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1. 发明申请

WO2010144165A1 CELL ISOLATION ON PHOTOVOLTAIC MODULES FOR HOT SPOT REDUCTION 审中-公开
标题翻译：用于热点减少的光伏模块的细胞分离
公开(公告)号：WO2010144165A1
公开(公告)日：2010-12-16
申请号：PCT/US2010/027030
申请日：2010-03-11
申请人： APPLIED MATERIALS, INC. , JIA, Renhe , WANG, Dapeng , FREI, Michel , SU, Tzay-Fa , TANNER, David , EBERSPACHER, Chris
发明人： JIA, Renhe , FREI, Michel , SU, Tzay-Fa , TANNER, David , EBERSPACHER, Chris
IPC分类号： H01L31/042 , H01L21/78
CPC分类号： H01L31/0463 , H01L31/0201 , Y02E10/50
摘要： Embodiments of the present invention provide methods for fabricating a solar cell on a substrate that have proportionally reduced current to minimize or reduce the likelihood of shading of a portion of the solar cell causing damage to the formed device. In one embodiment, a method for fabricating a series of solar cell arrays on a substrate includes providing a substrate having a TCO layer formed thereon, forming a first plurality of vertical scribing lines and a first plurality of horizontal scribing lines in the TCO layer, forming a film stack and a back metal layer on the scribed TCO layer, and forming a second plurality of the horizontal scribing lines in the film stack and the back metal layer, wherein the second plurality of horizontal scribing lines comprise pairs of scribing lines formed adjacent to each respective one of the first plurality of the horizontal scribing lines formed in the TCO layer.
摘要翻译：本发明的实施例提供了在基板上制造太阳能电池的方法，所述太阳能电池具有成比例地减小的电流，以最小化或降低太阳能电池部分的阴影的可能性，从而对所形成的器件造成损害。在一个实施例中，在衬底上制造一系列太阳能电池阵列的方法包括提供其上形成有TCO层的衬底，在TCO层中形成第一多个垂直划线和第一多个水平划线，形成在划线的TCO层上的薄膜叠层和背金属层，以及在薄膜叠层和后金属层中形成第二多个水平划线，其中第二多个水平划线包括邻近形成的成对划线在TCO层中形成的第一多个水平划线中的每个相应的一个。

2. 发明申请

WO2010091025A2 METROLOGY AND INSPECTION SUITE FOR A SOLAR PRODUCTION LINE 审中-公开
标题翻译：太阳能生产线的计量和检验套件
公开(公告)号：WO2010091025A2
公开(公告)日：2010-08-12
申请号：PCT/US2010/022915
申请日：2010-02-02
申请人： APPLIED MATERIALS, INC. , SCHLEZINGER, Asaf , FREI, Michel, R. , WANG, Dapeng , SU, Tzay-Fa , SVIDENKO, Vicky , MAQSOOD, Kashif
发明人： FREI, Michel, R. , WANG, Dapeng , SU, Tzay-Fa , SVIDENKO, Vicky , MAQSOOD, Kashif
IPC分类号： H01L31/042 , H01L21/66
CPC分类号： H01L31/188 , H01L31/022466 , Y02E10/50
摘要： Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.
摘要翻译：本发明的实施例一般涉及使用适于在太阳能电池器件的形成中执行一个或多个工艺的处理模块来形成太阳能电池器件的系统。在一个实施例中，该系统适于通过接受大的未处理衬底并执行多次沉积，材料去除，清洁，切片，结合以及各种检查和测试过程来形成薄膜太阳能电池器件，以形成多个完整，功能和测试然后太阳能电池装置可以运送到最终用户以安装在期望的位置以发电。在一个实施例中，系统提供在各种形成水平的太阳能电池装置的检查，同时收集和使用计量数据来诊断，调整或改进在制造太阳能电池装置期间的生产线工艺。

