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1. 发明授权

US08771429B2 Supercritical drying method for semiconductor substrate and supercritical drying apparatus 有权
标题翻译：半导体衬底超临界干燥方法及超临界干燥装置
公开(公告)号：US08771429B2
公开(公告)日：2014-07-08
申请号：US13420870
申请日：2012-03-15
申请人： Linan Ji , Hidekazu Hayashi , Hiroshi Tomita , Hisashi Okuchi , Yohei Sato , Takayuki Toshima , Mitsuaki Iwashita , Kazuyuki Mitsuoka , Gen You , Hiroki Ohno , Takehiko Orii
发明人： Linan Ji , Hidekazu Hayashi , Hiroshi Tomita , Hisashi Okuchi , Yohei Sato , Takayuki Toshima , Mitsuaki Iwashita , Kazuyuki Mitsuoka , Gen You , Hiroki Ohno , Takehiko Orii
IPC分类号： B08B7/00
CPC分类号： H01L21/02 , F26B21/10 , F26B21/14 , F26B23/028 , F26B2200/04 , H01L21/02052 , H01L21/02057 , H01L21/02101 , H01L21/67034
摘要： According to one embodiment, a supercritical drying method for a semiconductor substrate, comprises introducing the semiconductor substrate into a chamber in a state, a surface of the semiconductor substrate being wet with alcohol, substituting the alcohol on the semiconductor substrate with a supercritical fluid of carbon dioxide by impregnating the semiconductor substrate to the supercritical fluid in the chamber, and discharging the supercritical fluid and the alcohol from the chamber and reducing a pressure inside the chamber. The method further comprises performing a baking treatment by supplying an oxygen gas or an ozone gas to the chamber after the reduction of the pressure inside the chamber.
摘要翻译：根据一个实施方案，一种用于半导体衬底的超临界干燥方法包括将半导体衬底以一种状态将半导体衬底引入室中，该半导体衬底的表面被醇润湿，用半导体衬底上的醇代替超临界流体碳通过将半导体衬底浸渍到腔室中的超临界流体中，并且将超临界流体和醇从腔室排出并且减小腔室内的压力，从而将二氧化碳稀释。该方法还包括在减小室内的压力之后，通过向室内供应氧气或臭氧气体进行烘烤处理。

2. 发明申请

US20130061492A1 SUPERCRITICAL DRYING METHOD AND SUPERCRITICAL DRYING APPARATUS FOR SEMICONDUCTOR SUBSTRATE 审中-公开
标题翻译：半导体基板超临界干燥方法和超临界干燥装置
公开(公告)号：US20130061492A1
公开(公告)日：2013-03-14
申请号：US13423374
申请日：2012-03-19
申请人： Hisashi OKUCHI , Hidekazu HAYASHI , Linan JI , Yohei SATO , Hiroshi TOMITA
发明人： Hisashi OKUCHI , Hidekazu HAYASHI , Linan JI , Yohei SATO , Hiroshi TOMITA
IPC分类号： F26B5/04
CPC分类号： F26B7/00 , F26B5/04
摘要： According to one embodiment, a supercritical drying apparatus comprises a chamber being hermetically sealable and configured to store a semiconductor substrate, a heater configured to heat an inner side of the chamber, a supply unit configured to supply carbon dioxide to the chamber, a discharge unit configured to discharge carbon dioxide from the chamber, and a rotation unit configured to rotate the chamber by an angle equal to or greater than 90 degrees and equal to or smaller than 180 degrees with respect to the horizontal direction.
摘要翻译：根据一个实施例，超临界干燥装置包括：气室密封并构造成存储半导体衬底;加热器，其构造成加热室的内侧;供应单元，被配置为向室供应二氧化碳;排放单元被构造成从所述室排放二氧化碳，以及旋转单元，其被构造成使所述室相对于水平方向旋转等于或大于90度且等于或小于180度的角度。

