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    • 2. 发明专利
    • Dry vacuum pump unit
    • 干式真空泵单元
    • JP2010127119A
    • 2010-06-10
    • JP2008300100
    • 2008-11-25
    • Ebara Corp株式会社荏原製作所
    • KASHIWABARA SATOSHINIIMURA YOSHIHIROSEKIGUCHI SHINICHINAKAZAWA TOSHIHARUOYAMA ATSUSHI
    • F04C29/00F04C23/00F04C25/02
    • PROBLEM TO BE SOLVED: To provide a small and lightweight dry vacuum pump unit easy carriable by handling.
      SOLUTION: This dry vacuum pump unit includes a pump part 21 comprising a pair of pump rotors 32a and 32b and a pump casing 30 having an intake port 21a and an exhaust port 21b, and a motor part 20. The motor part 20 is a magnet coupling type DC brushless motor having a pair of magnet rotors and integrally mutually synchronously anti-rotating the pair of pump rotors without using a timing gear. The pump casing 30 is constituted of aluminum or an aluminum alloy, and the pump rotors 32a and 32b are provided by fitting and fixing a screw composed of aluminum or an aluminum alloy or forming and fixing a screw composed of resin material, on the outer periphery of rotary shafts 31a and 31b composed of a steel material.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一个小而轻便的干式真空泵单元,通过处理便于携带。 解决方案:该干式真空泵单元包括:泵部21,其包括一对泵转子32a和32b;以及具有进气口21a和排气口21b的泵壳体30以及电动机部件20.马达部件20 是一种具有一对磁体转子的磁体耦合型直流无刷电动机,并且在不使用正时齿轮的情况下整体地相互同步地防转动一对泵转子。 泵壳30由铝或铝合金构成,泵转子32a,32b通过将由铝或铝合金构成的螺钉嵌合固定,或者在外周形成固定由树脂材料构成的螺杆 由钢材构成的旋转轴31a,31b。 版权所有(C)2010,JPO&INPIT
    • 3. 发明专利
    • Dry vacuum pump device
    • 干式真空泵装置
    • JP2014074380A
    • 2014-04-24
    • JP2012222878
    • 2012-10-05
    • Ebara Corp株式会社荏原製作所
    • IWASAKI KOICHINAKAZAWA TOSHIHARUYOSHIDA SHINYAOYAMA ATSUSHI
    • F04C25/02F04C28/06F04C28/28
    • PROBLEM TO BE SOLVED: To provide a dry vacuum pump that can be stably operated without causing a failure of a motor and an inverter when a load is increased.SOLUTION: A dry vacuum pump device 1 comprises: at least one pump unit; and a control device 5 for controlling the pump unit. The pump unit comprises: a dry vacuum pump 2; a motor 3 for driving the dry vacuum pump 2; and an inverter 4 for controlling the rotational speed of the motor 3. The control device 5 has a function of switching an output current limit value of the inverter 4 from a first current limit value to a second current limit value. The first current limit value is a continuous rated current value, which is the maximum current value that can be continuously passed through the motor 3 by the inverter 4, and the second current limit value is larger than the continuous rated current value.
    • 要解决的问题:提供一种干式真空泵,其能够在负载增加时不会引起电动机和逆变器的故障而稳定地运行。解决方案:干式真空泵装置1包括:至少一个泵单元; 以及用于控制泵单元的控制装置5。 泵单元包括:干式真空泵2; 驱动干式真空泵2的马达3; 以及用于控制电动机3的转速的逆变器4.控制装置5具有将逆变器4的输出电流限制值从第一限流值切换到第二限流值的功能。 第一电流限制值是连续的额定电流值,其是由逆变器4连续通过电动机3的最大电流值,并且第二电流限制值大于连续额定电流值。
    • 4. 发明专利
    • Power supply device
    • 电源设备
    • JP2012055042A
    • 2012-03-15
    • JP2010193978
    • 2010-08-31
    • Ebara Corp株式会社荏原製作所
    • OSUGA TORUOYAMA ATSUSHINAKAZAWA TOSHIHARU
    • H02M7/48H02M3/155H02M7/493H02P27/06
    • PROBLEM TO BE SOLVED: To provide a power supply device capable of responding to a demand for transient large power, with small size.SOLUTION: The power supply device includes a cutoff unit for supplying/shielding a commercial power source, and inverters 11 and 21 for outputting a drive power of arbitrary frequency to motors M1 and M2. The inverters 11 and 21 include a rectification part for rectifying a commercial power supply, and a smoothing part for smoothing the voltage rectified by the rectification part. An output part of the smoothing part is equipped with a frequency conversion part consisting of a switching element. A transient power supply part 14 is provided in which, when an output power of the frequency conversion part comes to be a predetermined value or higher, a shortfall power is supplied to the frequency conversion part, from a capacitor of the smoothing part or from a capacitor 12 for supplying power, which is separately installed, and when the output power of the frequency conversion part comes to be a predetermined value or less, the capacitor 12 for power supply is charged with the rectification part. Thus, with a load fluctuation of an output power relative to the input power to the inverters 11 and 21 being averaged in terms of time, the component on the high order side of the frequency conversion part and the capacity of equipment are miniaturized.
