专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06597446B2 Holographic scatterometer for detection and analysis of wafer surface deposits 失效
公开(公告)号：US06597446B2
公开(公告)日：2003-07-22
申请号：US09815228
申请日：2001-03-22
申请人： Alex Klooster , James M. Marks , Takeo Sawatari
发明人： Alex Klooster , James M. Marks , Takeo Sawatari
IPC分类号： G01N2100
CPC分类号： G01N21/9501
摘要： A holographic scatterometer with continuous readout can rapidly identify the presence of deposits (particles or other defects) on an unpatterned wafer surface and determine the volume density (size) and location. The scatterometer can also determine chemical composition of the detected deposits. The range of the deposit (particle) size to be measured is below 80 nm, which currently existing scatterometer type instruments cannot readily detect. The inspection can be achieved as an in-line stage during the processing of wafers or in situ in combination with another processing tool or as a separate off-line analysis device.

2. 发明授权

US4275454A Optical system phase error compensator 失效
标题翻译：光学系统相位误差补偿器
公开(公告)号：US4275454A
公开(公告)日：1981-06-23
申请号：US965277
申请日：1978-12-01
申请人： Alex Klooster, Jr.
发明人： Alex Klooster, Jr.
IPC分类号： G06E3/00 , G06G9/00 , G02B27/22 , G03H1/16
CPC分类号： G06E3/003 , G03H1/0005 , G03H1/04 , G03H2001/0072 , G03H2001/0434
摘要： A method for compensating for phase errors in an optical data processing system for performing a Fourier transformation analysis of a data source. The aberrations of the system are holographically recorded by passing an object beam through the system and the optical data source in a direction opposite to that of the DC read beam used in the transformation analysis. The object beam and a reference beam derived from a common coherent light source are generated by the system and directed to an optical memory wherein the interference pattern between the object and reference beam is recorded. The data source is analyzed by providing a read beam incident the optical memory along a path in the reverse direction of the reference beam. In such manner, a reconstruction beam emanating from the hologram is directed back through the data source to display the Fourier transform of the data in the data source. The reconstruction beam thus serves to automatically compensate for phase errors introduced into the system by thickness variations of the data source as well as from the lenses in the system.
摘要翻译：一种用于补偿用于执行数据源的傅里叶变换分析的光学数据处理系统中的相位误差的方法。通过使物体光束通过与转换分析中使用的DC读取光束的方向相反的方向通过系统和光学数据源来全息记录系统的像差。由公共相干光源产生的物体光束和参考光束由系统产生，并被引导到光学存储器，其中记录对象和参考光束之间的干涉图案。通过沿着参考光束的相反方向的路径提供沿光存储器入射的读取光束来分析数据源。以这种方式，从全息图发出的重建光束被引导回数据源，以显示数据源中的数据的傅里叶变换。因此，重构波束用于通过数据源以及系统中的透镜的厚度变化来自动补偿引入到系统中的相位误差。

3. 发明授权

US07359065B2 Method of combining holograms 失效
标题翻译：组合全息图的方法
公开(公告)号：US07359065B2
公开(公告)日：2008-04-15
申请号：US11181664
申请日：2005-07-14
申请人： Jon Nisper , Michael Mater , Alex Klooster , Zhenhua Huang
发明人： Jon Nisper , Michael Mater , Alex Klooster , Zhenhua Huang
IPC分类号： G01B11/02
CPC分类号： G01B11/2441 , G01B11/306
摘要： A method of combining holograms or phase images of an object is disclosed, where attributes of the data used to record two phase images of overlapping portions of the surface of an object are compared and used to match pixels of the two recordings. A relative tilt angle and direction correction is added, and a third phase image is generated. Phase images of objects which are too large to be imaged in an interferometric imaging system can thus be produced.
摘要翻译：公开了一种组合物体的全息图或相位图像的方法，其中用于记录物体表面的重叠部分的两个相位图像的数据的属性被比较并用于匹配两个记录的像素。添加相对倾斜角度和方向校正，并生成第三相位图像。因此可以产生太大而不能在干涉成像系统中成像的物体的相位图像。