3. 发明申请

US20130033282A1 CONTACT STRUCTURE AND METHOD OF MANUFACTURING CONTACT STRUCTURE 审中-公开
标题翻译：接触结构和制造接触结构的方法
公开(公告)号：US20130033282A1
公开(公告)日：2013-02-07
申请号：US13641305
申请日：2011-04-06
申请人： Yohei Sato , Tomohisa Hoshino
发明人： Yohei Sato , Tomohisa Hoshino
IPC分类号： G01R1/067 , C25D1/00
CPC分类号： G01R3/00 , G01R1/06722
摘要： A contact structure has a probe and a housing disposed on an outer circumference thereof. The housing has a housing main body in which a hollow section vertically penetrating the same is formed, and a conductive coat film with which an inner wall surface of the hollow section is coated. The probe has a base end portion fixed in place on one end side of the housing, a conductive leading end portion that is movable in the hollow section while being in contact with the coat film and has, on a leading end thereof, a contact that comes into contact with a subject to be inspected, and an elastic portion that connects together the base end portion and the leading end portion, is disposed in the hollow section, and has elasticity.
摘要翻译：接触结构具有探针和设置在其外周上的壳体。壳体具有壳体主体，其中形成有垂直贯穿其的中空部分，以及涂覆有中空部分的内壁表面的导电涂膜。该探针具有固定在壳体的一端侧上的基端部，导电性前端部与导电接触部可在中空部中移动，并且在其前端具有接触部与待检查对象接触，并且将基端部和前端部连接在一起的弹性部设置在中空部中，具有弹性。

4. 发明申请

US20100243932A1 ELECTROMAGNETICALLY ACTUATED VALVE 有权
标题翻译：电磁致动阀
公开(公告)号：US20100243932A1
公开(公告)日：2010-09-30
申请号：US12649905
申请日：2009-12-30
申请人： Yukinori OTSUKA , Yohei Sato
发明人： Yukinori OTSUKA , Yohei Sato
IPC分类号： F16K31/02 , F16K1/42
CPC分类号： F16K31/0655 , B60T8/363 , F16K1/425 , F16K1/427 , F16K31/0665 , Y10T137/86992
摘要： An electromagnetically actuated valve including a solenoid with a coil that generates a magnetic field upon being energized, a tubular member made of a non-magnetic material and disposed on an inner circumferential side of the coil, a movable valve body disposed within the tubular member and movable in an axial direction of the tubular member by an attraction force that is generated upon energizing the coil to thereby open and close a fluid passage, a first member made of a resin material and including a seat portion that is brought into contact with the movable valve body to close the fluid passage, and a first biasing member that biases the movable valve body toward the seat portion.
摘要翻译：一种电磁致动阀，包括具有线圈的螺线管，该线圈在通电时产生磁场，由非磁性材料制成并设置在线圈的内周侧的管状构件，设置在管状构件内的可动阀体，可通过在对线圈通电而产生的吸引力沿管状构件的轴向方向移动，从而打开和关闭流体通道;第一构件，其由树脂材料制成并且包括与可移动的接触的座部分阀体以关闭流体通道;以及第一偏置构件，其将可动阀体朝向座部部分偏压。

5. 发明授权

US06174053B1 Ink tank, head cartridge and ink jet printing apparatus 失效
标题翻译：墨盒，墨盒和喷墨打印设备
公开(公告)号：US06174053B1
公开(公告)日：2001-01-16
申请号：US09027726
申请日：1998-02-23
申请人： Masahiko Higuma , Jun Kawai , Yohei Sato , Yoichi Taneya , Hiroshi Sugitani , Tokuya Ohta , Kazuaki Masuda , Hiroyuki Ishinaga , Torachika Osada , Takashi Saito
发明人： Masahiko Higuma , Jun Kawai , Yohei Sato , Yoichi Taneya , Hiroshi Sugitani , Tokuya Ohta , Kazuaki Masuda , Hiroyuki Ishinaga , Torachika Osada , Takashi Saito
IPC分类号： B41J2175
CPC分类号： B41J2/1752 , B41J2/17513 , B41J2/17553 , B41J2/17563
摘要： A printing system having an ink tank for storing ink, the ink tank having a housing having an ink feeding port formed through a first surface for feeding ink therethrough, and a second surface opposite the first. An ink absorbing member is accommodated in the housing, is a porous member having a three-dimensional net-shaped structure molded of a composition comprising a condensate of (i) a compound having an amino group and (ii) formaldehyde, and has a first surface facing the ink feeding port. An alleviating member having more resilience than the ink absorbing member is disposed between the ink absorbing member and an ink outflow portion formed through the ink feeding port and alleviates pressure applied by the ink outflow portion against the ink absorbing member. Both the alleviating member and the ink absorbing member are deformed by compression against the ink outflow portion. A compensating member having more resilience than the ink absorbing member is disposed between the ink absorbing member and the ink outflow portion and applies a functional force to the ink absorbing member corresponding to deterioration of properties of the ink absorbing member. Another ink absorbing member having more resilience than the ink absorbing member is disposed between the ink absorbing member and the ink outflow portion.
摘要翻译：一种具有用于储存墨水的墨水盒的打印系统，所述墨水盒具有壳体，所述壳体具有通过用于供给墨水的第一表面形成的供墨口以及与之相对的第二表面。油墨吸收部件容纳在壳体中，是具有由包含（i）具有氨基的化合物和（ii）甲醛）的缩合物的组合物模制的三维网状结构的多孔构件，并且具有第一面向供墨口的表面。具有比墨水吸收部件更具弹性的减轻部件设置在墨水吸收部件和通过供墨口形成的墨水流出部之间，并且减轻墨水流出部分对墨水吸收部件施加的压力。减轻构件和吸墨构件都通过压靠墨水流出部而变形。具有比墨水吸收构件更具弹性的补偿构件设置在墨吸收构件和墨流出部之间，并且与吸墨构件的性能劣化相对应地对吸墨构件施加功能力。在墨吸收部件和墨水流出部之间设置有比墨水吸收部件具有更大回弹性的另一吸墨部件。

