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1. 发明授权

US06597446B2 Holographic scatterometer for detection and analysis of wafer surface deposits 失效
公开(公告)号：US06597446B2
公开(公告)日：2003-07-22
申请号：US09815228
申请日：2001-03-22
申请人： Alex Klooster , James M. Marks , Takeo Sawatari
发明人： Alex Klooster , James M. Marks , Takeo Sawatari
IPC分类号： G01N2100
CPC分类号： G01N21/9501
摘要： A holographic scatterometer with continuous readout can rapidly identify the presence of deposits (particles or other defects) on an unpatterned wafer surface and determine the volume density (size) and location. The scatterometer can also determine chemical composition of the detected deposits. The range of the deposit (particle) size to be measured is below 80 nm, which currently existing scatterometer type instruments cannot readily detect. The inspection can be achieved as an in-line stage during the processing of wafers or in situ in combination with another processing tool or as a separate off-line analysis device.

2. 发明授权

US5923423A Heterodyne scatterometer for detecting and analyzing wafer surface defects 失效
标题翻译：用于检测和分析晶圆表面缺陷的异步散射仪
公开(公告)号：US5923423A
公开(公告)日：1999-07-13
申请号：US923453
申请日：1997-09-04
申请人： Takeo Sawatari , Philip A. Gaubis , Alex Klooster , James M. Marks
发明人： Takeo Sawatari , Philip A. Gaubis , Alex Klooster , James M. Marks
IPC分类号： G01N21/94 , G01B9/02
CPC分类号： G01N21/94
摘要： A scatterometer for detecting and analyzing wafer surface defects includes a light source generating a beam of light and a photodetector. Optics are used for splitting the beam of light into a reference beam and a detection beam. Optics also direct the reference beam and the detection beam to the photodetector through different optical paths. The optics direct the detection beam to the surface of the wafer and when incident upon a defect creates a scattered beam. The optics direct the scattered beam to the photodetector. A driver moves the surface of the wafer with respect to the detection beam. A computer coupled to the photodetector determines the presence of a defect on the surface by analyzing an interference pattern from the superposition of the reference beam and the scattered beam.
摘要翻译：用于检测和分析晶片表面缺陷的散射仪包括产生光束的光源和光电检测器。光学用于将光束分成参考光束和检测光束。光学器件还通过不同的光路将参考光束和检测光束引导到光电检测器。光学器件将检测光束引导到晶片的表面，并且当入射到缺陷时产生散射光束。光学器件将散射光束引导到光电检测器。驱动器相对于检测光束移动晶片的表面。耦合到光电检测器的计算机通过分析来自参考光束和散射光束的叠加的干涉图案来确定表面上存在缺陷。

3. 发明授权

US5343179A Miniaturized solenoid operated trip device 失效
标题翻译：小型电磁脱扣器
公开(公告)号：US5343179A
公开(公告)日：1994-08-30
申请号：US11065
申请日：1993-01-29
申请人： Charles W. Pipich , David W. Fugate , James M. Marks
发明人： Charles W. Pipich , David W. Fugate , James M. Marks
IPC分类号： H01H33/42 , H01H71/12 , H01H71/24 , H01H73/36 , H01H9/20
CPC分类号： H01H71/2463 , H01H2083/205
摘要： A solenoid operated circuit breaker trip device has a base defining a guide channel and an actuator that slides in the guide channel and interacts with a contact breaking mechanism having a trip bar operable to make or break electrical contacts. A spring biases the actuator toward the trip bar. A solenoid on the base electromagnetically displaces a plunger along a linear path and is coupled to a trigger having a latching surface that holds or releases the actuator. The guide channel runs parallel to the path of the plunger, adjacent the solenoid. The trigger is L-shaped and pivoted on a pivot pin between two legs of its L-shape, on an axis transverse to the path of the plunger. One of the two trigger legs is coupled to the plunger, and the other has an engagement surface that is moved behind a complementary surface of the actuator to selectively block its displacement. The base can be a slotted frame attached to the solenoid or a molded housing having an interior cavity for receiving the solenoid. A return spring urges the trigger toward the latching position.
摘要翻译：螺线管操作的断路器跳闸装置具有限定引导通道的基部和在引导通道中滑动的致动器，并且与具有可操作以产生或断开电触点的跳闸杆的触点断开机构相互作用。弹簧将致动器偏压到跳闸杆。基座上的螺线管电磁地沿着线性路径移动柱塞并且联接到具有保持或释放致动器的闩锁表面的触发器。引导通道平行于柱塞的路径平行，与螺线管相邻。触发器是L形的，并且在横向于柱塞的路径的轴上的枢轴销上枢转在L形的两个腿之间的枢轴销上。两个触发器腿中的一个联接到柱塞，另一个具有接合表面，该接合表面在致动器的互补表面后移动以选择性地阻挡其位移。基座可以是连接到螺线管的开槽框架或具有用于容纳螺线管的内部空腔的模制外壳。复位弹簧将扳机推向闩锁位置。

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