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    • 8. 发明授权
    • Obliquely deposited film element
    • 倾斜沉积膜元件
    • US5932354A
    • 1999-08-03
    • US893510
    • 1997-07-11
    • Yasuhiko TakedaTomoyoshi MotohiroTatsumi HiokiShoji NodaMikio OkamotoHiroshi Niikura
    • Yasuhiko TakedaTomoyoshi MotohiroTatsumi HiokiShoji NodaMikio OkamotoHiroshi Niikura
    • C03C17/34G02B5/30B32B17/00
    • C03C17/3452C03C17/3417G02B5/3033
    • By providing a normally deposited layer as a buffer layer between a substrate and an obliquely deposited layer, it is possible to prevent contaminants on the substrate from diffusing into the obliquely deposited layer. Also, by providing a normally deposited layer as a passivation layer on the uppermost obliquely deposited layer, absorption of water vapor in the air by the obliquely deposited layer is prevented. Further, by forming a laminated object comprising obliquely deposited layers and dense normally deposited layers, strength of each obliquely deposited layer itself is increased and relaxation of its columnar structure can be suppressed with certainty because both the diffusion of contaminants from the substrate and the absorption of water in the air is prevented. Thus, by removing factors to accelerate the relaxation of columnar structure in the obliquely deposited layer, clouding of the obliquely deposited film layer can be prevented.
    • 通过在衬底和倾斜沉积层之间提供作为缓冲层的常规沉积层​​,可以防止衬底上的污染物扩散到倾斜沉积层中。 此外,通过在最上面的倾斜沉积层上提供作为钝化层的正常沉积层,防止了倾斜沉积层对空气中的水蒸气的吸收。 此外,通过形成包括倾斜沉积层和致密正常沉积层的层叠物体,每个倾斜沉积层本身的强度增加,并且可靠地确定地抑制其柱状结构的松弛,因为污染物从基底的扩散和吸收 防止空气中的水。 因此,通过去除加速倾斜沉积层中的柱状结构的因素,可以防止倾斜沉积膜层的混浊。