6. 发明授权

US5589862A Liquid storing container for recording apparatus 失效
标题翻译：用于记录装置的液体储存容器
公开(公告)号：US5589862A
公开(公告)日：1996-12-31
申请号：US444545
申请日：1995-05-19
申请人： Toshihiko Ujita , Koji Yamakawa , Masanori Takenouchi , Sadayuki Sugama , Kenjiro Watanabe , Torachika Osada , Kazuhiro Nakajima , Takayoshi Tsutsumi , Hidemi Kubota , Yasuo Kotaki , Keiichiro Tsukuda , Yohei Sato
发明人： Toshihiko Ujita , Koji Yamakawa , Masanori Takenouchi , Sadayuki Sugama , Kenjiro Watanabe , Torachika Osada , Kazuhiro Nakajima , Takayoshi Tsutsumi , Hidemi Kubota , Yasuo Kotaki , Keiichiro Tsukuda , Yohei Sato
IPC分类号： B41J2/175 , B41J2/05 , B41J2/165 , B41J2/18 , B41J2/185
CPC分类号： B41J2/17523 , B41J2/165 , B41J2/1652 , B41J2/17513 , B41J2/1752 , B41J2/17553 , B41J2/17563 , B41J2/17503
摘要： A liquid storing container employable for an ink jet recording apparatus includes a housing, a porous ink absorbing member received in the housing, and a first filter coming in contact with the ink absorbing member. The liquid storing container is detachably connected to an ink jet recording head having a second filter disposed in a liquid flow path thereof. The liquid storing container is constructed such that the volume between the first filter and the second filter, a size of each filter, a condition for compressively receiving the ink absorbing member in the housing, and an inner structure of the liquid storing container satisfactorily coincide with predetermined conditions.
摘要翻译：可用于喷墨记录装置的液体储存容器包括壳体，容纳在壳体中的多孔吸墨件和与吸墨件接触的第一过滤器。液体储存容器可拆卸地连接到具有设置在其液体流路中的第二过滤器的喷墨记录头。液体储存容器被构造成使得第一过滤器和第二过滤器之间的体积，每个过滤器的尺寸，用于压缩地接收壳体中的吸墨件的状态，以及液体容纳容器的内部结构令人满意地与预定条件。

