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1. 发明申请

WO2008030713A1 SUBSTRATE CLEANING METHOD 审中-公开
标题翻译：基板清洗方法
公开(公告)号：WO2008030713A1
公开(公告)日：2008-03-13
申请号：PCT/US2007/076734
申请日：2007-08-24
申请人： TOKYO ELECTRON LIMITED , TOKYO ELECTRON AMERICA, INC. , MIZOTA, Shogo , TERUOMI, Minami , YOKOMIZO, Kenji , MASAKI, Taira
发明人： MIZOTA, Shogo , TERUOMI, Minami , YOKOMIZO, Kenji , MASAKI, Taira
IPC分类号： H01L21/02
CPC分类号： H01L21/02052 , H01L21/02057 , Y10S134/902
摘要： A method is provided for reducing the amount of film fragments (66a) discharged into a processing liquid circulation system (73, 73') during removal of films (66) from wafers (W), thereby reducing the frequency of filter (80) cleaning or filter (80) replacement. The method includes exposing a wafer (W) containing a film (66) formed thereon in a process chamber (46) of a substrate processing system (1) to a processing liquid (64), where the wafer (W) is not rotated or is rotated at a first speed (608a, 908a, 1208a) and the processing liquid (64) is discharged from the process chamber (46) to a processing liquid circulation system (73). Subsequently, exposure of the wafer (W) to the processing liquid (64, 64a, 64b) is discontinued and the wafer (W) is rotated at a second speed (608b, 908b, 1208b) greater than the first speed (608a, 908a, 1208a) to centrifugally remove fragments (66a) of the film (66) from the wafer (W). Next, the wafer (W) is exposed to the same or a different processing liquid (64, 64a, 64b) and the processing liquid (64, 64a, 64b) is discharged from the process chamber (46) to a processing liquid drain (78).
摘要翻译：提供一种用于减少在从晶片（W）移除薄膜（66）期间排出到处理液体循环系统（73,73'）中的薄膜碎片（66a）的量的方法，从而降低过滤器（80）清洁的频率或过滤器（80）更换。该方法包括将其上形成的膜（66）的晶片（W）暴露在基板处理系统（1）的处理室（46）中的处理液体（64）中，其中晶片（W）不旋转或以第一速度（608a，908a，1208a）旋转，并且处理液体（64）从处理室（46）排出到处理液循环系统（73）。随后，将晶片（W）暴露于处理液（64,64a，64b）中断，晶片（W）以比第一速度（608a，908a）大的第二速度（608b，908b，1208b）旋转，1208a）从晶片（W）离心去除膜（66）的碎片（66a）。接下来，将晶片（W）暴露于相同或不同的处理液（64,64a，64b），处理液（64,64a，64b）从处理室（46）排出到处理液排出口 78）。

2. 发明授权

US08475668B2 Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein 有权
标题翻译：基板液体处理装置，基板液体处理方法和存储有基板液体处理程序的存储介质
公开(公告)号：US08475668B2
公开(公告)日：2013-07-02
申请号：US12902721
申请日：2010-10-12
申请人： Hiroshi Tanaka , Teruomi Minami , Yosuke Kawabuchi , Norihiro Ito , Fumihiro Kamimura , Takashi Yabuta , Kazuki Kosai , Takeshi Uno , Kenji Sekiguchi , Yasushi Fujii
发明人： Hiroshi Tanaka , Teruomi Minami , Yosuke Kawabuchi , Norihiro Ito , Fumihiro Kamimura , Takashi Yabuta , Kazuki Kosai , Takeshi Uno , Kenji Sekiguchi , Yasushi Fujii
IPC分类号： H01B13/00
CPC分类号： H01L21/02057 , H01L21/67051
摘要： Provided are a substrate liquid processing apparatus, a substrate liquid processing method, and a computer readable storage medium having a substrate liquid processing program stored therein that can prevent the occurrence of the electrostatic breakdown caused by the discharge of electric charges in a substrate. The substrate liquid processing apparatus processes a circuit-forming surface of the substrate with a chemical liquid. Furthermore, prior to processing the substrate with the chemical liquid, the substrate liquid processing apparatus performs an anti-static process for an surface opposite to the circuit-forming surface of the substrate by an anti-static liquid, thereby emitting the electric charges on the substrate.
摘要翻译：提供一种基板液体处理装置，基板液体处理方法以及其中存储有基板液体处理程序的计算机可读存储介质，其可以防止由基板中的电荷放电引起的静电破坏的发生。基板液体处理装置用化学液体处理基板的电路形成表面。此外，在用化学液体处理基板之前，基板液体处理装置通过防静电液体对与基板的电路形成面相反的表面进行防静电处理，从而将电荷基质。

