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1. 发明专利

JP2009150403A Turbo vacuum pump 有权
标题翻译：涡轮真空泵
公开(公告)号：JP2009150403A
公开(公告)日：2009-07-09
申请号：JP2009067239
申请日：2009-03-19
申请人： Ebara Corp , 株式会社荏原製作所
发明人： OCHIAI TOSHIHARU , SEKIGUCHI SHINICHI , MIYAMOTO MATSUTARO , NAKAZAWA TOSHIHARU
IPC分类号： F04D9/04 , F04D29/046 , F16C32/04
CPC分类号： F16C32/0442 , F16C32/0444 , F16C2360/42 , F16C2360/45
摘要： PROBLEM TO BE SOLVED: To provide a turbo vacuum pump improving exhaust performance by reducing a gap between a rotary blade and a stationary blade, accurately estimating temperature and thermal expansion quantity of a rotary shaft, and issuing warning or stopping operation before the rotary blade and the stationary blade touch.
SOLUTION: The turbo vacuum pump is provided with: at least a pair of axial magnetic bearings 59 magnetically floating a rotary shaft 54; a rotary blade 52 attached on a rotary shaft; a stationary blade 53 disposed to oppose to the rotary blade; and a motor 55 rotationally driving the rotary shaft. An exhaust part 90 is constructed by disposing the rotary blade and the stationary blade near one end part of the rotary shaft, a motion control part 91 is constructed by disposing an axial magnetic bearing 58 and a first axial displacement sensor 59 detecting an axial position of the rotary shaft near another end of the rotary shaft, and a second axial displacement sensor 60 detecting axial direction of the rotary shaft is disposed near the exhaust part.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供通过减小旋转叶片和固定叶片之间的间隙来提高排气性能的涡轮真空泵，精确地估计旋转轴的温度和热膨胀量，并在之前发出警告或停止操作旋转刀片和固定刀片接触。解决方案：涡轮真空泵设置有：至少一对轴向磁性轴承59，磁性浮动旋转轴54; 安装在旋转轴上的旋转刀片52; 设置成与旋转刀片相对的固定刀片53; 以及旋转地驱动旋转轴的马达55。排气部90通过将旋转刀片和固定刀片配置在旋转轴的一端部而构成，运动控制部91通过设置轴向磁轴承58和第一轴向位移传感器59构成，第一轴向位移传感器59检测轴向位置靠近旋转轴的另一端的旋转轴和检测旋转轴的轴向的第二轴向位移传感器60设置在排气部附近。版权所有（C）2009，JPO＆INPIT

2. 发明专利

JP2008157257A Turbo-molecular pump 审中-公开
标题翻译：涡轮分子泵
公开(公告)号：JP2008157257A
公开(公告)日：2008-07-10
申请号：JP2008035618
申请日：2008-02-18
申请人： Ebara Corp , 株式会社荏原製作所
发明人： MIYAMOTO MATSUTARO , OGAMINO HIROAKI
IPC分类号： F04D19/04
CPC分类号： F04D19/042 , F04D29/522 , F04D29/701
摘要： PROBLEM TO BE SOLVED: To inhibit or prevent formation of a side product in a pump by a specific process and enable establishment of a wide operable range. SOLUTION: A turbo-molecular pump includes a casing 14 having a rotor R and a stator S held in the casing, a blade exhaust part L 1 and/or a groove exhaust part L 2 composed of the rotor R and the stator S, an inner casing 152 surrounding circumference of the blade exhaust part L 1 and/or the groove exhaust part L 2 , and temperature adjustment mechanisms 206, 208 attached to a stator of the inner casing or the groove exhaust part L 2 . COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：通过特定的方法抑制或防止在泵中形成副产物，并且能够建立广泛的可操作范围。解决方案：涡轮分子泵包括具有转子R和保持在壳体中的定子S的壳体14，叶片排气部分L 1和/或槽排出部分L SB 由转子R和定子S构成的2 ，围绕叶片排出部L 1和/或槽排出部L 2的周围的内壳152， SB>和附接到内壳或槽排气部L 2 SB的定子的温度调节机构206,208。版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2014194847A Stage device and electron beam application device 有权
标题翻译：阶段装置和电子束应用装置
公开(公告)号：JP2014194847A
公开(公告)日：2014-10-09
申请号：JP2013069942
申请日：2013-03-28
申请人： Ebara Corp , 株式会社荏原製作所
发明人： MIYAMOTO MATSUTARO
IPC分类号： H01J37/20 , H01J37/09 , H01J37/16 , H01L21/027 , H01L21/68 , H02K9/19 , H02K41/02
摘要： PROBLEM TO BE SOLVED: To configure the stage device of an electron beam application device, for irradiating a sample with an electron beam, simply and compactly by using a linear motor so that the influence of magnetic force of the linear motor on the inspection or processing of a sample can be minimized.SOLUTION: A stage device to be housed in a container is configured so that a first stage and a second stage disposed vertically are driven by linear motors, respectively, and the stators and rotors of both motors are disposed on the outside of an electron beam irradiation region, and do not enter this region even during the process.
摘要翻译：要解决的问题：为了配置电子束施加装置的平台装置，通过使用线性电动机简单紧凑地照射电子束的样本，使得线性电动机的磁力对检查或处理的影响可以最小化样品。解决方案：容纳在容器中的平台装置被构造成使得垂直设置的第一阶段和第二阶段分别由线性电动机驱动，并且两个电动机的定子和转子被布置在电子束照射区域的外部，即使在该过程中也不进入该区域。

