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1. 发明申请

WO2011087878A3 MANUFACTURE OF THIN FILM SOLAR CELLS WITH HIGH CONVERSION EFFICIENCY 审中-公开
标题翻译：具有高转换效率的薄膜太阳能电池的制造
公开(公告)号：WO2011087878A3
公开(公告)日：2011-11-24
申请号：PCT/US2010062175
申请日：2010-12-28
申请人： APPLIED MATERIALS INC , TANNER DAVID , LE HIEN-MINH HUU , GU QUANCHENG TOMMY , SHENG SHURAN , CHAE YONG KEE , SU TZAY-FA JEFF , WANG DAPENG
发明人： TANNER DAVID , LE HIEN-MINH HUU , GU QUANCHENG TOMMY , SHENG SHURAN , CHAE YONG KEE , SU TZAY-FA JEFF , WANG DAPENG
IPC分类号： H01L31/075 , H01L31/042 , H01L31/18
CPC分类号： H01L31/022466 , H01L21/67236 , H01L21/67736 , H01L31/02168 , H01L31/03921 , H01L31/056 , H01L31/075 , H01L31/076 , H01L31/202 , Y02E10/52 , Y02E10/548 , Y02P70/521
摘要： A method and apparatus for forming solar cells is provided. In one embodiment, a photovoltaic device includes a antireflection coating layer disposed on a first surface of a substrate, a barrier layer disposed on a second surface of the substrate, a first transparent conductive oxide layer disposed on the barrier layer, a conductive contact layer disposed on the first transparent conductive oxide layer, a first p-i-n junction formed on the conductive contact layer, and a second transparent conductive oxide layer formed on the first p-i-n junction.
摘要翻译：提供了一种用于形成太阳能电池的方法和设备。在一个实施例中，光伏器件包括设置在衬底的第一表面上的抗反射涂层，设置在衬底的第二表面上的阻挡层，设置在阻挡层上的第一透明导电氧化物层，设置的导电接触层在第一透明导电氧化物层上形成在导电接触层上形成的第一pin结和在第一pin结上形成的第二透明导电氧化物层。

2. 发明申请

WO2011087878A2 MANUFACTURE OF THIN FILM SOLAR CELLS WITH HIGH CONVERSION EFFICIENCY 审中-公开
标题翻译：具有高转换效率的薄膜太阳能电池的制造
公开(公告)号：WO2011087878A2
公开(公告)日：2011-07-21
申请号：PCT/US2010/062175
申请日：2010-12-28
申请人： APPLIED MATERIALS, INC. , TANNER, David , LE, Hien-Minh Huu , GU, Quancheng (Tommy) , SHENG, Shuran , CHAE, Yong Kee , SU, Tzay-Fa (Jeff) , WANG, Dapeng
发明人： TANNER, David , LE, Hien-Minh Huu , GU, Quancheng (Tommy) , SHENG, Shuran , CHAE, Yong Kee , SU, Tzay-Fa (Jeff) , WANG, Dapeng
CPC分类号： H01L31/022466 , H01L21/67236 , H01L21/67736 , H01L31/02168 , H01L31/03921 , H01L31/056 , H01L31/075 , H01L31/076 , H01L31/202 , Y02E10/52 , Y02E10/548 , Y02P70/521
摘要： A method and apparatus for forming solar cells is provided. In one embodiment, a photovoltaic device includes a antireflection coating layer disposed on a first surface of a substrate, a barrier layer disposed on a second surface of the substrate, a first transparent conductive oxide layer disposed on the barrier layer, a conductive contact layer disposed on the first transparent conductive oxide layer, a first p-i-n junction formed on the conductive contact layer, and a second transparent conductive oxide layer formed on the first p-i-n junction.
摘要翻译：提供一种用于形成太阳能电池的方法和装置。在一个实施例中，光伏器件包括设置在衬底的第一表面上的抗反射涂层，设置在衬底的第二表面上的阻挡层，设置在阻挡层上的第一透明导电氧化物层，设置在导电接触层在第一透明导电氧化物层上形成在导电接触层上的第一pin结，以及形成在第一pin结上的第二透明导电氧化物层。