3. 发明授权

US08371318B2 Liquid processing apparatus, liquid processing method, and storage medium 有权
公开(公告)号：US08371318B2
公开(公告)日：2013-02-12
申请号：US13591877
申请日：2012-08-22
申请人： Teruomi Minami , Norihiro Ito , Yuji Kamikawa
发明人： Teruomi Minami , Norihiro Ito , Yuji Kamikawa
IPC分类号： B08B3/00
CPC分类号： H01L21/67051 , H01L21/67028 , H01L21/67034
摘要： A liquid processing apparatus 1 comprises a casing 5, a substrate holding mechanism 20 that holds a wafer (substrate to be processed) W, a process-liquid supplying mechanism 30 that supplies a process liquid, a draining cup 12 that receives a process liquid, and a draining pipe 13 that discharges a process liquid outside. The process-liquid supplying mechanism 30 includes a first chemical-liquid supply mechanism that supplies a hydrofluoric process liquid, and a drying-liquid supplying mechanism that supplies an organic solvent for drying a wafer W. A control part 50 causes the first chemical-liquid supplying mechanism to supply a hydrofluoric process liquid, and then causes the drying-liquid supplying mechanism to supply an organic solvent. In addition, before the control part 50 causes the drying-liquid supplying mechanism to supply an organic solvent, the control part causes a cleaning mechanism 10 to remove an alkaline component in a casing 5.

4. 发明申请

US20120312332A1 LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE MEDIUM 有权
标题翻译：液体加工设备，液体加工方法和储存介质
公开(公告)号：US20120312332A1
公开(公告)日：2012-12-13
申请号：US13591877
申请日：2012-08-22
申请人： Teruomi MINAMI , Norihiro ITO , Yuji KAMIKAWA
发明人： Teruomi MINAMI , Norihiro ITO , Yuji KAMIKAWA
IPC分类号： B08B3/08 , B08B3/02
CPC分类号： H01L21/67051 , H01L21/67028 , H01L21/67034
摘要： A liquid processing apparatus 1 comprises a casing 5, a substrate holding mechanism 20 that holds a wafer (substrate to be processed) W, a process-liquid supplying mechanism 30 that supplies a process liquid, a draining cup 12 that receives a process liquid, and a draining pipe 13 that discharges a process liquid outside. The process-liquid supplying mechanism 30 includes a first chemical-liquid supply mechanism that supplies a hydrofluoric process liquid, and a drying-liquid supplying mechanism that supplies an organic solvent for drying a wafer W. A control part 50 causes the first chemical-liquid supplying mechanism to supply a hydrofluoric process liquid, and then causes the drying-liquid supplying mechanism to supply an organic solvent. In addition, before the control part 50 causes the drying-liquid supplying mechanism to supply an organic solvent, the control part causes a cleaning mechanism 10 to remove an alkaline component in a casing 5.
摘要翻译：液体处理装置1包括壳体5，保持晶片（待处理基板）W的基板保持机构20，供给处理液的处理液供给机构30，接收处理液的排出杯12，以及将处理液体排出到外部的排水管13。处理液供给机构30包括供给氢氟化处理液的第一药液供给机构和供给干燥晶片W的有机溶剂的干燥液供给机构。控制部50使第一药液供给机构供给氢氟化处理液，然后使干燥液供给机构供给有机溶剂。此外，在控制部50使干燥液供给机构供给有机溶剂之前，控制部使清洁机构10除去壳体5内的碱性成分。