4. 发明专利

JP2009112102A Rotating apparatus 有权
标题翻译：旋转装置
公开(公告)号：JP2009112102A
公开(公告)日：2009-05-21
申请号：JP2007280989
申请日：2007-10-29
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KAWASAKI HIROYUKI , MIYAMOTO MATSUTARO
IPC分类号： H02K17/16 , H02K7/14
CPC分类号： F04D19/042 , F04D25/06 , H02K7/09 , H02K17/165
摘要： PROBLEM TO BE SOLVED: To provide a rotating apparatus having a rotor which rotates stably during high speed rotation, and being rotated at a relatively high speed by the torque of an induction motor excellent in reliability.
SOLUTION: A rotating apparatus comprises a rotor shaft 11, a motor rotor core 13a secured to the rotor shaft 11 and conductors arranged in the motor rotor core 13a, and an induction motor rotor 13 equipped with a motor end ring 13b for connecting the conductors collectively, wherein the rotor shaft 11 is rotated at a high speed by the torque of an induction motor, and a member (a rotor spacer 20) of such a structure as covering the motor end ring 13b is provided.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有转子的旋转装置，该转子在高速旋转期间稳定地旋转，并且通过可靠性优异的感应电动机的转矩以相对高的速度旋转。解决方案：旋转装置包括转子轴11，固定到转子轴11的电动机转子芯13a和布置在电动机转子芯13a中的导体以及配备有用于连接的电动机端环13b的感应电动机转子13 集体地形成导体，其中转子轴11通过感应电动机的扭矩以高速旋转，并且设置有覆盖电动机端环13b的结构的部件（转子间隔件20）。版权所有（C）2009，JPO＆INPIT

