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1. 发明申请

US20130061492A1 SUPERCRITICAL DRYING METHOD AND SUPERCRITICAL DRYING APPARATUS FOR SEMICONDUCTOR SUBSTRATE 审中-公开
标题翻译：半导体基板超临界干燥方法和超临界干燥装置
公开(公告)号：US20130061492A1
公开(公告)日：2013-03-14
申请号：US13423374
申请日：2012-03-19
申请人： Hisashi OKUCHI , Hidekazu HAYASHI , Linan JI , Yohei SATO , Hiroshi TOMITA
发明人： Hisashi OKUCHI , Hidekazu HAYASHI , Linan JI , Yohei SATO , Hiroshi TOMITA
IPC分类号： F26B5/04
CPC分类号： F26B7/00 , F26B5/04
摘要： According to one embodiment, a supercritical drying apparatus comprises a chamber being hermetically sealable and configured to store a semiconductor substrate, a heater configured to heat an inner side of the chamber, a supply unit configured to supply carbon dioxide to the chamber, a discharge unit configured to discharge carbon dioxide from the chamber, and a rotation unit configured to rotate the chamber by an angle equal to or greater than 90 degrees and equal to or smaller than 180 degrees with respect to the horizontal direction.
摘要翻译：根据一个实施例，超临界干燥装置包括：气室密封并构造成存储半导体衬底;加热器，其构造成加热室的内侧;供应单元，被配置为向室供应二氧化碳;排放单元被构造成从所述室排放二氧化碳，以及旋转单元，其被构造成使所述室相对于水平方向旋转等于或大于90度且等于或小于180度的角度。

2. 发明申请

US20120247516A1 SUPERCRITICAL DRYING METHOD AND APPARATUS FOR SEMICONDUCTOR SUBSTRATES 有权
标题翻译：超临界干燥方法和半导体基板的设备
公开(公告)号：US20120247516A1
公开(公告)日：2012-10-04
申请号：US13369970
申请日：2012-02-09
申请人： Yohei SATO , Hisashi OKUCHI , Hiroshi TOMITA , Hidekazu HAYASHI , Yukiko KITAJIMA , Takayuki TOSHIMA , Mitsuaki IWASHITA , Kazuyuki MITSUOKA , Gen YOU , Hiroki OHNO , Takehiko ORII
发明人： Yohei SATO , Hisashi OKUCHI , Hiroshi TOMITA , Hidekazu HAYASHI , Yukiko KITAJIMA , Takayuki TOSHIMA , Mitsuaki IWASHITA , Kazuyuki MITSUOKA , Gen YOU , Hiroki OHNO , Takehiko ORII
IPC分类号： B08B3/00 , F26B25/14 , F26B25/06
CPC分类号： F26B3/02
摘要： According to one embodiment, a supercritical drying method comprises cleaning a semiconductor substrate with a chemical solution, rinsing the semiconductor substrate with pure water after the cleaning, changing a liquid covering a surface of the semiconductor substrate from the pure water to alcohol by supplying the alcohol to the surface after the rinsing, guiding the semiconductor substrate having the surface wetted with the alcohol into a chamber, discharging oxygen from the chamber by supplying an inert gas into the chamber, putting the alcohol into a supercritical state by increasing temperature in the chamber to a critical temperature of the alcohol or higher after the discharge of the oxygen, and discharging the alcohol from the chamber by lowering pressure in the chamber and changing the alcohol from the supercritical state to a gaseous state. The chamber contains SUS. An inner wall face of the chamber is subjected to electrolytic polishing.
摘要翻译：根据一个实施方案，超临界干燥方法包括用化学溶液清洗半导体衬底，在清洁之后用纯水冲洗半导体衬底，通过供应醇将覆盖半导体衬底的表面的液体从纯水改变为醇在冲洗后的表面上引导具有被醇润湿的表面的半导体衬底进入腔室，通过向室中供应惰性气体从室中排出氧气，通过增加室中的温度将醇置于超临界状态醇的临界温度或排出氧后的较高温度，并且通过降低室中的压力并将醇从超临界状态改变为气态，从室中排出醇。房间包含SUS。对室的内壁面进行电解抛光。

