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1. 发明申请

WO2011005277A1 METHODS AND APPARATUS FOR PROTECTING PLASMA CHAMBER SURFACES 审中-公开
标题翻译：保护等离子体表面的方法和装置
公开(公告)号：WO2011005277A1
公开(公告)日：2011-01-13
申请号：PCT/US2009/064535
申请日：2009-11-16
申请人： MKS INSTRUMENTS, INC. , TAI, Chiu-Ying , CHEN, Xing , HU, Chaolin , COWE, Andrew , SHAJII, Ali
发明人： TAI, Chiu-Ying , CHEN, Xing , HU, Chaolin , COWE, Andrew , SHAJII, Ali
IPC分类号： C25D11/04 , C25D11/18 , C25D11/30 , H01J37/32
CPC分类号： C25D11/04 , C25D11/026 , C25D11/18 , C25D11/30 , H01J37/32477
摘要： A method for creating a protective layer over a surface of an object comprising aluminum and magnesium for use in a semiconductor processing system, which includes oxidizing the surface of the object using a plasma electrolytic oxidation process. The method also includes generating a halogen-comprising plasma by exciting a gas comprising a halogen. The method also includes exposing the oxidized surface to the halogen-comprising plasma or excited gas.
摘要翻译：一种用于在半导体处理系统中使用的用于在包括铝和镁的物体的表面上形成保护层的方法，其包括使用等离子体电解氧化工艺氧化物体的表面。该方法还包括通过激发包含卤素的气体产生含卤素的等离子体。该方法还包括将氧化的表面暴露于含卤素等离子体或激发气体。

2. 发明申请

WO2006096195A3 HEAT SWITCH 审中-公开
标题翻译：热开关
公开(公告)号：WO2006096195A3
公开(公告)日：2009-04-23
申请号：PCT/US2005021452
申请日：2005-06-17
申请人： ENERGEN INC , JOSHI CHANDRASHEKHAR H , TAI CHIU-YING , MAVNUR ANIL
发明人： JOSHI CHANDRASHEKHAR H , TAI CHIU-YING , MAVNUR ANIL
IPC分类号： H01L41/00 , A61F2/06 , F25D3/12 , F25D19/00 , F28F27/00
CPC分类号： F25D19/006
摘要： Heat switch. The switch includes a magnetostrictive member and a coil arranged to apply a magnetic field to the magnetostrictive member to cause the member to change from a first state to a second state of elongation. A heat conductive flexible structure is coupled to the magnetostrictive member so as to change its lateral extent in response to a change from the first state of elongation to the second state of elongation of the magnetostrictive member. A heat conductive housing is adjacent to at least one surface of the flexible structure so that the at least one surface of the flexible structure is in contact with the housing in one state of elongation of the magnetostrictive member and out of contact with the housing in the other state of elongation of the magnetostrictive member. The switch controls the flow of heat from a relatively warmer surface to a relatively colder surface.
摘要翻译：热开关。开关包括磁致伸缩构件和布置成向磁致伸缩构件施加磁场以使构件从第一状态变为第二状态的线圈。导热柔性结构耦合到磁致伸缩构件，以响应于从第一延伸状态向第二延伸状态的变化而改变其横向延伸。导热壳体与柔性结构的至少一个表面相邻，使得柔性结构的至少一个表面在磁致伸缩构件的一个伸长状态下与壳体接触并且在壳体中与壳体接触磁致伸缩构件的其它伸长状态。开关控制从相对较温暖的表面到相对较冷的表面的热流。

3. 发明申请

WO2006096195A2 HEAT SWITCH 审中-公开
标题翻译：热开关
公开(公告)号：WO2006096195A2
公开(公告)日：2006-09-14
申请号：PCT/US2005/021452
申请日：2005-06-17
申请人： ENERGEN, INC. , JOSHI, Chandrashekhar, H. , TAI, Chiu-Ying , MAVNUR, Anil
发明人： JOSHI, Chandrashekhar, H. , TAI, Chiu-Ying , MAVNUR, Anil
IPC分类号： A61F2/06
CPC分类号： F25D19/006
摘要： Heat switch. The switch includes a magnetostrictive member and a coil arranged to apply a magnetic field to the magnetostrictive member to cause the member to change from a first state to a second state of elongation. A heat conductive flexible structure is coupled to the magnetostrictive member so as to change its lateral extent in response to a change from the first state of elongation to the second state of elongation of the magnetostrictive member. A heat conductive housing is adjacent to at least one surface of the flexible structure so that the at least one surface of the flexible structure is in contact with the housing in one state of elongation of the magnetostrictive member and out of contact with the housing in the other state of elongation of the magnetostrictive member. The switch controls the flow of heat from a relatively warmer surface to a relatively colder surface.
摘要翻译：热开关。开关包括磁致伸缩构件和布置成向磁致伸缩构件施加磁场以使构件从第一状态变为第二状态的线圈。导热柔性结构耦合到磁致伸缩构件，以响应于从第一延伸状态向第二延伸状态的变化而改变其横向延伸。导热壳体与柔性结构的至少一个表面相邻，使得柔性结构的至少一个表面在磁致伸缩构件的一个延伸状态下与壳体接触并且在壳体中与壳体接触磁致伸缩构件的其它伸长状态。开关控制从相对较温暖的表面到相对较冷的表面的热流。

4. 发明申请

WO2005117280A3 TUNABLE SUPERCONDUCTING RF CAVITY 审中-公开
公开(公告)号：WO2005117280A3
公开(公告)日：2005-12-08
申请号：PCT/US2005/014159
申请日：2005-04-26
申请人： ENERGEN, INC. , JOSHI, Chandrashekhar H. , MAVANUR, Anil , TAI, Chiu-Ying
发明人： JOSHI, Chandrashekhar H. , MAVANUR, Anil , TAI, Chiu-Ying
IPC分类号： H05H9/00 , H04B1/04
摘要： Tunable RF cavity. The cavity (24) includes a magnetostrictive material (20) coupled to the cavity (24) and a magnetic coil (22) configured to impress a magnetic field on the magnetostrictive material (20). Control circuitry energizes the magnetic coil (22) to control the shape of the magnetostrictive material (20), thereby to control the length of the cavity (24) to tune its resonant frequency.

