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1. 发明专利

JPH11280689A Turbo molecular drag pump 失效
标题翻译：涡轮分子泵
公开(公告)号：JPH11280689A
公开(公告)日：1999-10-15
申请号：JP19653898
申请日：1998-06-26
申请人： Ebara Corp , 株式会社荏原製作所
发明人： IKEGAMI TETSUMASA , MIYAMOTO MATSUTARO , KAWASAKI HIROYUKI
IPC分类号： F04D19/04
CPC分类号： F04D19/042 , F04D29/522
摘要： PROBLEM TO BE SOLVED: To prevent breakage of a stator and a casing and to prevent breakage of a vacuum system caused thereby by providing a structure for releasing binding to a pump casing in circumferential or radial direction in a case where abnormal torque acts on a stator side on at least one portion of the stator in a turbo molecular pump. SOLUTION: During normal operation, a large torque does not act on a fixed vane 32 or fixed vane spacer 38 in circumferential or radial direction. A laminated structure of the fixed vane 32 and the fixed vane spacer 38 is bound by friction between each other and keeps its position. If abnormality occurs to rotation of a rotor for some reason and a large force is applied to fixed vane spacers 38a, 38b in circumferential and radial directions, the fixed vane spacers 38a, 38b are pushed outward. Then, a half spacer piece is separated and enters grooves 42, 44 in circumferential direction and the binding of other fixed vane spacer 38 against a stator S in axial direction is released. Accordingly, the fixed vane spacer 38 becomes freely rotatable. As a result, rotation energy of the rotor is absorbed thereby, and the rotor comes into a stop eventually.
摘要翻译：要解决的问题：为了防止定子和壳体的断裂，并且通过在异常转矩作用于定子的情况下提供用于释放与泵壳体在周向或径向方向上的结合的结构而导致的真空系统的断裂在涡轮分子泵中的至少一部分定子上。解决方案：在正常操作过程中，大的扭矩在周向或径向方向上不会对固定叶片32或固定叶片间隔件38作用。固定叶片32和固定叶片间隔件38的层叠结构通过彼此之间的摩擦而保持其位置。如果由于某种原因转子发生异常，并且在周向和径向方向上对固定叶片间隔件38a，38b施加大的力，固定叶片间隔件38a，38b被向外推。然后，半间隔件被分离并在圆周方向上进入槽42,44，并且释放其它固定叶片间隔件38与轴向方向的定子S的结合。因此，固定叶片间隔件38可自由转动。结果，转子的旋转能量被吸收，转子最终停止。

2. 发明专利

JP2005256179A Apparatus and method for electroless plating 审中-公开
标题翻译：电镀镀层的装置和方法
公开(公告)号：JP2005256179A
公开(公告)日：2005-09-22
申请号：JP2005150068
申请日：2005-05-23
申请人： Ebara Corp , 株式会社荏原製作所
发明人： TOMIOKA MASAYA , IKEGAMI TETSUMASA , OKUYAMA SHUICHI , SENDAI SATOSHI
IPC分类号： C23C18/31
摘要： PROBLEM TO BE SOLVED: To provide an electroless plating apparatus which can form a plating film with a uniform thickness and inhibites the occurrence of stains and smears caused by unnecessary oxidation, reduction or corrosion reaction by deposited liquid, and drying of locally deposited liquid, and to provide an electroless plating method.
SOLUTION: The electroless plating apparatus for performing electroless plating on a plating substrate 20 is equipped with an on-off valve for supplying a detergent and performs a plating treatment and a washing treatment in an electroless plating tank 10. The plating treatment is performed by placing the plating substrate 20 in the electroless plating tank 10 and supplying an electroless plating liquid Q
1 to the electroless plating tank 10 to form the electroless plating film on the surface of the plating substrate, and the washing treatment is performed by supplying the detergent to the surface of the substrate 20 through the on-off valve to wash the surface of the substrate 20.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够形成均匀厚度的镀膜的化学镀设备，并且抑制由沉积液体的不必要的氧化，还原或腐蚀反应引起的污渍和污迹的发生，以及局部沉积的干燥液体，并提供化学镀方法。解决方案：用于在电镀基板20上进行无电镀的化学镀设备配备有用于供给洗涤剂的开关阀，并在化学镀槽10中进行电镀处理和洗涤处理。电镀处理通过将电镀基板20放置在化学镀槽10中并将化学镀液Q SB 1施加到化学镀槽10上以在镀覆基板的表面上形成化学镀膜来进行，通过开关阀将洗涤剂供给到基板20的表面以洗涤基板20的表面来进行洗涤处理。（C）2005，JPO＆NCIPI