3. 发明申请

WO2009134660A2 PHOTOVOLTAIC CELL REFERENCE MODULE FOR SOLAR TESTING 审中-公开
标题翻译：用于太阳能测试的光电池参考模块
公开(公告)号：WO2009134660A2
公开(公告)日：2009-11-05
申请号：PCT/US2009041410
申请日：2009-04-22
申请人： APPLIED MATERIALS INC , WANG DAPENG , FREI MICHEL R , SU TZAY-FA , TANNER DAVID
发明人： WANG DAPENG , FREI MICHEL R , SU TZAY-FA , TANNER DAVID
IPC分类号： H01L31/042
CPC分类号： H01L31/042 , H01L31/02167 , H01L31/048 , H02S50/10 , Y02E10/50
摘要： The present invention generally includes an apparatus and method of forming a reference module device that is able to deliver a repeatable and desirable amount of power that does not degrade or change over time. The reference module can be used to help test and calibrate various testing equipment used in the production of a photovoltaic device that may be formed in a solar cell fab. The solar cell fab is generally an arrangement of processing modules and automation equipment that is used to form solar cell devices.
摘要翻译：本发明通常包括一种形成参考模块装置的装置和方法，所述装置和方法能够递送不会劣化或随时间改变的可重复且期望的功率量。参考模块可用于帮助测试和校准在太阳能电池制造中可能形成的光伏器件生产中使用的各种测试设备。太阳能电池制造厂通常是用于形成太阳能电池装置的处理模块和自动化设备的布置。

4. 发明申请

WO2011047186A3 METHOD AND APPARATUS FOR IMPROVING PHOTOVOLTAIC EFFICIENCY 审中-公开
公开(公告)号：WO2011047186A3
公开(公告)日：2011-04-21
申请号：PCT/US2010/052719
申请日：2010-10-14
申请人： APPLIED MATERIALS, INC. , LE, Hien-Minh, Huu , HASSAN, Mohd, Fadzli, Anwar , TANNER, David , WANG, Dapeng
发明人： LE, Hien-Minh, Huu , HASSAN, Mohd, Fadzli, Anwar , TANNER, David , WANG, Dapeng
IPC分类号： H01L31/042
摘要： A method and apparatus for improving efficiency of photovoltaic cells by improving light capture between the photoelectric unit and back reflector is provided. A transition layer is formed at the interface between the photoelectric unit and transmitting conducting layer of the back reflector by adding oxygen, nitrogen, or both to the surface of the photoelectric unit or the interface between the photoelectric unit and the transmitting conducting layer. The transition layer may comprise silicon, oxygen, or nitrogen, and may be silicon oxide, silicon nitride, metal oxide with excess oxygen, metal oxide with nitrogen, or any combination thereof, including bilayers and multi-layers. The sputtering process for forming the transmitting conducting layer may feature at least one of nitrogen and excess oxygen, and may be performed by sputtering at low power, followed by an operation to form the rest of the transmitting conductive layer.

5. 发明申请

WO2011047186A2 METHOD AND APPARATUS FOR IMPROVING PHOTOVOLTAIC EFFICIENCY 审中-公开
标题翻译：提高光伏效率的方法和设备
公开(公告)号：WO2011047186A2
公开(公告)日：2011-04-21
申请号：PCT/US2010052719
申请日：2010-10-14
申请人： APPLIED MATERIALS INC , LE HIEN-MINH HUU , HASSAN MOHD FADZLI ANWAR , TANNER DAVID , WANG DAPENG
发明人： LE HIEN-MINH HUU , HASSAN MOHD FADZLI ANWAR , TANNER DAVID , WANG DAPENG
IPC分类号： H01L31/042
CPC分类号： H01L31/022466 , C23C14/0084 , C23C14/027 , C23C14/086 , H01L31/022483 , H01L31/0236 , H01L31/0368 , H01L31/03682 , H01L31/03685 , H01L31/03762 , H01L31/056 , H01L31/076 , H01L31/077 , H01L31/1804 , H01L31/182 , H01L31/1824 , H01L31/1884 , Y02E10/52 , Y02E10/545 , Y02E10/546 , Y02E10/547 , Y02E10/548 , Y02P70/521
摘要： A method and apparatus for improving efficiency of photovoltaic cells by improving light capture between the photoelectric unit and back reflector is provided. A transition layer is formed at the interface between the photoelectric unit and transmitting conducting layer of the back reflector by adding oxygen, nitrogen, or both to the surface of the photoelectric unit or the interface between the photoelectric unit and the transmitting conducting layer. The transition layer may comprise silicon, oxygen, or nitrogen, and may be silicon oxide, silicon nitride, metal oxide with excess oxygen, metal oxide with nitrogen, or any combination thereof, including bilayers and multi-layers. The sputtering process for forming the transmitting conducting layer may feature at least one of nitrogen and excess oxygen, and may be performed by sputtering at low power, followed by an operation to form the rest of the transmitting conductive layer.
摘要翻译：提供了通过改进光电单元和后反射器之间的光捕获来提高光伏电池效率的方法和设备。通过向光电单元表面或光电单元与发射导电层之间的界面添加氧，氮或两者，在光电单元与背反射器的透射导电层之间的界面处形成过渡层。过渡层可以包括硅，氧或氮，并且可以是氧化硅，氮化硅，具有过量氧的金属氧化物，具有氮的金属氧化物或其任何组合，包括双层和多层。用于形成透射导电层的溅射工艺可以具有氮和过量氧中的至少一种，并且可以通过低功率溅射来执行，随后进行形成透射导电层的其余部分的操作。

