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    • 2. 发明申请
    • Method of aligning a particle-beam-generated pattern to a pattern on a pre-patterned substrate
    • 将粒子束生成图案与预图案化衬底上的图案对准的方法
    • US20070072099A1
    • 2007-03-29
    • US11233616
    • 2005-09-23
    • Jeffrey SullivanTony Young
    • Jeffrey SullivanTony Young
    • G03F9/00G21G5/00G03C5/00A61N5/00
    • H01J37/3174B82Y10/00B82Y40/00G03F9/7015G03F9/7088H01J2237/31793Y10S430/143
    • A significant improvement in the alignment of a particle-beam-generated pattern relative to a pre-existing pattern present on a substrate has been accomplished using optical measurement to register the particle beam to the pre-existing pattern. Use of a position fiducial which can be accurately measured by both an optical microscope and a particle beam axis is used to align a pre-existing pattern with a particle-beam-generated pattern during writing of the particle-beam-generated pattern. Registration of the pre-existing pattern to the fiducial and registration of the particle beam axis to the fiducial periodically during production of the particle-beam-generated pattern continually provides an improvement in the overall alignment of the pattern being created to the pre-existing pattern on the substrate. The improved method of alignment can be used to correct for drift, or thermal expansion, or gravitational sag, by way of example.
    • 已经使用光学测量来实现粒子束生成图案相对于存在于衬底上的预先存在的图案的对准的显着改进,以将粒子束注册到预先存在的图案。 使用可以通过光学显微镜和粒子束轴两者精确测量的位置基准来使用在粒子束产生的图案的写入期间将预先存在的图案与粒子束产生的图案对准。 在生成粒子束生成图案期间,将预先存在的图案注册到基准和粒子束轴的基准周期性地定期地连续地提供了所创建的图案与预先存在的图案的整体对准的改进 在基板上。 改进的对准方法可以用于校正漂移或热膨胀或重力下垂的例子。
    • 5. 发明授权
    • Automatic inspection system for flat panel substrate
    • 平板基板自动检测系统
    • US07714996B2
    • 2010-05-11
    • US11714513
    • 2007-03-05
    • Zheng YanBo LiWayne ChenTony YoungNing LiJianbo Gao
    • Zheng YanBo LiWayne ChenTony YoungNing LiJianbo Gao
    • G01N21/00
    • G01N21/8901G01N21/9501G01N2021/9513G01N2201/0627
    • Automatic optical inspection (AOI) systems are described comprising optical modules that include an illumination component and a lens array configured to direct illumination of the illumination component at a portion of a substrate. The lens array includes a Fresnel lens. The optical module includes a camera that receives reflected light resulting from an interaction of the illumination and the substrate. The camera includes a time delay integration (TDI) sensor. A telecentric imaging lens directs reflected light from the substrate to the camera. The illumination component comprises a controller coupled to multiple LED light sources, each emitting light at a different wavelength. The controller independently controls each LED light source. The illumination component includes a bright field and/or a dark field light source. The illumination component can include a front side and/or a back side light source. An optical fiber is coupled to the camera and an image processor.
    • 自动光学检查(AOI)系统被描述为包括光学模块,其包括照明部件和透镜阵列,该透镜阵列被配置为在衬底的一部分处直接照射照明部件。 透镜阵列包括菲涅尔透镜。 光学模块包括摄像机,其接收由照明和衬底的相互作用产生的反射光。 相机包括时延积分(TDI)传感器。 远心成像透镜将来自基板的反射光引导到相机。 照明部件包括耦合到多个LED光源的控制器,每个LED光源发射不同波长的光。 控制器独立控制每个LED光源。 照明组件包括明场和/或暗场光源。 照明部件可以包括前侧和/或后侧光源。 光纤耦合到相机和图像处理器。
    • 8. 发明申请
    • Automatic inspection system for flat panel substrate
    • 平板基板自动检测系统
    • US20080174771A1
    • 2008-07-24
    • US11714513
    • 2007-03-05
    • Zheng YanBo LiWayne ChenTony YoungNing LiJianbo Gao
    • Zheng YanBo LiWayne ChenTony YoungNing LiJianbo Gao
    • G01N21/892
    • G01N21/8901G01N21/9501G01N2021/9513G01N2201/0627
    • Automatic optical inspection (AOI) systems are described comprising optical modules that include an illumination component and a lens array configured to direct illumination of the illumination component at a portion of a substrate. The lens array includes a Fresnel lens. The optical module includes a camera that receives reflected light resulting from an interaction of the illumination and the substrate. The camera includes a time delay integration (TDI) sensor. A telecentric imaging lens directs reflected light from the substrate to the camera. The illumination component comprises a controller coupled to multiple LED light sources, each emitting light at a different wavelength. The controller independently controls each LED light source. The illumination component includes a bright field and/or a dark field light source. The illumination component can include a front side and/or a back side light source. An optical fiber is coupled to the camera and an image processor.
    • 自动光学检查(AOI)系统被描述为包括光学模块,其包括照明部件和透镜阵列,该透镜阵列被配置为在衬底的一部分处直接照射照明部件。 透镜阵列包括菲涅尔透镜。 光学模块包括摄像机,其接收由照明和衬底的相互作用产生的反射光。 相机包括时延积分(TDI)传感器。 远心成像透镜将来自基板的反射光引导到相机。 照明部件包括耦合到多个LED光源的控制器,每个LED光源发射不同波长的光。 控制器独立控制每个LED光源。 照明组件包括明场和/或暗场光源。 照明部件可以包括前侧和/或后侧光源。 光纤耦合到相机和图像处理器。