3. 发明申请

US20120240426A1 SUPERCRITICAL DRYING METHOD FOR SEMICONDUCTOR SUBSTRATE 有权
标题翻译：用于半导体基板的超临界干燥方法
公开(公告)号：US20120240426A1
公开(公告)日：2012-09-27
申请号：US13231956
申请日：2011-09-13
申请人： Hidekazu HAYASHI , Hiroshi Tomita , Yukiko Kitajima , Hisashi Okuchi , Yohei Sato
发明人： Hidekazu HAYASHI , Hiroshi Tomita , Yukiko Kitajima , Hisashi Okuchi , Yohei Sato
IPC分类号： F26B7/00 , F26B21/14
CPC分类号： H01L21/02101 , H01L21/02068 , H01L21/67017 , H01L21/67034
摘要： According to one embodiment, a supercritical drying method for a semiconductor substrate includes introducing a semiconductor substrate formed with a metal film into a chamber, the surface of the substrate being wet with alcohol, supplying a supercritical fluid of carbon dioxide into the chamber, setting a temperature inside the chamber to a predetermined temperature, to replace the alcohol on the semiconductor substrate with the supercritical fluid, and discharging the supercritical fluid and the alcohol from the chamber while keeping the temperature inside the chamber at the predetermined temperature, to lower a pressure inside the chamber. The predetermined temperature is not lower than 75° C. but lower than a critical temperature of the alcohol.
摘要翻译：根据一个实施例，半导体衬底的超临界干燥方法包括将形成有金属膜的半导体衬底引入腔室中，基底表面被醇润湿，将二氧化碳的超临界流体供应到腔室中，在室内温度达到预定温度，用超临界流体替代半导体衬底上的醇，并且将超临界流体和醇从室中排出，同时将室内的温度保持在预定温度，以降低内部的压力房间。预定温度不低于75℃，但低于醇的临界温度。

4. 发明申请

US20120186097A1 SUPERCRITICAL DRYING DEVICE AND METHOD 审中-公开
标题翻译：超临界干燥装置及方法
公开(公告)号：US20120186097A1
公开(公告)日：2012-07-26
申请号：US13160350
申请日：2011-06-14
申请人： Hidekazu HAYASHI , Hiroshi Tomita , Hisashi Okuchi , Yohei Sato , Yukiko Kitajima
发明人： Hidekazu HAYASHI , Hiroshi Tomita , Hisashi Okuchi , Yohei Sato , Yukiko Kitajima
IPC分类号： F26B3/00 , F26B25/06
CPC分类号： F26B3/00
摘要： Certain embodiments provide a supercritical drying device, comprising a sealable first vessel; a fluorine adsorbent provided inside the first vessel; a second vessel being provided inside the first vessel and housing a semiconductor substrate; a heater heating the inside of the first vessel; a pipe connected to the first vessel; and a valve provided on the pipe. Free fluorine generated by heating a fluorine containing solvent is adsorbed to the fluorine adsorbent.
摘要翻译：某些实施例提供了一种超临界干燥装置，包括可密封的第一容器; 设置在第一容器内的氟吸附剂; 第二容器设置在第一容器的内部并容纳半导体衬底; 加热器加热第一容器的内部; 连接到第一船的管道; 以及设置在管上的阀。通过加热含氟溶剂产生的游离氟吸附到氟吸附剂上。

5. 发明申请

US20120048304A1 SUPERCRITICAL DRYING METHOD AND SUPERCRITICAL DRYING SYSTEM 审中-公开
标题翻译：超临界干燥方法和超临界干燥系统
公开(公告)号：US20120048304A1
公开(公告)日：2012-03-01
申请号：US13029776
申请日：2011-02-17
申请人： Yukiko KITAJIMA , Hiroshi TOMITA , Hidekazu HAYASHI , Hisashi OKUCHI , Yohei SATO
发明人： Yukiko KITAJIMA , Hiroshi TOMITA , Hidekazu HAYASHI , Hisashi OKUCHI , Yohei SATO
IPC分类号： B08B3/00
CPC分类号： H01L21/67034 , H01L21/02101
摘要： According to an embodiment, a supercritical drying method includes: introducing a semiconductor substrate of which a surface is wet with a supercritical displacement solvent into a chamber; supplying a first supercritical fluid being based on first carbon dioxide to the chamber; supplying a second supercritical fluid which is based on second carbon dioxide to the chamber, after the supplying of the first supercritical fluid; and lowering an inside pressure of the chamber to gasify the second supercritical fluid and to discharge the gasified second supercritical fluid from the chamber. The first carbon dioxide is generated by recovering and recycling the carbon dioxide discharged from the chamber. The second carbon dioxide contains no supercritical displacement solvent or contains the supercritical displacement solvent in a concentration lower than that in the first carbon dioxide.
摘要翻译：根据一个实施方案，超临界干燥方法包括：将超临界位移溶剂表面被湿润的半导体衬底引入腔室; 将基于第一二氧化碳的第一超临界流体供应到所述室; 在供应第一超临界流体之后，向腔室供应基于第二二氧化碳的第二超临界流体; 并且降低所述室的内部压力以使所述第二超临界流体气化并从所述室排出所述气化的第二超临界流体。第一种二氧化碳是通过回收和循环从室排出的二氧化碳产生的。第二种二氧化碳不含超临界置换溶剂，或含有浓度低于第一种二氧化碳浓度的超临界置换溶剂。

