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1. 发明申请

US20050024630A1 Device for examining end part 审中-公开
标题翻译：检查端部的装置
公开(公告)号：US20050024630A1
公开(公告)日：2005-02-03
申请号：US10833038
申请日：2004-04-28
申请人： Toshiki Ohno , Hirotoshi Ise , Masato Toyota , Toshio Komemura , Hidefumi Sakita , Suekazu Nakashima , Koji Matsuda
发明人： Toshiki Ohno , Hirotoshi Ise , Masato Toyota , Toshio Komemura , Hidefumi Sakita , Suekazu Nakashima , Koji Matsuda
IPC分类号： G01B11/00 , G01N21/89 , G01N21/95 , H01L21/66 , G01N21/88
CPC分类号： G01N21/9503
摘要： A device for examining an end part according to the present invention includes a light projecting portion, a light receiving portion, a displacement sensor amplifier, and a data processing apparatus. The light projecting portion projects light on the end part of a semiconductor wafer. The light receiving portion receives specular reflected light reflected from the end part of the semiconductor wafer. The displacement sensor amplifier and the data processing apparatus calculate the displacement amount of the end part of the semiconductor wafer by a change in the distribution of the quantity of the specular reflected light received by the light receiving portion. Thus, the device for examining an end part can be reduced in size and simplified. Additionally, the device for examining an end part can be obtained, with which a change of the material of the end part of a measurement target is hardly detected as defects falsely.
摘要翻译：根据本发明的用于检查端部的装置包括光投射部分，光接收部分，位移传感器放大器和数据处理装置。光投射部分在半导体晶片的端部上投射光。光接收部分接收从半导体晶片的端部反射的镜面反射光。位移传感器放大器和数据处理装置通过光接收部分接收的镜面反射光量的分布变化来计算半导体晶片的端部的位移量。因此，用于检查端部的装置可以减小尺寸并简化。此外，可以获得用于检查端部的装置，由此几乎不能将测量对象的端部的材料的变化几乎不被错误地检测为缺陷。

2. 发明授权

US5587633A Press control method and press apparatus 失效
标题翻译：按压控制方法和按压装置
公开(公告)号：US5587633A
公开(公告)日：1996-12-24
申请号：US578970
申请日：1995-12-27
申请人： Hideji Aoki , Takahiro Tashima , Suekazu Nakashima , Yoshiyuki Osako , Hidetaka Yamasaki
发明人： Hideji Aoki , Takahiro Tashima , Suekazu Nakashima , Yoshiyuki Osako , Hidetaka Yamasaki
IPC分类号： B30B15/22 , B30B15/14 , B21D5/02
CPC分类号： B30B1/181 , B30B15/14
摘要： It is an object to obtain a press apparatus and a press controlling method which apply press working to a processed object with accurate press load and is capable of press working with accurate press load without affected by variations in thickness of the processed objects and variations in shut height of molds. A servo motor (51) is connected concentrically to a rotation transmitter (52), and a screw shaft (53) is provided passing through the center of the rotation transmitter (52). The driving force of the servo motor (51) is converted into a thrusting force of a press ram (54) by combining the rotation transmitter (52) and the screw shaft (53). Correct press load is applied to the processed objects and troubles in the press processing caused by variations in thickness of the processed objects can be prevented.
摘要翻译：本发明的一个目的是获得一种压制装置和压力控制方法，该方法对具有精确的压力载荷的加工对象进行冲压加工，并且能够在精确的加压载荷下进行加压加工，而不受加工对象的厚度变化和关闭的变化的影响模具高度伺服电动机51同心地连接到旋转发射器52，并且穿过旋转发射器52的中心的螺杆轴53设置。通过组合旋转变送器（52）和螺杆轴（53），将伺服电动机（51）的驱动力转换成压力冲杆（54）的推力。对加工对象施加正确的压力负荷，并且可以防止由加工对象的厚度变化引起的冲压加工中的麻烦。

3. 发明授权

US06337042B1 Press machine and method of manufacturing pressed products 失效
标题翻译：冲压机及冲压制品的制造方法
公开(公告)号：US06337042B1
公开(公告)日：2002-01-08
申请号：US09395185
申请日：1999-09-14
申请人： Suekazu Nakashima , Yasuo Kawano , Hideji Aoki
发明人： Suekazu Nakashima , Yasuo Kawano , Hideji Aoki
IPC分类号： B29C3322
CPC分类号： B30B15/14
摘要： An object is to reduce mutual interference between a plurality of sets of molds coupled to a common frame stand to improve the processing accuracy. A plurality of sets (e.g. two sets) of molds are driven by servo motors (6a, 6b). The servo motors (6a, 6b) are individually controlled by servo amplifiers (8a, 8b), respectively. A control portion in the servo amplifier (8a) calculates a current (I) so that the measured value (X) of the rotating position of the servo motor (6a) follows a directing value (X0) sent from a CPU through a pulse generator (9). A torque detecting/limiting portion (25) limits the calculated current (I) so that a limit value of the torque sent from the CPU through a DA converter (12) is not exceeded and sends it to the servo motor (6a) through a current amplifier (26). When the torque of the servo motor (6a) reaches the limit value after the molds come in contact, the directing value (X0) is rapidly advanced in the mold-losing direction.
摘要翻译：目的是减少耦合到公共框架的多组模具之间的相互干扰，以提高处理精度。由伺服电动机（6a，6b）驱动多个组（例如两组）模具。伺服电动机（6a，6b）分别由伺服放大器（8a，8b）控制。伺服放大器（8a）中的控制部分计算电流（I），使得伺服电机（6a）的旋转位置的测量值（X）遵循从CPU通过脉冲发生器发送的定向值（X0）（9）。转矩检测/限制部分（25）限制计算出的电流（I），使得不经过DA转换器（12）从CPU发送的转矩的极限值被超过并且通过一个电流放大器（26）。当模具接触后伺服电动机（6a）的转矩达到极限值时，引导值（X0）在失模方向快速上升。

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