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    • 1. 发明申请
    • ORGANIC THIN-FILM TRANSISTOR, METHOD OF MANUFACTURING SAME AND EQUIPMENT FOR MANUFACTURING SAME
    • 有机薄膜晶体管及其制造方法及其制造设备
    • US20070284571A1
    • 2007-12-13
    • US11748567
    • 2007-05-15
    • Akira DoiTomohiro InoueMasahiko AndoMasakazu Kishi
    • Akira DoiTomohiro InoueMasahiko AndoMasakazu Kishi
    • H01L29/08H01L35/24H01L51/00
    • H01L51/0004H01L51/0055H01L51/0545H01L51/105
    • An organic thin-film transistor (TFT) with a large carrier mobility includes a drain electrode, a source electrode, which are made of different materials, and a semiconductor layer formed on upper surface of a substrate. Equipment for manufacturing the organic TFT comprises a substrate mounting unit, a painting unit, a light irradiating unit, a sealed container for housing the above units, and a gas supplying unit of an antioxidant gas to the sealed container. The organic TFT to be manufactured is placed on the substrate mounting unit and a semiconductor layer is formed by using the painting unit. The painted semiconductor layer is dried with a light by using the light irradiating unit. When the light with substantially uniform wavelength is irradiated to the drain and the source electrodes, a temperature gradient is caused in the semiconductor layer. Accordingly, an organic TFT with a large carrier mobility can be manufactured.
    • 具有大载流子迁移率的有机薄膜晶体管(TFT)包括由不同材料制成的漏电极,源电极以及形成在衬底的上表面上的半导体层。 用于制造有机TFT的设备包括基板安装单元,涂装单元,光照射单元,用于容纳上述单元的密封容器,以及将抗氧化气体供给到密封容器的单元。 将要制造的有机TFT放置在基板安装单元上,并且通过使用该涂装单元形成半导体层。 通过使用光照射单元,用光来干燥涂漆的半导体层。 当具有基本均匀的波长的光被照射到漏极和源电极时,在半导体层中引起温度梯度。 因此,可以制造具有大载流子迁移率的有机TFT。