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    • 8. 发明公开
    • 케미컬 공급 장치
    • 化学品供应设备
    • KR1020040056688A
    • 2004-07-01
    • KR1020020083229
    • 2002-12-24
    • 삼성전자주식회사
    • 강인구
    • H01L21/027
    • PURPOSE: A chemical supplying apparatus is provided to efficiently control leakage water and temperature by using a heat pipe instead of a constant temperature water, and to precisely control the temperature of the chemicals injected to a wafer by installing the heat pipe in a position most adjacent to a nozzle and by directly controlling the temperature of the chemicals of a chemical line. CONSTITUTION: Chemicals are supplied from a chemical storing tank(11) that is connected to a unit apparatus(20) for performing a process for fabricating a specific semiconductor by a chemical line(13). The heat pipe(17) for generating heat to the chemical line is installed in the chemical supplying apparatus. A temperature control unit(15) for controlling the temperature of the heat pipe is connected to the heat pipe.
    • 目的:提供一种化学品供应装置,通过使用热管代替恒温水来有效地控制泄漏水和温度,并通过将热管安装在最相邻的位置来精确控制注入到晶片的化学品的温度 并直接控制化学品的化学品的温度。 构成:化学品从连接到单元装置(20)的化学品储存罐(11)供应,用于通过化学品管线(13)进行用于制造特定半导体的工艺。 用于向化学品生产线发热的热管(17)安装在化学品供应装置中。 用于控制热管的温度的温度控制单元(15)连接到热管。
    • 10. 发明公开
    • 칩 스케일 적층 칩 패키지와 그 제조 방법
    • 芯片尺寸堆叠芯片包装及其制造方法
    • KR1020010056903A
    • 2001-07-04
    • KR1019990058575
    • 1999-12-17
    • 삼성전자주식회사
    • 심종보이관재강인구
    • H01L23/28
    • H01L24/97H01L24/94H01L2224/16145H01L2224/16225H01L2224/1703H01L2224/94H01L2224/97H01L2924/15311H01L2224/81
    • PURPOSE: A chip scale stack chip package and a manufacturing method thereof are provided to attain a high integration with reduced size and weight while having a plurality of chips. CONSTITUTION: The package(50) includes the first and second chips(12,32). The first chip(12) has the first insulating layer covering an active surface thereof except electrode pads, redistribution metal lines connected to the electrode pads and then extended over the first insulating layer, the second insulating layer covering the metal lines but having windows exposing parts of each metal line, and the first terminals(26) of bump shape formed in the outer windows and connected to the metal lines. The second chip(32) has the second terminals(37) of bump shape formed on electrode pads thereof and connected to the metal lines of the first chip(12) through the inner windows of the first chip(12). The second terminals(37) are smaller in height than the first terminals(26). The package(50) further includes a printed circuit board(51) to which the first chip(12) is attached by the first terminals(26), a resin encapsulant(55) filled in a space between the first chip(12) and the circuit board(51), and the third terminals(54) mounted on the circuit board(51) and electrically connected to the first terminals(26).
    • 目的:提供一种芯片级堆叠芯片封装及其制造方法,以在具有多个芯片的同时实现尺寸和重量减小的高集成度。 构成:包装(50)包括第一和第二芯片(12,32)。 第一芯片(12)具有覆盖其活性表面的第一绝缘层,除了电极焊盘,再分配金属线连接到电极焊盘,然后在第一绝缘层上延伸,第二绝缘层覆盖金属线,但具有窗口暴露部分 的每个金属线,以及形成在外窗中并连接到金属线的凸起形状的第一端子(26)。 第二芯片(32)具有形成在其电极焊盘上的凸起形状的第二端子(37),并通过第一芯片(12)的内部窗口与第一芯片(12)的金属线连接。 第二端子(37)的高度比第一端子(26)小。 所述封装(50)还包括印刷电路板(51),所述第一芯片(12)由所述第一端子(26)附接到所述印刷电路板(51),树脂密封剂(55)填充在所述第一芯片(12)和 电路板(51)和安装在电路板(51)上并电连接到第一端子(26)的第三端子(54)。