4. 发明授权

US06868736B2 Ultra-miniature optical pressure sensing system 失效
标题翻译：超微型光学压力传感系统
公开(公告)号：US06868736B2
公开(公告)日：2005-03-22
申请号：US10371871
申请日：2003-02-21
申请人： Takeo Sawatari , Alex Klooster , Dean M. Aslam , Yuping Lin , James Marks
发明人： Takeo Sawatari , Alex Klooster , Dean M. Aslam , Yuping Lin , James Marks
IPC分类号： G01L7/08 , G01L9/00 , G02B6/32 , G02B6/38 , G01L1/24 , F16C11/00
CPC分类号： G02B6/3869 , G01L9/0042 , G01L9/0047 , G01L9/0077 , G02B6/32 , G02B6/3855
摘要： The fiber optic pressure sensing system includes a sensor housing formed using MEMS processing. The sensor housing has ribs and grooves in both horizontal and vertical directions relative to the surface to allow the membrane to flex in a consistent manner. The flexing of the membrane allows the pedestal to be repeatedly positioned in response to pressure acting on the extension of the sensor head and membrane.
摘要翻译：光纤压力传感系统包括使用MEMS处理形成的传感器外壳。传感器外壳在水平和垂直方向上具有相对于表面的肋和槽，以允许膜以一致的方式弯曲。膜的弯曲允许基座响应于作用在传感器头和膜的延伸部上的压力而重复定位。

5. 发明申请

US20080150204A1 Stabilizer for vibration isolation platform 审中-公开
标题翻译：隔振平台稳定器
公开(公告)号：US20080150204A1
公开(公告)日：2008-06-26
申请号：US11933558
申请日：2007-11-01
申请人： Alex klooster , Michael Mater
发明人： Alex klooster , Michael Mater
IPC分类号： F16F7/00
CPC分类号： F16F15/04 , F16F7/10
摘要： A vibration isolation platform having supports such as air pistons to damp out low frequency vibrations is equipped with a means for restricting pitch and roll motion as the weight distribution is changed and the vibration isolation platform exhibits vertical motion. The preferred means for restricting are torsion bars and tension means which transfer force from one part of the platform to the other.
摘要翻译：具有诸如空气活塞的支撑件以减少低频振动的隔振平台配备有当重量分布改变并且隔振平台呈现垂直运动时用于限制俯仰和滚动运动的装置。优选的限制装置是扭力杆和拉力装置，其将力从平台的一部分传递到另一部分。

6. 发明申请

US20060227820A1 Tunable laser 审中-公开
公开(公告)号：US20060227820A1
公开(公告)日：2006-10-12
申请号：US11093418
申请日：2005-03-30
申请人： Alex Klooster
发明人： Alex Klooster
IPC分类号： H01S3/10
CPC分类号： H01S3/1055
摘要： A tunable extended cavity laser is disclosed having a single flexure pivot or hinge forming a pivot axis about which a grating tuning element is rotated. The pivot axis does not move appreciably as the grating is pivoted. The most preferred embodiment of the flexure hinge is a cartwheel hinge.

7. 发明申请

US20080236306A1 SYSTEM AND METHOD FOR REDUCING CONVECTION CURRENT EFFECTS IN THE OPTICAL PATH OF A HOLOGRAPHIC INTERFEROMETRY SYSTEM 审中-公开
标题翻译：系统和方法用于降低全息图干涉系统光学路径中的对流电流效应
公开(公告)号：US20080236306A1
公开(公告)日：2008-10-02
申请号：US11865656
申请日：2007-10-01
申请人： Michael J. Mater , Alex Klooster , Greg Dale
发明人： Michael J. Mater , Alex Klooster , Greg Dale
IPC分类号： G01N17/00
CPC分类号： G01B9/02052 , G01B9/02047 , G01B9/021 , G01J3/02 , G01J3/0286 , G03H1/0486 , G03H2001/0489
摘要： The invention includes a system and method for reducing convection current effects in the optical path of a holographic interferometer system. The system preferably includes an enclosure for the optical path of the holographic interferometer system. In one embodiment, the system also includes a thermal element coupled to or located inside the enclosure. In another embodiment, the system also includes a gas located inside the enclosure, wherein the gas has a lower index of refraction than air. In another embodiment, the system also includes a fan coupled to or located inside the enclosure and adapted to circulate a gas inside the enclosure.
摘要翻译：本发明包括用于减少全息干涉仪系统的光路中的对流电流效应的系统和方法。该系统优选地包括用于全息干涉仪系统的光路的外壳。在一个实施例中，系统还包括耦合到或位于外壳内的热元件。在另一个实施例中，系统还包括位于外壳内的气体，其中气体具有比空气更低的折射率。在另一个实施例中，系统还包括耦合到外壳并位于外壳内并适于使气体在外壳内循环的风扇。