3. 发明申请

WO2009129030A3 SOLAR PARAMETRIC TESTING MODULE AND PROCESSES 审中-公开
标题翻译：太阳参数测试模块和过程
公开(公告)号：WO2009129030A3
公开(公告)日：2009-12-10
申请号：PCT/US2009038063
申请日：2009-03-24
申请人： APPLIED MATERIALS INC , LU DANNY CAM TOAN , MARRIOTT MICHAEL , SVIDENKO VICKY , WANG DAPENG , FREI MICHEL R
发明人： LU DANNY CAM TOAN , MARRIOTT MICHAEL , SVIDENKO VICKY , WANG DAPENG , FREI MICHEL R
IPC分类号： H01L21/66 , G01R27/08 , H01L21/677 , H01L21/68
CPC分类号： H01L21/681 , H01L21/67253 , H02S50/10
摘要： Embodiments of the present invention generally relate to a module that can test and analyze various regions of a solar cell device in an automated or manual fashion after one or more steps have been completed in the solar cell formation process. The module used to perform the automated testing and analysis processes can also be adapted to test a partially formed solar cell at various stages of the solar cell formation process within an automated solar cell production line. The automated solar cell production line is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices.
摘要翻译：本发明的实施例总体上涉及一种模块，该模块能够在太阳能电池形成过程中的一个或多个步骤已经完成之后以自动或手动方式测试和分析太阳能电池器件的各个区域。用于执行自动化测试和分析过程的模块也可以适用于在自动化太阳能电池生产线内的太阳能电池形成过程的各个阶段测试部分形成的太阳能电池。自动化太阳能电池生产线通常是用于形成太阳能电池装置的自动处理模块和自动化设备的布置。

4. 发明申请

WO2013062824A1 REAR-POINT-CONTACT PROCESS FOR PHOTOVOLTAIC CELLS 审中-公开
标题翻译：光伏电池的后点接触过程
公开(公告)号：WO2013062824A1
公开(公告)日：2013-05-02
申请号：PCT/US2012/060559
申请日：2012-10-17
申请人： APPLIED MATERIALS, INC. , FREI, Michel R. , MUNGEKAR, Hemant P. , PONNEKANTI, Hari K.
发明人： FREI, Michel R. , MUNGEKAR, Hemant P. , PONNEKANTI, Hari K.
IPC分类号： H01L31/042 , H01L31/0216 , H01L31/18
CPC分类号： H01L31/02167 , H01L31/022425 , H01L31/068 , H01L31/18 , Y02E10/547
摘要： Embodiments of the invention generally relate to methods for performing rear-point-contact processes on substrates, particularly solar cell substrates. The methods generally include disposing a substrate on a substrate support which functions as a mask during deposition of a passivation layer on a back surface of the substrate. A process gas is introduced to an area between the back surface of the substrate and the substrate support in order to deposit the passivation layer on the back surface of the substrate. The deposited passivation layer has openings therethrough in order to facilitate electrical contact of the substrate with a metallization layer subsequently formed over the passivation layer. The passivation layer is formed without requiring a separate patterning and etching process of the passivation layer.
摘要翻译：本发明的实施例一般涉及在衬底，特别是太阳能电池衬底上执行背点接触工艺的方法。所述方法通常包括在衬底的背面上沉积钝化层的过程中将衬底设置在衬底支撑体上，其用作掩模。将工艺气体引入到衬底的背面和衬底支撑件之间的区域中，以便将钝化层沉积在衬底的背面上。沉积的钝化层具有穿过其的开口，以便于衬底与随后在钝化层上形成的金属化层的电接触。形成钝化层，而不需要钝化层的单独图案化和蚀刻工艺。