    • 要解决的问题:提供能够响应于具有小尺寸的瞬态大功率的需求的电源装置。 解决方案:电源装置包括用于提供/屏蔽商用电源的切断单元以及用于向马达M1和M2输出任意频率的驱动功率的反相器11和21。 逆变器11和21包括用于整流商用电源的整流部分和用于平滑由整流部分整流的电压的平滑部分。 平滑部的输出部配备有由开关元件构成的变频部。 提供了一个瞬时电源部分14,其中当频率转换部分的输出功率达到预定值或更高时,从平滑部分的电容器或从平滑部分的电容器向频率转换部分提供短缺功率 用于供电的电容器12,分开安装,当变频部的输出功率为规定值以下时,电源用电容器12由整流部分充电。 因此,相对于反相器11和21的输入功率的输出功率的负载波动在时间上被平均化,变频部分的高阶侧的分量和设备的容量被小型化。 版权所有(C)2012,JPO&INPIT
    • 5. 发明专利
    • Brushless synchronous motor and its drive controller
    • 无刷同步电机及其驱动控制器
    • JP2007104738A
    • 2007-04-19
    • JP2005287300
    • 2005-09-30
    • Ebara Corp株式会社荏原製作所
    • NAKAZAWA TOSHIHARUOYAMA ATSUSHI
    • H02K29/06H02K1/27H02K21/14H02P6/18
    • H02P6/16H02K21/14H02K29/12
    • PROBLEM TO BE SOLVED: To provide an inexpensive brushless synchronous motor having a simple structure. SOLUTION: The brushless synchronous motor comprises: a rotor 1 having salient magnets 2-5 arranged in the circumferential direction; and a stator 6 having drive magnetic poles 9 applied with an exciting coil 8 and arranged in the circumferential direction wherein the rotor 1 has a noncircular cross-section. The rotor 1 may be a tubular body having at least one plane perpendicular to the direction of one magnetic pole of the rotor 1, or a tubular body of elliptical cross-section having the long diameter in the direction of one magnetic pole of the rotor. Rotation angle of the rotor 1 is detected by providing a required number of exciting coils 8 with a detection circuit outputting a detection signal indicative of the impedance of the exciting coil 8 dependent on the distance between the drive magnetic pole 9 and the rotor 1. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种具有简单结构的便宜的无刷同步电动机。 解决方案:无刷同步电动机包括:具有沿圆周方向布置的突出磁体2-5的转子1; 以及具有施加有励磁线圈8并且沿圆周方向布置的转子1具有非圆形横截面的驱动磁极9的定子6。 转子1可以是具有与转子1的一个磁极的方向垂直的至少一个平面的管状体或具有沿转子的一个磁极的方向具有长直径的椭圆形截面的管状体。 通过提供所需数量的励磁线圈8来检测转子1的旋转角度,检测电路根据驱动磁极9和转子1之间的距离输出表示励磁线圈8的阻抗的检测信号。 P>版权所有(C)2007,JPO&INPIT
    • 6. 发明专利
    • Magnetic bearing device and turbo-type vacuum pump
    • 磁力轴承装置和涡轮式真空泵
    • JP2005240952A
    • 2005-09-08
    • JP2004054281
    • 2004-02-27
    • Ebara CorpEbara Densan Ltd株式会社荏原製作所株式会社荏原電産
    • OCHIAI TOSHIHARUSEKIGUCHI SHINICHIMIYAMOTO MATSUTARONAKAZAWA TOSHIHARU
    • G01B7/30F04D19/04F04D29/04F04D29/056F04D29/058F16C32/04G01B7/00H02K7/09
    • F16C32/0476F16C32/0446F16C2360/45
    • PROBLEM TO BE SOLVED: To provide a magnetic bearing device capable of reducing the influence of a thermal expansion of a rotary shaft due to high temperature, preventing the amount of whirling caused by unbalance of a rotary shaft from being superposed on the output value of an axial displacement sensor, mounting the axial displacement sensor in a place other than an end of the rotary shaft, and stably controlling a position in the axial direction of the rotary shaft. SOLUTION: The magnetic bearing device is equipped with at least a pair of axial magnetic bearings 5a, 5b for magnetically levitating a rotary shaft 1, at least one axial displacement sensor 6 for