5. 发明授权

US07669472B2 Liquid level detector and liquid processing system provided with the same 有权
标题翻译：液位检测器和液体处理系统一样提供
公开(公告)号：US07669472B2
公开(公告)日：2010-03-02
申请号：US11604890
申请日：2006-11-28
申请人： Koji Tanaka , Teruomi Minami
发明人： Koji Tanaka , Teruomi Minami
IPC分类号： G01F23/00
CPC分类号： G01F23/02 , G01F23/2927
摘要： A liquid level detector 10 includes a liquid guiding pipe 14 that guides a liquid in a tank to an inside thereof in such a manner that a liquid level of the guided liquid conforms to a liquid level of the liquid in the tank, and a branching liquid guiding pipe 15 for detecting a liquid level, which branches off from the liquid guiding pipe to guide the liquid into an inside thereof in such a manner that a liquid level of the guided liquid conforms to a liquid level of the liquid in the tank. The branching liquid guiding pipe 15 is provided with position sensors 16 (16a, 16b, 16c, 16d) for detecting the liquid level of the liquid in the branching liquid guiding pipe 15. On a part where the liquid guiding pipe 14 and the branching liquid guiding pipe 15 are connected to each other, there is disposed a bubble passage prevention member 17 of a porous plate shape, which prevents bubble generated in the liquid from entering the branching liquid guiding pipe 15.
摘要翻译：液面检测器10包括：液体引导管14，其将罐中的液体引导到其内部，使得被引导液体的液面与罐中液体的液面一致;以及分支液体引导管15，用于检测从液体引导管分支的液面，以将液体引导到其内部，使得被引导液体的液面与罐中液体的液面一致。分支液引导管15设置有用于检测分支液引导管15中的液体液位的位置传感器16（16a，16b，16c，16d）。在液体引导管14和分支液体引导管15彼此连接，设置有防止液体中产生的气泡进入分支液引导管15的多孔板形状的气泡通道防止部件17。

6. 发明授权

US08906165B2 Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus 有权
标题翻译：基板处理方法，存储用于执行基板处理方法的计算机程序的存储介质和基板处理装置
公开(公告)号：US08906165B2
公开(公告)日：2014-12-09
申请号：US13161714
申请日：2011-06-16
申请人： Teruomi Minami , Naoyuki Okamura , Hirotaka Maruyama , Yosuke Kawabuchi
发明人： Teruomi Minami , Naoyuki Okamura , Hirotaka Maruyama , Yosuke Kawabuchi
IPC分类号： B08B7/04 , H01L21/02 , H01L21/67
CPC分类号： H01L21/67028 , H01L21/02052 , H01L21/67051
摘要： In a substrate processing method according to the present invention, a substrate is first processed using a chemical liquid. Next, the substrate is rinsed by supplying a rinsing liquid thereto while the substrate is being rotated. Thereafter, the substrate is dried while the substrate is being rotated. The drying of the substrate includes reducing a rotating speed of the substrate to a first rotating speed lower than that of the substrate during the rinsing of the substrate, while supplying the rinsing liquid to a central portion of the substrate; moving, from the central portion of the substrate toward a peripheral edge portion thereof, a rinsing liquid supply position to which the rinsing liquid is supplied, after the rotating speed of the substrate has been reduced to the first rotating speed; and supplying a drying liquid to the substrate, after the rinsing liquid supply position has been moved.
摘要翻译：在本发明的基板处理方法中，首先使用化学液处理基板。接下来，在旋转基板的同时通过供给冲洗液来冲洗基板。此后，在旋转基板的同时干燥基板。基板的干燥包括在冲洗衬底期间将衬底的旋转速度降低到低于衬底的旋转速度，同时将冲洗液体供应到衬底的中心部分; 在基板的旋转速度降低到第一旋转速度之后，从基板的中心部朝向其周边部分移动供给冲洗液体的冲洗液体供给位置; 并且在冲洗液体供应位置已经移动之后将干燥液体供应到基底。