5. 发明申请

WO2010129559A3 CALIBRATION PROCEDURE FOR SOLAR SIMULATORS USED IN SINGLE-JUNCTION AND TANDEM-JUNCTION SOLAR CELL TESTING APPARATUS 审中-公开
标题翻译：用于单节和串联太阳能电池测试装置的太阳能模拟器的校准程序
公开(公告)号：WO2010129559A3
公开(公告)日：2011-02-03
申请号：PCT/US2010033562
申请日：2010-05-04
申请人： APPLIED MATERIALS INC , WANG DAPENG , FREI MICHEL , SU TZAY-FA , TANNER DAVID
发明人： WANG DAPENG , FREI MICHEL , SU TZAY-FA , TANNER DAVID
IPC分类号： H01L31/042
CPC分类号： G01J1/08 , G01J1/32
摘要： A method of calibrating a light source used to simulate the sun in solar cell testing apparatus. The method comprises using a control cell to measure the intensity of light from the light source at a first wavelength range as a function of output short circuit current, comparing the measured intensity to a targeted intensity value, optionally adjusting power to the light source until the measured intensity is substantially equal to the targeted intensity value, repeatedly using a calibrated monitoring module to periodically measure monitoring measured values for monitoring module output short circuit current, monitoring module output open circuit voltage and monitoring module quantum efficiency, obtaining average values for monitoring module output short circuit current, monitoring module output open circuit voltage and monitoring module quantum efficiency, comparing the measured values with the average values, and determining if differences in measured values and average values are within an acceptable limit.
摘要翻译：一种在太阳能电池测试装置中校准用于模拟太阳的光源的方法。该方法包括使用控制单元来测量来自作为输出短路电流的函数的来自光源的来自光源的光的强度，作为输出短路电流的函数，将测量的强度与目标强度值进行比较，可选地调节光源的功率，直到测量强度基本上等于目标强度值，重复使用校准监控模块定期测量监测模块输出短路电流，监控模块输出开路电压和监控模块量子效率的监测值，获取监控模块输出的平均值短路电流，监控模块输出开路电压和监控模块量子效率，将测量值与平均值进行比较，并确定测量值和平均值之间的差异是否在可接受的极限内。

6. 发明申请

WO2010091025A3 METROLOGY AND INSPECTION SUITE FOR A SOLAR PRODUCTION LINE 审中-公开
标题翻译：用于太阳能生产线的计量和检测套件
公开(公告)号：WO2010091025A3
公开(公告)日：2010-11-25
申请号：PCT/US2010022915
申请日：2010-02-02
申请人： APPLIED MATERIALS INC , SCHLEZINGER ASAF , FREI MICHEL R , WANG DAPENG , SU TZAY-FA , SVIDENKO VICKY , MAQSOOD KASHIF
发明人： FREI MICHEL R , WANG DAPENG , SU TZAY-FA , SVIDENKO VICKY , MAQSOOD KASHIF
IPC分类号： H01L31/042 , H01L21/66
CPC分类号： H01L31/188 , H01L31/022466 , Y02E10/50
摘要： Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.
摘要翻译：本发明的实施例总体上涉及一种系统，该系统用于使用处理模块形成太阳能电池器件，所述处理模块适于在形成太阳能电池器件中执行一个或多个处理。在一个实施例中，该系统适于通过接受大的未处理的基板并且执行多次沉积，材料去除，清洁，切片，结合以及各种检查和测试过程以形成多个完整的，功能性的和测试的来形成薄膜太阳能电池器件太阳能电池装置然后可以被运送到最终用户以安装在期望的位置以发电。在一个实施例中，系统提供各种形成等级的太阳能电池装置的检查，同时收集和使用度量数据来诊断，调整或改善太阳能电池装置制造期间的生产线过程。

7. 发明申请

WO2009055262A1 PHOTOVOLTAIC FABRICATION PROCESS MONITORING AND CONTROL USING DIAGNOSTIC DEVICES 审中-公开
标题翻译：使用诊断设备的光伏制造过程监控和控制
公开(公告)号：WO2009055262A1
公开(公告)日：2009-04-30
申请号：PCT/US2008/079585
申请日：2008-10-10
申请人： APPLIED MATERIALS, INC. , WANG, Dapeng , FREI, Michel Ranjit , SU, Tsay-Fa , SVIDENKO, Vicky , HIGASHI, Gregg S.
发明人： WANG, Dapeng , FREI, Michel Ranjit , SU, Tsay-Fa , SVIDENKO, Vicky , HIGASHI, Gregg S.
IPC分类号： H01L31/042
CPC分类号： H01L31/186 , B23K26/0622 , B23K26/082 , B23K26/36 , B23K26/40 , B23K2201/40 , B23K2203/50 , Y02E10/50 , Y02P70/521
摘要： The formation of diagnostic devices on the same substrate used to fabricate a photovoltaic (PV) cell is described. Such devices, also referred to as process diagnostic vehicles (PDVs), are configured for in-line monitoring of electrical characteristics of PV cell features and are formed on the substrate using the same process steps for PV cell fabrication. The data collected via the PDVs can be used to tune or optimize subsequent PV cell fabrication, i.e., used as feedback for the fabrication process. Alternatively, the data collected via PDVs can be fed forward in the fabrication process, so that later process steps performed on a PV cell substrate can be modified to compensate for issues detected on the PV cell substrate via the PDVs.
摘要翻译：描述了用于制造光伏（PV）电池的同一衬底上的诊断装置的形成。这种也被称为过程诊断车辆（PDV）的装置被配置为在线监测PV电池特征的电特性，并且使用与PV电池制造相同的工艺步骤在衬底上形成。通过PDV收集的数据可用于调整或优化随后的PV电池制造，即用作制造工艺的反馈。或者，可以通过PDV收集的数据在制造过程中向前馈送，使得可以修改在PV电池基板上执行的后续处理步骤，以经由PDV来补偿在PV电池基板上检测到的问题。