6. 发明申请

US20110289793A1 SUPERCRITICAL DRYING METHOD 审中-公开
标题翻译：超临界干燥方法
公开(公告)号：US20110289793A1
公开(公告)日：2011-12-01
申请号：US12976593
申请日：2010-12-22
申请人： Hidekazu HAYASHI , Hiroshi Tomita , Hisashi Okuchi , Yohei Sato , Yukiko Kitajima
发明人： Hidekazu HAYASHI , Hiroshi Tomita , Hisashi Okuchi , Yohei Sato , Yukiko Kitajima
IPC分类号： F26B3/02 , B08B3/10
CPC分类号： F26B3/04 , H01L21/67034
摘要： According to one embodiment, a semiconductor substrate having a surface wetted with a chemical solution is introduced into a chamber, and a supercritical fluid is supplied into the chamber. The temperature in the chamber is adjusted to the critical temperature of the chemical solution or higher, so that the chemical solution is put into a supercritical state. The pressure in the chamber is then lowered, and the chemical solution in the critical state is turned into gaseous matter. The gaseous matter is then discharged from the chamber.
摘要翻译：根据一个实施例，将具有用化学溶液润湿的表面的半导体衬底引入室中，并将超临界流体供应到室中。将室内的温度调节至化学溶液的临界温度以上，使化学溶液处于超临界状态。然后降低室中的压力，将临界状态下的化学溶液变成气态物质。然后将气体从室排出。

7. 发明申请

US20110314689A1 SUBSTRATE DRYING METHOD 审中-公开
标题翻译：基板干燥方法
公开(公告)号：US20110314689A1
公开(公告)日：2011-12-29
申请号：US12980079
申请日：2010-12-28
申请人： Hisashi OKUCHI , Yohei SATO , Hidekazu HAYASHI , Hiroshi TOMITA , Yukiko KITAJIMA
发明人： Hisashi OKUCHI , Yohei SATO , Hidekazu HAYASHI , Hiroshi TOMITA , Yukiko KITAJIMA
IPC分类号： F26B3/02 , B08B3/00
CPC分类号： C11D11/0047 , H01L21/02057 , H01L21/67028 , H01L21/67034
摘要： According to one embodiment, a semiconductor substrate whose surface is wet with a chemical solution (solvent) and formed with patterns having an aspect ratio of 10 or more is loaded into a chamber. Then, while the chemical solution (solvent) remains on the semiconductor substrate, its temperature is increased to a predetermined temperature in the range of 160° C. or more and less than the critical temperature of the chemical solution (solvent), and the evaporated chemical solution (solvent) is discharged from the chamber.
摘要翻译：根据一个实施例，将其表面用化学溶液（溶剂）润湿并且形成有纵横比为10以上的图案的半导体基板装载到室中。然后，当化学溶液（溶剂）保留在半导体衬底上时，其温度升高到在160℃以上且小于化学溶液（溶剂）的临界温度的范围内的预定温度，并且蒸发化学溶液（溶剂）从室排出。

