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1. 发明申请

US20140212022A1 METHOD OF DESIGN-BASED DEFECT CLASSIFICATION AND SYSTEM THEREOF 有权
标题翻译：基于设计的缺陷分类方法及其系统
公开(公告)号：US20140212022A1
公开(公告)日：2014-07-31
申请号：US13756462
申请日：2013-01-31
申请人： MARK GESHEL , ZVI GOREN , EFRAT ROZENMAN
发明人： MARK GESHEL , ZVI GOREN , EFRAT ROZENMAN
IPC分类号： G06T7/00
CPC分类号： G06T7/0004 , G01R31/26 , G01R31/2894 , G06T7/0006 , G06T7/001 , G06T2207/30148 , H01L22/12
摘要： There is provided an inspection method capable of classifying defects detected on a production layer of a specimen. The method comprises: obtaining input data related to the detected defects; processing the input data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof; and sorting the processed defects in accordance with predefined bins, wherein each bin is associated with at least one classification operation, wherein at least one classification operation sorts at least part of the processed defects to one or more classification bins to yield finally classified defects, and wherein each classification operation, excluding the last one, sorts at least part of the processed defects to be processed by one or more of the following classification operations.
摘要翻译：提供了能够对在样品的生产层上检测到的缺陷进行分类的检查方法。该方法包括：获取与检测到的缺陷相关的输入数据; 使用与生产层相关联的决策算法处理输入数据并指定两个或更多个分类操作及其序列; 以及根据预定义的箱分类处理的缺陷，其中每个仓与至少一个分类操作相关联，其中至少一个分类操作将至少部分经处理的缺陷排序到一个或多个分类箱以产生最终分类的缺陷，以及其中除了最后一个之外的每个分类操作通过以下分类操作中的一个或多个对待处理的缺陷的至少一部分进行排序。

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