5. 发明专利

JPH11280689A Turbo molecular drag pump 失效
标题翻译：涡轮分子泵
公开(公告)号：JPH11280689A
公开(公告)日：1999-10-15
申请号：JP19653898
申请日：1998-06-26
申请人： Ebara Corp , 株式会社荏原製作所
发明人： IKEGAMI TETSUMASA , MIYAMOTO MATSUTARO , KAWASAKI HIROYUKI
IPC分类号： F04D19/04
CPC分类号： F04D19/042 , F04D29/522
摘要： PROBLEM TO BE SOLVED: To prevent breakage of a stator and a casing and to prevent breakage of a vacuum system caused thereby by providing a structure for releasing binding to a pump casing in circumferential or radial direction in a case where abnormal torque acts on a stator side on at least one portion of the stator in a turbo molecular pump. SOLUTION: During normal operation, a large torque does not act on a fixed vane 32 or fixed vane spacer 38 in circumferential or radial direction. A laminated structure of the fixed vane 32 and the fixed vane spacer 38 is bound by friction between each other and keeps its position. If abnormality occurs to rotation of a rotor for some reason and a large force is applied to fixed vane spacers 38a, 38b in circumferential and radial directions, the fixed vane spacers 38a, 38b are pushed outward. Then, a half spacer piece is separated and enters grooves 42, 44 in circumferential direction and the binding of other fixed vane spacer 38 against a stator S in axial direction is released. Accordingly, the fixed vane spacer 38 becomes freely rotatable. As a result, rotation energy of the rotor is absorbed thereby, and the rotor comes into a stop eventually.
摘要翻译：要解决的问题：为了防止定子和壳体的断裂，并且通过在异常转矩作用于定子的情况下提供用于释放与泵壳体在周向或径向方向上的结合的结构而导致的真空系统的断裂在涡轮分子泵中的至少一部分定子上。解决方案：在正常操作过程中，大的扭矩在周向或径向方向上不会对固定叶片32或固定叶片间隔件38作用。固定叶片32和固定叶片间隔件38的层叠结构通过彼此之间的摩擦而保持其位置。如果由于某种原因转子发生异常，并且在周向和径向方向上对固定叶片间隔件38a，38b施加大的力，固定叶片间隔件38a，38b被向外推。然后，半间隔件被分离并在圆周方向上进入槽42,44，并且释放其它固定叶片间隔件38与轴向方向的定子S的结合。因此，固定叶片间隔件38可自由转动。结果，转子的旋转能量被吸收，转子最终停止。

6. 发明专利

JP2014196693A 電子線応用装置の鏡筒部へ真空ポンプを接続する真空ポンプ用接続装置、及び該接続装置の設置方法有权
标题翻译：真空泵连接装置将真空泵连接到电子束应用装置的透镜条上以及用于安装真空泵连接装置的方法
公开(公告)号：JP2014196693A
公开(公告)日：2014-10-16
申请号：JP2013072410
申请日：2013-03-29
申请人：株式会社荏原製作所 , Ebara Corp
发明人： MIYAMOTO MATSUTARO
IPC分类号： F04D19/04 , H01J37/16 , H01J37/18 , H01L21/027
CPC分类号： F04D29/605 , F04D19/042 , Y10T29/49826
摘要：【課題】真空ポンプのロータロック時等において、ポンプの固定強度が低下することを防ぐ。【解決手段】真空ポンプ用接続装置34は、排気接続部24Aを介して互いに対向するように排気接続部24Aに接続された第1の振動吸収部36及び第2の振動吸収部38を有する。第1の振動吸収部36は、排気接続部24Aに接続された第1の振動吸収部36の第1の端部40の反対側にある第1の振動吸収部36の第2の端部42で、真空ポンプ16Aの吸気口28に接続される。第1の振動吸収部36及び第2の振動吸収部38は真空ポンプの振動を吸収する。第1の振動吸収部36及び第2の振動吸収部38は、弾性ベローズ36,38である。真空ポンプ用接続装置34は、排気接続部24Aに接続された第2の振動吸収部38の第1の端部42の反対側にある第2の振動吸収部38の第2の端部44で第2の振動吸収部38に固定される剛性の連結部材46を有する。【選択図】図1
摘要翻译：要解决的问题：为了防止在真空泵的转子锁定时泵固定强度降低。解决方案：真空泵连接装置34具有连接到真空泵的第一吸振部36和第二振动吸收部38 排气连接部分24A，使得它们通过排气连接部分24A彼此相对地面对。第一振动吸收部36在与第一吸振部36连接的第一振动吸收部36的第一端部40的相反侧的第一振动吸收部36的第二端部42连接到真空泵16A的吸入口28 到排气连接部24A。第一振动吸收部36和第二振动吸收部38吸收真空泵的振动。第一振动吸收部36和第二振动吸收部38是弹性波纹管36,38。真空泵连接装置34具有在第二振动的第二端部44处固定到第二振动吸收部38的刚性连接构件46 位于与排气连接部24A连接的第二振动吸收部38的第一端部42的相反侧的吸收部38。