6. 发明申请

WO2010129559A3 CALIBRATION PROCEDURE FOR SOLAR SIMULATORS USED IN SINGLE-JUNCTION AND TANDEM-JUNCTION SOLAR CELL TESTING APPARATUS 审中-公开
标题翻译：用于单节和串联太阳能电池测试装置的太阳能模拟器的校准程序
公开(公告)号：WO2010129559A3
公开(公告)日：2011-02-03
申请号：PCT/US2010033562
申请日：2010-05-04
申请人： APPLIED MATERIALS INC , WANG DAPENG , FREI MICHEL , SU TZAY-FA , TANNER DAVID
发明人： WANG DAPENG , FREI MICHEL , SU TZAY-FA , TANNER DAVID
IPC分类号： H01L31/042
CPC分类号： G01J1/08 , G01J1/32
摘要： A method of calibrating a light source used to simulate the sun in solar cell testing apparatus. The method comprises using a control cell to measure the intensity of light from the light source at a first wavelength range as a function of output short circuit current, comparing the measured intensity to a targeted intensity value, optionally adjusting power to the light source until the measured intensity is substantially equal to the targeted intensity value, repeatedly using a calibrated monitoring module to periodically measure monitoring measured values for monitoring module output short circuit current, monitoring module output open circuit voltage and monitoring module quantum efficiency, obtaining average values for monitoring module output short circuit current, monitoring module output open circuit voltage and monitoring module quantum efficiency, comparing the measured values with the average values, and determining if differences in measured values and average values are within an acceptable limit.
摘要翻译：一种在太阳能电池测试装置中校准用于模拟太阳的光源的方法。该方法包括使用控制单元来测量来自作为输出短路电流的函数的来自光源的来自光源的光的强度，作为输出短路电流的函数，将测量的强度与目标强度值进行比较，可选地调节光源的功率，直到测量强度基本上等于目标强度值，重复使用校准监控模块定期测量监测模块输出短路电流，监控模块输出开路电压和监控模块量子效率的监测值，获取监控模块输出的平均值短路电流，监控模块输出开路电压和监控模块量子效率，将测量值与平均值进行比较，并确定测量值和平均值之间的差异是否在可接受的极限内。

7. 发明申请

WO2010091025A3 METROLOGY AND INSPECTION SUITE FOR A SOLAR PRODUCTION LINE 审中-公开
标题翻译：用于太阳能生产线的计量和检测套件
公开(公告)号：WO2010091025A3
公开(公告)日：2010-11-25
申请号：PCT/US2010022915
申请日：2010-02-02
申请人： APPLIED MATERIALS INC , SCHLEZINGER ASAF , FREI MICHEL R , WANG DAPENG , SU TZAY-FA , SVIDENKO VICKY , MAQSOOD KASHIF
发明人： FREI MICHEL R , WANG DAPENG , SU TZAY-FA , SVIDENKO VICKY , MAQSOOD KASHIF
IPC分类号： H01L31/042 , H01L21/66
CPC分类号： H01L31/188 , H01L31/022466 , Y02E10/50
摘要： Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.
摘要翻译：本发明的实施例总体上涉及一种系统，该系统用于使用处理模块形成太阳能电池器件，所述处理模块适于在形成太阳能电池器件中执行一个或多个处理。在一个实施例中，该系统适于通过接受大的未处理的基板并且执行多次沉积，材料去除，清洁，切片，结合以及各种检查和测试过程以形成多个完整的，功能性的和测试的来形成薄膜太阳能电池器件太阳能电池装置然后可以被运送到最终用户以安装在期望的位置以发电。在一个实施例中，系统提供各种形成等级的太阳能电池装置的检查，同时收集和使用度量数据来诊断，调整或改善太阳能电池装置制造期间的生产线过程。

