9/1438 , C03C15/00 , C03C17/23 , C03C17/3417 , C03C2218/32 , F24S50/80 , F24S80/52 , G02B1/115 , G02B5/021 , G02B5/0268 , G02B5/0278 , Y02A40/252 , Y10T428/24355
摘要： Certain example embodiments relate to a sunlight-scattering thin-film coating disposed on a substrate for greenhouse applications. The surface morphology of the coating promotes a better and more uniform light distribution. For instance, at least one thin-film layer disposed on a substrate may be textured so as to create surface features on the order of 0.1-5 microns, with the surface features being sized to cause (a) light having a wavelength of greater than or equal to about 800 nm incident thereon to primarily scatter to angles less than 30 degrees relative to a major surface of the substrate and (b) light having a wavelength of less than or equal to about 700 nm incident thereon to primarily scatter to angles greater than 20 degrees relative to the major surface of the substrate. This arrangement may advantageously direct beneficial light towards plant life while directing parasitic light away from the plant life.
摘要翻译：某些示例实施例涉及设置在用于温室应用的基板上的日光散射薄膜涂层。涂层的表面形态促进了更好和更均匀的光分布。例如，设置在基板上的至少一个薄膜层可以被纹理化，以便产生大约0.1-5微米的表面特征，其中表面特征的尺寸使得（a）波长大于或等于大约800nm入射到其上以主要散射到相对于衬底的主表面小于30度的角度，以及（b）入射到其上的波长小于或等于约700nm的光主要散射到更大的角度相对于基材的主表面超过20度。这种布置可以有利地将有利的光引向植物生命，同时将寄生光引导远离植物的寿命。

5. 发明申请

US20080308146A1 Front electrode including pyrolytic transparent conductive coating on textured glass substrate for use in photovoltaic device and method of making same 审中-公开
标题翻译：前电极包括用于光伏器件的纹理化玻璃基板上的热解透明导电涂层及其制造方法
公开(公告)号：US20080308146A1
公开(公告)日：2008-12-18
申请号：US11812078
申请日：2007-06-14
申请人： Alexey Krasnov , Scott V. Thomsen
发明人： Alexey Krasnov , Scott V. Thomsen
IPC分类号： H01L31/0236 , B29D11/00 , H01L31/0216 , H01L31/0224
CPC分类号： H01L31/18 , H01L31/02366 , Y02E10/50
摘要： A photovoltaic device includes a front electrode on a textured front glass substrate. In certain example embodiments, the glass substrate is textured via roller(s) and/or etching to form a textured surface. Thereafter, a front electrode is formed on the textured surface of the glass substrate via pyrolysis. The front electrode may be of or include a transparent conductive oxide (TCO) such as tin oxide and/or fluorinated tin oxide in certain example embodiments. In certain example instances, this is advantageous in that efficiency of the photovoltaic device can be improved by increasing light absorption by the active semiconductor via both increasing light intensity passing through the front glass substrate and front electrode, and increasing the light path in the semiconductor photovoltaic conversion layer.
摘要翻译：光电器件包括在纹理化的前玻璃基板上的前电极。在某些示例性实施例中，玻璃基板通过辊纹理和/或蚀刻以形成纹理表面。此后，通过热解在玻璃基板的纹理化表面上形成前电极。在某些示例性实施方案中，前电极可以是或包括透明导电氧化物（TCO），例如氧化锡和/或氟化氧化锡。在某些示例中，这是有利的，因为可以通过增加通过前玻璃基板和前电极的光强度增加有源半导体的光吸收来增加光电器件的效率，并且增加半导体光伏转换层。

6. 发明授权

US08415194B2 Rear electrode structure for use in photovoltaic device such as CIGS/CIS photovoltaic device and method of making same 有权
公开(公告)号：US08415194B2
公开(公告)日：2013-04-09
申请号：US12926943
申请日：2010-12-20
申请人： Alexey Krasnov , Willem den Boer , Scott V. Thomsen , Leonard L. Boyer, Jr.
发明人： Alexey Krasnov , Willem den Boer , Scott V. Thomsen , Leonard L. Boyer, Jr.
IPC分类号： H01L21/00
CPC分类号： H01L31/022425 , H01L31/02366 , H01L31/0322 , H01L31/0392 , H01L31/03923 , H01L31/0749 , Y02E10/541 , Y02P70/521
摘要： A photovoltaic device including a rear electrode which may also function as a rear reflector. In certain example embodiments of this invention, the rear electrode includes a metallic based reflective film that is oxidation graded, so as to be more oxided closer to a rear substrate (e.g., glass substrate) supporting the electrode than at a location further from the rear substrate. In other words, the rear electrode is oxidation graded so as to be less oxided closer to a semiconductor absorber of the photovoltaic device than at a location further from the semiconductor absorber in certain example embodiments. In certain example embodiments, the interior surface of the rear substrate may optionally be textured so that the rear electrode deposited thereon is also textured so as to provide desirable electrical and reflective characteristics. In certain example embodiments, the rear electrode may be of or include Mo and/or MoOx, and may be sputter-deposited using a combination of MoOx and Mo sputtering targets.