3. 发明专利

JP2006170217A Turbo molecular pump 有权
标题翻译：涡轮分子泵
公开(公告)号：JP2006170217A
公开(公告)日：2006-06-29
申请号：JP2006047919
申请日：2006-02-24
申请人： Ebara Corp , 株式会社荏原製作所
发明人： IKEGAMI TETSUMASA , MIYAMOTO MATSUTARO , KAWASAKI HIROYUKI
IPC分类号： F04D19/04
CPC分类号： F04D19/042 , F04D29/522
摘要： PROBLEM TO BE SOLVED: To provide a turbo molecular pump having high safety and capable of preventing breakage of a stator and a casing and destruction of a vacuum system even when abnormality occurs on a rotor side.
SOLUTION: A fragile part 72 to be fractured when abnormal torque acts from a rotor R in at least a part of the stator having a vane exhaust part L
1 and a channel exhaust part L
2 constituted by the rotor R and the stator S to fix at least a part of the stator S to a pump casing 14 due to abnormal rotation or destruction of rotor R itself is provided in the inside of the pump casing 14. Friction reducing structures 58a, 58b for rotating the stator S in the vane exhaust part L
1 and the channel exhaust part L
2 after the fracture of the fragile part 72 when abnormal torque acts in at least a part of the stator S from the rotor R due to abnormal rotation or destruction of the rotor R itself are provided in at least a part between the stator S and the pump casing 14.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：即使在转子侧发生异常，也可提供具有高安全性并能够防止定子和壳体破裂的涡轮分子泵以及真空系统的破坏。解决方案：当具有叶片排气部分L 1 的定子的至少一部分中的转子R和通道排气部分L SB 由于转子R和定子S构成，由于转子R本身的异常旋转或破坏而将定子S的至少一部分固定在泵壳体14上，所以在泵壳14的内部用于使易碎部72断裂后的叶片排出部L 1和/或SB 2中的定子S旋转的摩擦减小结构58a，58b异常扭矩作用在定子S的至少一部分中，由于转子R的异常旋转或破坏而在定子S和泵壳14之间的至少一部分中设置有转子R。版权所有（C））2006年，日本特许厅和NCIPI

4. 发明专利

JP2005307356A Electroless copper-plating method 审中-公开
标题翻译：电镀铜法
公开(公告)号：JP2005307356A
公开(公告)日：2005-11-04
申请号：JP2005213228
申请日：2005-07-22
申请人： Ebara Corp , 株式会社荏原製作所
发明人： SENDAI SATOSHI , KOGURE NAOAKI , KURIYAMA FUMIO , IKEGAMI TETSUMASA , OKUYAMA SHUICHI
IPC分类号： C23C18/38
摘要： PROBLEM TO BE SOLVED: To provide an electroless copper-plating method capable of prolonging the service life of the plating solution and facilitating the control of a plating liquid, by inhibiting a Cannizzaro reaction as much as possible. SOLUTION: The copper plating method comprises plating a substrate W with copper while circulating the plating liquid 10 between a plating tank 11 in which the substrate W is held and is electroless copper-plated and a plating liquid circulation tank 12 for storing the plating liquid 10 therein, so that a temperature T 1 of the plating liquid 10 in the plating tank 11 can be higher than the temperature T 2 of the plating liquid 10 in the plating liquid circulation tank 12 (T 1 >T 2 ); and throughout the period of carrying the substrate in and taking it out from the plating process tank 11, returning all of the plating liquid 10 to the plating liquid circulation tank 12. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：通过尽可能地抑制坎尼扎罗反应，提供能够延长电镀液的使用寿命并且便于电镀液的控制的化学镀铜方法。解决方案：铜电镀方法包括在将电镀液体10在其中保持基板W的镀槽11和电化学镀铜之间循环电镀液体10的同时将铜基板W电镀，并且将电镀液循环罐12 电镀液10，使得电镀槽11中的电镀液10的温度T SB> 1 可以高于电镀液10中的电镀液10的温度T SB> 2 电镀液循环箱12（T 1 > T 2 ）; 并且在将基板搬运并从电镀处理槽11中取出的期间，将所有的电镀液10返回到电镀液循环槽12.版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2003083283A Turbo-molecular pump 有权
标题翻译：涡轮分子泵
公开(公告)号：JP2003083283A
公开(公告)日：2003-03-19
申请号：JP2002255227
申请日：2002-08-30
申请人： Ebara Corp , 株式会社荏原製作所
发明人： IKEGAMI TETSUMASA , MIYAMOTO MATSUTARO , KAWASAKI HIROYUKI
IPC分类号： F04D19/04
摘要： PROBLEM TO BE SOLVED: To provide a safe turbo-molecular pump preventing damage to a stator or a casing and accompanying destroying of a vacuum system even when abnormality occurs on a rotor side.
SOLUTION: This turbo-molecular pump has vane discharge parts L
1 , L
2 formed by the rotor R and the stator S. A friction reducing structure is placed in at least a part between the stator S of the vane discharge parts L
1 , L
2 and a pump casing 14.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：即使在转子侧发生异常，也可以提供安全的涡轮分子泵，防止对定子或壳体造成损坏，并伴随破坏真空系统。解决方案：该涡轮分子泵具有由转子R和定子S形成的叶片排出部分L1，L2。在叶片排出部分L1，L2的定子S和泵之间的至少一部分中放置减摩结构套管14。

