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    • 9. 发明授权
    • Focus error correction system and method
    • 聚焦误差校正系统及方法
    • US07760928B2
    • 2010-07-20
    • US11550357
    • 2006-10-17
    • Tuvia-Dror KutscherYaacov ZakRami ElishaiErez Fridman
    • Tuvia-Dror KutscherYaacov ZakRami ElishaiErez Fridman
    • G06K9/03
    • G01N21/9501G01N21/8806G02B7/36
    • A method for focus error corrections. The method includes: determining a focus scheme in response to: a spatial relationship between an upper surface of at least a first portion of a substantially transparent upper layer of an inspected object and between an upper surface of at least a first portion of a reflective layer of the inspected object; wherein the reflective layer is positioned below the transparent upper layer, and a position of at least one height differentiated narrow feature of inspected object; wherein during a scan of each height differentiated narrow feature a focus error signal change rate well exceeds a focus correction rate of a focus error correction unit; and applying the focus scheme while scanning at least a portion of the inspected object.
    • 一种聚焦误差校正方法。 该方法包括:响应于以下步骤确定焦点方案:在被检查物体的基本上透明的上层的至少第一部分的上表面与反射层的至少第一部分的上表面之间的空间关系 被检查对象; 其中所述反射层位于所述透明上层的下方,以及被检查物体的至少一个高度差分窄特征的位置; 其中在每个高度差分窄特征的扫描期间,聚焦误差信号变化率远远超过聚焦误差校正单元的聚焦校正速率; 以及在扫描被检查对象的至少一部分的同时应用聚焦方案。