5. 发明申请

WO2011153228A3 REDUCTION OF COPPER OR TRACE METAL CONTAMINANTS IN PLASMA ELECTROLYTIC OXIDATION COATINGS 审中-公开
标题翻译：在等离子体电解氧化涂料中还原铜或金属污染物
公开(公告)号：WO2011153228A3
公开(公告)日：2012-09-27
申请号：PCT/US2011038746
申请日：2011-06-01
申请人： MKS INSTR INC , CHEN XING , JI CHENGXIANG , TAI CHIU-YING
发明人： CHEN XING , JI CHENGXIANG , TAI CHIU-YING
IPC分类号： C25D5/48 , C23C16/44 , C25D11/04 , H01J37/16 , H01J37/32
CPC分类号： C25D11/04 , C23C28/321 , C25D5/48 , C25D11/026 , C25D11/16 , H01J37/16 , H01J37/32357 , H01J37/32431 , H01J37/32467
摘要： A method for creating an oxide layer having a reduced copper concentration over a surface of an object comprising aluminum and copper for use in a semiconductor processing system. The oxide layer produced using a plasma electrolytic oxidation process has a reduced copper peak concentration, which decreases a risk of copper contamination, and includes magnesium oxides that can be converted to magnesium halide upon exposure to an excited halogen- comprising gas or halogen-comprising plasma to increase the erosion/corrosion resistance of the oxide layer.
摘要翻译：一种用于在半导体处理系统中用于产生包含铝和铜的物体的表面上的铜浓度降低的氧化物层的方法。使用等离子体电解氧化方法生产的氧化物层具有降低的铜峰浓度，这降低了铜污染的风险，并且包括在暴露于包含激发的含卤素气体或含卤素的等离子体时可转化为卤化镁的氧化镁以增加氧化物层的侵蚀/耐腐蚀性。

6. 发明申请

WO2011153228A2 REDUCTION OF COPPER OR TRACE METAL CONTAMINANTS IN PLASMA ELECTROLYTIC OXIDATION COATINGS 审中-公开
标题翻译：在等离子体电解氧化涂料中还原铜或金属污染物
公开(公告)号：WO2011153228A2
公开(公告)日：2011-12-08
申请号：PCT/US2011/038746
申请日：2011-06-01
申请人： MKS INSTRUMENTS, INC. , CHEN, Xing , JI, Chengxiang , TAI, Chiu-Ying
发明人： CHEN, Xing , JI, Chengxiang , TAI, Chiu-Ying
IPC分类号： C25D5/48 , C25D11/04 , C23C16/44 , H01J37/16 , H01J37/32
CPC分类号： C25D11/04 , C23C28/321 , C25D5/48 , C25D11/026 , C25D11/16 , H01J37/16 , H01J37/32357 , H01J37/32431 , H01J37/32467
摘要： A method for creating an oxide layer having a reduced copper concentration over a surface of an object comprising aluminum and copper for use in a semiconductor processing system. The oxide layer produced using a plasma electrolytic oxidation process has a reduced copper peak concentration, which decreases a risk of copper contamination, and includes magnesium oxides that can be converted to magnesium halide upon exposure to an excited halogen- comprising gas or halogen-comprising plasma to increase the erosion/corrosion resistance of the oxide layer.
摘要翻译：一种在半导体处理系统中用于产生包含铝和铜的物体表面上的铜浓度降低的氧化物层的方法。使用等离子体电解氧化方法生产的氧化物层具有降低的铜峰浓度，这降低了铜污染的风险，并且包括在暴露于包含激发的含卤素气体或含卤素的等离子体时可转化为卤化镁的氧化镁以增加氧化物层的侵蚀/耐腐蚀性。

7. 发明申请

WO2005117280A2 TUNABLE SUPERCONDUCTING RF CAVITY 审中-公开
标题翻译： TUNABLE超导射孔
公开(公告)号：WO2005117280A2
公开(公告)日：2005-12-08
申请号：PCT/US2005014159
申请日：2005-04-26
申请人： ENERGEN INC , JOSHI CHANDRASHEKHAR H , MAVANUR ANIL , TAI CHIU-YING
发明人： JOSHI CHANDRASHEKHAR H , MAVANUR ANIL , TAI CHIU-YING
IPC分类号： H01P7/06 , H04B1/04 , H04B1/40
CPC分类号： H01P7/06
摘要： Tunable RF cavity. The cavity includes a magnetostrictive material coupled to the cavity and a magnetic coil configured to impress a magnetic field on the magnetostrictive material. Control circuitry energizes the magnetic coil to control the shape of the magnetostrictive material, thereby to control the length of the cavity to tune its resonant frequency.
摘要翻译：可调谐射频腔。空腔包括耦合到空腔的磁致伸缩材料和被配置为在磁致伸缩材料上施加磁场的磁性线圈。控制电路为磁线圈通电以控制磁致伸缩材料的形状，从而控制空腔的长度以调谐其谐振频率。

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