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1. 发明授权

US5923423A Heterodyne scatterometer for detecting and analyzing wafer surface defects 失效
标题翻译：用于检测和分析晶圆表面缺陷的异步散射仪
公开(公告)号：US5923423A
公开(公告)日：1999-07-13
申请号：US923453
申请日：1997-09-04
申请人： Takeo Sawatari , Philip A. Gaubis , Alex Klooster , James M. Marks
发明人： Takeo Sawatari , Philip A. Gaubis , Alex Klooster , James M. Marks
IPC分类号： G01N21/94 , G01B9/02
CPC分类号： G01N21/94
摘要： A scatterometer for detecting and analyzing wafer surface defects includes a light source generating a beam of light and a photodetector. Optics are used for splitting the beam of light into a reference beam and a detection beam. Optics also direct the reference beam and the detection beam to the photodetector through different optical paths. The optics direct the detection beam to the surface of the wafer and when incident upon a defect creates a scattered beam. The optics direct the scattered beam to the photodetector. A driver moves the surface of the wafer with respect to the detection beam. A computer coupled to the photodetector determines the presence of a defect on the surface by analyzing an interference pattern from the superposition of the reference beam and the scattered beam.
摘要翻译：用于检测和分析晶片表面缺陷的散射仪包括产生光束的光源和光电检测器。光学用于将光束分成参考光束和检测光束。光学器件还通过不同的光路将参考光束和检测光束引导到光电检测器。光学器件将检测光束引导到晶片的表面，并且当入射到缺陷时产生散射光束。光学器件将散射光束引导到光电检测器。驱动器相对于检测光束移动晶片的表面。耦合到光电检测器的计算机通过分析来自参考光束和散射光束的叠加的干涉图案来确定表面上存在缺陷。

2. 发明授权

US5870511A Fiber optic temperature sensor 失效
公开(公告)号：US5870511A
公开(公告)日：1999-02-09
申请号：US791025
申请日：1997-01-27
申请人： Takeo Sawatari , Philip A. Gaubis , Brenton L. Mattes , Clark J. Charnetski
发明人： Takeo Sawatari , Philip A. Gaubis , Brenton L. Mattes , Clark J. Charnetski
IPC分类号： G01B9/02 , G02B6/00
CPC分类号： G01K11/3206 , G01K11/125 , G01K5/50
摘要： A fiber optic temperature sensor uses a light source which transmits light through an optical fiber to a sensor head at the opposite end of the optical fiber from the light source. The sensor head has a housing coupled to the end of the optical fiber. A metallic reflective surface is coupled to the housing adjacent the end of the optical fiber to form a gap having a predetermined length between the reflective surface and the optical fiber. A detection system is also coupled to the optical fiber which determines the temperature at the sensor head from an interference pattern of light which is reflected from the reflective surface.

3. 发明授权

US5982288A Visibility sensor system 失效
标题翻译：可见度传感器系统
公开(公告)号：US5982288A
公开(公告)日：1999-11-09
申请号：US53034
申请日：1998-04-01
申请人： Takeo Sawatari , Philip A. Gaubis , Clark J. Charnetski
发明人： Takeo Sawatari , Philip A. Gaubis , Clark J. Charnetski
IPC分类号： B60Q1/14 , G08G1/09 , G01W1/00
CPC分类号： B60Q1/1423 , G08G1/096716 , G08G1/096758 , G08G1/096775
摘要： A visibility sensor system includes a housing having a sensor head opening. A removable sensor head assembly is removably coupled to the housing within the sensor head opening. The sensor head assembly has a sensor enclosure and a connector. An electronics module is coupled to the sensor head through the connector.
摘要翻译：可见度传感器系统包括具有传感器头部开口的壳体。可拆卸传感器头组件可拆卸地联接到传感器头部开口内的壳体。传感器头组件具有传感器外壳和连接器。电子模块通过连接器耦合到传感器头。