8. 发明申请

WO2009055262A1 PHOTOVOLTAIC FABRICATION PROCESS MONITORING AND CONTROL USING DIAGNOSTIC DEVICES 审中-公开
标题翻译：使用诊断设备的光伏制造过程监控和控制
公开(公告)号：WO2009055262A1
公开(公告)日：2009-04-30
申请号：PCT/US2008/079585
申请日：2008-10-10
申请人： APPLIED MATERIALS, INC. , WANG, Dapeng , FREI, Michel Ranjit , SU, Tsay-Fa , SVIDENKO, Vicky , HIGASHI, Gregg S.
发明人： WANG, Dapeng , FREI, Michel Ranjit , SU, Tsay-Fa , SVIDENKO, Vicky , HIGASHI, Gregg S.
IPC分类号： H01L31/042
CPC分类号： H01L31/186 , B23K26/0622 , B23K26/082 , B23K26/36 , B23K26/40 , B23K2201/40 , B23K2203/50 , Y02E10/50 , Y02P70/521
摘要： The formation of diagnostic devices on the same substrate used to fabricate a photovoltaic (PV) cell is described. Such devices, also referred to as process diagnostic vehicles (PDVs), are configured for in-line monitoring of electrical characteristics of PV cell features and are formed on the substrate using the same process steps for PV cell fabrication. The data collected via the PDVs can be used to tune or optimize subsequent PV cell fabrication, i.e., used as feedback for the fabrication process. Alternatively, the data collected via PDVs can be fed forward in the fabrication process, so that later process steps performed on a PV cell substrate can be modified to compensate for issues detected on the PV cell substrate via the PDVs.
摘要翻译：描述了用于制造光伏（PV）电池的同一衬底上的诊断装置的形成。这种也被称为过程诊断车辆（PDV）的装置被配置为在线监测PV电池特征的电特性，并且使用与PV电池制造相同的工艺步骤在衬底上形成。通过PDV收集的数据可用于调整或优化随后的PV电池制造，即用作制造工艺的反馈。或者，可以通过PDV收集的数据在制造过程中向前馈送，使得可以修改在PV电池基板上执行的后续处理步骤，以经由PDV来补偿在PV电池基板上检测到的问题。

9. 发明申请

WO2011129970A2 LOW-LOSS THIN-FILM SI BACK CONTACT SYSTEM 审中-公开
标题翻译：低损失薄膜返回接触系统
公开(公告)号：WO2011129970A2
公开(公告)日：2011-10-20
申请号：PCT/US2011/029629
申请日：2011-03-23
申请人： APPLIED MATERIALS, INC. , EBERSPACHER, Chris , WANG, Dapeng
发明人： EBERSPACHER, Chris , WANG, Dapeng
IPC分类号： H01L31/042
CPC分类号： H01L31/02168 , H01L31/022433 , H01L31/022483 , Y02E10/50
摘要： A method and apparatus for forming a thin-film photovoltaic device is described. One or more photoconversion layers is formed on a substrate. A transparent conductor is formed over the photoconversion layer and a patterned conductor formed over the transparent conductor. The patterned conductor comprises a plurality of joined conductive segments that cover portions of the transparent conductor while leaving other portions exposed. A broad spectrum reflector is formed over the patterned conductor, and a structural back layer may be applied to the broad spectrum reflector. The thickness and conductivity of the transparent conductor and the areal coverage of the patterned conductor may be adjusted to achieve a desired bulk sheet resistance.
摘要翻译：描述了用于形成薄膜光伏器件的方法和设备。在基板上形成一个或多个光转换层。在光转换层上形成透明导体，并在透明导体上形成图案导体。图案化的导体包括多个接合的导电段，其覆盖透明导体的部分，同时使其它部分露出。在图案化的导体上形成广谱反射器，并且可以将结构背层应用于广谱反射器。可以调节透明导体的厚度和导电性以及图案化导体的面覆盖度以实现期望的体积薄片电阻。

10. 发明申请

WO2010135321A3 METHOD AND APPARATUS FOR SOLAR CELL PRODUCTION LINE CONTROL AND PROCESS ANALYSIS 审中-公开
标题翻译：太阳能电池生产线控制和过程分析的方法和装置
公开(公告)号：WO2010135321A3
公开(公告)日：2011-02-03
申请号：PCT/US2010035247
申请日：2010-05-18
申请人： APPLIED MATERIALS INC , SVIDENKO VICKY , ABRAHAM MATHEW , KINCAL SERKAN , SCHLEZINGER ASAF , FREI MICHEL , WANG DAPENG , SU TZAY-FA
发明人： SVIDENKO VICKY , ABRAHAM MATHEW , KINCAL SERKAN , SCHLEZINGER ASAF , FREI MICHEL , WANG DAPENG , SU TZAY-FA
IPC分类号： H01L31/042 , H01L31/18
CPC分类号： H01L31/1876 , G05B2219/31449 , G05B2219/31459 , H01L31/03762 , H01L31/075 , H02S50/10 , Y02E10/50 , Y02P70/521 , Y02P80/114 , Y02P90/86
摘要： Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.
摘要翻译：本发明的实施例一般涉及使用适于在太阳能电池器件的形成中执行一个或多个工艺的处理模块来形成太阳能电池器件的系统。在一个实施例中，该系统适于通过接受大的未处理衬底并执行多次沉积，材料去除，清洁，切片，结合以及各种检查和测试过程来形成薄膜太阳能电池器件，以形成多个完整，功能和测试然后太阳能电池装置可以运送到最终用户以安装在期望的位置以发电。在一个实施例中，系统提供在各种形成水平的太阳能电池装置的检查，同时收集和使用计量数据来诊断，调整或改进在制造太阳能电池装置期间的生产线工艺。

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