会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明授权
    • Process for depositing titanium nitride film by CVD
    • 通过CVD沉积氮化钛膜的工艺
    • US5300321A
    • 1994-04-05
    • US056768
    • 1993-05-04
    • Tadashi NakanoTomohiro Ohta
    • Tadashi NakanoTomohiro Ohta
    • C23C16/34C23C16/00
    • C23C16/34
    • A process which is capable of depositing a titanium nitride film of a high quality at a high deposition rate by low temperature chemical vapor deposition is provided. The titanium nitride film is deposited using a gas source comprising a compound of the general formula:A.sub.n B.sub.m Tiwherein n and m are independently selected from integers of from 1 to 3 provided that sum of n and m is equal to or smaller than 4; A is selected from a cyclic hydrocarbon group and a nitrogen-containing heterocyclic group which is bonded to the titanium by .pi. electron; and B is an alkylamine derivative group containing a nitrogen atom which is directly bonded to the titanium. The film deposition process of the invention is highly useful in LSI fabrication.
    • 提供了一种能够通过低温化学气相沉积以高沉积速率沉积高质量的氮化钛膜的方法。 使用包含以下通式的化合物的气体源沉积氮化钛膜:AnBmTi其中n和m独立地选自1至3的整数,条件是n和m的和等于或小于4; A选自环状烃基和通过(pi)电子与钛结合的含氮杂环基; B是含有与钛直接结合的氮原子的烷基胺衍生物基团。 本发明的成膜方法在LSI制造中是非常有用的。
    • 10. 发明授权
    • Insulating film of semiconductor device and coating solution for forming insulating film and method of manufacturing insulating film
    • 用于形成绝缘膜的半导体器件和涂层溶液的绝缘膜和制造绝缘膜的方法
    • US06423651B1
    • 2002-07-23
    • US08492108
    • 1995-08-29
    • Tadashi NakanoKyoji Tokunaga
    • Tadashi NakanoKyoji Tokunaga
    • H01L21302
    • C09D183/04H01L21/316
    • It is an object to provide an insulating film which enables not only to obtain a good film quality but to achieve an excellent filling property, thick film formation and planarization simultaneously, and to provide an insulating film forming coating solution for forming the insulating film, and to provide a method of manufacturing the insulating film. An insulating film forming coating solution containing as a main component a solution of a polymer obtained by co-hydrolysis of trialkoxysilane expressed by a general formula, SiH(OR)3, methyltrialkoxysilane expressed by a general formula, SiCH3(OR)3, and tetraalkoxysilane expressed by a general formula, Si(OR)4 is coated on a semiconductor substrate (1) having a step portion, and after it is heated and dried in an inert gas atmosphere, an insulating film (6) which is composed of a silane-derived compound expressed by a general formula, SiHx(CH3)yO2−(x+y)/2, where, 0
    • 本发明的目的是提供一种绝缘膜,其不仅能够获得良好的膜质量,而且能够同时实现优异的填充性,厚膜形成和平坦化,并且提供用于形成绝缘膜的绝缘膜形成用涂布液, 提供一种绝缘膜的制造方法。一种绝缘膜形成用涂布液,其以作为主要成分的由通式SiH(OR)3表示的三烷氧基硅烷,由一般式表示的甲基三烷氧基硅烷, 通式SiCH 3(OR)3和由通式Si(OR)4表示的四烷氧基硅烷)涂覆在具有阶梯部分的半导体衬底(1)上,在惰性气体气氛中加热干燥后, 由通式SiHx(CH3)yO2-(x + y)/ 2表示的硅烷衍生化合物组成的膜(6),其中0