7. 发明授权

US08303723B2 Liquid processing apparatus, liquid processing method, and storage medium 有权
标题翻译：液体处理装置，液体处理方法和存储介质
公开(公告)号：US08303723B2
公开(公告)日：2012-11-06
申请号：US12634942
申请日：2009-12-10
申请人： Teruomi Minami , Fumihiro Kamimura , Kazuki Kosai , Takashi Yabuta , Kenji Yokomizo , Shogo Mizota
发明人： Teruomi Minami , Fumihiro Kamimura , Kazuki Kosai , Takashi Yabuta , Kenji Yokomizo , Shogo Mizota
IPC分类号： B08B3/04
CPC分类号： H01L21/67051 , H01L21/6708
摘要： In a liquid processing apparatus configured to remove, from a substrate including a first film and a second film formed above the first film, the first film and the second film, a first chemical-liquid supply part supplies, to a substrate W, a first liquid for dissolving the first film, a second chemical-liquid supply part supplies a second chemical liquid for weakening the second film, and a fluid supply part serving also as an impact giving part gives a physical impact to the second film so as to break the second film and supplies a fluid for washing away debris of the broken second film. A control device controls the respective parts such that, after the second liquid has been supplied and then the fluid has been supplied from the fluid supply part, the first chemical liquid is supplied.
摘要翻译：在一种液体处理装置中，配置为从包括第一膜的第一膜和在第一膜上形成的第二膜的基板上除去第一膜和第二膜，第一药液供给部向基板W供给第一膜用于溶解第一膜的液体，第二药液供给部供给用于削弱第二膜的第二药液，还用作冲击赋予部的流体供给部对第二膜产生物理冲击，从而破坏第二膜并且提供用于洗涤破碎的第二膜的碎屑的流体。控制装置控制各部分，使得在第二液体被供应之后，然后从流体供应部分供应流体，供应第一化学液体。

8. 发明申请

US20110315169A1 SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRAM FOR PERFORMING SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS 有权
标题翻译：基板处理方法，用于执行基板处理方法的存储介质存储计算机程序和基板处理装置
公开(公告)号：US20110315169A1
公开(公告)日：2011-12-29
申请号：US13161721
申请日：2011-06-16
申请人： Teruomi MINAMI , Naoyuki Okamura , Yosuke Kawabuchi
发明人： Teruomi MINAMI , Naoyuki Okamura , Yosuke Kawabuchi
IPC分类号： B08B3/00
CPC分类号： H01L21/67028 , H01L21/67051
摘要： In a substrate processing method according to the present invention, a cleaning liquid nozzle supplies a rinsing liquid to a central portion of a substrate and thereafter moves from a position corresponding to the central portion of the substrate to a position corresponding to a peripheral, edge portion thereof while supplying the rinsing liquid before stopping at the position corresponding to the peripheral edge portion. Next, a drying liquid nozzle moves from the position corresponding to the peripheral edge portion to the position corresponding to the central portion while supplying a drying liquid. Then, the drying liquid nozzle is kept stationary at the position corresponding to the central portion for a predetermined period of time while supplying the drying liquid.Thereafter, a gas nozzle moves from the position corresponding to the central portion to the position corresponding to the peripheral edge portion while supplying an inert gas.
摘要翻译：在根据本发明的基板处理方法中，清洗液喷嘴将冲洗液体提供到基板的中心部分，然后从与基板的中心部分相对应的位置移动到对应于周边边缘部分的位置同时在与周缘部对应的位置停止前供给冲洗液。接着，在供给干燥液的同时，将干燥液喷嘴从对应于周缘部的位置移动到与中央部对应的位置。然后，在供给干燥液体的同时，将干燥液喷嘴保持静止在与中央部分对应的位置一段预定的时间。此后，在供给惰性气体的同时，气体喷嘴从对应于中心部分的位置移动到对应于周边边缘部分的位置。