7. 发明申请

US20110097841A1 Rear electrode structure for use in photovoltaic device such as CIGS/CIS photovoltaic device and method of making same 有权
公开(公告)号：US20110097841A1
公开(公告)日：2011-04-28
申请号：US12926943
申请日：2010-12-20
申请人： Alexey Krasnov , Willem den Boer , Scott V. Thomsen , Leonard L. Boyer, JR.
发明人： Alexey Krasnov , Willem den Boer , Scott V. Thomsen , Leonard L. Boyer, JR.
IPC分类号： H01L31/18 , H01L21/44
CPC分类号： H01L31/022425 , H01L31/02366 , H01L31/0322 , H01L31/0392 , H01L31/03923 , H01L31/0749 , Y02E10/541 , Y02P70/521
摘要： A photovoltaic device including a rear electrode which may also function as a rear reflector. In certain example embodiments of this invention, the rear electrode includes a metallic based reflective film that is oxidation graded, so as to be more oxided closer to a rear substrate (e.g., glass substrate) supporting the electrode than at a location further from the rear substrate. In other words, the rear electrode is oxidation graded so as to be less oxided closer to a semiconductor absorber of the photovoltaic device than at a location further from the semiconductor absorber in certain example embodiments. In certain example embodiments, the interior surface of the rear substrate may optionally be textured so that the rear electrode deposited thereon is also textured so as to provide desirable electrical and reflective characteristics. In certain example embodiments, the rear electrode may be of or include Mo and/or MoOx, and may be sputter-deposited using a combination of MoOx and Mo sputtering targets.

8. 发明申请

US20120251773A1 Light scattering coating for greenhouse applications, and/or coated article including the same 有权
标题翻译：用于温室应用的光散射涂层和/或包括其的涂层制品
公开(公告)号：US20120251773A1
公开(公告)日：2012-10-04
申请号：US13064600
申请日：2011-04-01
申请人： Alexey Krasnov , Willem Den Boer , Scott V. Thomsen , Jean-Marc Lemmer
发明人： Alexey Krasnov , Willem Den Boer , Scott V. Thomsen , Jean-Marc Lemmer
IPC分类号： B32B3/30 , B05D3/00 , C23C14/34 , B05D3/12 , B05D5/06 , B05D3/10
CPC分类号： G02B1/10 , A01G9/14 , A01G9/1438 , C03C15/00 , C03C17/23 , C03C17/3417 , C03C2218/32 , F24S50/80 , F24S80/52 , G02B1/115 , G02B5/021 , G02B5/0268 , G02B5/0278 , Y02A40/252 , Y10T428/24355
摘要： Certain example embodiments relate to a sunlight-scattering thin-film coating disposed on a substrate for greenhouse applications. The surface morphology of the coating promotes a better and more uniform light distribution. For instance, at least one thin-film layer disposed on a substrate may be textured so as to create surface features on the order of 0.1-5 microns, with the surface features being sized to cause (a) light having a wavelength of greater than or equal to about 800 nm incident thereon to primarily scatter to angles less than 30 degrees relative to a major surface of the substrate and (b) light having a wavelength of less than or equal to about 700 nm incident thereon to primarily scatter to angles greater than 20 degrees relative to the major surface of the substrate. This arrangement may advantageously direct beneficial light towards plant life while directing parasitic light away from the plant life.
摘要翻译：某些示例实施例涉及设置在用于温室应用的基板上的日光散射薄膜涂层。涂层的表面形态促进了更好和更均匀的光分布。例如，设置在基板上的至少一个薄膜层可以被纹理化，以便产生大约0.1-5微米的表面特征，其中表面特征的尺寸使得（a）波长大于或等于大约800nm入射到其上以主要散射到相对于衬底的主表面小于30度的角度，以及（b）入射到其上的具有小于或等于约700nm的波长的光，以主要散射到更大的角度相对于基材的主表面超过20度。这种布置可以有利地将有利的光引向植物生命，同时将寄生光引导远离植物的寿命。