6. 发明专利

JPH11280690A Turbo-molecular pump 失效
标题翻译：涡轮分子泵
公开(公告)号：JPH11280690A
公开(公告)日：1999-10-15
申请号：JP9998998
申请日：1998-03-27
申请人： Ebara Corp , 株式会社荏原製作所
发明人： IKEGAMI TETSUMASA , MIYAMOTO MATSUTARO
IPC分类号： F04D19/04
摘要： PROBLEM TO BE SOLVED: To stop the pump safely before the rotating vane of the rotor touches or collides against the fixed vane or other members of the stator by measuring and grasping the relationship in terms of radial position.
SOLUTION: In the pump casing of this turbo-molecular pump in which a rotor R and a stator S constitute a vane exhaust zone L1 and a groove exhaust zone L2, a sensor 40 is provided to measure the positional relationship between the rotor R and stator S relative to the diameter. With the output from the sensor 40, positional relationship between the rotor R and the stator S relative to the diameter can be grasped. The pump can be safely stopped before the rotating vane of the rotor touches or collides against the fixed vane or other members of the stator.
COPYRIGHT: (C)1999,JPO
摘要翻译：要解决的问题：通过测量和掌握径向位置的关系，在转子的旋转叶片接触或碰撞固定叶片或定子的其他部件之前，安全地停止泵。解决方案：在该涡轮分子泵的泵壳中，转子R和定子S构成叶片排气区域L1和凹槽排出区域L2，设置传感器40以测量转子R和定子之间的位置关系 S相对于直径。通过传感器40的输出，可以掌握转子R与定子S之间的相对于直径的位置关系。在转子的旋转叶片接触或碰撞固定叶片或定子的其他部件之前，泵可以安全地停止。

7. 发明专利

JPH10274174A LIQUID TRANSFERRING DEVICE AND ITS CONTROLLING METHOD 失效
公开(公告)号：JPH10274174A
公开(公告)日：1998-10-13
申请号：JP2392598
申请日：1998-01-21
申请人： EBARA CORP , EBARA DENSAN KK
发明人： YAMAMOTO JUICHI , IKEGAMI TETSUMASA , SOFUGAWA TAKUJI , AIYOSHIZAWA SHIYUNICHI , NAKAZAWA TOSHIHARU , KOJIMA YOSHINORI
IPC分类号： F04C2/16 , F04C15/00 , F04D3/02 , F04D13/06 , F04D15/00 , F04D29/04 , F04D29/048 , F17D1/14 , H02K7/09 , H02K7/14 , H02K29/00 , H02P6/22
摘要： PROBLEM TO BE SOLVED: To prevent stagnation of liquid in a discharge pipe and stop fluid flow by means of a pump itself, by arranging a screw type pump having a pump rotor which can be controlled in rotational speed in both normal and reverse directions on the way of a liquid transferring line, and thereby suctioning back the liquid in a reverse direction. SOLUTION: In order to feed liquid, a pump rotor 13 is rotated in a normal direction, that is, a direction for spirally feeding liquid along a screw thread groove 12a from a suctioning port 2a to a discharging port 2b. After completing feeding of a required amount of liquid, the residual liquid in a discharge pipe 4 is suctioned back into a suction pipe 3. Namely, after the pump rotor 12 is stopped, the rotational direction of the pump rotor 12 is changed for suctioning the residual liquid inside the discharge pipe 4 back to the suction pipe 3. When the pump rotor 12 is stopped, however, liquid is under contraflow due to a large discharging port head and pressure difference between the pump suctioning side and the discharging side. In such a case, the rotational speed of the pump rotor 12 is reduced for performing suctioning back.

