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1. 发明申请

US20080174771A1 Automatic inspection system for flat panel substrate 有权
标题翻译：平板基板自动检测系统
公开(公告)号：US20080174771A1
公开(公告)日：2008-07-24
申请号：US11714513
申请日：2007-03-05
申请人： Zheng Yan , Bo Li , Wayne Chen , Tony Young , Ning Li , Jianbo Gao
发明人： Zheng Yan , Bo Li , Wayne Chen , Tony Young , Ning Li , Jianbo Gao
IPC分类号： G01N21/892
CPC分类号： G01N21/8901 , G01N21/9501 , G01N2021/9513 , G01N2201/0627
摘要： Automatic optical inspection (AOI) systems are described comprising optical modules that include an illumination component and a lens array configured to direct illumination of the illumination component at a portion of a substrate. The lens array includes a Fresnel lens. The optical module includes a camera that receives reflected light resulting from an interaction of the illumination and the substrate. The camera includes a time delay integration (TDI) sensor. A telecentric imaging lens directs reflected light from the substrate to the camera. The illumination component comprises a controller coupled to multiple LED light sources, each emitting light at a different wavelength. The controller independently controls each LED light source. The illumination component includes a bright field and/or a dark field light source. The illumination component can include a front side and/or a back side light source. An optical fiber is coupled to the camera and an image processor.
摘要翻译：自动光学检查（AOI）系统被描述为包括光学模块，其包括照明部件和透镜阵列，该透镜阵列被配置为在衬底的一部分处直接照射照明部件。透镜阵列包括菲涅尔透镜。光学模块包括摄像机，其接收由照明和衬底的相互作用产生的反射光。相机包括时延积分（TDI）传感器。远心成像透镜将来自基板的反射光引导到相机。照明部件包括耦合到多个LED光源的控制器，每个LED光源发射不同波长的光。控制器独立控制每个LED光源。照明组件包括明场和/或暗场光源。照明部件可以包括前侧和/或后侧光源。光纤耦合到相机和图像处理器。

2. 发明授权

US07714996B2 Automatic inspection system for flat panel substrate 有权
标题翻译：平板基板自动检测系统
公开(公告)号：US07714996B2
公开(公告)日：2010-05-11
申请号：US11714513
申请日：2007-03-05
申请人： Zheng Yan , Bo Li , Wayne Chen , Tony Young , Ning Li , Jianbo Gao
发明人： Zheng Yan , Bo Li , Wayne Chen , Tony Young , Ning Li , Jianbo Gao
IPC分类号： G01N21/00
CPC分类号： G01N21/8901 , G01N21/9501 , G01N2021/9513 , G01N2201/0627
摘要： Automatic optical inspection (AOI) systems are described comprising optical modules that include an illumination component and a lens array configured to direct illumination of the illumination component at a portion of a substrate. The lens array includes a Fresnel lens. The optical module includes a camera that receives reflected light resulting from an interaction of the illumination and the substrate. The camera includes a time delay integration (TDI) sensor. A telecentric imaging lens directs reflected light from the substrate to the camera. The illumination component comprises a controller coupled to multiple LED light sources, each emitting light at a different wavelength. The controller independently controls each LED light source. The illumination component includes a bright field and/or a dark field light source. The illumination component can include a front side and/or a back side light source. An optical fiber is coupled to the camera and an image processor.
摘要翻译：自动光学检查（AOI）系统被描述为包括光学模块，其包括照明部件和透镜阵列，该透镜阵列被配置为在衬底的一部分处直接照射照明部件。透镜阵列包括菲涅尔透镜。光学模块包括摄像机，其接收由照明和衬底的相互作用产生的反射光。相机包括时延积分（TDI）传感器。远心成像透镜将来自基板的反射光引导到相机。照明部件包括耦合到多个LED光源的控制器，每个LED光源发射不同波长的光。控制器独立控制每个LED光源。照明组件包括明场和/或暗场光源。照明部件可以包括前侧和/或后侧光源。光纤耦合到相机和图像处理器。

3. 发明授权

US07038773B2 Apparatus and methods for enabling robust separation between signals of interest and noise 有权
标题翻译：用于实现感兴趣的信号和噪声之间的鲁棒分离的装置和方法
公开(公告)号：US07038773B2
公开(公告)日：2006-05-02
申请号：US10848631
申请日：2004-05-18
申请人： Lionel Kuhlmann , Jianbo Gao , Mark C. Sweeney
发明人： Lionel Kuhlmann , Jianbo Gao , Mark C. Sweeney
IPC分类号： G01N21/00 , G01B11/30
CPC分类号： G06T7/0004 , G01B11/303 , G01N21/9501 , G06T5/50 , G06T7/11 , G06T2207/30148
摘要： Disclosed are methods and apparatus for analyzing the Raze data provided by an optical inspection tool. The Haze data is analyzed so as to detect defects associated with the specimen surface. In general, the Haze data is first conditioned so that background noise which corresponds to low frequency variation on the specimen is separated or removed from the Haze data prior to analysis of such Haze data. In a specific embodiment, low frequency variations in the specimen surface are characterized, in effect, as an optical surface upon which an incident beam is directed. The Haze data that conforms to this resulting polynomial equation is then subtracted from the original Haze data to result in residual data, where slow variations in surface roughness are subtracted out, leaving possible defect information in the residual Haze data. This residual Haze data may then be analyzed to determine whether the specimen contains a defect.
摘要翻译：公开了用于分析由光学检查工具提供的Raze数据的方法和装置。分析雾度数据，以便检测与样品表面相关的缺陷。通常，首先对雾度数据进行调节，使得在分析这样的雾度数据之前，将相应于样本上的低频变化的背景噪声从雾度数据中分离或去除。在具体实施例中，试样表面的低频变化实际上表征为入射光束被引导到的光学表面。然后从原始雾度数据中减去符合该结果的多项式方程式的雾度数据，得到残差数据，减去表面粗糙度的较慢变化，从而留下残余雾点数据中的可能的缺陷信息。然后可以分析该残留雾度数据以确定样本是否包含缺陷。

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