8. 发明申请

WO2010135321A3 METHOD AND APPARATUS FOR SOLAR CELL PRODUCTION LINE CONTROL AND PROCESS ANALYSIS 审中-公开
标题翻译：太阳能电池生产线控制和过程分析的方法和装置
公开(公告)号：WO2010135321A3
公开(公告)日：2011-02-03
申请号：PCT/US2010035247
申请日：2010-05-18
申请人： APPLIED MATERIALS INC , SVIDENKO VICKY , ABRAHAM MATHEW , KINCAL SERKAN , SCHLEZINGER ASAF , FREI MICHEL , WANG DAPENG , SU TZAY-FA
发明人： SVIDENKO VICKY , ABRAHAM MATHEW , KINCAL SERKAN , SCHLEZINGER ASAF , FREI MICHEL , WANG DAPENG , SU TZAY-FA
IPC分类号： H01L31/042 , H01L31/18
CPC分类号： H01L31/1876 , G05B2219/31449 , G05B2219/31459 , H01L31/03762 , H01L31/075 , H02S50/10 , Y02E10/50 , Y02P70/521 , Y02P80/114 , Y02P90/86
摘要： Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.
摘要翻译：本发明的实施例一般涉及使用适于在太阳能电池器件的形成中执行一个或多个工艺的处理模块来形成太阳能电池器件的系统。在一个实施例中，该系统适于通过接受大的未处理衬底并执行多次沉积，材料去除，清洁，切片，结合以及各种检查和测试过程来形成薄膜太阳能电池器件，以形成多个完整，功能和测试然后太阳能电池装置可以运送到最终用户以安装在期望的位置以发电。在一个实施例中，系统提供在各种形成水平的太阳能电池装置的检查，同时收集和使用计量数据来诊断，调整或改进在制造太阳能电池装置期间的生产线工艺。

9. 发明申请

WO2010129559A2 CALIBRATION PROCEDURE FOR SOLAR SIMULATORS USED IN SINGLE-JUNCTION AND TANDEM-JUNCTION SOLAR CELL TESTING APPARATUS 审中-公开
标题翻译：用于单节和串联太阳能电池测试装置的太阳能模拟器的校准程序
公开(公告)号：WO2010129559A2
公开(公告)日：2010-11-11
申请号：PCT/US2010/033562
申请日：2010-05-04
申请人： APPLIED MATERIALS, INC. , WANG, Dapeng , FREI, Michel , SU, Tzay-Fa , TANNER, David
发明人： WANG, Dapeng , FREI, Michel , SU, Tzay-Fa , TANNER, David
IPC分类号： H01L31/042
CPC分类号： G01J1/08 , G01J1/32
摘要： A method of calibrating a light source used to simulate the sun in solar cell testing apparatus. The method comprises using a control cell to measure the intensity of light from the light source at a first wavelength range as a function of output short circuit current, comparing the measured intensity to a targeted intensity value, optionally adjusting power to the light source until the measured intensity is substantially equal to the targeted intensity value, repeatedly using a calibrated monitoring module to periodically measure monitoring measured values for monitoring module output short circuit current, monitoring module output open circuit voltage and monitoring module quantum efficiency, obtaining average values for monitoring module output short circuit current, monitoring module output open circuit voltage and monitoring module quantum efficiency, comparing the measured values with the average values, and determining if differences in measured values and average values are within an acceptable limit.
摘要翻译：一种在太阳能电池测试装置中校准用于模拟太阳的光源的方法。该方法包括使用控制单元来测量来自作为输出短路电流的函数的来自光源的来自光源的光的强度，作为输出短路电流的函数，将测量的强度与目标强度值进行比较，可选地调节光源的功率，直到测量强度基本上等于目标强度值，重复使用校准监控模块定期测量监测模块输出短路电流，监控模块输出开路电压和监控模块量子效率的监测值，获取监控模块输出的平均值短路电流，监控模块输出开路电压和监控模块量子效率，将测量值与平均值进行比较，并确定测量值和平均值之间的差异是否在可接受的极限内。