8. 发明专利

JP2000226671A ELECTROLESS PLATING DEVICE 失效
公开(公告)号：JP2000226671A
公开(公告)日：2000-08-15
申请号：JP3023099
申请日：1999-02-08
申请人： EBARA CORP
发明人： SENDAI SATOSHI , IKEGAMI TETSUMASA , MISHIMA KOJI , INOUE HIROAKI , OKUYAMA SHUICHI
IPC分类号： C23C18/31 , H01L21/288
摘要： PROBLEM TO BE SOLVED: To provide an electroless plating device which is capable of reducing incomplete plating or irregular plating, small in degradation of a plating solution and change in concentration of the composition of the plating solution, capable of keeping the plating temperature at a specified temperature, stable in plating quality, and capable of avoiding the increase in the cost in disposing the solution and the excessive burden on the environment. SOLUTION: In an electroless plating device to form a metallic plating film on a surface to be plated by bringing the electroless plating solution in contact with a surface of a substrate to be plated, the surface of the substrate 1 to be plated is faced upward, a space in which the surfaces to be plated are opposite to each other and sealed is formed in a plating cell 22, the electroless plating solution is fed into the sealed space from an initial make-up tank through a plating solution feed valve 9, and the plating is achieved by feeding the pressure pulsation to the sealed space from a pressure pulsation generation part 24.

9. 发明专利

JP2000160349A ELECTROLESS PLATING DEVICE 失效
公开(公告)号：JP2000160349A
公开(公告)日：2000-06-13
申请号：JP33748898
申请日：1998-11-27
申请人： EBARA CORP
发明人： TOMIOKA MASAYA , IKEGAMI TETSUMASA , OKUYAMA SHUICHI , SENDAI SATOSHI
IPC分类号： H05K3/18 , C23C18/31 , H01L21/288
摘要： PROBLEM TO BE SOLVED: To provide an electroless plating device by which a plating film is formed in uniform thickness, and the contamination or blotting due to the useless oxidation, reduction, corrosion reaction, drying of the locally deposited soln. or the like, depending on the quality of the deposited soln. is never caused. SOLUTION: A substrate 20 to be plated is electroless-plated by this method. The device is provided with a plating soln. circulating tank 15, a plating soln. circulating pump 17 and switching valves (stop valves V1 to V8), the substrate 20 is placed in an electroless-plating tank 10, and an electroless plating soln. Q1 is supplied from the tank 15, the soln. Q1 is completely isolated from the outside air, and an electroless plating film is formed on the substrate 20 surface in a closed state. The substrate 20 in the plating tank 10 is not exposed to the outside air and is plated, washed with water and dried in series.

10. 发明专利

JPH11230084A TURBO MOLECULAR PUMP 失效
公开(公告)号：JPH11230084A
公开(公告)日：1999-08-24
申请号：JP5298698
申请日：1998-02-18
申请人： EBARA CORP
发明人： KAWASAKI HIROYUKI , IKEGAMI TETSUMASA , MIYAMOTO MATSUTARO
IPC分类号： F04D19/04 , F16C32/04
摘要： PROBLEM TO BE SOLVED: To provide a turbo molecular pump formed into its compact size in the axial direction and having sufficient exhausting/compressing capabilities. SOLUTION: A turbo molecular pump is provided with a rotor R capable of being rotated at high speed, a stator S fixed to casings 10, 12, a vane exhausting part L1 constituted by alternately arranging rotary vanes 30 on the rotor R side and fixed vanes 32 on the stator S side, and the thread groove exhausting part L2 having thread groove exhausting passages 40a, 40b, 40c, 40d, 40e formed among rotational cylindrical parts 36a, 36b, 36c on the rotor R side and fixed cylindrical parts 38a, 38b on the stator S side on the downstream side of the vane exhausting parts. At least two or more thread groove exhaust passages are concentrically provided, and the ratio H/D of the pump main body height H and the maximum diameter D is set to 0.7 or less.

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