会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明申请
    • METHOD OF FORMING PHOTONIC CRYSTALS
    • 形成光子晶体的方法
    • US20120142170A1
    • 2012-06-07
    • US13377521
    • 2010-06-09
    • Jinghua TengEo LimSoo Jin ChuaSoo Seng Nirman Ang
    • Jinghua TengEo LimSoo Jin ChuaSoo Seng Nirman Ang
    • H01L21/20
    • G02B6/1225B82Y20/00G02B6/136G02B2006/12176
    • According to an embodiment of the present invention, a method of forming photonic crystals is provided. The method includes: forming a layer arrangement on a support substrate. The layer arrangement includes a first partial layer arrangement and a second partial layer arrangement, wherein the second partial layer arrangement is disposed over the first partial layer arrangement, wherein each partial layer arrangement comprises a first layer and a second layer, wherein the second layer is disposed over the first layer, and wherein the material of the second layer has a different etching characteristic than the material of the first layer. The method further includes removing at least one portion of the second layer and removing the first layer, wherein forming the layer arrangement occurs prior to removing the at least one portion of the second layer and the first layer.
    • 根据本发明的实施例,提供了形成光子晶体的方法。 该方法包括:在支撑衬底上形成层布置。 层布置包括第一部分层布置和第二部分层布置,其中第二部分层布置设置在第一部分层布置之上,其中每个部分层布置包括第一层和第二层,其中第二层是 设置在所述第一层上,并且其中所述第二层的材料具有与所述第一层的材料不同的蚀刻特性。 该方法还包括去除第二层的至少一部分并去除第一层,其中形成层布置发生在去除第二层和第一层的至少一部分之前。
    • 10. 发明申请
    • METHOD OF FORMING A METAL CONTACT AND PASSIVATION OF A SEMICONDUCTOR FEATURE
    • 形成金属接触的方法和半导体特性的钝化
    • US20080121916A1
    • 2008-05-29
    • US11939227
    • 2007-11-13
    • Jinghua TENGEe Leong LimSoo Jin Chua
    • Jinghua TENGEe Leong LimSoo Jin Chua
    • H01S5/22H01L21/4763H01L33/00
    • H01L33/38H01L33/08H01L33/385H01S5/0282H01S5/22
    • A method of forming a metal contact and passivation of a semiconductor feature, and devices made using the method. The method comprises the steps of forming a dielectric mask on a semiconductor substrate utilising photolithography processes; etching the semiconductor substrate such that one or more features are formed underneath respective portions of the dielectric mask; depositing a passivation layer on the substrate with the dielectric mask in place above the features; subjecting the substrate to an etchant such that the dielectric mask is etched at a higher rate than the passivation layer, whereby portions of the passivation layer deposited on the dielectric mask are lifted off from the substrate; and depositing a metal layer on the substrate including over the remaining passivation layer and exposed portions of the features.
    • 一种形成半导体特征的金属接触和钝化的方法,以及使用该方法制造的器件。 该方法包括以下步骤:利用光刻工艺在半导体衬底上形成介电掩模; 蚀刻半导体衬底,使得一个或多个特征形成在介电掩模的各个部分下方; 在衬底上沉积钝化层,其中介电掩模位于特征上方; 使衬底经受蚀刻剂,使得以比钝化层更高的速率蚀刻介电掩模,由此沉积在介电掩模上的钝化层的一部分从衬底上提出; 以及在所述衬底上沉积金属层,所述金属层包括在剩余的钝化层上并且所述特征的暴露部分。