10. 发明申请

WO2009029902A1 PHOTOVOLTAIC PRODUCTION LINE 审中-公开
标题翻译：光伏生产线
公开(公告)号：WO2009029902A1
公开(公告)日：2009-03-05
申请号：PCT/US2008/074931
申请日：2008-08-29
申请人： APPLIED MATERIALS, INC. , BACHRACH, Robert Z. , CHAE, Yong-Kee , CHOI, Soo Young , DE VRIES, Nicholas G. J. , ELGAR, Yacov , ENGLHARDT, Eric A. , FREI, Michel R. , GAY, Charles , HAWKINS, Parris , HO, Choi , HUNTER, James Craig , KANKANALA, Penchala N. , LI, Liwei , LO, Wing Hoo , LU, Danny Cam Toan , MEI, Fang , MURPHY, Stephen P. , PATEL, Srujal , SAUNDERS, Matthew J. B. , SCHLEZINGER, Asaf , SHENG, Shuran , SU, Tzay-Fa , SULLIVAN, Jeffrey S. , TANNER, David , TROWBRIDGE, Teresa , WALKER, Brice , WHITE, John M. , WON, Tae K.
发明人： BACHRACH, Robert Z. , CHAE, Yong-Kee , CHOI, Soo Young , DE VRIES, Nicholas G. J. , ELGAR, Yacov , ENGLHARDT, Eric A. , FREI, Michel R. , GAY, Charles , HAWKINS, Parris , HO, Choi , HUNTER, James Craig , KANKANALA, Penchala N. , LI, Liwei , LO, Wing Hoo , LU, Danny Cam Toan , MEI, Fang , MURPHY, Stephen P. , PATEL, Srujal , SAUNDERS, Matthew J. B. , SCHLEZINGER, Asaf , SHENG, Shuran , SU, Tzay-Fa , SULLIVAN, Jeffrey S. , TANNER, David , TROWBRIDGE, Teresa , WALKER, Brice , WHITE, John M. , WON, Tae K.
IPC分类号： G06F7/10 , H01L31/06 , H01L21/4763
CPC分类号： H01L21/67236 , B23K26/364 , B26F3/002 , B26F3/004 , B65G49/064 , B65G2249/02 , B65G2249/04 , C03B33/03 , C03B33/033 , H01L21/67132 , H01L21/67712 , H01L21/67715 , H01L21/67721 , H01L21/67727 , H01L21/6776 , H01L31/022425 , H01L31/03921 , H01L31/0504 , H01L31/075 , H02S50/00 , H02S50/10 , Y02E10/548 , Y02P40/57 , Y10T29/49002 , Y10T29/49355 , Y10T29/5196 , Y10T29/53113 , Y10T29/5313 , Y10T29/5317 , Y10T29/53187 , Y10T29/53365 , Y10T29/53417 , Y10T225/10 , Y10T225/325 , Y10T225/329
摘要： The present invention relates to a system that can be used to form a photovoltaic device using processing modules that are adapted to perform steps in the solar cell formation process The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.
摘要翻译：本发明涉及一种可用于使用处理模块来形成光伏器件的系统，所述处理模块适于在太阳能电池形成过程中执行步骤。自动化太阳能电池制造厂通常是自动化处理模块和用于形成太阳能电池器件的自动化设备。因此，自动化太阳能加工厂通常将包括适于接纳衬底的衬底接收模块，具有至少一个处理室的一个或多个吸收层沉积群集工具，该处理室适于在衬底的表面上沉积含硅层，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压灭菌器模块，自动化接线盒附接模块，以及一个或多个质量保证模块，其适于测试和限定完全形成太阳能电池装置。

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