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1. 发明申请

US20130204569A1 SYSTEM, A METHOD AND A COMPUTER PROGRAM PRODUCT FOR CAD-BASED REGISTRATION 有权
标题翻译：系统，基于CAD的注册的方法和计算机程序产品
公开(公告)号：US20130204569A1
公开(公告)日：2013-08-08
申请号：US13368305
申请日：2012-02-07
申请人： Zvi Goren , Nir Ben-David Dodzin
发明人： Zvi Goren , Nir Ben-David Dodzin
IPC分类号： G06F19/00
CPC分类号： G01N21/9501 , G01N2021/95615
摘要： A system for generating calibration information usable for wafer inspection, the system including: (I) a displacement analysis module, configured to: (a) calculate a displacement for each target out of multiple targets selected in multiple scanned frames which are included in a scanned area of the wafer, the calculating based on a correlation of: (i) an image associated with the respective target which was obtained during a scanning of the wafer, and (ii) design data corresponding to the image; and (b) determining a displacement for each of the multiple scanned frames, the determining based on the displacements calculated for multiple targets in the respective scanned frame; and (II) a subsequent processing module, configured to generate calibration information including the displacements determined for the multiple scanned frames, and a target database that includes target image and location information of each target of a group of database targets.
摘要翻译：一种用于生成可用于晶片检查的校准信息的系统，所述系统包括：（I）位移分析模块，其被配置为：（a）计算在扫描的多个扫描帧中选择的多个目标中的每个目标的位移，基于以下相关性的计算：（i）在晶片的扫描期间获得的与各个目标相关联的图像，以及（ii）与图像对应的设计数据; 以及（b）确定所述多个扫描帧中的每一个的位移，所述确定基于针对相应扫描帧中的多个目标计算的位移; 以及（II）后续处理模块，被配置为生成包括为多个扫描帧确定的位移的校准信息，以及包括目标图像的目标数据库和一组数据库目标的每个目标的位置信息。

2. 发明授权

US07847929B2 Methods and apparatus for inspecting a plurality of dies 有权
标题翻译：用于检查多个管芯的方法和装置
公开(公告)号：US07847929B2
公开(公告)日：2010-12-07
申请号：US11466583
申请日：2006-08-23
申请人： Tuvia Dror Kutscher , Zvi Goren , Efrat Rozenman , Rami Elichai
发明人： Tuvia Dror Kutscher , Zvi Goren , Efrat Rozenman , Rami Elichai
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/4738 , G01N21/55
摘要： A method for inspecting a plurality of dies, that are typically disposed on a surface of a semiconducting wafer. Each of the dies includes respective functional features within the die. The method consists of identifying within a first die a first multiplicity of the functional features having respective characteristics, and measuring respective first locations of the first multiplicity with respect to an origin of the first die. Within a group of second dies a second multiplicity of the functional features having the respective characteristics is identified, respective second locations of the second multiplicity are measured. The second locations are compared to the first locations to determine a location of an origin of the group of the second dies.
摘要翻译：一种用于检查通常设置在半导体晶片的表面上的多个管芯的方法。每个模具包括模具内的各自的功能特征。该方法包括在第一裸片内识别具有各自特征的第一多个功能特征，以及相对于第一裸片的原点测量第一多重性的相应第一位置。在一组第二模具内，识别具有相应特征的功能特征的第二多重性，测量第二多重性的相应第二位置。将第二位置与第一位置进行比较，以确定第二模具组的原点的位置。

3. 发明授权

US07680871B2 Approximating function properties with expander graphs 有权
标题翻译：具有扩展器图形的近似函数属性
公开(公告)号：US07680871B2
公开(公告)日：2010-03-16
申请号：US11275625
申请日：2006-01-19
申请人： Kristin E Lauter , Denis X. Charles , Eyal Zvi Goren
发明人： Kristin E Lauter , Denis X. Charles , Eyal Zvi Goren
IPC分类号： G06F17/10
CPC分类号： G06F17/18 , G06F7/725
摘要： Function properties may be approximated using an expander graph. For example, an approximate average of a function may be determined by randomly exploring an expander graph. Values of the function are associated with vertices of the expander graph. The expander graph is randomly explored by traversing edges and encountering vertices. The exploration may comprise a crawl, a walk, and so forth. An approximate average of the function is determined based on the function values that are associated with encountered vertices.
摘要翻译：函数属性可以使用扩展器图近似。例如，函数的近似平均值可以通过随机地浏览扩展器图来确定。函数的值与扩展器图的顶点相关联。通过遍历边缘并遇到顶点来随机探索扩展器图。探索可能包括爬行，散步等等。基于与遇到的顶点相关联的函数值来确定函数的近似平均值。

