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    • 7. 发明申请
    • IMPROVED CMOS DIODES WITH DUAL GATE CONDUCTORS, AND METHODS FOR FORMING THE SAME
    • 改进的具有双栅导体的CMOS二极管及其形成方法
    • WO2007127770A2
    • 2007-11-08
    • PCT/US2007/067361
    • 2007-04-25
    • INTERNATIONAL BUSINESS MACHINES CORPORATIONONSONGO, David, M.RAUSCH, WernerYANG, Haining, S.
    • ONSONGO, David, M.RAUSCH, WernerYANG, Haining, S.
    • H01L23/62
    • H01L29/7391H01L29/66356
    • The present invention provides an improved CMOS diode structure with dual gate conductors. Specifically, a substrate comprising a first n-doped region and a second p-doped region is formed. A third region of either n-type or p-type conductivity is located between the first and second regions. A first gate conductor of n-type conductivity and a second gate conductor of p-type conductivity are located over the substrate and adjacent to the first and second regions, respectively. Further, the second gate conductor is spaced apart and isolated from the first gate conductor by a dielectric isolation structure. An accumulation region with an underlying depletion region can be formed in such a diode structure between the third region and the second or the first region, and such an accumulation region preferably has a width that is positively correlated with that of the second or the first gate conductor.
    • 本发明提供了具有双栅极导体的改进的CMOS二极管结构。 具体地,形成包括第一n掺杂区域和第二p掺杂区域的衬底。 n型或p型导电性的第三区域位于第一和第二区域之间。 n型导电体的第一栅极导体和p型导电体的第二栅极导体分别位于衬底上并且分别邻近第一和第二区域。 此外,第二栅极导体通过介电隔离结构与第一栅极导体隔开并隔离。 可以在第三区域和第二区域或第一区域之间的这种二极管结构中形成具有底层耗尽区域的积聚区域,并且这样的累积区域优选地具有与第二或第一栅极的宽度正相关的宽度 导体。