9. 发明申请

US20110089137A1 SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING METHOD, AND STORAGE MEDIUM HAVING SUBSTRATE LIQUID PROCESSING PROGRAM STORED THEREIN 有权
标题翻译：基板液体处理装置，底板液体处理方法以及具有基板液化处理程序的存储介质
公开(公告)号：US20110089137A1
公开(公告)日：2011-04-21
申请号：US12902721
申请日：2010-10-12
申请人： Hiroshi TANAKA , Teruomi MINAMI , Yosuke KAWABUCHI , Norihiro ITO , Fumihiro KAMIMURA , Takashi YABUTA , Kazuki KOSAI , Takeshi UNO , Kenji SEKIGUCHI , Yasushi FUJII
发明人： Hiroshi TANAKA , Teruomi MINAMI , Yosuke KAWABUCHI , Norihiro ITO , Fumihiro KAMIMURA , Takashi YABUTA , Kazuki KOSAI , Takeshi UNO , Kenji SEKIGUCHI , Yasushi FUJII
IPC分类号： H05K3/00
CPC分类号： H01L21/02057 , H01L21/67051
摘要： Provided are a substrate liquid processing apparatus, a substrate liquid processing method, and a computer readable storage medium having a substrate liquid processing program stored therein that can prevent the occurrence of the electrostatic breakdown caused by the discharge of electric charges in a substrate. The substrate liquid processing apparatus processes a circuit-forming surface of the substrate with a chemical liquid. Furthermore, prior to processing the substrate with the chemical liquid, the substrate liquid processing apparatus performs an anti-static process for an surface opposite to the circuit-forming surface of the substrate by an anti-static liquid, thereby emitting the electric charges on the substrate.
摘要翻译：提供一种基板液体处理装置，基板液体处理方法以及其中存储有基板液体处理程序的计算机可读存储介质，其可以防止由基板中的电荷放电引起的静电破坏的发生。基板液体处理装置用化学液体处理基板的电路形成表面。此外，在用化学液体处理基板之前，基板液体处理装置通过防静电液体对与基板的电路形成面相反的表面进行防静电处理，从而将电荷基质。

10. 发明申请

US20090056764A1 Liquid processing apparatus, liquid processing method, and storage medium 审中-公开
标题翻译：液体处理装置，液体处理方法和存储介质
公开(公告)号：US20090056764A1
公开(公告)日：2009-03-05
申请号：US12222871
申请日：2008-08-18
申请人： Teruomi Minami , Norihiro Ito , Yuji Kamikawa
发明人： Teruomi Minami , Norihiro Ito , Yuji Kamikawa
IPC分类号： B08B3/08 , B08B3/02
CPC分类号： H01L21/67051 , H01L21/67028 , H01L21/67034
摘要： A liquid processing apparatus 1 comprises a casing 5, a substrate holding mechanism 20 that holds a wafer (substrate to be processed) W, a process-liquid supplying mechanism 30 that supplies a process liquid, a draining cup 12 that receives a process liquid, and a draining pipe 13 that discharges a process liquid outside. The process-liquid supplying mechanism 30 includes a first chemical-liquid supply mechanism that supplies a hydrofluoric process liquid, and a drying-liquid supplying mechanism that supplies an organic solvent for drying a wafer W. A control part 50 causes the first chemical-liquid supplying mechanism to supply a hydrofluoric process liquid, and then causes the drying-liquid supplying mechanism to supply an organic solvent. In addition, before the control part 50 causes the drying-liquid supplying mechanism to supply an organic solvent, the control part causes a cleaning mechanism 10 to remove an alkaline component in a casing 5.
摘要翻译：液体处理装置1包括壳体5，保持晶片（待处理基板）W的基板保持机构20，供给处理液的处理液供给机构30，接收处理液的排出杯12，以及将处理液体排出到外部的排水管13。处理液供给机构30包括供给氢氟化处理液的第一药液供给机构和供给干燥晶片W的有机溶剂的干燥液供给机构。控制部50使第一药液供给机构供给氢氟化处理液，然后使干燥液供给机构供给有机溶剂。此外，在控制部50使干燥液供给机构供给有机溶剂之前，控制部使清洁机构10除去壳体5内的碱性成分。

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