4. 发明申请

US20080259326A1 Die Column Registration 有权
标题翻译：死柱注册
公开(公告)号：US20080259326A1
公开(公告)日：2008-10-23
申请号：US11466583
申请日：2006-08-23
申请人： Tuvia Dror Kutscher , Zvi Goren , Efrat Rozenman , Rami Elichai
发明人： Tuvia Dror Kutscher , Zvi Goren , Efrat Rozenman , Rami Elichai
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/4738 , G01N21/55
摘要： A method for inspecting a plurality of dies, that are typically disposed on a surface of a semiconducting wafer. Each of the dies includes respective functional features within the die. The method consists of identifying within a first die a first multiplicity of the functional features having respective characteristics, and measuring respective first locations of the first multiplicity with respect to an origin of the first die. Within a group of second dies a second multiplicity of the functional features having the respective characteristics is identified, respective second locations of the second multiplicity are measured. The second locations are compared to the first locations to determine a location of an origin of the group of the second dies.
摘要翻译：一种用于检查通常设置在半导体晶片的表面上的多个管芯的方法。每个模具包括模具内的各自的功能特征。该方法包括在第一裸片内识别具有各自特征的第一多个功能特征，以及相对于第一裸片的原点测量第一多重性的相应第一位置。在一组第二模具内，识别具有相应特征的功能特征的第二多重性，测量第二多重性的相应第二位置。将第二位置与第一位置进行比较，以确定第二模具组的原点的位置。

5. 发明授权

US07907726B2 Pseudorandom number generation with expander graphs 有权
标题翻译：具有扩展器图的伪随机数生成
公开(公告)号：US07907726B2
公开(公告)日：2011-03-15
申请号：US11275629
申请日：2006-01-19
申请人： Kristin E. Lauter , Denis X Charles , Eyal Zvi Goren
发明人： Kristin E. Lauter , Denis X Charles , Eyal Zvi Goren
IPC分类号： G06F7/58
CPC分类号： G06F7/582 , H04L9/0662
摘要： Pseudorandom numbers may be generated from input seeds using expander graphs. Expander graphs are a collection of vertices that are interconnected via edges. Generally, a walk around an expander graph is determined responsive to an input seed, and a pseudorandom number is produced based on vertex names. Specifically, a next edge, which is one of multiple edges emanating from a current vertex, is selected responsive to an extracted seed chunk. The next edge is traversed to reach a next vertex. The name of the next vertex is ascertained and used as a portion of the pseudorandom number being produced by the walk around the expander graph.
摘要翻译：可以使用扩展器图从输入种子生成伪随机数。扩展器图是通过边缘互连的顶点的集合。通常，响应于输入种子确定围绕扩展器图形的步行，并且基于顶点名称产生伪随机数。具体地，响应于提取的种子块选择作为从当前顶点发出的多个边缘之一的下一个边缘。遍历下一个边以到达下一个顶点。确定下一个顶点的名称，并将其用作由扩展器图形围绕生成的伪随机数的一部分。

6. 发明授权

US09599575B2 System, a method and a computer program product for CAD-based registration 有权
公开(公告)号：US09599575B2
公开(公告)日：2017-03-21
申请号：US13368305
申请日：2012-02-07
申请人： Zvi Goren , Nir Ben-David Dodzin
发明人： Zvi Goren , Nir Ben-David Dodzin
IPC分类号： G01N21/95 , G01N21/956
CPC分类号： G01N21/9501 , G01N2021/95615
摘要： A system for generating calibration information usable for wafer inspection, the system including: (I) a displacement analysis module, configured to: (a) calculate a displacement for each target out of multiple targets selected in multiple scanned frames which are included in a scanned area of the wafer, the calculating based on a correlation of: (i) an image associated with the respective target which was obtained during a scanning of the wafer, and (ii) design data corresponding to the image; and (b) determining a displacement for each of the multiple scanned frames, the determining based on the displacements calculated for multiple targets in the respective scanned frame; and (II) a subsequent processing module, configured to generate calibration information including the displacements determined for the multiple scanned frames, and a target database that includes target image and location information of each target of a group of database targets.