9. 发明授权

US07875945B2 Rear electrode structure for use in photovoltaic device such as CIGS/CIS photovoltaic device and method of making same 有权
标题翻译：用于光电器件如CIGS / CIS光伏器件的后电极结构及其制造方法
公开(公告)号：US07875945B2
公开(公告)日：2011-01-25
申请号：US12149919
申请日：2008-05-09
申请人： Alexey Krasnov , Willem den Boer , Scott V. Thomsen , Leonard L. Boyer, Jr.
发明人： Alexey Krasnov , Willem den Boer , Scott V. Thomsen , Leonard L. Boyer, Jr.
IPC分类号： H01L31/0232
CPC分类号： H01L31/022425 , H01L31/02366 , H01L31/0322 , H01L31/0392 , H01L31/03923 , H01L31/0749 , Y02E10/541 , Y02P70/521
摘要： A photovoltaic device including a rear electrode which may also function as a rear reflector. In certain example embodiments of this invention, the rear electrode includes a metallic based reflective film that is oxidation graded, so as to be more oxided closer to a rear substrate (e.g., glass substrate) supporting the electrode than at a location further from the rear substrate. In other words, the rear electrode is oxidation graded so as to be less oxided closer to a semiconductor absorber of the photovoltaic device than at a location further from the semiconductor absorber in certain example embodiments. In certain example embodiments, the interior surface of the rear substrate may optionally be textured so that the rear electrode deposited thereon is also textured so as to provide desirable electrical and reflective characteristics. In certain example embodiments, the rear electrode may be of or include Mo and/or MoOx, and may be sputter-deposited using a combination of MoOx and Mo sputtering targets.
摘要翻译：一种光电器件，包括也可用作后反射器的后电极。在本发明的某些示例性实施例中，后电极包括氧化分级的金属基反射膜，以便比支撑电极的后基板（例如，玻璃基板）更靠近后方的位置基质。换句话说，在某些示例性实施例中，后电极被氧化分级，以便比在远离半导体吸收器的位置更靠近光伏器件的半导体吸收器。在某些示例性实施例中，后部衬底的内表面可以可选地被纹理化，使得沉积在其上的后电极也是纹理化的，以便提供期望的电和反射特性。在某些示例性实施例中，后电极可以是Mo和/或MoO x，或者可以使用MoOx和Mo溅射靶的组合来溅射沉积。

10. 发明申请

US20090020157A1 Rear electrode structure for use in photovoltaic device such as CIGS/CIS photovoltaic device and method of making same 有权
标题翻译：用于光电器件如CIGS / CIS光伏器件的后电极结构及其制造方法
公开(公告)号：US20090020157A1
公开(公告)日：2009-01-22
申请号：US12149919
申请日：2008-05-09
申请人： Alexey Krasnov , Willem den Boer , Scott V. Thomsen , Leonard L. Boyer, JR.
发明人： Alexey Krasnov , Willem den Boer , Scott V. Thomsen , Leonard L. Boyer, JR.
IPC分类号： H01L31/00 , C23C14/00
CPC分类号： H01L31/022425 , H01L31/02366 , H01L31/0322 , H01L31/0392 , H01L31/03923 , H01L31/0749 , Y02E10/541 , Y02P70/521
摘要： A photovoltaic device including a rear electrode which may also function as a rear reflector. In certain example embodiments of this invention, the rear electrode includes a metallic based reflective film that is oxidation graded, so as to be more oxided closer to a rear substrate (e.g., glass substrate) supporting the electrode than at a location further from the rear substrate. In other words, the rear electrode is oxidation graded so as to be less oxided closer to a semiconductor absorber of the photovoltaic device than at a location further from the semiconductor absorber in certain example embodiments. In certain example embodiments, the interior surface of the rear substrate may optionally be textured so that the rear electrode deposited thereon is also textured so as to provide desirable electrical and reflective characteristics. In certain example embodiments, the rear electrode may be of or include Mo and/or MoOx, and may be sputter-deposited using a combination of MoOx and Mo sputtering targets.
摘要翻译：一种光电器件，包括也可用作后反射器的后电极。在本发明的某些示例性实施例中，后电极包括氧化分级的金属基反射膜，以便比支撑电极的后基板（例如，玻璃基板）更靠近后方的位置基质。换句话说，在某些示例性实施例中，后电极被氧化分级，以便比在远离半导体吸收器的位置更靠近光伏器件的半导体吸收器。在某些示例性实施例中，后部衬底的内表面可以可选地被纹理化，使得沉积在其上的后电极也是纹理化的，以便提供期望的电和反射特性。在某些示例性实施例中，后电极可以是Mo和/或MoO x，或者可以使用MoOx和Mo溅射靶的组合来溅射沉积。

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