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    • 1. 发明授权
    • Pressure sensor
    • 压力传感器
    • US4970487A
    • 1990-11-13
    • US282639
    • 1988-12-12
    • Makoto TsukaharaYukihiro KatoYoshitaka ItohTetsuo Oka
    • Makoto TsukaharaYukihiro KatoYoshitaka ItohTetsuo Oka
    • G01L9/04G01L1/22G01L9/00G01P15/12
    • G01L9/0055G01L1/2287G01L9/0051G01P15/122Y10T29/49103
    • A sensor is provided for detecting a physical quantity such as fluid pressure and acceleration of a mass and converting same into electrical signals. The sensor has a diaphragm made of a metal deformable by the physical quantity, a layered constructed insulating means of an insulating material which is formed on the diaphragm by means of a physical vapor desposition process, wherein the layered constructed insulating means has at least two insulating material layers, a strain gauge formed on the layered constructed insulating means opposite the diaphragm by means of a physical vapor deposition process, and a contact zone on the strain gauge to provide an electrical connection for a physical quantity sensing device to the sensor. Due to the layered construction of the insulating means, the thickness of the insulating means as a whole may be reduced below that of a single layer insulating means and maintain good insulative properties particularly at excessive strain.
    • 提供了一种用于检测诸如流体压力和质量加速度的物理量并将其转换为电信号的传感器。 传感器具有通过物理量可变形的金属膜,通过物理蒸汽沉积工艺形成在隔膜上的绝缘材料的分层结构的绝缘装置,其中层状构造的绝缘装置具有至少两个绝缘体 材料层,通过物理气相沉积工艺形成在与隔膜相对的分层构造的绝缘装置上的应变仪,以及在应变仪上的接触区域,以提供用于传感器的物理量感测装置的电连接。 由于绝缘装置的分层结构,绝缘装置整体的厚度可以降低到单层绝缘装置的厚度以下,特别是在过度的应变下保持良好的绝缘性能。
    • 2. 发明授权
    • Superconducting magnet apparatus and method for magnetizing superconductor
    • 超导磁体装置及超导体磁化方法
    • US07026901B2
    • 2006-04-11
    • US10066680
    • 2002-02-06
    • Yousuke YanagiTetsuo OkaYoshitaka ItohMasaaki Yoshikawa
    • Yousuke YanagiTetsuo OkaYoshitaka ItohMasaaki Yoshikawa
    • H01F7/00
    • H01F13/00F25B9/14F25D19/006H01F6/008
    • A cold head is disposed in an insulating container and cooled by a refrigerator. A superconductor is disposed in the insulating container, contacting the cold head, and is cooled to its superconduction transition temperature or lower by heat conduction. A magnetizing coil is disposed outside the insulating container for applying a magnetic field to the superconductor. Control is performed so that a magnetic field determined considering the magnetic field to be captured by the superconductor is applied. A pulsed magnetic field is applied to the superconductor a plurality of times. Each pulsed magnetic field is applied when the temperature of the superconductor is a predetermined temperature or lower. A maximum pulsed magnetic field is applied at least once in an initial or intermediate stage of the repeated application of pulsed magnetic fields. After that, a pulsed magnetic field equal to or less than the maximum pulsed magnetic field is applied. Pulsed magnetic fields are repeatedly applied while the temperature of the superconductor is lowered. A pulsed magnetic field is applied when the temperature T0 of a central portion of the superconductor is the superconduction transition temperature or lower and the temperature of a peripheral portion is higher than T0. The temperature of the entire superconductor is brought close to T0 to apply another pulsed magnetic field. The magnetizing coil faces at least one of two opposite sides of the superconductor to apply pulsed magnetic fields to the superconductor in its magnetization direction.
    • 将冷头设置在绝热容器中并用冰箱冷却。 超导体设置在绝热容器中,与冷头接触,并通过热传导而冷却至其超导转变温度或更低。 磁化线圈设置在绝缘容器的外部,用于向超导体施加磁场。 执行控制,使得考虑要由超导体捕获的磁场确定的磁场被施加。 将脉冲磁场多次施加到超导体。 当超导体的温度为预定温度或更低时,施加每个脉冲磁场。 在重复施加脉冲磁场的初始阶段或中间阶段,最大脉冲磁场施加至少一次。 之后,施加等于或小于最大脉冲磁场的脉冲磁场。 当超导体的温度降低时,脉冲磁场被重复施加。 当超导体的中心部分的温度T 0 <0>超导转变温度以下且周边部分的温度高于T 0 0 。 整个超导体的温度接近T 0 0以施加另一个脉冲磁场。 磁化线圈面向超导体的两个相对侧中的至少一个,以在其磁化方向上向超导体施加脉冲磁场。
    • 4. 发明授权
    • Superconducting magnet apparatus and method for magnetizing superconductor
    • 超导磁体装置及超导体磁化方法
    • US06441710B1
    • 2002-08-27
    • US09586956
    • 2000-06-05
    • Yousuke YanagiTetsuo OkaYoshitaka ItohMasaaki Yoshikawa
    • Yousuke YanagiTetsuo OkaYoshitaka ItohMasaaki Yoshikawa
    • H01F2724
    • H01F13/00F25B9/14F25D19/006H01F6/008
    • A cold head is disposed in an insulating container and cooled by a refrigerator. A superconductor is disposed in the insulating container, contacting the cold head, and is cooled to its superconduction transition temperature or lower by heat conduction. A magnetizing coil is disposed outside the insulating container for applying a magnetic field to the superconductor. Control is performed so that a magnetic field determined considering the magnetic field to be captured by the superconductor is applied. A pulsed magnetic field is applied to the superconductor a plurality of times. Each pulsed magnetic field is applied when the temperature of the superconductor is a predetermined temperature or lower. A maximum pulsed magnetic field is applied at least once in an initial or intermediate stage of the repeated application of pulsed magnetic fields. After that, a pulsed magnetic field equal to or less than the maximum pulsed magnetic field is applied. Pulsed magnetic fields are repeatedly applied while the temperature of the superconductor is lowered. A pulsed magnetic field is applied when the temperature To of a central portion of the superconductor is the superconduction transition temperature or lower and the temperature of a peripheral portion is higher than T0. The temperature of the entire superconductor is brought close to T0 to apply another pulsed magnetic field. The magnetizing coil faces at least one of two opposite sides of the superconductor to apply pulsed magnetic fields to the superconductor in its magnetization direction.