8. 发明申请

US20120208048A1 BATTERIES FOR POWER TOOLS AND METHODS OF MOUNTING BATTERY TERMINALS TO BATTERY HOUSINGS 审中-公开
标题翻译：用于电动工具的电池和将电池端子安装到电池外壳的方法
公开(公告)号：US20120208048A1
公开(公告)日：2012-08-16
申请号：US13396173
申请日：2012-02-14
申请人： Hironori OGURA , Hideyuki TAGA , Hidekazu HAYASHI
发明人： Hironori OGURA , Hideyuki TAGA , Hidekazu HAYASHI
IPC分类号： H01M2/06 , H01M2/00 , H01M10/04 , H01M2/30
CPC分类号： H01M2/1022 , H01M2/1066 , H01M2/30 , H01M10/46 , Y10T29/49108
摘要： A battery includes a battery housing and a plurality of battery terminals. The battery housing has a terminal mounting portion made of resin. The battery terminals are connectible with external terminals and are mounted to the terminal mounting portion so as to extend through the terminal mounting portion, so that each of the battery terminals has a first end positioned on one side of the terminal mounting portion and a second end positioned on an opposite side of the terminal mounting portion. At least one of the battery terminals is integrated with the terminal mounting portion, so that there is no substantial clearance between the at least one of the battery terminals and a part of the terminal mounting portion, through which the at least one of the battery terminals extends.
摘要翻译：电池包括电池壳体和多个电池端子。电池壳体具有由树脂制成的端子安装部。电池端子可与外部端子连接，并且安装到端子安装部分以便延伸通过端子安装部分，使得每个电池端子具有位于端子安装部分的一侧上的第一端和第二端位于端子安装部分的相对侧上。电池端子中的至少一个与端子安装部分一体化，使得至少一个电池端子和端子安装部分的一部分之间没有实质的间隙，至少一个电池端子延伸。

9. 发明申请

US20130029197A1 BATTERY PACK INCLUDING A SHOCK ABSORBING DEVICE 有权
标题翻译：电池组包括一个震动吸收装置
公开(公告)号：US20130029197A1
公开(公告)日：2013-01-31
申请号：US13632658
申请日：2012-10-01
申请人： Tsuyoshi MURAYAMA , Hideyuki TAGA , Kazutoshi OGINO , Hidekazu HAYASHI , Hitoshi SUZUKI
发明人： Tsuyoshi MURAYAMA , Hideyuki TAGA , Kazutoshi OGINO , Hidekazu HAYASHI , Hitoshi SUZUKI
IPC分类号： H01M10/52 , H01M10/50 , H01M2/12
CPC分类号： H01M2/1022 , H01M2/347 , H01M6/42 , H01M10/425
摘要： One aspect according to the present invention includes a battery pack and a shock absorbing device interposed between a battery cell holder and a case body and capable of keeping the battery cell holder and the battery cells not to directly contact with an inner surface of the case body.
摘要翻译：根据本发明的一个方面包括电池组和设置在电池单元保持器和壳体之间并且能够保持电池单元保持器和电池单元不与壳体的内表面直接接触的减震装置。

10. 发明申请

US20120096298A1 BATTERY PACK 有权
标题翻译：电池组
公开(公告)号：US20120096298A1
公开(公告)日：2012-04-19
申请号：US13271516
申请日：2011-10-12
申请人： Masafumi NODA , Hiroki UESUGI , Hidekazu HAYASHI
发明人： Masafumi NODA , Hiroki UESUGI , Hidekazu HAYASHI
IPC分类号： G06F11/30 , G06F1/26
CPC分类号： H02J7/0021 , G01R31/3606 , G01R31/3658 , H01M10/0525 , H01M10/4257 , H01M10/441 , H01M10/448 , H01M10/482 , H02J7/0029 , H02J7/0072 , Y02E60/12
摘要： A tool battery pack can include a current detection element for detecting a discharge current or a charge current, a monitoring section for inputting a current signal of the discharge current or the charge current through the current detection element and for inputting voltage signals of each cell battery, and a control microcomputer for performing discharge control or charge control based on the signals from the monitoring section. Further, the tool battery pack is constructed such that the current signal through the current detection element is input to both the monitoring section and the control microcomputer,
摘要翻译：工具电池组可以包括用于检测放电电流或充电电流的电流检测元件，用于输入通过电流检测元件的放电电流或充电电流的电流信号的监视部分，以及用于输入每个电池电池的电压信号以及基于来自监视部的信号进行放电控制或充电控制的控制微计算机。此外，工具电池组被构造成使得通过电流检测元件的电流信号被输入到监视部分和控制微型计算机两者，

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