7. 发明专利

JP2006170217A Turbo molecular pump 有权
标题翻译：涡轮分子泵
公开(公告)号：JP2006170217A
公开(公告)日：2006-06-29
申请号：JP2006047919
申请日：2006-02-24
申请人： Ebara Corp , 株式会社荏原製作所
发明人： IKEGAMI TETSUMASA , MIYAMOTO MATSUTARO , KAWASAKI HIROYUKI
IPC分类号： F04D19/04
CPC分类号： F04D19/042 , F04D29/522
摘要： PROBLEM TO BE SOLVED: To provide a turbo molecular pump having high safety and capable of preventing breakage of a stator and a casing and destruction of a vacuum system even when abnormality occurs on a rotor side.
SOLUTION: A fragile part 72 to be fractured when abnormal torque acts from a rotor R in at least a part of the stator having a vane exhaust part L
1 and a channel exhaust part L
2 constituted by the rotor R and the stator S to fix at least a part of the stator S to a pump casing 14 due to abnormal rotation or destruction of rotor R itself is provided in the inside of the pump casing 14. Friction reducing structures 58a, 58b for rotating the stator S in the vane exhaust part L
1 and the channel exhaust part L
2 after the fracture of the fragile part 72 when abnormal torque acts in at least a part of the stator S from the rotor R due to abnormal rotation or destruction of the rotor R itself are provided in at least a part between the stator S and the pump casing 14.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：即使在转子侧发生异常，也可提供具有高安全性并能够防止定子和壳体破裂的涡轮分子泵以及真空系统的破坏。解决方案：当具有叶片排气部分L 1 的定子的至少一部分中的转子R和通道排气部分L SB 由于转子R和定子S构成，由于转子R本身的异常旋转或破坏而将定子S的至少一部分固定在泵壳体14上，所以在泵壳14的内部用于使易碎部72断裂后的叶片排出部L 1和/或SB 2中的定子S旋转的摩擦减小结构58a，58b异常扭矩作用在定子S的至少一部分中，由于转子R的异常旋转或破坏而在定子S和泵壳14之间的至少一部分中设置有转子R。版权所有（C））2006年，日本特许厅和NCIPI

8. 发明专利

JP2005042709A Vacuum pump 审中-公开
标题翻译：真空泵
公开(公告)号：JP2005042709A
公开(公告)日：2005-02-17
申请号：JP2004173085
申请日：2004-06-10
申请人： Ebara Corp , 株式会社荏原製作所
发明人： SEKIGUCHI SHINICHI , MIYAMOTO MATSUTARO
IPC分类号： F04D29/056 , F04D17/16 , F04D19/04 , F04D29/058 , F04D29/04
CPC分类号： F04D29/058 , F04D17/168 , F04D19/046 , F04D23/008 , F04D29/266 , F04D29/30
摘要： PROBLEM TO BE SOLVED: To provide a vacuum pump, capable of evacuating in a pressure range from the atmospheric pressure to high vacuum, reduced in size and improved in pump performance by performing high speed rotation, and producing a completely oil-free vacuum. SOLUTION: This vacuum pump for discharging gas includes: a main shaft 5 supported to be freely rotated by a bearing 22; a motor 23 for driving the main shaft 5 to rotate; a first exhaust part 10 having a first rotary blade 13 fitted to the main shaft 5, a first fixed blade 14 fixed to the inside of a first casing 12 and an intake port 11; and a second exhaust part 30 having a second rotary blade 33 fitted to the main shaft 5, a second fixed blade 34 fixed to the inside of a second casing 32 and an exhaust port 31. The intake port 11 is disposed in the vicinity of the end of the main shaft 5, and the first exhaust part 10, the bearing 22 and the second exhaust part 30 are disposed in order along the axial direction of the main shaft 5. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够在从大气压到高真空的压力范围内排气的真空泵，通过高速旋转来减小尺寸并提高泵的性能，并且产生完全无油真空。解决方案：用于排出气体的真空泵包括：被轴承22自由旋转地支撑的主轴5; 用于驱动主轴5旋转的马达23; 第一排气部10具有安装在主轴5上的第一旋转叶片13，固定在第一壳体12的内部的第一固定叶片14和进气口11; 以及具有与主轴5嵌合的第二旋转叶片33的第二排气部30，固定在第二壳体32的内部的第二固定叶片34和排气口31.进气口11配置在主轴5的端部，第一排气部10，轴承22和第二排气部30沿着主轴5的轴向依次配置。（C）2005，JPO＆NCIPI