7. 发明申请

US20130202187A1 SYSTEM, A METHOD AND A COMPUTER PROGRAM PRODUCT FOR CAD-BASED REGISTRATION 有权
公开(公告)号：US20130202187A1
公开(公告)日：2013-08-08
申请号：US13368306
申请日：2012-02-07
申请人： Zvi Goren , Nir Ben-David Dodzin
发明人： Zvi Goren , Nir Ben-David Dodzin
IPC分类号： G06K9/32
CPC分类号： G06T7/0008 , G01B11/14 , G01N21/9501 , G01N2201/10 , G01N2201/125 , G01N2201/127 , G06T7/32 , G06T2207/30148
摘要： A system for location based wafer analysis, the system comprising: (i) a first input interface; (ii) a second input interface; (iii) a correlator; and (iv) a processor, configured to generate inspection results for the inspected wafer, with the help of at least one frame run-time displacement.

8. 发明授权

US07382876B2 Hash function constructions from expander graphs 失效
标题翻译：来自扩展器图的散列函数结构
公开(公告)号：US07382876B2
公开(公告)日：2008-06-03
申请号：US11263701
申请日：2005-11-01
申请人： Kristin E. Lauter , Denis X Charles , Eyal Zvi Goren
发明人： Kristin E. Lauter , Denis X Charles , Eyal Zvi Goren
IPC分类号： H04L9/28
CPC分类号： H04L9/0643 , G06F17/30949
摘要： Hash function constructions from expander graphs are described. In one aspect, an expander graph is walked to compute a hash function. The expander graph is walked using respective subsets of an input message. A label of a last vertex walked is an output of the hash function.
摘要翻译：描述了来自扩展器图形的散列函数结构。在一个方面，走扩展器图来计算哈希函数。使用输入消息的相应子集来走扩展器图。走过的最后一个顶点的标签是散列函数的输出。

9. 发明授权

US08855399B2 System, a method and a computer program product for CAD-based registration 有权
标题翻译：系统，方法和计算机程序产品，用于基于CAD的注册
公开(公告)号：US08855399B2
公开(公告)日：2014-10-07
申请号：US13368306
申请日：2012-02-07
申请人： Zvi Goren , Nir Ben-David Dodzin
发明人： Zvi Goren , Nir Ben-David Dodzin
IPC分类号： G06K9/00
CPC分类号： G06T7/0008 , G01B11/14 , G01N21/9501 , G01N2201/10 , G01N2201/125 , G01N2201/127 , G06T7/32 , G06T2207/30148
摘要： A system for location based wafer analysis, the system comprising: (i) a first input interface; (ii) a second input interface; (iii) a correlator; and (iv) a processor, configured to generate inspection results for the inspected wafer, with the help of at least one frame run-time displacement.
摘要翻译：一种用于基于位置的晶片分析的系统，所述系统包括：（i）第一输入接口; （ii）第二输入接口; （iii）相关器; 以及（iv）处理器，被配置为通过至少一个帧运行时位移来产生检查的晶片的检查结果。

10. 发明申请

US20140212022A1 METHOD OF DESIGN-BASED DEFECT CLASSIFICATION AND SYSTEM THEREOF 有权
标题翻译：基于设计的缺陷分类方法及其系统
公开(公告)号：US20140212022A1
公开(公告)日：2014-07-31
申请号：US13756462
申请日：2013-01-31
申请人： MARK GESHEL , ZVI GOREN , EFRAT ROZENMAN
发明人： MARK GESHEL , ZVI GOREN , EFRAT ROZENMAN
IPC分类号： G06T7/00
CPC分类号： G06T7/0004 , G01R31/26 , G01R31/2894 , G06T7/0006 , G06T7/001 , G06T2207/30148 , H01L22/12
摘要： There is provided an inspection method capable of classifying defects detected on a production layer of a specimen. The method comprises: obtaining input data related to the detected defects; processing the input data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof; and sorting the processed defects in accordance with predefined bins, wherein each bin is associated with at least one classification operation, wherein at least one classification operation sorts at least part of the processed defects to one or more classification bins to yield finally classified defects, and wherein each classification operation, excluding the last one, sorts at least part of the processed defects to be processed by one or more of the following classification operations.
摘要翻译：提供了能够对在样品的生产层上检测到的缺陷进行分类的检查方法。该方法包括：获取与检测到的缺陷相关的输入数据; 使用与生产层相关联的决策算法处理输入数据并指定两个或更多个分类操作及其序列; 以及根据预定义的箱分类处理的缺陷，其中每个仓与至少一个分类操作相关联，其中至少一个分类操作将至少部分经处理的缺陷排序到一个或多个分类箱以产生最终分类的缺陷，以及其中除了最后一个之外的每个分类操作通过以下分类操作中的一个或多个对待处理的缺陷的至少一部分进行排序。

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