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    • 1. 发明授权
    • Porcelain enamel frit for sheet iron ground coat
    • 瓷釉玻璃料用于铁皮磨面
    • US4361654A
    • 1982-11-30
    • US290182
    • 1981-08-05
    • Akira OhmuraTadashi Nakano
    • Akira OhmuraTadashi Nakano
    • C03C3/064C03C3/066C03C3/089C03C3/091C03C3/097C03C8/02C03C8/04C03C8/08C03C7/02C03C3/08
    • C03C8/02C03C8/04C03C8/08C03C2207/02
    • A porcelain enamel frit for sheet iron ground coat is disclosed, which contains neither fluorine nor fluorine compound, but has excellent firing property, and can be worked into sheet iron enamel having high gloss and adherence and low surface roughness. The frit consists of 100 parts of a main component and 7-42 parts of an auxiliary component, said main component consisting of 30-73 parts of SiO.sub.2 or a mixture of SiO.sub.2 and at least one of TiO.sub.2, ZrO.sub.2 and SnO.sub.2, 8-45 parts of B.sub.2 O.sub.3, and 8-41 parts of Na.sub.2 O or a mixture of Na.sub.2 O and at least one of Li.sub.2 O and K.sub.2 O, and said auxiliary component consisting of not more than 12 parts of Al.sub.2 O.sub.3, 1-22 parts of at least one of CaO, Bao, ZnO, MgO and SrO, from more than 0 part to 7 parts of MoO.sub.3 or a mixture of MoO.sub.3 and at least one of V.sub.2 O.sub.5, P.sub.2 O.sub.5 and Sb.sub.2 O.sub.3, and 0.5-10 parts of at least one of CoO, NiO, CuO, MnO.sub.2 and Fe.sub.2 O.sub.3.
    • 公开了一种不含氟和氟化合物,但具有优异的焙烧性能的瓷釉料玻璃料,可以加工成具有高光泽度和粘附性以及低表面粗糙度的片状铁搪瓷。 玻璃料由100份主成分和7-42份辅助成分组成,所述主成分由30-73份SiO 2或SiO 2与TiO 2,ZrO 2和SnO 2中的至少一种组成,8-45 B 2 O 3的部分,Na 2 O的8〜41份,或Na 2 O与Li 2 O和K 2 O的至少一种的混合物,所述的辅助成分由不超过12份的Al 2 O 3,1-22份CaO, BaO,ZnO,MgO和SrO,MoO 3的0份〜7份,MoO 3与V 2 O 5,P 2 O 5,Sb 2 O 3中的至少一种的混合物,以及0.5〜10份的CoO,NiO,CuO, MnO2和Fe2O3。
    • 3. 发明授权
    • Process for depositing titanium nitride film by CVD
    • 通过CVD沉积氮化钛膜的工艺
    • US5300321A
    • 1994-04-05
    • US056768
    • 1993-05-04
    • Tadashi NakanoTomohiro Ohta
    • Tadashi NakanoTomohiro Ohta
    • C23C16/34C23C16/00
    • C23C16/34
    • A process which is capable of depositing a titanium nitride film of a high quality at a high deposition rate by low temperature chemical vapor deposition is provided. The titanium nitride film is deposited using a gas source comprising a compound of the general formula:A.sub.n B.sub.m Tiwherein n and m are independently selected from integers of from 1 to 3 provided that sum of n and m is equal to or smaller than 4; A is selected from a cyclic hydrocarbon group and a nitrogen-containing heterocyclic group which is bonded to the titanium by .pi. electron; and B is an alkylamine derivative group containing a nitrogen atom which is directly bonded to the titanium. The film deposition process of the invention is highly useful in LSI fabrication.
    • 提供了一种能够通过低温化学气相沉积以高沉积速率沉积高质量的氮化钛膜的方法。 使用包含以下通式的化合物的气体源沉积氮化钛膜:AnBmTi其中n和m独立地选自1至3的整数,条件是n和m的和等于或小于4; A选自环状烃基和通过(pi)电子与钛结合的含氮杂环基; B是含有与钛直接结合的氮原子的烷基胺衍生物基团。 本发明的成膜方法在LSI制造中是非常有用的。
    • 9. 发明授权
    • Insulating film of semiconductor device and coating solution for forming insulating film and method of manufacturing insulating film
    • 用于形成绝缘膜的半导体器件和涂层溶液的绝缘膜和制造绝缘膜的方法
    • US06423651B1
    • 2002-07-23
    • US08492108
    • 1995-08-29
    • Tadashi NakanoKyoji Tokunaga
    • Tadashi NakanoKyoji Tokunaga
    • H01L21302
    • C09D183/04H01L21/316
    • It is an object to provide an insulating film which enables not only to obtain a good film quality but to achieve an excellent filling property, thick film formation and planarization simultaneously, and to provide an insulating film forming coating solution for forming the insulating film, and to provide a method of manufacturing the insulating film. An insulating film forming coating solution containing as a main component a solution of a polymer obtained by co-hydrolysis of trialkoxysilane expressed by a general formula, SiH(OR)3, methyltrialkoxysilane expressed by a general formula, SiCH3(OR)3, and tetraalkoxysilane expressed by a general formula, Si(OR)4 is coated on a semiconductor substrate (1) having a step portion, and after it is heated and dried in an inert gas atmosphere, an insulating film (6) which is composed of a silane-derived compound expressed by a general formula, SiHx(CH3)yO2−(x+y)/2, where, 0
    • 本发明的目的是提供一种绝缘膜,其不仅能够获得良好的膜质量,而且能够同时实现优异的填充性,厚膜形成和平坦化,并且提供用于形成绝缘膜的绝缘膜形成用涂布液, 提供一种绝缘膜的制造方法。一种绝缘膜形成用涂布液,其以作为主要成分的由通式SiH(OR)3表示的三烷氧基硅烷,由一般式表示的甲基三烷氧基硅烷, 通式SiCH 3(OR)3和由通式Si(OR)4表示的四烷氧基硅烷)涂覆在具有阶梯部分的半导体衬底(1)上,在惰性气体气氛中加热干燥后, 由通式SiHx(CH3)yO2-(x + y)/ 2表示的硅烷衍生化合物组成的膜(6),其中0
    • 10. 发明授权
    • Method for repair coating
    • 维修方法
    • US06368661B2
    • 2002-04-09
    • US09783601
    • 2001-02-15
    • Tadashi Nakano
    • Tadashi Nakano
    • B05D310
    • C09D163/00
    • The present invention provides a method for repair coating characterized by applying an epoxy-polyamine resin base coating composition comprising an epoxy resin having at least one epoxy resin in a molecule and an amine base curing agent as resinous components on a deteriorated coating film which is selected from a tar epoxy resin coating film, a tar urethane resin coating film, a modified epoxy resin coating film, a modified urethane resin coating film, an epoxy-polyamine resin coating film and an epoxy urethane resin coating film and which has a water content of 0.3 to 5% by weight.
    • 本发明提供一种维修涂层的方法,其特征在于,在分散有至少一种环氧树脂的环氧树脂和胺基固化剂作为树脂成分的环氧 - 多胺树脂基涂料组合物上涂布劣化涂膜, 焦油环氧树脂涂膜,焦油聚氨酯树脂涂膜,改性环氧树脂涂膜,改性聚氨酯树脂涂膜,环氧 - 多胺树脂涂膜和环氧聚氨酯树脂涂膜,其含水量为 0.3〜5重量%。