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    • 1. 发明申请
    • ORGANIC THIN-FILM TRANSISTOR, METHOD OF MANUFACTURING SAME AND EQUIPMENT FOR MANUFACTURING SAME
    • 有机薄膜晶体管及其制造方法及其制造设备
    • US20070284571A1
    • 2007-12-13
    • US11748567
    • 2007-05-15
    • Akira DoiTomohiro InoueMasahiko AndoMasakazu Kishi
    • Akira DoiTomohiro InoueMasahiko AndoMasakazu Kishi
    • H01L29/08H01L35/24H01L51/00
    • H01L51/0004H01L51/0055H01L51/0545H01L51/105
    • An organic thin-film transistor (TFT) with a large carrier mobility includes a drain electrode, a source electrode, which are made of different materials, and a semiconductor layer formed on upper surface of a substrate. Equipment for manufacturing the organic TFT comprises a substrate mounting unit, a painting unit, a light irradiating unit, a sealed container for housing the above units, and a gas supplying unit of an antioxidant gas to the sealed container. The organic TFT to be manufactured is placed on the substrate mounting unit and a semiconductor layer is formed by using the painting unit. The painted semiconductor layer is dried with a light by using the light irradiating unit. When the light with substantially uniform wavelength is irradiated to the drain and the source electrodes, a temperature gradient is caused in the semiconductor layer. Accordingly, an organic TFT with a large carrier mobility can be manufactured.
    • 具有大载流子迁移率的有机薄膜晶体管(TFT)包括由不同材料制成的漏电极,源电极以及形成在衬底的上表面上的半导体层。 用于制造有机TFT的设备包括基板安装单元,涂装单元,光照射单元,用于容纳上述单元的密封容器,以及将抗氧化气体供给到密封容器的单元。 将要制造的有机TFT放置在基板安装单元上,并且通过使用该涂装单元形成半导体层。 通过使用光照射单元,用光来干燥涂漆的半导体层。 当具有基本均匀的波长的光被照射到漏极和源电极时,在半导体层中引起温度梯度。 因此,可以制造具有大载流子迁移率的有机TFT。
    • 7. 发明授权
    • Solvent vapor sucking method and solvent recovering apparatus
    • 溶剂蒸汽吸取法和溶剂回收装置
    • US5565070A
    • 1996-10-15
    • US287826
    • 1994-08-09
    • Akira DoiHiroshi ObinataYoshikazu TakanoOsamu Matsumura
    • Akira DoiHiroshi ObinataYoshikazu TakanoOsamu Matsumura
    • B01D3/00B01D5/00C23G5/04B01D3/14B01D11/04
    • B01D5/0036B01D3/00B01D3/007B01D5/0081C23G5/04
    • A method for recovering solvent vapor in a manner which requires less power using an apparatus which is smaller in size, has a longer life, and is capable of being operated without reducing recovering efficiency, including locating an inlet of a suction pipe at a position within the container between the liquid surface of the solvent and an upper edge of the container, wherein the opening of the suction pipe is open downward, and drawing the vapor from the upper surface of the solvent in the container. The apparatus for carrying out this method includes a solvent container provided with a heater inside a lower part of the container, the container having an opening at the upper part thereof, a cooling device provided inside the container; a suction pipe disposed in the container such that an opening of the pipe is located below an upper edge of the container wherein the opening of the suction pipe is oriented downward; a suction device in fluid communication with the interior of the container by the suction pipe; and a solvent recovering device connected to the suction device. The vapor produced by the solvent in the container is drawn off by a compressor through the suction pipe. The vapor is condensed and recovered by the condensing device have more than two low-temperature condensers.
    • 使用尺寸更小的装置以较少的功率回收溶剂蒸汽的方法具有更长的使用寿命,并且能够在不降低回收效率的情况下进行操作,包括将吸入管的入口定位在内部的位置 溶剂的液面与容器的上边缘之间的容器,其中吸入管的开口向下敞开,并从容器的溶剂的上表面抽出蒸汽。 用于实施该方法的装置包括在容器的下部设置有加热器的溶剂容器,容器在其上部具有开口,设置在容器内部的冷却装置; 吸入管设置在容器中,使得管的开口位于容器的上边缘的下方,其中吸入管的开口朝向下方; 抽吸装置,通过吸管与容器的内部流体连通; 和与吸引装置连接的溶剂回收装置。 由容器中的溶剂产生的蒸汽由压缩机通过吸管排出。 蒸气被冷凝和回收,冷凝装置具有两个以上的低温冷凝器。
    • 10. 发明授权
    • Rocking actuator and laser machining apparatus
    • 摇摆执行器和激光加工设备
    • US07629714B2
    • 2009-12-08
    • US11833695
    • 2007-08-03
    • Souichi ToyamaKounosuke KitamuraAkira DoiHiromu HiraiKenta SekiYoshiaki Kano
    • Souichi ToyamaKounosuke KitamuraAkira DoiHiromu HiraiKenta SekiYoshiaki Kano
    • H02K33/00
    • H02K26/00H02K33/16
    • A rocking actuator and a laser machining apparatus which can suppress a temperature rise of a permanent magnet in a moving-magnet actuator. Even when a steerable mirror is positioned by rapid and continuous motions, highly reliable machining can be performed without degrading machining throughput or hole position accuracy. A cooling jacket for cooling a casing and heat transfer units brought into contact with a coil and the casing are provided. Heat generated in the coil is introduced to the casing through the heat transfer bypass units. Thus, the temperature rise of the coil is suppressed. Radial grooves are provided in the permanent magnet opposed to the coil so as to prevent an eddy current from appearing therein. Groove depth is made not smaller than skin depth expressed by a function of volume resistivity and permeability of the permanent magnet and a fundamental frequency of a current applied to the coil.
    • 可以抑制移动磁体致动器中的永磁体的温度升高的摆动致动器和激光加工装置。 即使通过快速连续的运动来定位可转向的镜子,也可以在不降低加工吞吐量或孔位置精度的情况下执行高度可靠的加工。 提供了用于冷却壳体的冷却套和与线圈和壳体接触的传热单元。 在线圈中产生的热量通过传热旁路单元引入壳体。 因此,线圈的温度上升被抑制。 在与线圈相对的永磁体中设置有径向槽,以防止其中出现涡流。 凹槽深度不小于由永磁体的体积电阻率和磁导率函数表示的皮肤深度以及施加到线圈的电流的基频。