9. 发明专利

JP2014173885A Installation structure of length meter 有权
标题翻译：长度计的安装结构
公开(公告)号：JP2014173885A
公开(公告)日：2014-09-22
申请号：JP2013044365
申请日：2013-03-06
申请人： Ebara Corp , 株式会社荏原製作所
发明人： MIYAMOTO MATSUTARO
IPC分类号： G01B11/00 , H01J37/20 , H01L21/027
CPC分类号： G01N21/15 , G01B11/002 , G01B11/026 , G03F9/7049
摘要： PROBLEM TO BE SOLVED: To provide an installation structure of a length meter capable of adjusting an axial position of laser light of the length meter without opening a vacuum container, and adjusting the axial position of the laser light through accurate and simple operation even in the case where a length meter in which an input plane of laser light crosses an output plane, is used.SOLUTION: A vacuum container B for housing a length meter therein is provided separately from a vacuum container A for installing an object to be measured therein. In a side part of the vacuum container A, an installation base 5 is installed while being integrally fitted to the container A or a surface plate supporting a portion to be measured. On the installation base 5, the vacuum container B is installed while being disposed in such a manner that a sidewall of the container B is overlapped to a sidewall A1 of the vacuum container A with a side part plate material interposed therebetween. Laser light is made incident into the vacuum container A from a length meter 1 housed within the vacuum container B through laser light axis holes provided at corresponding positions of both the vacuum containers A and B, and laser light made incident and reflected in the object to be measured is made incident into the length meter 1.
摘要翻译：要解决的问题：提供一种能够在不打开真空容器的情况下调节长度计的激光的轴向位置的长度计的安装结构，并且通过精确和简单的操作来调节激光的轴向位置，即使在使用其中激光输入面与输出面交叉的长度计的情况。解决方案：用于在其中容纳长度计的真空容器B与用于安装被测量物体的真空容器A分开设置。在真空容器A的侧面部分中，安装基座5一体地装配到容器A或支撑被测量部分的表面板上。在安装基座5上，真空容器B被安装成使得容器B的侧壁与真空容器A的侧壁A1重叠，侧面板材料插入其间。通过设置在两个真空容器A和B的相应位置处的激光光轴孔和入射并反射到该物体中的激光，将激光从容纳在真空容器B内的长度计1入射到真空容器A中被测量入射到长度计1中。

10. 发明专利

JP2007087639A Electron beam device and pattern evaluation method 审中-公开
标题翻译：电子束装置和图案评估方法
公开(公告)号：JP2007087639A
公开(公告)日：2007-04-05
申请号：JP2005272181
申请日：2005-09-20
申请人： Ebara Corp , 株式会社荏原製作所
发明人： NAKASUJI MAMORU , KARIMATA TSUTOMU , KANEUMA TOSHIFUMI , MIYAMOTO MATSUTARO
IPC分类号： H01J37/21 , H01J37/153 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide an electron beam device capable of achieving high throughput by obviating the need to manufacture a Z-map and of evaluating a sample by reducing deviation of a focus even when an electron optical system using a large aperture angle is used by correcting chromatic aberration on an axis without needing an expensive stage.
SOLUTION: This electron beam device used for evaluating a pattern by continuously moving a sample base has an electron optical system having a visual field larger than a stripe width in a direction perpendicular to the continuous movement direction of the sample base and at least 1/4 of the stripe width in the continuous movement direction of the sample base; a beam is moved in the movement direction of the sample base before the pattern evaluation to acquire a signal waveform for measuring a focusing condition; and a pattern is evaluated by an optimum focusing condition obtained as the result thereof.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够通过避免制造Z图的需要而获得高产量的电子束装置，以及即使当使用大孔径的电子光学系统时也减小焦点的偏差来评估样品通过校正轴上的色差而不需要昂贵的台阶来使用角度。解决方案：用于通过连续移动样品基底来评估图案的电子束装置具有在垂直于样品基底的连续移动方向的方向上具有大于条纹宽度的视场的电子光学系统，并且至少在样品基底的连续运动方向上的条带宽度的1/4; 在图案评估之前，将光束沿着样品台的移动方向移动，以获取用于测量聚焦条件的信号波形; 并且通过作为其结果获得的最佳聚焦条件来评估图案。版权所有（C）2007，JPO＆INPIT

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