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1. 发明授权

US06822185B2 Temperature controlled dome-coil system for high power inductively coupled plasma systems 失效
标题翻译：用于高功率感应耦合等离子体系统的温度控制穹顶线圈系统
公开(公告)号：US06822185B2
公开(公告)日：2004-11-23
申请号：US10267711
申请日：2002-10-08
申请人： Michael Welch , Paul E. Luscher , Siamak Salimian , Rolf Guenther , Zhong Qiang Hua , Son Phi , Peter Loewenhardt
发明人： Michael Welch , Paul E. Luscher , Siamak Salimian , Rolf Guenther , Zhong Qiang Hua , Son Phi , Peter Loewenhardt
IPC分类号： B23K900
CPC分类号： H01L21/67248 , H01J37/32458 , H01J37/32522 , H01L21/67109
摘要： The temperature of a plasma chamber of a semiconductor fabrication tool is maintained substantially constant utilizing a variety of techniques, separately or in combination. One technique is to provide the exterior surface of the plasma chamber dome with a plurality of fins projecting into high velocity regions of an overlying airflow in order to dissipate heat from the chamber. Ducting defined by cover overlying the exposed exterior surface of the dome may also feature projecting lips or an airfoil to place high velocity components of the airflow into contact within the exterior dome surface and the fins. Other techniques include employing a high speed fan to control airflow circulation, and the use of temperature sensors in communication the fan through a processor to control fan speed and thereby regulate chamber temperature.
摘要翻译：半导体制造工具的等离子体室的温度通过各种技术单独地或组合地保持基本恒定。一种技术是提供等离子体室圆顶的外表面，其中多个翼片突出到上覆气流的高速区域，以便从腔室散发热量。覆盖在圆顶外露的外表面上的覆盖层限定的管道还可以具有突出的唇缘或翼型件，以将气流的高速分量置于外部圆顶表面和翅片内。其他技术包括采用高速风扇来控制气流循环，以及使用温度传感器通过处理器通风风扇来控制风扇速度，从而调节室温。

2. 发明授权

US06246203B1 Direct skew control and interlock of gantry 有权
标题翻译：龙门架的直接歪斜控制和互锁
公开(公告)号：US06246203B1
公开(公告)日：2001-06-12
申请号：US09245445
申请日：1999-02-05
申请人： Rexford Abbott , Son Phi
发明人： Rexford Abbott , Son Phi
IPC分类号： B64C1706
CPC分类号： B23Q11/001 , B23Q1/267 , B25J9/026 , B25J18/002 , G05B2219/50389 , Y10S414/136
摘要： Systems and methods are described for direct skew control and interlock of a gantry. An apparatus includes a gantry that includes a first member defining a gantry primary axis Z, a cross member defining a secondary axis X that is coupled to the first member via a trunnion, and a second member defining a gantry primary axis Z′ coupled to the cross member via an elastic hinge. A method for controlling skew on a cross member moved by a first and second driver includes moving the first and second drivers to a first position, measuring a resulting skew value, and correcting the skew on the cross member by moving the first driver and/or the second driver.
摘要翻译：描述了用于台架的直接歪斜控制和互锁的系统和方法。一种装置包括具有限定门架主轴线Z的第一构件的台架，限定通过枢轴联接到第一构件的次轴X的横向构件，以及限定与托架主轴线Z联接的台架主轴线Z' 横向构件通过弹性铰链。用于控制由第一和第二驱动器移动的横向构件的偏斜的方法包括将第一和第二驱动器移动到第一位置，测量所得到的扭曲值，以及通过移动第一驱动器和/或第二个司机。

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