8. 发明申请

US20070133010A1 Off-axis paraboloid interferometric mirror with off focus illumination 失效
标题翻译：离轴抛物面干涉镜与离焦照明
公开(公告)号：US20070133010A1
公开(公告)日：2007-06-14
申请号：US11301320
申请日：2005-12-12
申请人： Alex Klooster , Carl Aleksoff
发明人： Alex Klooster , Carl Aleksoff
IPC分类号： G01B11/02
CPC分类号： G01B11/2441 , G01B9/02007
摘要： An off axis paraboloid mirror is used to provide object illumination in an interferometric imaging system. The light from an object illumination light source diverges from a point apart from the focus point of the paraboloid, proceeds to the parabolic mirror surface, and is reflected as a nearly parallel beam to illuminate the object.
摘要翻译：离轴抛物面镜用于在干涉成像系统中提供物体照明。来自物体照明光源的光从抛物面的焦点偏离的点发散，进入抛物面镜面，并被反射为近似平行的光束以照射物体。

9. 发明申请

US20070024866A1 Method of combining holograms 失效
标题翻译：组合全息图的方法
公开(公告)号：US20070024866A1
公开(公告)日：2007-02-01
申请号：US11181664
申请日：2005-07-14
申请人： Jon Nisper , Mike Mater , Alex Klooster , Zhenhua Huang
发明人： Jon Nisper , Mike Mater , Alex Klooster , Zhenhua Huang
IPC分类号： G01B11/02
CPC分类号： G01B11/2441 , G01B11/306
摘要： A method of combining holograms or phase images of an object is disclosed, where attributes of the data used to record two phase images of overlapping portions of the surface of an object are compared and used to match pixels of the two recordings. A relative tilt angle and direction correction is added, and a third phase image is generated. Phase images of objects which are too large to be imaged in an interferometric imaging system can thus be produced.
摘要翻译：公开了一种组合物体的全息图或相位图像的方法，其中用于记录物体表面的重叠部分的两个相位图像的数据的属性被比较并用于匹配两个记录的像素。添加相对倾斜角度和方向校正，并生成第三相位图像。因此可以产生太大而不能在干涉成像系统中成像的物体的相位图像。

10. 发明授权

US06898350B2 Interferometric focusing technique for forming taps in fibers 失效
标题翻译：用于在纤维中形成水龙头的干涉聚焦技术
公开(公告)号：US06898350B2
公开(公告)日：2005-05-24
申请号：US10643437
申请日：2003-08-19
申请人： Amber Iler , Alex Klooster
发明人： Amber Iler , Alex Klooster
IPC分类号： G02B6/02 , G02B6/28 , G02B6/34
CPC分类号： G02B6/2852 , G02B6/02095 , G02B6/4215
摘要： Techniques are used to determine when interfering beams of light are precisely aligned at the core of the fiber when a laser interferometer is used to burn diffraction gratings into optical fibers. Two alternative methods are disclosed for performing this function, namely, refraction of the UV fluorescence through the fiber onto a paper or screen, and alternately interrupting the left and right UV beams, then directly observing the fluorescence pattern of the UV beam on the fiber core to determine alignment.
摘要翻译：当使用激光干涉仪将衍射光栅烧制成光纤时，技术用于确定干涉光束何时精确对准光纤的核心。公开了用于执行该功能的两种替代方法，即通过光纤将UV荧光折射到纸或屏幕上，并且交替地中断左和右UV束，然后直接观察纤维芯上的UV束的荧光图案以确定对齐。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式