detecting an axial levitating position of the rotary shaft 1, a magnetic bearing control device 17 for controlling exciting current of the axial magnetic bearings 5a, 5b so as to magnetically levitate the rotary shaft 1 at a prescribed position on the basis of the output value of the axial displacement sensor 6. A sensor target 7 concentric with the rotary shaft 1 is provided to the vicinity of a high-temperature part of the rotary shaft 1. The axial displacement sensor 6 is arranged in a position opposed to the sensor target 7. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种能够降低由于高温导致的旋转轴的热膨胀的影响的磁轴承装置,防止由旋转轴的不平衡引起的旋转量叠加在输出端上 轴向位移传感器的值,将轴向位移传感器安装在旋转轴的端部以外的位置,并稳定地控制旋转轴的轴向位置。 解决方案:磁性轴承装置配备有至少一对用于磁悬浮旋转轴1的轴向磁轴承5a,5b,至少一个用于检测旋转轴1的轴向悬浮位置的轴向位移传感器6, 磁轴承控制装置17,其用于控制​​轴向磁轴承5a,5b的励磁电流,以便根据轴向位移传感器6的输出值将旋转轴1磁化悬浮在规定的位置。传感器目标7同心 旋转轴1设置在旋转轴1的高温部附近。轴向位移传感器6配置在与传感器目标7相对的位置。(C)2005,JPO&NCIPI
    • 7. 发明专利
    • モータ、ポンプ
    • 电机和泵
    • JP2014236546A
    • 2014-12-15
    • JP2013115092
    • 2013-05-31
    • 株式会社荏原製作所Ebara Corp
    • HOZUMI TAKASHIINADA TAKANORIYOSHIDA SHINYAKOJIMA YOSHINORINAKAZAWA TOSHIHARU
    • H02K5/128F04D19/04H02K7/09
    • 【課題】渦電流の発生防止と、モータステータとモータロータとの空隙の低減とを両立させつつ、モータステータを腐食性ガスまたは凝縮性ガスから保護する。【解決手段】ポンプに連結され、ポンプの回転駆動源として使用されるためのモータは、回転軸線を中心に回転可能なモータロータと、モータロータの外側に配置されたモータステータであって、ステータコアと、ステータコアの回転軸線の方向の両端に形成されたコイル露出部と、を有するモータステータとを備える。ステータコアのうちのモータの内部空間に露出する部位と、コイル露出部の周囲とには、非導電性とシール性とを有する被膜層が形成される。【選択図】図1
    • 要解决的问题:提供一种能够防止涡电流的发生和减少电动机定子与电动机转子之间的气隙的技术,并且保护电动机定子免受腐蚀性气体或可冷凝气体的影响。解决方案:A 与泵连接并用于泵的旋转驱动源的马达包括:可绕旋转轴线旋转的马达转子; 以及电动机定子,其设置在所述电动机转子的外侧,并且具有形成在所述定子铁心的两端的旋转轴线方向的定子铁心和线圈露出部。 具有密封性的不导电涂层形成在定子芯的暴露于电动机的内部空间和位于线圈暴露部分周围的定子芯的部分的部分上。
    • 9. 发明专利
    • Vacuum pump
    • 真空泵
    • JP2012120268A
    • 2012-06-21
    • JP2010265415
    • 2010-11-29
    • Ebara Corp株式会社荏原製作所
    • INADA TAKANORIKOJIMA YOSHINORINAKAZAWA TOSHIHARUOYAMA ATSUSHI
    • H02P27/06F04C25/02F04C29/00H02P5/74
    • PROBLEM TO BE SOLVED: To provide a vacuum pump that inexpensively implements improved operating performance and reduced power consumption by switching between a permanent magnet synchronization operation and an induction motor operation in accordance with the operating state of an electric motor.SOLUTION: The vacuum pump includes: a pump rotor disposed in a rotor casing; a rotary shaft for rotating the pump rotor; the electric motor having a motor rotor coupled to an end of the rotary shaft, provided with a plurality of permanent magnets and provided with a secondary conductor around the plurality of permanent magnets, and driving the rotary shaft to rotate the pump rotor; a detection section for detecting an operating state of the electric motor; and a control section for switching between a permanent magnet synchronization operation of driving the rotary shaft with the permanent magnets and an induction motor operation of driving the rotary shaft with the secondary conductor in accordance with the operating state of the electric motor detected by the detection section.