7. 发明授权

US5583549A Liquid storing container for recording apparatus 失效
公开(公告)号：US5583549A
公开(公告)日：1996-12-10
申请号：US98872
申请日：1993-07-29
申请人： Toshihiko Ujita , Koji Yamakawa , Masanori Takenouchi , Sadayuki Sugama , Kenjiro Watanabe , Torachika Osada , Kazuhiro Nakajima , Takayoshi Tsutsumi , Hidemi Kubota , Yasuo Kotaki , Keiichiro Tsukuda , Yohei Sato
发明人： Toshihiko Ujita , Koji Yamakawa , Masanori Takenouchi , Sadayuki Sugama , Kenjiro Watanabe , Torachika Osada , Kazuhiro Nakajima , Takayoshi Tsutsumi , Hidemi Kubota , Yasuo Kotaki , Keiichiro Tsukuda , Yohei Sato
IPC分类号： B41J2/175 , B41J2/05 , B41J2/165 , B41J2/18 , B41J2/185
CPC分类号： B41J2/17523 , B41J2/165 , B41J2/1652 , B41J2/17513 , B41J2/1752 , B41J2/17553 , B41J2/17563 , B41J2/17503
摘要： A liquid storing container employable for an ink jet recording apparatus includes a housing, a porous ink absorbing member received in the housing, and a first filter coming in contact with the ink absorbing member. The liquid storing container is detachably connected to an ink jet recording head having a second filter disposed in a liquid flow path thereof. The liquid storing container is constructed such that the volume between the first filter and the second filter, a size of each filter, a condition for compressively receiving the ink absorbing member in the housing, and an inner structure of the liquid storing container satisfactorily coincide with predetermined conditions.

9. 发明申请

US20110314689A1 SUBSTRATE DRYING METHOD 审中-公开
标题翻译：基板干燥方法
公开(公告)号：US20110314689A1
公开(公告)日：2011-12-29
申请号：US12980079
申请日：2010-12-28
申请人： Hisashi OKUCHI , Yohei SATO , Hidekazu HAYASHI , Hiroshi TOMITA , Yukiko KITAJIMA
发明人： Hisashi OKUCHI , Yohei SATO , Hidekazu HAYASHI , Hiroshi TOMITA , Yukiko KITAJIMA
IPC分类号： F26B3/02 , B08B3/00
CPC分类号： C11D11/0047 , H01L21/02057 , H01L21/67028 , H01L21/67034
摘要： According to one embodiment, a semiconductor substrate whose surface is wet with a chemical solution (solvent) and formed with patterns having an aspect ratio of 10 or more is loaded into a chamber. Then, while the chemical solution (solvent) remains on the semiconductor substrate, its temperature is increased to a predetermined temperature in the range of 160° C. or more and less than the critical temperature of the chemical solution (solvent), and the evaporated chemical solution (solvent) is discharged from the chamber.
摘要翻译：根据一个实施例，将其表面用化学溶液（溶剂）润湿并且形成有纵横比为10以上的图案的半导体基板装载到室中。然后，当化学溶液（溶剂）保留在半导体衬底上时，其温度升高到在160℃以上且小于化学溶液（溶剂）的临界温度的范围内的预定温度，并且蒸发化学溶液（溶剂）从室排出。

10. 发明授权

US07732228B2 Method for manufacturing printing head 有权
标题翻译：打印头制造方法
公开(公告)号：US07732228B2
公开(公告)日：2010-06-08
申请号：US11477352
申请日：2006-06-30
申请人： Takayuki Ono , Yohei Sato , Satoshi Shimazu
发明人： Takayuki Ono , Yohei Sato , Satoshi Shimazu
IPC分类号： H01L21/00
CPC分类号： B41J2/17559 , B41J2/14072 , B41J2/17513 , B41J2/17526 , Y10T29/49401
摘要： A process for manufacturing a printing head is able to maintain an appropriate connection between a substrate and flying leads. The process includes a connecting step of connecting electric connection terminals of a substrate and flying leads provided on an electric wiring basic material and a mounting step of mounting a unit consisting of the electric wiring base material and the substrate connected together, on a printing head main body. During the connecting step, the substrate and each flying lead are electrically connected together with a predetermined distance between them. During the mounting step, the unit is fixed to the printing head main body so that the distance between each of the electric connection terminals of the substrate and the electric wiring base material is shorter than the predetermined distance. This forms a slack shape of each flying lead.
摘要翻译：用于制造打印头的工艺能够保持基板和飞行引线之间的适当连接。该方法包括连接基板的电连接端子和设置在电线基材上的飞行导线的连接步骤以及将由电气布线基材和连接在一起的基板组成的单元安装在打印头主体上的安装步骤身体。在连接步骤期间，基板和每个飞行引线在它们之间以预定距离电连接在一起。在安装步骤期间，单元被固定到打印头主体，使得基板的每个电连接端子和电布线基材之间的距离短于预定距离。这形成每个飞行导线的松弛形状。

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