4. 发明授权

US6141098A Fiber optic temperature sensor 失效
标题翻译：光纤温度传感器
公开(公告)号：US6141098A
公开(公告)日：2000-10-31
申请号：US167138
申请日：1998-10-06
申请人： Takeo Sawatari , Philip A. Gaubis
发明人： Takeo Sawatari , Philip A. Gaubis
IPC分类号： G01B9/02 , G02B6/00
CPC分类号： G01K11/3206 , G01K11/125 , G01K5/50
摘要： A fiber optic temperature sensor uses a light source which transmits light through an optical fiber to a sensor head at the opposite end of the optical fiber from the light source. The sensor head has a housing coupled to the end of the optical fiber. A metallic reflective surface is coupled to the housing adjacent the end of the optical fiber to form a gap having a predetermined length between the reflective surface and the optical fiber. A detection system is also coupled to the optical fiber which determines the temperature at the sensor head from an interference pattern of light which is reflected from the reflective surface.
摘要翻译：光纤温度传感器使用光源，其将光通过光纤传输到与光源相反的光纤相对端的传感器头。传感器头具有耦合到光纤端部的壳体。金属反射表面与邻近光纤端部的壳体耦合以在反射表面和光纤之间形成具有预定长度的间隙。检测系统还耦合到光纤，其从反射表面反射的光的干涉图案确定传感器头部的温度。

5. 发明授权

US5987995A Fiber optic pressure catheter 失效
标题翻译：光纤压力导管
公开(公告)号：US5987995A
公开(公告)日：1999-11-23
申请号：US895727
申请日：1997-07-17
申请人： Takeo Sawatari , Yuping Lin , Philip A. Gaubis
发明人： Takeo Sawatari , Yuping Lin , Philip A. Gaubis
IPC分类号： A61B5/0215 , A61B5/03 , G01L9/00 , A61B5/02 , G01L7/08
CPC分类号： A61B5/031 , A61B5/0215 , G01L9/0077
摘要： A fiber optic pressure catheter includes a light source, an optical fiber coupled to receive light from the light source and a sensor head that is optically coupled to the optical fiber. The sensor head has a housing defining a chamber coupled to an end of the optical fiber opposite the light source. The housing has an opening which is enclosed by a membrane. The membrane is responsive to pressure differentials between the chamber and outside the sensor head. A resilient ribbon is coupled within the chamber and has a first end fixedly coupled to a support. The ribbon has a second end that is movable in front of the optical fiber. The ribbon is mounted so that the middle portion of the ribbon touches the membrane and is biased by the membrane in response to various pressure differentials. Thus, various amounts of light are reflected back into the optical fiber based on the amount of pressure at the membrane. A detection system is optically coupled to the optical fiber which determines the pressure at the sensor head from the contrast of spectral fringes of light created by an optical coating on the end of the optical fiber and the light reflecting from the ribbon.
摘要翻译：光纤压力导管包括光源，耦合以接收来自光源的光的光纤和光学耦合到光纤的传感器头。传感器头具有限定耦合到与光源相对的光纤的端部的腔室的壳体。壳体具有由膜包围的开口。膜对腔室和传感头之间的压差有反应。弹性带连接在腔室内并且具有固定地联接到支撑件的第一端。带状物具有可在光纤前方移动的第二端。色带被安装成使得色带的中间部分接触膜并且响应于各种压力差被膜偏压。因此，基于膜上的压力量，各种量的光被反射回到光纤中。检测系统光学耦合到光纤，其根据由光纤端部上的光学涂层产生的光的光谱条纹和从带反射的光线的对比度来确定传感器头部处的压力。

6. 发明授权

US4800974A Electric steering gear 失效
标题翻译：电动舵机
公开(公告)号：US4800974A
公开(公告)日：1989-01-31
申请号：US790468
申请日：1985-10-23
申请人： Thomas J. Wand , Philip A. Gaubis , Philip Q. Guest, Jr.
发明人： Thomas J. Wand , Philip A. Gaubis , Philip Q. Guest, Jr.
IPC分类号： B62D5/04
CPC分类号： B62D5/0463 , B62D5/0496
摘要： An electronic control system for a steering assembly having an electric motor coupled to the steering assembly for providing power assist. The electric power assist motor is drivably connected to a steering member for assisting movement thereof in response to applied input torque to the vehicle steering wheel. The electronic control unit monitors an output signal from a torsion sensor which measures the amount of applied input torque. The electronic control unit generates a pulse width modulated signal having a duty cycle proportional to the measured amount of applied input torque. Solid state switches provide connection between the vehicle battery and the motor, the connection time being controlled by the duty cycle of the pulse width modulated signal. A speed decoder determines which of a plurality of speed ranges the vehicle is moving. A plurality of look-up tables are provided, each table includes a value of power assist for a given amount of applied input torque. A look-up table is selected depending upon the decoded vehicle speed. Soft start circuitry is provided to control the maximum amount of assist that is permitted upon initial application of power to the electronic control unit. The amount to assist permitted increases from a minimum to a maximum within a predetermined amount of time. Temperature foldback circuitry is also provided to limit the amount of current through the electric power assist motor dependent upon sensed temperature of the solid state switches. The amount of current permitted through the motor is also limited to an absolute maximum. A connection cable is provided to reduce radiated electromagnetic emissions and voltage transients.
摘要翻译：一种用于转向组件的电子控制系统，其具有联接到转向组件的电动马达用于提供动力辅助。电动助力马达可驱动地连接到转向构件，用于响应于向车辆方向盘施加的输入扭矩来辅助其运动。电子控制单元监视来自扭矩传感器的输出信号，该扭力传感器测量施加的输入扭矩的量。电子控制单元生成具有与被测量的输入转矩成比例的占空比的脉宽调制信号。固态开关提供车辆电池和电动机之间的连接，连接时间由脉冲宽度调制信号的占空比控制。速度解码器确定车辆正在移动的多个速度范围中的哪一个。提供多个查找表，每个表包括给定量的施加输入转矩的动力辅助值。根据解码的车辆速度来选择查找表。提供软启动电路以控制在初始向电子控制单元施加电力时允许的最大辅助量。协助的数量在预定的时间内从最小值增加到最大值。还提供温度折返电路以根据感测到的固态开关的温度来限制通过电动辅助电动机的电流量。通过电机允许的电流量也被限制在绝对最大值。提供连接电缆以减少辐射电磁辐射和电压瞬变。

