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    • 2. 发明授权
    • Imaging probe
    • 成像探头
    • US06621065B1
    • 2003-09-16
    • US09708535
    • 2000-11-09
    • Yasushi FukumotoSeiji ShimokawaKenji Okabe
    • Yasushi FukumotoSeiji ShimokawaKenji Okabe
    • H01J4014
    • H04N5/2256
    • A CCD camera (27) images a work to generate its image data. An imaging optical system (24, 25, 26) focuses an image of the work on the CCD camera (27). A down-projection illumination source (31) includes at least one semiconductor light-emitting device for producing a down-projection illumination light to illuminate the work from above. An illuminating optical system (29) joins the illumination light from the down-projection illumination source (31) to the imaging optical system in order to lead the illumination light to the work via the imaging optical system. These optical components are mounted on a chassis (23) to construct an imaging probe (1), which is employed at any angle as a measuring probe of a three-dimensional tester.
    • CCD相机(27)对作品进行成像以生成其图像数据。 成像光学系统(24,25,26)将作品的图像聚焦在CCD照相机(27)上。 下投影照明源(31)包括至少一个半导体发光装置,用于产生从上方照射工件的下投照明光。 照明光学系统(29)将来自下投照明源(31)的照明光连接到成像光学系统,以便经由成像光学系统将照明光引导到工件。 这些光学部件被安装在底架23上,构成成像探头(1),其以任意角度被用作三维测试仪的测量探针。
    • 6. 发明授权
    • Focus detection unit and microscope using the focus detection unit
    • 焦点检测单元和显微镜使用焦点检测单元
    • US5963366A
    • 1999-10-05
    • US965527
    • 1997-11-06
    • Taizo NakamuraYasushi FukumotoYuwu Zhang
    • Taizo NakamuraYasushi FukumotoYuwu Zhang
    • G03B13/36G02B7/28G02B21/24G02B21/26G02B21/06G02B23/06
    • G02B21/244
    • A focus detection unit including an optical system employing an image sandwiching method is disclosed. In the focus detection unit, a double slit mask (12) forming double sight lines is disposed on the optical axis of a lamp 10 while a single slit mask (16) forming an single sight line is disposed on the optical axis of a lamp (14). A triangular pole prism 18 is provided, consisting of first and second side surfaces, which together constitutes an edge, and a plane opposing the edge. The prism (18) is disposed such that the double and single sight line are able to irradiate the first and second side surfaces. The prism reflects the incoming lines toward a plane before the right-angle edge. Before the edge of the prism (18), a projection lens (20) is provided for forming images of the double and single sight lines which have been reflected by the prism (18) and separated by a mask (22), at a both aiming line imaging position 100. The images are projected onto a workpiece.
    • 公开了一种包括使用图像夹持方法的光学系统的焦点检测单元。 在焦点检测单元中,在灯10的光轴上设置形成双重视线的双缝掩模(12),同时在灯的光轴上设置形成单个视线的单个狭缝掩模(16) 14)。 提供三角柱棱镜18,其由第一和第二侧表面组成,它们一起构成边缘,以及与边缘相对的平面。 棱镜(18)被布置成使得双重和单个瞄准线能够照射第一和第二侧表面。 棱镜将入射线反射到直角边缘之前的平面。 在棱镜(18)的边缘之前,设置投影透镜(20),用于形成由棱镜(18)反射并由掩模(22)分离的双和单视线的图像,两者 瞄准线成像位置100.图像被投影到工件上。