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    • 4. 发明授权
    • Testing apparatus for semiconductor device
    • 半导体器件测试装置
    • US5917833A
    • 1999-06-29
    • US988471
    • 1997-12-10
    • Tsunehiro Sato
    • Tsunehiro Sato
    • G01R31/28G01R31/3193G11C29/26G11C29/44G11C29/56G11C29/00G11C7/00
    • G11C29/26G01R31/31935G11C29/56
    • A testing apparatus for semiconductor device capable of preventing reduction in the number of devices to be simultaneously measured is provided. Address of a measurement section of a semiconductor device to be measured, input data inputted to the measurement section and expected data to be outputted from the semiconductor device when the input data is inputted are generated by an ALPG. Output data actually outputted from the semiconductor device when the input data is inputted and expected data are compared with each other at a comparison unit. Comparison result is outputted as fail information. By a test pass control unit, there is generated test pass information for selecting fail information on the basis of divisional test information inputted in the case where the cycle time of test is faster than the cycle time of the fail information storage memory. Memory cell within the fail information storage memory is selected on the basis of address of the measurement section. Thus, fail information is written into the selected memory cell on the basis of test pass information by a fail information write control unit.
    • 提供一种能够防止同时测量的设备的数量减少的半导体器件的测试装置。 通过ALPG生成要测量的半导体器件的测量部分的地址,输入到测量部分的输入数据和输入数据时从半导体器件输出的期望数据。 当输入数据被输入时,实际从半导体器件输出的输出数据和预期数据在比较单元中相互比较。 比较结果作为失败信息输出。 通过测试通过控制单元,生成用于根据在测试的周期时间比故障信息存储存储器的周期时间快的情况下输入的分割测试信息来选择失败信息的测试通过信息。 基于测量部分的地址选择故障信息存储存储器内的存储单元。 因此,故障信息写入控制单元基于测试通过信息将故障信息写入所选存储单元。