7. 发明授权

US4660671A Electric steering gear 失效
标题翻译：电动舵机
公开(公告)号：US4660671A
公开(公告)日：1987-04-28
申请号：US790376
申请日：1985-10-23
申请人： Michael E. Behr , Kenneth P. Wozniak , Philip A. Gaubis , Philip Q. Guest, Jr. , James L. Graves , Thomas J. Wand
发明人： Michael E. Behr , Kenneth P. Wozniak , Philip A. Gaubis , Philip Q. Guest, Jr. , James L. Graves , Thomas J. Wand
IPC分类号： B62D6/02 , B62D5/04 , B62D5/24
CPC分类号： B62D5/049 , B62D5/0463
摘要： An electronic control system for a steering system having an electric motor coupled to the steering system for providing power assist. The steering system is of the rack and pinion type having an input gear coupled to the steering wheel and a pinion gear in meshing engagement with the rack. Two torsion sensors are coupled across the input and pinion gears and generate analog output signals. When no input torque is applied to the steering wheel, the output signals from the two torsion sensors are equal. When input torque is applied to the steering wheel, the signals from the torsion sensors vary substantially linearly in opposite directions. An electronic control unit controls operation of the electric power assist motor in accordance with the output signal from one of the torsion sensors. Failsafe circuitry is provided for monitoring the outputs of the redundant torsion sensors to insure proper control of the electric power assist motor. The failsafe circuitry provides (i) a sensor-to-sensor check to insure the output voltage of one sensor is consistent with the output voltage of the other sensor, (ii) a sensor limit check to insure that the output voltage from each sensor does not exceed a predetermined limit, (iii) a sensor direction check to insure that the signal being used to drive the electric power assist motor, as derived from one sensor, will drive the motor in the same direction sensed by the other sensor, and (iv) an excess assist check to insure that the signal used to drive the electric assist motor, as derived from one sensor, will not cause the motor to provide a greater amount of assist than an amount requested, as detected by the other sensor.
摘要翻译：一种用于转向系统的电子控制系统，其具有耦合到转向系统的电动马达用于提供动力辅助。转向系统是齿条齿轮型，其具有联接到方向盘的输入齿轮和与齿条啮合的小齿轮。两个扭转传感器耦合在输入和小齿轮上，并产生模拟输出信号。当方向盘没有施加输入转矩时，来自两个扭力传感器的输出信号相等。当向方向盘施加输入扭矩时，来自扭转传感器的信号在相反方向上大致线性地变化。电子控制单元根据来自一个扭转传感器的输出信号来控制电动辅助电动机的动作。提供故障安全电路用于监视冗余扭转传感器的输出，以确保电动辅助电机的正确控制。故障安全电路提供（i）传感器到传感器检查，以确保一个传感器的输出电压与另一个传感器的输出电压一致，（ii）传感器极限检查，以确保来自每个传感器的输出电压不超过预定限制，（iii）传感器方向检查，以确保用于驱动电动助力马达的信号（从一个传感器得到）将驱动马达沿与另一传感器感测的相同方向，并且（ iv）多余的辅助检查，以确保从一个传感器得到的用于驱动电动辅助马达的信号不会导致马达提供比所要求的更大的辅助量，如另一个传感器所检测到的那样。

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