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    • 3. 发明授权
    • Silicon nitride sintered body and process for producing the same
    • 氮化硅烧结体及其制造方法
    • US5275772A
    • 1994-01-04
    • US957506
    • 1992-10-05
    • Takehisa YamamotoTakao NishiokaKenji MatsunumaAkira YamakawaMasaya Miyake
    • Takehisa YamamotoTakao NishiokaKenji MatsunumaAkira YamakawaMasaya Miyake
    • C04B35/593C04B35/597C04B35/58
    • C04B35/5935C04B35/597
    • The present invention relates to a silicon nitride sintered body [wherein the composition of Si.sub.3 N.sub.4 -first aid (Y.sub.2 O.sub.3 +MgO)-second aid (at least one of Al.sub.2 O.sub.3 and AlN)] falls within a range defined by lines joining points A, B, C and D in FIG. 1, the crystal phase of the sintered body contains both .alpha.-Si.sub.3 N.sub.4 and .beta.'-sialon, and the relative density is 98% or more. This sintered body is produced by subjecting a green compact of the above-described source to primary sintering in a nitrogen gas atmosphere at 1300 to 1700.degree. C. so that the relative density reaches 96% or more, and the precipitation ratio of the .alpha.-Si.sub.3 N.sub.4 crystal phases to the .beta.'-sialon crystal phase in the sintered body is in the range of from 40:60 to 80:20; and then subjecting the primary sintered body to secondary sintering in a nitrogen gas atmosphere at 1300 to 1700.degree. C. so that the relative density reaches 98% or more. The sintered body has superior strength properties, especially at ordinary temperatures, and can be produced with a high productivity in a high yield at a low cost.
    • 本发明涉及一种氮化硅烧结体[其中,Si 3 N 4 - 急救(Y 2 O 3 + MgO) - 辅助剂(Al 2 O 3和AlN中的至少一种)的组成]落在由连接点A,B, C和D。 如图1所示,烧结体的结晶相含有α-Si 3 N 4和β'-Sialon,相对密度为98%以上。 该烧结体是通过使上述源的生坯在1300〜1700℃的氮气气氛中进行一次烧结而制成的,使得相对密度达到96%以上, Si3N4晶相与烧结体中的β' - 赛隆结晶相的比例范围为40:60至80:20; 然后在1300〜1700℃的氮气气氛中使一次烧结体进行二次烧结,使得相对密度达到98%以上。 该烧结体具有优异的强度特性,特别是在普通温度下,可以低成本高产率地以高生产率生产。
    • 5. 发明授权
    • Method of manufacturing a ceramics-type vacuum vessel
    • 制造陶瓷型真空容器的方法
    • US5603788A
    • 1997-02-18
    • US457013
    • 1995-06-01
    • Tetsuya AbeYoshio MurakamiHisao TakeuchiAkira YamakawaMasaya Miyake
    • Tetsuya AbeYoshio MurakamiHisao TakeuchiAkira YamakawaMasaya Miyake
    • C04B37/00F16J12/00H05H7/14B32B31/12B32B31/26
    • H05H7/14
    • A vacuum vessel is provided in which the majority of a vessel wall including an annular wall portion (1) and a plate-wall portion (2) is formed of ceramic material such as silicon nitride, for example. To bond the plural wall members together, bonding faces having a surface flatness of not more than 1 .mu.m are prepared thereon, and then a ceramic powder bonding substance with an average particle diameter of not more than 1 .mu.m is interposed between adjacent bonding faces and subjected to heating. Because the generation of gas, such as hydrogen, from the wall of the ceramic vessel is reduced, extremely high vacuum can be generated and maintained in the interior of the vacuum vessel. Also, because the wall of the vacuum vessel has a high permeability with respect to a magnetic field and an electric field, the vacuum vessel can be used as a vessel in a particle accelerator that allows the high precision control of charged particles therein by means of an electromagnetic field.
    • 提供一种真空容器,其中包括环形壁部分(1)和板壁部分(2)的容器壁的大部分由诸如氮化硅的陶瓷材料形成。 为了将多个壁构件结合在一起,在其上制备具有不大于1μm的表面平坦度的接合面,然后将平均粒径不大于1μm的陶瓷粉末粘合物置于相邻的接合面 并进行加热。 因为从陶瓷容器的壁产生气体,例如氢气,所以可以在真空容器的内部产生极高的真空度并维持真空。 此外,由于真空容器的壁相对于磁场和电场具有高磁导率,所以真空容器可以用作粒子加速器中的容器,其允许通过以下方式对带电粒子进行高精度控制: 电磁场。
    • 7. 发明授权
    • Quadrupole electrode and process for producing the same
    • 四极电极及其制造方法
    • US5373157A
    • 1994-12-13
    • US965258
    • 1993-01-05
    • Seiji HirokiTetsuya AbeYoshio MurakamiYoshishige TakanoAkira YamakawaMasaya Miyake
    • Seiji HirokiTetsuya AbeYoshio MurakamiYoshishige TakanoAkira YamakawaMasaya Miyake
    • H01J49/42H01J1/88
    • H01J49/4215H01J49/068
    • The present invention relates to improvement of a quadrupole electrode for use in a mass spectrometer or the like, in which two pairs of electrode rods 1, 2, 3 and 4 formed in such a manner that the section of the opposed face of each rod is hyperbolic or circular, and each electrode rod is made of a ceramic and the surface of the electrode is coated with a coating layer 5 of a conductive metal. Further, the present invention relates to a production process, characterized by incorporating such four electrodes at predetermined intervals. Since the electrodes are mainly made of a ceramic which is easily formable with a high dimensional accuracy, the adjustment of the positional relationship between the electrodes during assembling can be made without much effort, which enables a quadrupole electrode having a high performance to be provided with a good reproducibility at a low cost.
    • PCT No.PCT / JP92 / 01141 Sec。 371日期:1993年1月5日 102(e)日期1993年1月5日PCT提交1992年9月7日PCT公布。 出版物WO93 / 05532 日本1993年3月18日。本发明涉及用于质谱仪等的四极电极的改进,其中两对电极棒1,2,3和4以这样的方式形成: 每个杆的相对面是双曲线或圆形,并且每个电极棒由陶瓷制成,并且电极的表面涂覆有导电金属的涂层5。 此外,本发明涉及一种制造方法,其特征在于以预定间隔并入这四个电极。 由于电极主要由能够以高尺寸精度容易地形成的陶瓷制成,因此可以在组装期间电极之间的位置关系的调整不需要太多的努力,这使得能够提供具有高性能的四极电极 以低成本实现良好的再现性。