    • 将冷头设置在绝热容器中并用冰箱冷却。 超导体设置在绝热容器中,与冷头接触,并通过热传导而冷却至其超导转变温度或更低。 磁化线圈设置在绝缘容器的外部,用于向超导体施加磁场。 执行控制,使得考虑要由超导体捕获的磁场确定的磁场被施加。 将脉冲磁场多次施加到超导体。 当超导体的温度为预定温度或更低时,施加每个脉冲磁场。 在重复施加脉冲磁场的初始阶段或中间阶段,最大脉冲磁场施加至少一次。 之后,施加等于或小于最大脉冲磁场的脉冲磁场。 当超导体的温度降低时,脉冲磁场被重复施加。 当超导体的中心部分的温度To为超导转变温度或更低,周边部分的温度高于T0时,施加脉冲磁场。 整个超导体的温度接近于T0,以施加另一个脉冲磁场。 磁化线圈面向超导体的两个相对侧中的至少一个,以在其磁化方向上向超导体施加脉冲磁场。
    • 7. 发明授权
    • Polishing pad and polishing device
    • 抛光垫和抛光装置
    • US06362107B1
    • 2002-03-26
    • US09831292
    • 2001-05-08
    • Kuniyasu ShiroHisashi MinamiguchiTetsuo Oka
    • Kuniyasu ShiroHisashi MinamiguchiTetsuo Oka
    • H01L21302
    • B24B37/24Y10S438/959
    • The present invention relates to a polishing pad which is characterized in that it has a polishing layer of rubber A-type microhardness at least 80° and a cushioning layer of bulk modulus at least 40 MPa and tensile modulus in the range 0.1 MPa to 20 MPa, and to a polishing device which is characterized in that a semiconductor substrate is fixed to the polishing head, and an aforesaid polishing pad is fixed to the polishing platen so that the polishing layer faces the semiconductor substrate, and by rotating the aforesaid polishing head or the polishing platen, or both, the semiconductor substrate is polished. With the polishing device or polishing pad of the present invention for use in the mechanical planarizing process wherein the surface of the insulating layers or metal interconnects formed on a semiconductor substrate are smoothened, it is possible to uniformly planarize the entire semiconductor face and perform uniform polishing close up to the wafer edge and, furthermore, it is possible to provide a technique for achieving both uniformity and planarity under conditions of high platen rotation rate.
    • 抛光垫技术领域本发明涉及一种抛光垫,其特征在于,具有橡胶A型显微硬度至少为80°的抛光层和体积弹性模量至少为40MPa的缓冲层,拉伸模量为0.1MPa〜20MPa 以及研磨装置,其特征在于,将半导体基板固定在研磨头上,将上述研磨垫固定在研磨台板上,使得研磨层面向半导体基板,通过旋转上述研磨头或 研磨台板或二者半导体衬底被抛光。通过本发明的抛光装置或抛光垫用于机械平面化处理中,其中形成在半导体衬底上的绝缘层或金属互连件的表面平滑化, 可以使整个半导体面均匀平坦化,并且在晶片边缘附近进行均匀的抛光,此外是 可能提供在高压板旋转速度的条件下实现均匀性和平面性的技术。
    • 9. 发明授权
    • Surging prediction device for a centrifugal compressor
    • 用于离心式压缩机的检测预测装置
    • US5095714A
    • 1992-03-17
    • US631459
    • 1990-12-21
    • Yasunori AdachiTetsuo Oka
    • Yasunori AdachiTetsuo Oka
    • F04D27/02F25B49/02
    • F25B49/022F04D27/02
    • A surging prediction device for a centrifugal compressor has a differential pressure detector and a controller. The detector detects a differential pressure between a hub side pressure in the vicinity of an inlet or a diffuser in the centrifugal compressor and a shroud side presser in the vicinity of the inlet of the diffuser. The controller compares the detected differential pressure from the detector with a set differential pressure beforehand set so as to be lower than a surging differential pressure between the hub side pressure and the shroud side pressure at an occurrence time of surging, and outputs a surging signal predicting an occurrence of surging when the detected differential pressure becomes higher than the set differential pressure.
    • 用于离心压缩机(100)的浪涌预测装置具有差压检测器(13)和控制器(14)。 检测器(13)检测离心压缩机(100)中的扩散器(4)的入口附近的轮毂侧压力与扩散器(4)的入口附近的护罩侧压力之间的压差, 。 控制器(14)将检测器(13)的检测差压与预先设定的设定差压进行比较,以便比在喘振发生时的轮毂侧压力与护罩侧压力之间的喘振压差相比较, 并且当检测到的压差变得高于设定的压差时,输出预测浪涌的发生的浪涌信号。