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2. 发明申请

WO2009070649A1 MULTI-ZONE PRESSURE CONTROL SYSTEM 审中-公开
标题翻译：多区域压力控制系统
公开(公告)号：WO2009070649A1
公开(公告)日：2009-06-04
申请号：PCT/US2008/084807
申请日：2008-11-26
申请人： MKS INSTRUMENTS, INC. , ZARRIN, Hossein , HILL, Gordon , MAVANUR, Anil
发明人： ZARRIN, Hossein , HILL, Gordon , MAVANUR, Anil
IPC分类号： G05D16/20
CPC分类号： G05D16/206 , Y10T137/86493
摘要： A pressure control system that controls the pressure of a fluid in a plurality of zones includes a distribution manifold, at least one main manifold connected to the distribution manifold, and at least one disposable manifold connected to the distribution manifold and the main manifold. The disposable manifold is adapted to be replaced independent of the distribution manifold and the main manifold, and is connected to each zone and to at least one vacuum source. The distribution manifold distributes the fluid to the plurality of zones, so as to cause flow of the fluid into and out of a measurement chamber located within each zone. The main manifold includes, for each zone, a pressure sensor configured to measure pressure in the measurement chamber in that zone, and a control valve configured to regulate the flow of the fluid through that zone.
摘要翻译：控制多个区域中的流体压力的压力控制系统包括分配歧管，连接到分配歧管的至少一个主歧管以及连接到分配歧管和主歧管的至少一个一次性歧管。一次性歧管适于独立于分配歧管和主歧管而被替换，并且连接到每个区域和至少一个真空源。分配歧管将流体分配到多个区域，以使流体流入和流出位于每个区域内的测量室。主歧管包括对于每个区域，配置成测量该区域中的测量室中的压力的压力传感器，以及配置成调节通过该区域的流体流动的控制阀。

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