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    • 7. 发明授权
    • Pressure sensor
    • 压力传感器
    • US4970487A
    • 1990-11-13
    • US282639
    • 1988-12-12
    • Makoto TsukaharaYukihiro KatoYoshitaka ItohTetsuo Oka
    • Makoto TsukaharaYukihiro KatoYoshitaka ItohTetsuo Oka
    • G01L9/04G01L1/22G01L9/00G01P15/12
    • G01L9/0055G01L1/2287G01L9/0051G01P15/122Y10T29/49103
    • A sensor is provided for detecting a physical quantity such as fluid pressure and acceleration of a mass and converting same into electrical signals. The sensor has a diaphragm made of a metal deformable by the physical quantity, a layered constructed insulating means of an insulating material which is formed on the diaphragm by means of a physical vapor desposition process, wherein the layered constructed insulating means has at least two insulating material layers, a strain gauge formed on the layered constructed insulating means opposite the diaphragm by means of a physical vapor deposition process, and a contact zone on the strain gauge to provide an electrical connection for a physical quantity sensing device to the sensor. Due to the layered construction of the insulating means, the thickness of the insulating means as a whole may be reduced below that of a single layer insulating means and maintain good insulative properties particularly at excessive strain.
    • 提供了一种用于检测诸如流体压力和质量加速度的物理量并将其转换为电信号的传感器。 传感器具有通过物理量可变形的金属膜,通过物理蒸汽沉积工艺形成在隔膜上的绝缘材料的分层结构的绝缘装置,其中层状构造的绝缘装置具有至少两个绝缘体 材料层,通过物理气相沉积工艺形成在与隔膜相对的分层构造的绝缘装置上的应变仪,以及在应变仪上的接触区域,以提供用于传感器的物理量感测装置的电连接。 由于绝缘装置的分层结构,绝缘装置整体的厚度可以降低到单层绝缘装置的厚度以下,特别是在过度的应变下保持良好的绝缘性能。
    • 9. 发明申请
    • Angle detecting apparatus
    • 角度检测装置
    • US20080265877A1
    • 2008-10-30
    • US12081854
    • 2008-04-22
    • Yukihiro KatoMasashi MomiyamaNoriaki Fujita
    • Yukihiro KatoMasashi MomiyamaNoriaki Fujita
    • G01B7/30
    • G01D5/245
    • An angle detection apparatus includes a rotation member including at least one north magnetic polar region and at least one south magnetic polar region alternately arranged around a rotation center, a magnetic field detecting portion having a magnetic plate and detecting elements detecting magnitudes of magnetic components in a direction perpendicular to the magnetic plate, and a computing unit determining a rotation angle of the rotation member, wherein the magnetic field detecting portion is disposed so that the magnetic plate is oriented perpendicular to a first direction, where magnetic field intensity is at its maximum, and the magnetic field detecting portion detects the magnitudes of the magnetic components in the first direction and a second direction corresponding to a direction that the north and south magnetic polar regions are circumferentially arranged.
    • 角度检测装置包括旋转构件,该旋转构件包括至少一个北极性区域和围绕旋转中心交替布置的至少一个南极性极区域,具有磁性板的磁场检测部分和检测元件中的磁性成分的检测元件 以及计算单元,其确定所述旋转构件的旋转角度,其中所述磁场检测部分设置成使得所述磁性板垂直于磁场强度处于其最大值的第一方向定向, 并且磁场检测部分检测第一方向上的磁性分量的大小和与北极和南极极区域周向布置的方向相对应的第二方向。