    • 要解决的问题:提供一种真空泵,其通过根据电动机的运行状态在永久磁铁同步操作和感应电动机操作之间切换而廉价地实现改进的操作性能和降低的功率消耗。 解决方案:真空泵包括:设置在转子壳体中的泵转子; 用于使所述泵转子旋转的旋转轴; 所述电动机具有联接到所述旋转轴的端部的电动机转子,设置有多个永磁体,并且在所述多个永磁体周围设置有次级导体,并且驱动所述旋转轴以使所述泵转子旋转; 用于检测电动机的运行状态的检测部分; 以及控制部分,用于根据由检测部分检测到的电动机的操作状态,在驱动旋转轴的永久磁铁同步操作与永磁体之间进行切换,以及感应电动机操作,其使用二次导体驱动旋转轴 。 版权所有(C)2012,JPO&INPIT
    • 10. 发明专利
    • Magnetic levitation type rotation introduction apparatus
    • 磁力诱导型旋转引言装置
    • JP2012060754A
    • 2012-03-22
    • JP2010200713
    • 2010-09-08
    • Ebara Corp株式会社荏原製作所
    • OYAMA ATSUSHIIBARADA TOSHIMITSUNAKAZAWA TOSHIHARUMATSUMURA KAZUHO
    • H02K7/09F16C32/04F16H49/00H01L21/68
    • PROBLEM TO BE SOLVED: To provide a magnetic levitation type rotation introduction apparatus which adopts a magnetic levitation type needless to use a magnetic fluid seal, and which makes it possible to make a length in an axial direction as a device short as much as possible.SOLUTION: There is provided a rotor 12 which outputs a rotation power, and the rotor 12 is rotation-supported at a prescribed position in a state of non-contact by two or more pairs of radial magnetic bearings 40 which are arranged in a radial direction of the rotor 12, and control a radial direction variation of the rotor 12 in a state of non-contact, and axial magnetic bearings 50 which are separated into 3 or more pairs and arranged in a circumference of the rotor 12, and control a axial direction variation of the rotor 12 in a state of non-contact. Radial electromagnets 44 of the radial magnetic bearing 40, and axial electromagnets 54 of the axial magnetic bearing 50 are arranged on approximately the same plane, and are fixed to a casing part 14.
    • 解决的问题:提供一种采用磁悬浮式的磁悬浮式旋转引导装置,不需要使用磁性流体密封,并且使得可以使轴向长度成为短的装置 尽可能。 解决方案:提供了一个输出旋转动力的转子12,转子12在两个或更多对径向磁轴承40的非接触状态下在规定位置旋转支承, 转子12的径向,并且控制非接触状态下的转子12的径向变化,以及分离成3对或更多对配置在转子12的圆周上的轴向磁轴承50,以及 在非接触状态下控制转子12的轴向变化。 径向磁轴承40的径向电磁体44和轴向磁性轴承50的轴向电磁铁54被布置在大致相同的平面上,并被固定在壳体部分14上。(C)2012,JPO&INPIT